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CN106232355A - Demoulding polyimide film, the plywood of demoulding polyimide film with band adhesive linkage, plywood, with the single or multiple lift wiring plate of demoulding polyimide film of band adhesive linkage and the manufacture method of multiwiring board - Google Patents

Demoulding polyimide film, the plywood of demoulding polyimide film with band adhesive linkage, plywood, with the single or multiple lift wiring plate of demoulding polyimide film of band adhesive linkage and the manufacture method of multiwiring board Download PDF

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Publication number
CN106232355A
CN106232355A CN201480067285.9A CN201480067285A CN106232355A CN 106232355 A CN106232355 A CN 106232355A CN 201480067285 A CN201480067285 A CN 201480067285A CN 106232355 A CN106232355 A CN 106232355A
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polyimide film
demoulding
resin
layer
release
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山田薰平
藤本大辅
岩仓哲郎
金子阳
金子阳一
村井曜
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Resonac Corp
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Hitachi Chemical Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J163/00Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/38Layered products comprising a layer of synthetic resin comprising epoxy resins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/12Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/40Adhesives in the form of films or foils characterised by release liners
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0326Organic insulating material consisting of one material containing O
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0014Shaping of the substrate, e.g. by moulding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/20Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
    • B32B2307/206Insulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/30Properties of the layers or laminate having particular thermal properties
    • B32B2307/306Resistant to heat
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/50Properties of the layers or laminate having particular mechanical properties
    • B32B2307/538Roughness
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/748Releasability
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2461/00Presence of condensation polymers of aldehydes or ketones
    • C09J2461/005Presence of condensation polymers of aldehydes or ketones in the release coating
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2479/00Presence of polyamine or polyimide
    • C09J2479/08Presence of polyamine or polyimide polyimide
    • C09J2479/086Presence of polyamine or polyimide polyimide in the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0137Materials
    • H05K2201/0154Polyimide

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

The present invention provides as need not etching after hot pressing process, can obtaining being suitable to the insulating barrier of the surface roughness of semi-additive process and can manufacture the demoulding polyimide film of material of the good single or multiple lift wiring plate of flatness.Specifically, the present invention provides a kind of demoulding polyimide film, and it has the release layer containing alkyd resin and amino resins at least one side of polyimide film.Additionally, the present invention also provides for the manufacture method of a kind of multiwiring board, comprising: by the demoulding polyimide film being not provided with on the face of polyimide film having adhesive linkage at above-mentioned release layer is laminated in single or multiple lift wiring plate, thus manufacture the operation of the single or multiple lift wiring plate of the demoulding polyimide film with band adhesive linkage;The operation of demoulding polyimide film is removed from the single or multiple lift wiring plate of the demoulding polyimide film with band adhesive linkage;And carry out the operation of circuit fabrication.

Description

脱模聚酰亚胺膜、附有带粘接层的脱模聚酰亚胺膜的层叠板、 层叠板、附有带粘接层的脱模聚酰亚胺膜的单层或多层布线 板、以及多层布线板的制造方法Release polyimide film, laminated board with release polyimide film with adhesive layer, Laminate, single or multilayer wiring with release polyimide film with adhesive layer Board, and method for manufacturing multilayer wiring board

技术领域technical field

本发明涉及脱模聚酰亚胺膜、附有带粘接层的脱模聚酰亚胺膜的层叠板、层叠板、附有带粘接层的脱模聚酰亚胺膜的单层或多层布线板、以及多层布线板的制造方法。The present invention relates to a release polyimide film, a laminate with a release polyimide film with an adhesive layer, a laminate, a single layer or a release polyimide film with an adhesive layer A multilayer wiring board, and a method for manufacturing the multilayer wiring board.

背景技术Background technique

以往,多层布线板是经过热压工序来制造的。该热压工序通过将预浸体或树脂膜与铜箔层叠于在单面或两面具有内层电路的电路基板上,进行加热、加压来进行,该预浸体是将树脂组合物浸渗、涂敷于纤维基材而得到的,该树脂膜不含纤维基材。另外,热压工序因其生产率高而被广泛使用。Conventionally, multilayer wiring boards have been manufactured through a heat-pressing process. This hot pressing process is performed by laminating a prepreg or a resin film and copper foil on a circuit board having an inner layer circuit on one or both sides, heating and pressing the prepreg impregnated with a resin composition. , obtained by coating on a fibrous base material, and the resin film does not contain a fibrous base material. In addition, the heat press process is widely used because of its high productivity.

