CN106248068A - Double distributed gyroscope of discrete electrodes of adjacent surface and preparation method thereof - Google Patents

Abstract

The invention proposes a micro gyroscope with double discrete electrodes distributed on adjacent surfaces and a preparation method thereof, comprising: a single crystal silicon substrate, a central fixed support column, a micro resonator, side electrodes, adjacent electrodes, and a glass substrate. There are multiple side electrodes, which are evenly distributed on one side of the micro-resonator, forming a uniformly distributed side electrode; there are multiple adjacent electrodes, which are evenly distributed on an adjacent surface of the micro-resonator, thus forming a uniformly distributed adjacent electrode ; The present invention combines MEMS bulk silicon processing technology and surface silicon processing technology for production; provides different driving, detection methods and different working modes, and can work in systems that require complex control; use adjacent electrodes and side electrodes to drive respectively And detection, reduce the parasitic capacitance between the driving electrode and the detection electrode, and improve the detection accuracy.

Description

Distributed micro gyroscope with double discrete electrodes on adjacent surfaces and its preparation method

technical field

The invention relates to a micro gyroscope in the field of micro-electromechanical technology, in particular to a micro gyroscope with two discrete electrodes distributed on adjacent surfaces and a preparation method thereof.

Background technique

Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. In particular, the micro-hemispherical resonant gyroscope, as an important research direction of the MEMS micro-gyroscope, has become a research hotspot in this field.

For micro gyroscopes, the use of full-angle control technology has the advantages of high stability, strong impact resistance, high precision, and small errors. It has broad application prospects in aerospace, inertial navigation, and consumer electronics. The currently designed gyroscope has a small number of electrodes, which limits its application in complex control systems; and a general gyroscope has only one set of electrodes on one surface, and there are certain parasitic capacitances and Signal interference limits its detection accuracy.

Based on this, it is urgent to propose a new gyroscope structure to avoid or reduce the above-mentioned influencing factors and expand its application range at the same time.

After retrieval, the Chinese invention patent application with publication number CN104165623A and application number 201410389616.2 provides an internal and external dual-electrode micro-hemispherical resonant gyroscope and its preparation method, including: a single crystal silicon substrate, a central fixed support column, Miniature hemispherical resonators, external electrodes, external electrode metal welding plates, glass substrates, metal leads, circular welding wire disks, external electrode metal connection columns, internal electrodes and seed layers. The invention can use the inner electrode and the outer electrode to drive and detect separately, reduce the parasitic capacitance between the drive electrode and the detection electrode, and improve the detection accuracy; provide metal leads and circular wire pads for the inner electrode and the outer electrode, which is convenient Signal application and signal extraction.

However, the above-mentioned patents only provide the structure scheme of the micro hemispherical gyroscope with internal discrete electrodes and external discrete electrodes, and cannot provide different electrode distribution schemes for various micro gyroscopes.

Contents of the invention

In view of the defects in the prior art, the object of the present invention is to provide a micro gyroscope with double discrete electrodes distributed on adjacent surfaces and a preparation method thereof, and the micro gyroscope is carried out in combination with MEMS bulk silicon processing technology and surface silicon processing technology. Manufacturing is a novel processing technology; it can provide different driving, detection methods and different working modes, and can work in systems that require complex control.

According to one aspect of the present invention, there is provided a micro gyroscope with two discrete electrodes distributed on adjacent surfaces, including: a single crystal silicon substrate, a central fixed support column, a micro-resonator, side electrodes, adjacent electrodes, and a glass substrate; :

There are a plurality of side electrodes, and the plurality of side electrodes are evenly distributed on one side of the micro-resonator to form a uniformly distributed side electrode; at the same time, the side electrodes are arranged on the surface of the single crystal silicon substrate or the surface of the glass substrate;

There are multiple adjacent electrodes, and the multiple adjacent electrodes are evenly distributed on an adjacent surface of the micro-resonator. electrode;

One end of the central fixed support column is connected to the single crystal silicon substrate, and the other end of the central fixed support column is connected to the micro-resonator; the adjacent electrodes are arranged on the surface of the single crystal silicon substrate or the surface of the glass substrate; the monocrystalline silicon substrate is bonded to the glass substrate;

The micro-resonator acts as a vibrating body of the micro-gyroscope, and the side electrodes and adjacent electrodes are used for driving, detection and control of the micro-gyroscope.

When the micro-gyroscope of the present invention works in the angular rate mode, an AC drive signal is applied, and a DC bias signal is applied to the micro-resonator, and the uniformly distributed side electrodes make the micro-resonator work at the position through electrostatic force. Under the required driving mode, the vibration amplitude and frequency of the driving mode remain unchanged; when there is an external angular velocity perpendicular to the direction of the single crystal silicon substrate, the vibration amplitude of the detection mode will change, and the vibration amplitude of The magnitude is proportional to the magnitude of the applied angular velocity, and at the same time causes the capacitance between the uniformly distributed side electrodes and the micro-resonator to change; the detected modal vibration amplitude is calculated by collecting the signal changes on the uniformly distributed side electrodes value, and then calculate the magnitude of the applied angular velocity.

Further, the micro gyroscope of the present invention collects the signal changes on the evenly distributed adjacent electrodes to calculate and detect the magnitude of the modal vibration amplitude, and then calculates the magnitude of the applied angular velocity, thereby reducing the parasitic capacitance between the uniformly distributed side electrodes , to improve detection accuracy.

Further, the micro gyroscope of the present invention applies an AC drive signal on the uniformly distributed adjacent electrodes, and collects detection signals on the uniformly distributed side electrodes or uniformly distributed adjacent electrodes, providing different driving, detection and way to control.

Further, the present invention judges the working state of the micro gyroscope through the signal change on the evenly distributed adjacent electrodes, and in the abnormal working state, applies a control signal to some evenly distributed adjacent electrodes through a control algorithm, The working state of the micro gyroscope can be adjusted so that the micro gyroscope can work normally.

Further, the micro gyroscope of the present invention can work in the force balance mode and the full angle mode, the force balance mode directly detects the magnitude of the applied angular velocity, and the full angle mode directly detects the magnitude of the applied rotation angle.

Preferably, a plurality of evenly distributed adjacent electrodes are evenly distributed on the upper side, lower side, outer side or inner side of the micro-resonator, and are adjacent to the side electrodes.

Preferably, a plurality of uniformly distributed side electrodes are uniformly distributed on the side of the micro-resonator, that is, any one of the upper side, the lower side, the outer side or the inner side.

Preferably, the material of the side electrode and the adjacent electrode is boron ion or phosphorus ion doped silicon or metallic nickel; when the side electrode or the adjacent electrode is located on a single crystal silicon substrate, the material is boron ion or phosphorus Ion-doped silicon; when the side electrodes or adjacent electrodes are on the glass substrate, the material is metallic nickel.

Preferably, the micro gyroscope is a ring resonant gyroscope, a hemispherical resonant gyroscope, a hemispherical resonant gyroscope, a cup-shaped resonant gyroscope, a disc resonant gyroscope, and a bird's nest-shaped resonant gyroscope.

Preferably, the micro-resonator is made of doped diamond or doped polysilicon, which is the main vibrating body of the micro-gyroscope.

Preferably, the materials of the single crystal silicon substrate and the glass substrate are respectively high-resistance silicon or silicon dioxide high-resistance materials, and the high-resistance materials are used to reduce signal interference between side electrodes.

Preferably, the material of the central fixed support column is silicon dioxide or high resistance silicon.

In the present invention, the distribution of side electrodes and adjacent electrodes can be used in a complex control system to realize full-angle control.

The present invention emphasizes a variety of miniature gyroscope structures with uniformly distributed side electrodes and uniformly distributed adjacent surface electrodes, which can be applied to special circuit drive and detection schemes (as described in the embodiments), and micro-resonators are not limited to micro The hemispherical resonant gyroscope can also provide different electrode distribution schemes for various micro gyroscopes.

The two-electrode distribution on the adjacent surface of the present invention, its electrodes are adjacently distributed in structure, rather than distributed up and down or inside and outside, and it is a double discrete electrode on the adjacent surface, and only one surface of the other is a discrete electrode In comparison, more complicated circuit control can be realized.