而且,近年来,随着电子设备的小型化、高集成化,要求多层布线板材料的微细布线化。作为形成微细布线的方法,适宜使用半加成法,该方法如下:在对要形成电路的面实施非电解镀铜后,仅在所需的部分进行电解镀铜,并通过蚀刻除去不需要的部分的铜镀层,形成布线。根据该方法,要蚀刻除去的铜层的厚度越薄,即,在表面粗糙度更小的要形成电路的面上薄薄地形成镀铜层、再将其除去,由此越能实现进一步的微细布线化。Furthermore, in recent years, along with miniaturization and high integration of electronic equipment, finer wiring of multilayer wiring board materials has been demanded. As a method of forming fine wiring, a semi-additive method is suitable. This method is as follows: After electroless copper plating is performed on the surface where the circuit is to be formed, electrolytic copper plating is performed only on the required part, and unnecessary parts are removed by etching. Part of the copper plating forms the wiring. According to this method, the thinner the thickness of the copper layer to be etched away, that is, the thinner the copper plated layer is formed on the surface where the circuit is to be formed and the surface roughness is smaller, and then removed, the further finer the copper layer can be achieved. Wiring.

但是,在使用了热压工序的多层布线板的制造中,由于在热压工序时将铜箔层叠于要形成电路的面与压板之间,因此要进行半加成法,则需要铜箔的蚀刻工序(例如参照专利文献1)。另外,由于铜箔的表面粗糙度被转印到要形成多层化的电路的面,因此要形成电路的面的表面粗糙度较大为0.3μm左右。However, in the manufacture of multilayer wiring boards using a hot-pressing process, since copper foil is laminated between the surface on which the circuit is to be formed and the pressing board during the hot-pressing process, copper foil is required to perform the semi-additive method. The etching process (for example, refer to Patent Document 1). In addition, since the surface roughness of the copper foil is transferred to the surface where the multilayer circuit is to be formed, the surface roughness of the surface where the circuit is to be formed is as large as about 0.3 μm.

为了解决该问题,还在研究使用表面粗糙度小的聚对苯二甲酸乙二醇酯(PET)等膜材料来代替铜箔(例如参照专利文献2),但是树脂膜的固化物即绝缘层会受到低耐热性或热变形的影响,因此尚有进一步改善的余地。In order to solve this problem, the use of film materials such as polyethylene terephthalate (PET) with a small surface roughness instead of copper foil has been studied (for example, refer to Patent Document 2), but the cured product of the resin film, that is, the insulating layer It is affected by low heat resistance or thermal deformation, so there is room for further improvement.

另外,作为此种膜材料的脱模剂,广泛使用剥离性优异的硅酮系脱模剂。In addition, as a release agent for such a film material, a silicone-based release agent excellent in releasability is widely used.

现有技术文献prior art literature

专利文献patent documents

专利文献1:日本特开2003-251739号公报Patent Document 1: Japanese Patent Laid-Open No. 2003-251739

专利文献2:日本专利第5212578号公报Patent Document 2: Japanese Patent No. 5212578

发明内容Contents of the invention

发明要解决的问题The problem to be solved by the invention

但是,在使用硅酮系脱模剂的情况下,存在硅酮组合物中的低分子量成分转移到绝缘层而造成可靠性降低等的技术问题。However, when a silicone-based mold release agent is used, there is a technical problem such as migration of low-molecular-weight components in the silicone composition to the insulating layer, resulting in a decrease in reliability.

本发明的目的在于,鉴于此种现状,提供作为如下材料的脱模聚酰亚胺膜,这样的材料不需要在使用铜箔时所需的热压工序后的蚀刻、可得到适于半加成法的表面粗糙度的绝缘层、脱模剂成分向绝缘层的转移较少、并且能制造平坦性良好的多层布线板。The object of the present invention is to provide a mold-releasing polyimide film as a material that can obtain a film suitable for semi-finished products without the need for etching after the hot-pressing process required when using copper foil. The insulating layer with the surface roughness of the conventional method, the migration of the release agent component to the insulating layer is less, and a multilayer wiring board with good flatness can be produced.