According to another aspect of the present invention, there is provided a method for preparing a micro-gyroscope with two discrete electrodes distributed on adjacent surfaces, comprising the steps of:

The first step is to clean the single crystal silicon substrate and the glass substrate, glue coating, photolithography, development, boron ion implantation, sputtering, and glue removal process, and obtain boron ion or phosphorus ion doped silicon material on the single crystal silicon substrate side electrodes or adjacent electrodes;

The second step is to apply glue, photolithography, development, silicon isotropic etching, and glue removal on the single crystal silicon substrate to obtain a groove corresponding to the shape of the micro-resonator on the single crystal silicon substrate;

The third step is to deposit silicon dioxide on the single crystal silicon substrate to provide a sacrificial layer for making micro-resonators and side electrodes or the gap between adjacent electrodes;

The fourth step is to deposit doped diamond or doped polysilicon on the single crystal silicon substrate, and perform chemical mechanical polishing to make a micro-resonator;

The fifth step, on the basis of the fourth step, use BOE solution to etch the silicon dioxide sacrificial layer and control the etching time to release the micro-resonator, and use the remaining part as the central fixed support column;

The sixth step is to apply glue, photolithography, development, nickel electroplating, and glue removal on the glass substrate to make adjacent electrodes or side electrodes of metal nickel materials;

The seventh step is to invert the glass substrate and bond it with the monocrystalline silicon substrate, so that the central part of the glass substrate is aligned with the center of the central fixed support column of the monocrystalline silicon substrate, so that the two substrates can be fixed, and the adjacent surface can be obtained. Dual Discrete Electrode Distributed Micro Gyroscope.

Compared with the prior art, the present invention has the following beneficial effects:

(1) The micro-gyroscope is made in combination with MEMS bulk silicon processing technology and surface silicon processing technology, and is a novel processing technology;

(2) The micro gyroscope can provide different driving and detection methods and different working modes, without reducing the electrode area, the number of electrodes is increased, so that the micro gyroscope can work in a place requiring complex control in the system;

(3) The micro gyroscope can be driven and detected by adjacent electrodes and side electrodes respectively, reducing the parasitic capacitance between the driving electrodes and the detecting electrodes, and improving detection accuracy; it can be used in complex control systems to realize full-angle control.

Description of drawings

Other characteristics, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

Fig. 1 (a)-Fig. 1 (c) is the micro-hemispherical resonant gyroscope structure schematic diagram of the double discrete electrode distribution adjacent surface of an embodiment of the present invention;

Fig. 2 (a)-Fig. 2 (c) is the structure schematic diagram of the miniature ring resonant gyroscope that adjacent surface double discrete electrodes are distributed according to an embodiment of the present invention;

Fig. 3 (a)-Fig. 3 (c) is the microdisk resonant gyroscope structure schematic diagram of the double discrete electrode distribution adjacent surface of an embodiment of the present invention;

Fig. 4 (a)-Fig. 4 (c) is the structure schematic diagram of the miniature hemispherical resonant gyroscope that adjacent surface double discrete electrodes are distributed according to an embodiment of the present invention;

Fig. 5 (a)-Fig. 5 (c) is the structure schematic diagram of the miniature multi-ring resonant gyroscope that two discrete electrodes are distributed on the adjacent surface of an embodiment of the present invention;

Fig. 6 (a)-Fig. 6 (c) is the structure schematic diagram of the miniature cup-shaped resonant gyroscope that adjacent surface double discrete electrodes are distributed according to an embodiment of the present invention;

Fig. 7 (a)-Fig. 7 (g) is the flow chart of the preparation method of the miniature hemispherical resonant gyroscope with two discrete electrodes distributed on the adjacent surface of an embodiment of the present invention;

In the figure: 1 is a micro-resonator, 2 is a uniformly distributed side electrode, 3 is a uniformly distributed adjacent electrode, 4 is a single crystal silicon substrate, 5 is a glass substrate, and 6 is a central fixed support column.

detailed description

The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

Example 1

As shown in Fig. 1(a)-Fig. 1(c), the present embodiment provides a miniature hemispherical resonant gyroscope with two discrete electrodes distributed on adjacent surfaces, including:

A hemispherical miniature harmonic oscillator 1;

Sixteen evenly distributed side electrodes 2;

Sixteen uniformly distributed adjacent electrodes 3;

A monocrystalline silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; wherein:

One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in FIG. 1(a));

Sixteen of the uniformly distributed side electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in FIG. As shown in c)); sixteen uniformly distributed adjacent electrodes 3 are arranged on the surface of the single crystal silicon substrate 4, and are evenly distributed on the outside of the micro-resonator 1 (as shown in Figure 1(a) shown); the monocrystalline silicon substrate 4 is bonded to the glass substrate 5 .

In this embodiment, the material of the micro-resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro-hemispherical resonator gyroscope.

In this embodiment, the uniformly distributed side electrode 2 is made of boron ion-doped silicon, or phosphorus ion-doped silicon, and the uniformly distributed side electrode 2 is used for driving and detecting the miniature hemispherical resonant gyroscope. and control.

In this embodiment, the material of the uniformly distributed adjacent electrodes 3 is silicon doped with boron ions or phosphorus ions, which is used for the driving, detection and control of the miniature hemispherical resonant gyroscope.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively, and the high-resistance materials can reduce the number of sixteen uniformly distributed side electrodes 2 and Signal interference between sixteen uniformly distributed adjacent electrodes 3 .

In this embodiment, the material of the central fixed support column 6 is silicon dioxide.

In this embodiment, the miniature hemispherical resonator gyroscope can work in the angular rate mode, apply an AC drive signal, apply a DC bias signal to the miniature resonator 1, and the uniformly distributed side electrodes 2 pass through the electrostatic force Make the micro-resonator 1 work in the required driving mode, the vibration amplitude and frequency of the driving mode remain unchanged; when there is an external angular velocity perpendicular to the single crystal silicon substrate 4, the vibration of the detection mode The amplitude will change, the magnitude of the vibration amplitude is proportional to the magnitude of the applied angular velocity, and at the same time cause the capacitance between the uniformly distributed side electrode 2 and the micro-resonator 1 to change; by collecting the uniformly distributed The signal change on the side electrode 2 can calculate the magnitude of the detected modal vibration amplitude, and then calculate the magnitude of the applied angular velocity.

In this embodiment, the miniature hemispherical resonant gyroscope can also collect the signal changes on the uniformly distributed adjacent electrodes 3 to calculate the magnitude of the detected modal vibration amplitude, and then calculate the magnitude of the applied angular velocity, thereby reducing the The parasitic capacitance between the side electrodes 2 is evenly distributed to improve the detection accuracy.

In this embodiment, the miniature hemispherical resonant gyroscope can apply an AC drive signal on the uniformly distributed adjacent electrode 3, and apply an AC drive signal on the uniformly distributed side electrode 2 or the uniformly distributed adjacent electrode 3 Collect detection signals and provide different driving, detection and control methods.

In this embodiment, the miniature hemispherical resonant gyroscope can judge the working status of the miniature hemispherical resonant gyroscope through the signal changes on the uniformly distributed adjacent electrodes 3, and in the abnormal working status, the Applying a control signal to some of the uniformly distributed adjacent electrodes 3 can adjust the working state of the micro-hemispheric resonant gyroscope, so that the micro-hemispherical resonant gyroscope can work normally.

In this embodiment, the miniature hemispherical resonant gyroscope can also work in the force balance mode and the full angle mode. The force balance mode can directly detect the magnitude of the applied angular velocity, and the full angle mode can directly detect the magnitude of the applied rotation angle.

Example 2

As shown in Fig. 2(a)-Fig. 2(c), the present embodiment provides a kind of miniature ring resonant gyroscope with two discrete electrodes distributed on adjacent surfaces, including:

A ring-shaped micro-resonator 1;

Sixteen evenly distributed side electrodes 2;

Sixteen uniformly distributed adjacent electrodes 3;

A monocrystalline silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; wherein:

One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 2(a)); 16 The uniformly distributed side electrodes 2 are arranged on the surface of the single crystal silicon substrate 4, and are evenly distributed on the outside of the micro-resonator 1 (as shown in FIG. 2(a)); sixteen of the described Evenly distributed adjacent electrodes 3 are arranged on the surface of the glass substrate 5 (as shown in Figure 2(b)), and are evenly distributed on the upper side of the micro-resonator 1 (as shown in Figure 2(c) ); the single crystal silicon substrate 4 is bonded to the glass substrate 5 .