用于解决问题的手段means of solving problems

本发明人等为了实现上述目的而反复进行了深入研究,结果发现以下所示的具有脱模层的聚酰亚胺膜、即脱模聚酰亚胺膜可实现上述目的,从而完成本发明。As a result of intensive studies to achieve the above object, the present inventors found that a polyimide film having a release layer shown below, that is, a release polyimide film can achieve the above object, and completed the present invention.

即,本发明提供以下的材料。That is, the present invention provides the following materials.

〔1〕一种脱模聚酰亚胺膜,其在聚酰亚胺膜的至少一面上具有含有醇酸树脂(A)及氨基树脂(B)而成的脱模层。[1] A release polyimide film having a release layer containing an alkyd resin (A) and an amino resin (B) on at least one surface of the polyimide film.

〔2〕根据〔1〕所述的脱模聚酰亚胺膜,其中,上述脱模层的厚度为0.01~10μm。[2] The release polyimide film according to [1], wherein the release layer has a thickness of 0.01 to 10 μm.

〔3〕根据〔1〕或〔2〕所述的脱模聚酰亚胺膜,其中,上述聚酰亚胺膜的厚度为10~100μm。[3] The release polyimide film according to [1] or [2], wherein the polyimide film has a thickness of 10 to 100 μm.

〔4〕根据〔1〕~〔3〕中任意者所述的脱模聚酰亚胺膜,其中,上述聚酰亚胺膜的形成上述脱模层一侧的面的表面粗糙度(Ra)为0.2μm以下。[4] The mold release polyimide film according to any one of [1] to [3], wherein the surface roughness (Ra) of the surface of the polyimide film on which the mold release layer is formed is 0.2 μm or less.

〔5〕根据〔1〕~〔4〕中任意者所述的脱模聚酰亚胺膜,其在上述脱模层的未设置聚酰亚胺膜的面上具有粘接层。[5] The release polyimide film according to any one of [1] to [4], which has an adhesive layer on a surface of the release layer on which the polyimide film is not provided.

〔6〕根据〔5〕所述的脱模聚酰亚胺膜,其中,上述粘接层使用包含环氧树脂及环氧树脂固化剂的树脂组合物而成。[6] The release polyimide film according to [5], wherein the adhesive layer is formed using a resin composition containing an epoxy resin and an epoxy resin curing agent.

〔7〕一种附有带粘接层的脱模聚酰亚胺膜的层叠板,其将〔5〕或〔6〕所述的脱模聚酰亚胺膜的粘接层侧层叠成形于预浸体或绝缘层的至少一面而成。[7] A laminate with an adhesive layer-attached release polyimide film, which is formed by laminating the adhesive layer side of the release polyimide film described in [5] or [6] At least one side of the prepreg or insulating layer.

〔8〕一种层叠板,其将〔7〕所述的层叠板的脱模聚酰亚胺膜剥离而成。[8] A laminate obtained by peeling off the release polyimide film of the laminate described in [7].

〔9〕一种附有带粘接层的脱模聚酰亚胺膜的单层或多层布线板,其将〔5〕或〔6〕所述的脱模聚酰亚胺膜的粘接层侧层叠于预浸体或绝缘层的一面、并将预浸体或绝缘层的另一面层叠于经电路加工而成的单层或多层布线板而成。[9] A single-layer or multi-layer wiring board with a release polyimide film with an adhesive layer, which adheres the release polyimide film described in [5] or [6] The layer side is laminated on one side of the prepreg or insulating layer, and the other side of the prepreg or insulating layer is laminated on the single-layer or multi-layer wiring board processed by the circuit.

〔10〕一种多层布线板的制造方法,其包括:通过将〔5〕或〔6〕所述的脱模聚酰亚胺膜层叠于单层或多层布线板,从而制造附有带粘接层的脱模聚酰亚胺膜的单层或多层布线板的工序;从附有带粘接层的脱模聚酰亚胺膜的单层或多层布线板除去脱模聚酰亚胺膜的工序;以及进行电路加工的工序。[10] A method for manufacturing a multilayer wiring board, comprising: laminating the release polyimide film described in [5] or [6] on a single-layer or multilayer wiring board, thereby manufacturing a Process of single-layer or multilayer wiring board of release polyimide film with adhesive layer; removal of release polyimide from single-layer or multi-layer wiring board with release polyimide film with adhesive layer The process of imide film; and the process of circuit processing.