In this embodiment, the material of the micro-resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro-ring resonator gyroscope.

In this embodiment, the uniformly distributed side electrode 2 is made of boron ion-doped silicon, or phosphorus ion-doped silicon, and the uniformly distributed side electrode 2 is used for driving and detecting the miniature ring resonant gyroscope. and control.

In this embodiment, the material of the evenly distributed adjacent electrodes 3 is silicon doped with boron ions or phosphorus ions, which is used for the driving, detection and control of the micro ring resonant gyroscope.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively, and the high-resistance materials can reduce the number of sixteen uniformly distributed side electrodes 2 and Signal interference between sixteen uniformly distributed adjacent electrodes 3 .

In this embodiment, the material of the central fixed support column 6 is silicon dioxide.

In this embodiment, the miniature ring resonator gyroscope can also work in force balance mode and full angle mode. The force balance mode can directly detect the magnitude of the applied angular velocity, and the full angle mode can directly detect the magnitude of the applied rotation angle.

Example 3

As shown in Fig. 3(a)-Fig. 3(c), the present embodiment provides a kind of miniature disk resonant gyroscope with two discrete electrodes distributed on adjacent surfaces, including:

A disk-shaped micro-resonator 1;

Sixteen evenly distributed side electrodes 2;

Sixteen uniformly distributed adjacent electrodes 3;

A monocrystalline silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; wherein:

One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 3(a)); 16 The uniformly distributed side electrodes 2 are arranged on the surface of the single crystal silicon substrate 4, and are evenly distributed on the outside of the micro-resonator 1 (as shown in FIG. 3(a)); sixteen of the described Evenly distributed adjacent electrodes 3 are arranged on the surface of the glass substrate 5 (as shown in Figure 3(b)), and evenly distributed on the upper side of the micro-resonator 1 (as shown in Figure 3(c) ); the single crystal silicon substrate 4 is bonded to the glass substrate 5 .

In this embodiment, the material of the micro-resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro-disk resonator gyroscope.

In this embodiment, the material of the uniformly distributed side electrodes 2 is boron ion-doped silicon, or phosphorus ion-doped silicon, and the uniformly distributed side electrodes 2 are used for driving, Detection and control.

In this embodiment, the material of the evenly distributed adjacent electrodes 3 is silicon doped with boron ions or phosphorus ions, which is used for the driving, detection and control of the microdisk resonant gyroscope.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively, and the high-resistance materials can reduce the number of sixteen uniformly distributed side electrodes 2 and Signal interference between sixteen uniformly distributed adjacent electrodes 3 .

In this embodiment, the material of the central fixed support column 6 is silicon dioxide.

In this embodiment, the miniature disk resonator gyroscope can also work in force balance mode and full angle mode, the force balance mode can directly detect the magnitude of the applied angular velocity, and the full angle mode can directly detect the magnitude of the applied rotation angle.

Example 4

As shown in Fig. 4(a)-Fig. 4(c), the present embodiment provides a miniature hemispherical resonant gyroscope with two discrete electrodes distributed on adjacent surfaces, including:

A hemispherical miniature harmonic oscillator 1;

Sixteen evenly distributed side electrodes 2;

Sixteen uniformly distributed adjacent electrodes 3;

A monocrystalline silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; wherein:

One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 4(a)); 16 The uniformly distributed side electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in Figure 4(b)), and are evenly distributed on the upper side of the micro-resonator 1 (as shown in Figure 4(c) shown); sixteen uniformly distributed adjacent electrodes 3 are arranged on the surface of the single crystal silicon substrate 4, and are evenly distributed on the outside of the micro-resonator 1 (as shown in Figure 4(a) ); the single crystal silicon substrate 4 is bonded to the glass substrate 5 .

In this embodiment, the material of the micro-resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro-hemispherical resonant gyroscope.

In this embodiment, the material of the uniformly distributed side electrodes 2 is boron ion-doped silicon, or phosphorus ion-doped silicon, and the uniformly distributed side electrodes 2 are used for driving, Detection and control.

In this embodiment, the material of the evenly distributed adjacent electrodes 3 is silicon doped with boron ions or phosphorus ions, which is used for the driving, detection and control of the miniature hemispherical resonant gyroscope.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively, and the high-resistance materials can reduce the number of sixteen uniformly distributed side electrodes 2 and Signal interference between sixteen uniformly distributed adjacent electrodes 3 .

In this embodiment, in this embodiment, the material of the central fixed support column 6 is silicon dioxide.

Example 5

As shown in Fig. 5(a)-Fig. 5(c), the present embodiment provides a kind of miniature multi-ring resonant gyroscope with two discrete electrodes distributed on adjacent surfaces, including:

A multi-ring micro-resonator 1;

Sixteen evenly distributed side electrodes 2;

Sixteen uniformly distributed adjacent electrodes 3;

A monocrystalline silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; wherein:

One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 5(a)); 16 The uniformly distributed side electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in Figure 5(b)), and are evenly distributed on the upper side of the micro-resonator 1 (as shown in Figure 5(c) shown); sixteen uniformly distributed adjacent electrodes 3 are arranged on the surface of the single crystal silicon substrate 4, and are evenly distributed on the outside of the micro-resonator 1 (as shown in Figure 5(a) ); the single crystal silicon substrate 4 is bonded to the glass substrate 5 .

In this embodiment, the material of the micro-resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro-multi-ring resonant gyroscope.

In this embodiment, the material of the uniformly distributed side electrodes 2 is boron ion-doped silicon, or phosphorus ion-doped silicon, and the uniformly distributed side electrodes 2 are used for driving, Detection and control.

In this embodiment, the material of the evenly distributed adjacent electrodes 3 is silicon doped with boron ions or phosphorus ions, which is used for the driving, detection and control of the miniature multi-ring resonant gyroscope.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively, and the high-resistance materials can reduce the number of sixteen uniformly distributed side electrodes 2 and Signal interference between sixteen uniformly distributed adjacent electrodes 3 .

In this embodiment, the material of the central fixed support column 6 is silicon dioxide.

Example 6

As shown in Figure 6(a)-Figure 6(c), the present embodiment provides a miniature cup-shaped resonant gyroscope with two discrete electrodes distributed on adjacent surfaces, including:

A cup-shaped micro-resonator 1;

Sixteen evenly distributed side electrodes 2;

Sixteen uniformly distributed adjacent electrodes 3;

A monocrystalline silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; wherein:

One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 6(a)); 16 The uniformly distributed side electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in Figure 6(b)), and are evenly distributed on the upper side of the micro-resonator 1 (as shown in Figure 6(c) shown); sixteen uniformly distributed adjacent electrodes 3 are arranged on the surface of the single crystal silicon substrate 4, and are evenly distributed on the outside of the micro-resonator 1 (as shown in Figure 6(a) ); the single crystal silicon substrate 4 is bonded to the glass substrate 5 .

In this embodiment, the material of the micro-resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro-cup resonator gyroscope.

In this embodiment, the material of the uniformly distributed side electrodes 2 is boron ion-doped silicon, or phosphorus ion-doped silicon, and the uniformly distributed side electrodes 2 are used for driving, Detection and control.

In this embodiment, the material of the uniformly distributed adjacent electrodes 3 is silicon doped with boron ions or phosphorus ions, which is used for the driving, detection and control of the miniature cup-shaped resonant gyroscope.

Further, the micro-gyroscope can be provided with metal leads, one end of the metal leads is connected to the side electrodes and adjacent electrodes, and the other end of the metal leads is used as an external interface for signal application and signal extraction.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively, and the high-resistance materials can reduce the number of sixteen uniformly distributed side electrodes 2 and Signal interference between sixteen uniformly distributed adjacent electrodes 3 .

In this embodiment, the material of the central fixed support column 6 is silicon dioxide.

The present invention combines MEMS body silicon processing technology and surface silicon processing technology to make, is a kind of novel processing technology; The micro gyroscope in the present invention can provide different drive, detection mode and different working mode, can work in need In the complex control system; the micro gyroscope in the present invention can utilize the adjacent electrodes and the side electrodes to drive and detect respectively, reduce the parasitic capacitance between the driving electrodes and the detection electrodes, and improve the detection accuracy; the micro gyroscope in the present invention The adjacent electrodes and side electrodes of the instrument provide metal leads for easy signal application and signal extraction.