发明效果Invention effect

根据本发明,可以提供脱模聚酰亚胺膜及使用其的多层布线板的制造方法,该脱模聚酰亚胺膜在以例如使用热板压制、辊层压机、二次压制(ダブルプレス)等的成形方法制造多层布线板时,与绝缘层的剥离性优异,还兼具即使在例如200℃以上等高温使用时膜也不会熔断的耐热强度,脱模剂成分向绝缘层的转移较少,并且表面粗糙度小,能够得到表面的平坦性优异的绝缘层及多层布线板。According to the present invention, it is possible to provide a method of manufacturing a release polyimide film and a multilayer wiring board using the same, the release polyimide film being pressed by using, for example, a hot plate press, a roll laminator, a secondary press ( When manufacturing a multilayer wiring board using a molding method such as Doble Press), it has excellent peelability from the insulating layer, and also has a heat resistance that does not melt the film even when it is used at a high temperature such as 200°C or higher. The release agent component is There is little migration of the insulating layer, and the surface roughness is small, and an insulating layer and a multilayer wiring board having excellent surface flatness can be obtained.

附图说明Description of drawings

图1为在实施例1中利用高精度三维表面形状粗糙度测定系统观察压制后、剥离脱模聚酰亚胺膜之后的绝缘层的表面状态的结果。FIG. 1 shows the result of observing the surface state of the insulating layer after pressing and peeling off the release polyimide film by using a high-precision three-dimensional surface roughness measurement system in Example 1.

图2为在比较例3中利用高精度三维表面形状粗糙度测定系统观察通过蚀刻除去表面的电解铜箔后的绝缘层的表面状态的结果。2 is a result of observing the surface state of the insulating layer after the electrolytic copper foil on the surface was removed by etching using a high-precision three-dimensional surface roughness measuring system in Comparative Example 3. FIG.

具体实施方式detailed description

[脱模聚酰亚胺膜][Mold release polyimide film]

首先,对本发明的脱模聚酰亚胺膜进行说明。本发明的脱模聚酰亚胺膜在聚酰亚胺膜的至少一面上具有含有醇酸树脂(A)及氨基树脂(B)而成的脱模层。First, the mold release polyimide film of this invention is demonstrated. The release polyimide film of this invention has the release layer containing an alkyd resin (A) and an amino resin (B) on at least one surface of a polyimide film.

需要说明的是,在本说明书中,“含有……而成”是指:可以是所含的物质未发生反应而以原本的状态被含有的状态、和所含有的物质以其至少一部分发生了反应的状态被含有的状态中的任意一种。It should be noted that, in this specification, "contains..." means that the contained substance may be contained in its original state without reacting, and at least a part of the contained substance may be contained. The state of the reaction is any of the states included.

作为被用作本发明的脱模聚酰亚胺膜的基材的聚酰亚胺膜,适合使用具有适度的强度、且在剥离时不会引起破裂等的聚酰亚胺膜。例如,在膜强度的方面,优选直接以酰亚胺键将芳香族化合物键合而成的芳香族聚酰亚胺,更优选具有下述式(I)所示的结构单元的芳香族聚酰亚胺。As a polyimide film used as a base material of the release polyimide film of this invention, the polyimide film which has moderate intensity|strength and does not cause a crack etc. at the time of peeling is used suitably. For example, in terms of film strength, an aromatic polyimide in which an aromatic compound is directly bonded by an imide bond is preferable, and an aromatic polyimide having a structural unit represented by the following formula (I) is more preferable. imine.

[化1][chemical 1]

(式(I)中,Z1为碳数6~18的4价芳香族烃基,Z2为碳数6~18的2价芳香族烃基。)(In the formula (I), Z1 is a tetravalent aromatic hydrocarbon group having 6 to 18 carbons, and Z2 is a divalent aromatic hydrocarbon group having 6 to 18 carbons.)

作为Z1所示的碳数6~18的4价芳香族烃基,优选为碳数6~12的4价芳香族烃基。The tetravalent aromatic hydrocarbon group having 6 to 18 carbons represented by Z 1 is preferably a tetravalent aromatic hydrocarbon group having 6 to 12 carbons.