Example 7

As shown in Fig. 7(a)-Fig. 7(g), the present embodiment provides a method for preparing a two-electrode distributed micro-hemispherical resonant gyroscope with side-discrete adjacent surfaces annular, including the following steps:

The first step, as shown in Figure 7(a), is to perform cleaning, glue coating, photolithography, development, boron ion implantation, sputtering, and glue removal processes on the single crystal silicon substrate 4 to obtain a single crystal silicon substrate 1 A side electrode 2 of boron ion-doped silicon material with a thickness of 10 μm-50 μm;

The second step, as shown in Figure 7 (b), is to carry out gluing, photolithography, development, silicon isotropic etching, and glue removal on the single crystal silicon substrate to obtain a radius of 300μm-700μm hemispherical groove;

The third step, as shown in FIG. 7(c), is to deposit silicon dioxide with a thickness of 1 μm-5 μm on the single crystal silicon substrate to provide a sacrificial layer for making the micro-hemispherical resonator 1 and the electrode gap;

The fourth step, as shown in Figure 7(d), is to deposit doped diamond or doped polysilicon on the basis of the third step, and perform chemical mechanical polishing to produce a micro hemispherical resonator 1 with a thickness of 1 μm-5 μm;

The fifth step, as shown in Figure 7(e), on the basis of the fourth step, use the BOE solution to etch the silicon dioxide sacrificial layer and control the etching time to release the micro hemispherical resonator 1, and use the remaining part as a radius of 15μm-35μm central fixed support column 6;

The sixth step, as shown in FIG. 7(f), is to apply glue, photolithography, development, nickel electroplating, and glue removal on the glass substrate 5 to make adjacent electrodes 3 of metal nickel material with a height of 20 μm-70 μm.

The seventh step, as shown in FIG. 7(g), invert the glass substrate 5 and bond it to the monocrystalline silicon substrate 4, so that the central part of the glass substrate 5 is aligned with the center of the central fixed support column of the monocrystalline silicon substrate 4. Accurately, the two substrates are fixed, so that a two-electrode distributed micro gyroscope with side-discrete adjacent surfaces can be obtained.

Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art may make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention.

Claims (10)

1. the double distributed gyroscope of discrete electrodes of an adjacent surface, it is characterised in that including: monocrystal silicon substrate, center are solid Determine support column, miniature resonant, side electrode, adjacent electrode and substrate of glass；Wherein:

Described side electrode is multiple, and multiple side electrodes are evenly distributed on the one side of miniature resonant, and composition is uniformly distributed Formula side electrode；The most described side electrode is arranged at the surface of described monocrystal silicon substrate or the surface of substrate of glass；

Described adjacent electrode is multiple, and multiple adjacent electrodes are evenly distributed on an adjacent surface of miniature resonant, and this adjacent surface is Refer to adjacent with the described side of distribution side electrode, so constitute and be uniformly distributed formula adjacent electrode；

Described center is fixed one end of support column and is connected with described monocrystal silicon substrate, described center fix the other end of support column with Described miniature resonant connects；Described adjacent electrode is arranged at the surface of described monocrystal silicon substrate or the surface of substrate of glass； Described monocrystal silicon substrate is bonded with described substrate of glass；

Described miniature resonant is used for described micro-top as the pendulum of described gyroscope, described side electrode and adjacent electrode The driving of spiral shell instrument, detect and control.

The double distributed gyroscope of discrete electrodes of a kind of adjacent surface the most according to claim 1, it is characterised in that described When gyroscope is operated under angular speed pattern, apply alternating current drive signal, described miniature resonant applies direct current biasing Signal, is uniformly distributed formula side electrode and makes described miniature resonant be operated under required driven-mode by electrostatic force, drives The vibration amplitude of mode and frequency keep constant；When being perpendicular to monocrystal silicon substrate and there is additional angular velocity in direction, detect mould The vibration amplitude of state can change, and the size of this vibration amplitude is directly proportional to the size of additional angular velocity, causes described simultaneously The electric capacity being uniformly distributed between formula side electrode and described miniature resonant changes；It is uniformly distributed formula side described in gathering Signal intensity on the electrode of face calculates the size of sensed-mode vibration amplitude, and then calculates the size of additional angular velocity.