作为Z1所示的碳数6~18的4价芳香族烃基,可优选列举例如下述的芳香族烃基。As the tetravalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by Z 1 , for example, the following aromatic hydrocarbon groups are preferably mentioned.

[化2][Chem 2]

另外,作为Z2所示的碳数6~18的2价芳香族烃基,优选为碳数6~12的2价芳香族烃基。In addition, the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by Z 2 is preferably a divalent aromatic hydrocarbon group having 6 to 12 carbon atoms.

作为Z2所示的碳数6~18的2价芳香族烃基,可优选列举例如下述的芳香族烃基。As the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by Z 2 , for example, the following aromatic hydrocarbon groups are preferably mentioned.

[化3][Chem 3]

作为市售的聚酰亚胺膜,可列举例如:宇部兴产株式会社制、商品名:Upilex R、Upilex S、Upilex SGA;Toray Dupont株式会社制、商品名:Kapton H、Kapton V、Kapton E、Kapton EN、Kapton ENZT;钟渊化学工业株式会社制、商品名:Apical AH、Apical NPI等。为了提高与脱模层的密合性,可以对这些市售膜的表面实施例如等离子体处理、电晕放电处理等。Examples of commercially available polyimide films include: Ube Industries, Ltd., trade names: Upilex R, Upilex S, Upilex SGA; Toray Dupont Co., Ltd., trade names: Kapton H, Kapton V, Kapton E , Kapton EN, Kapton ENZT; manufactured by Chung Yeon Chemical Industry Co., Ltd., trade names: Apical AH, Apical NPI, etc. For example, plasma treatment, corona discharge treatment, etc. can be given to the surface of these commercially available films in order to improve the adhesiveness with a mold release layer.

对于作为本发明的脱模聚酰亚胺膜的基材而使用的聚酰亚胺膜的厚度,只要根据目的及用途进行选择即可。从聚酰亚胺膜的追随性和剥离性的观点出发,例如聚酰亚胺膜的厚度优选为10~100μm、更优选为20~50μm、进一步优选为25~50μm。What is necessary is just to select the thickness of the polyimide film used as a base material of the release polyimide film of this invention according to the objective and use. From the viewpoint of followability and peelability of the polyimide film, for example, the thickness of the polyimide film is preferably 10 to 100 μm, more preferably 20 to 50 μm, and even more preferably 25 to 50 μm.

从使剥离后的绝缘层的平坦性良好的观点出发,作为本发明的脱模聚酰亚胺膜的基材而使用的聚酰亚胺膜的表面粗糙度(Ra)例如优选为0.2μm以下、更优选为0.1μm以下、进一步优选为0.05μm以下。需要说明的是,在此所说的“聚酰亚胺膜的表面粗糙度”表示至少要形成脱模层一侧的面的表面粗糙度。From the viewpoint of improving the flatness of the insulating layer after peeling, the surface roughness (Ra) of the polyimide film used as the base material of the release polyimide film of the present invention is preferably, for example, 0.2 μm or less. , more preferably 0.1 μm or less, still more preferably 0.05 μm or less. In addition, "the surface roughness of a polyimide film" here means the surface roughness of the surface on the side where a mold release layer should be formed at least.

本发明的聚酰亚胺膜具有在高温范围不发生热熔融的强度,因此优选在例如150~300℃使用,优选在该范围不显示明确的玻璃化转变温度且储藏弹性模量(10Hz)超过1GPa。The polyimide film of the present invention has strength that does not undergo thermal fusion in a high temperature range, so it is preferably used at, for example, 150 to 300° C., and preferably does not show a clear glass transition temperature in this range and has a storage elastic modulus (10 Hz) exceeding 1GPa.