The double distributed gyroscope of discrete electrodes of a kind of adjacent surface the most according to claim 2, it is characterised in that described The signal intensity that gyroscope collection is uniformly distributed on formula adjacent electrode calculates the size of sensed-mode vibration amplitude, and then calculates The size of additional angular velocity, thus reduce and be uniformly distributed the parasitic capacitance between formula side electrode, improve accuracy of detection.

The double distributed gyroscope of discrete electrodes of a kind of adjacent surface the most according to claim 2, it is characterised in that described Gyroscope is being uniformly distributed on formula adjacent electrode applying alternating current drive signal, and is uniformly distributed formula side electrode or equal described Acquisition testing signal on even distributed adjacent electrode, it is provided that different driving, detection and control modes.

The double distributed gyroscope of discrete electrodes of a kind of adjacent surface the most according to claim 2, it is characterised in that pass through The described signal intensity being uniformly distributed on formula adjacent electrode judges the duty of described gyroscope, at abnormal operating state Under, it is uniformly distributed on formula adjacent electrode applying control signal by control algolithm in part, the work of gyroscope described in scalable Make state, so that described gyroscope normally works.

The double distributed gyroscope of discrete electrodes of a kind of adjacent surface the most according to claim 2, it is characterised in that described Gyroscope can be operated under dynamic balance pattern and full angle pattern, and dynamic balance pattern directly detects the size of additional angular velocity, Full angle pattern directly detects the size of the additional anglec of rotation.

7., according to the double distributed gyroscope of discrete electrodes of a kind of adjacent surface described in any one of claim 1-6, its feature exists In, the material of described side electrode and described adjacent electrode is boron ion or phosphonium ion doped silicon or is metallic nickel；Work as side When electrode or adjacent electrode are positioned in monocrystal silicon substrate, material is boron ion or phosphonium ion doped silicon；When side electrode or When adjacent electrode is positioned in substrate of glass, material is metallic nickel.

8. according to the double distributed gyroscope of discrete electrodes of a kind of adjacent surface described in any one of claim 1-6, its feature Being, described monocrystal silicon substrate and the material of substrate of glass are respectively the highly resistant material of High Resistivity Si or silicon dioxide.

9. according to the double distributed gyroscope of discrete electrodes of a kind of adjacent surface described in any one of claim 1-6, its feature Being, it is High Resistivity Si or silicon dioxide that the material of support column is fixed at described center；

The material of described miniature resonant is doped diamond or DOPOS doped polycrystalline silicon.

10. the preparation according to the double distributed gyroscope of discrete electrodes of the adjacent surface described in any one of claim 1-9 Method, it is characterised in that comprise the steps:

The first step, monocrystal silicon substrate and substrate of glass are carried out, gluing, photoetching, development, boron ion implanting, sputter, remove photoresist Technique, obtains boron ion or the side electrode of phosphonium ion doped silicon material or adjacent electrode in monocrystal silicon substrate；

Second step, monocrystal silicon substrate carries out gluing, photoetching, development, the isotropic etching of silicon, remove photoresist, with at monocrystal silicon The groove that the sub-shape of miniature resonant is corresponding is obtained in substrate；

3rd step, in monocrystal silicon substrate, deposit silicon dioxide, for making between miniature resonant and side electrode or adjacent electrode Gap provides sacrifice layer；

4th step, in monocrystal silicon substrate, deposit doped diamond or DOPOS doped polycrystalline silicon, and chemically-mechanicapolish polish, to make Miniature resonant；

5th step, on the basis of the 4th step, utilize BOE solution etches silicon dioxide sacrificial layer and control etch period, with release Miniature resonant, and nubbin is fixed support column as center；

6th step, carry out gluing, photoetching, development, electronickelling on the glass substrate, remove photoresist, to make the adjacent of metallic nickel materials Electrode or side electrode；

7th step, inversion substrate of glass, and be bonded with monocrystal silicon substrate, the core making substrate of glass is silica-based with monocrystalline The center alignment of support column is fixed at the center at the end, it is achieved two substrates are fixed, thus it is distributed to obtain the double discrete electrodes of adjacent surface Gyroscope.