(脱模层)(release layer)

用于形成本发明的脱模聚酰亚胺膜的脱模层的树脂组合物(以下,有时称作脱模层用树脂组合物)是包含醇酸树脂(A)及氨基树脂(B)的组合物。在该脱模层用树脂组合物的固体成分中,醇酸树脂(A)及氨基树脂(B)的合计含量(其中,在含有有机溶剂的情况下,为固体成分的合计含量。)优选为50质量%以上、更优选为60质量%以上、进一步优选为70质量%以上、特别优选为80质量%以上。The resin composition for forming the release layer of the release polyimide film of the present invention (hereinafter, sometimes referred to as the resin composition for release layer) contains an alkyd resin (A) and an amino resin (B). combination. In the solid content of the resin composition for a release layer, the total content of the alkyd resin (A) and the amino resin (B) (wherein, when an organic solvent is contained, the total content of the solid content.) is preferably 50% by mass or more, more preferably 60% by mass or more, still more preferably 70% by mass or more, particularly preferably 80% by mass or more.

通过使脱模层为含有醇酸树脂(A)及氨基树脂(B)而成的层,从而在脱模层中得到交联结构,与硅酮系脱模剂相比,可抑制脱模层用树脂组合物成分向绝缘层的转移,且显示良好的剥离性。通过抑制脱模层用树脂组合物成分向绝缘层的转移,从而可以抑制绝缘层的耐热性等的降低。By making the release layer a layer containing an alkyd resin (A) and an amino resin (B), a cross-linked structure is obtained in the release layer, and the release layer can be suppressed compared with a silicone-based release agent. It is used to transfer the components of the resin composition to the insulating layer, and shows good peelability. By suppressing the migration of the resin composition component for mold release layers to an insulating layer, the fall of the heat resistance of an insulating layer, etc. can be suppressed.

脱模层的厚度例如优选为0.01~10μm、更优选为0.05~5μm、进一步优选为0.05~2μm。通过使脱模层的厚度为0.01~10μm,从而存在剥离性提高的倾向。The thickness of the mold release layer is, for example, preferably 0.01 to 10 μm, more preferably 0.05 to 5 μm, even more preferably 0.05 to 2 μm. There exists a tendency for releasability to improve by making the thickness of a mold release layer into 0.01-10 micrometers.

上述成分(A)相对于上述成分(B)的比率(A/B)以固体成分质量比计例如优选为95/5~10/90、更优选为90/10~40/60。The ratio (A/B) of the component (A) to the component (B) is, for example, preferably 95/5 to 10/90, more preferably 90/10 to 40/60 in terms of solid mass ratio.

若醇酸树脂(A)的比率为95质量%以下(即,氨基树脂(B)的比率为5质量%以上),则在脱模层中得到充分的交联结构,存在剥离性降低得到抑制的倾向。另外,若醇酸树脂(A)的比率为10质量%以上(即,氨基树脂(B)的比率为90质量%以下),则脱模层不会变得过硬,存在得到良好剥离性的倾向。When the ratio of the alkyd resin (A) is 95% by mass or less (that is, the ratio of the amino resin (B) is 5% by mass or more), a sufficient crosslinked structure is obtained in the mold release layer, and the decrease in peelability is suppressed. Propensity. In addition, when the ratio of the alkyd resin (A) is 10% by mass or more (that is, the ratio of the amino resin (B) is 90% by mass or less), the release layer does not become too hard, and good peelability tends to be obtained. .

在本发明中,醇酸树脂(A)是指通过多元醇与多元酸的缩合反应而得到的合成树脂。作为醇酸树脂(A),可以使用二元酸与二元醇的缩合物或用非干性油脂肪酸改性后的非转化性醇酸、以及二元酸与三元以上的醇的缩合物即转化性醇酸中的任意种。In the present invention, the alkyd resin (A) refers to a synthetic resin obtained by a condensation reaction of a polyhydric alcohol and a polybasic acid. As the alkyd resin (A), condensates of dibasic acids and dihydric alcohols, non-converted alkyds modified with non-drying oil fatty acids, and condensates of dibasic acids and trihydric or higher alcohols can be used That is, any of the transforming alkyds.

另外,本发明中所使用的醇酸树脂(A)可以使用各种市售品,也可以按照公知的方法来合成。In addition, the alkyd resin (A) used in this invention can use various commercial items, and can also synthesize|combine by a well-known method.

作为醇酸树脂(A)的合成方法,可列举例如将多元醇与多元酸或在其中加入改性剂并进行加热缩合的方法等。As a synthesis method of the alkyd resin (A), for example, a polyhydric alcohol, a polybasic acid, or a method of adding a modifying agent thereto, followed by thermal condensation, etc. may be mentioned.

作为多元醇,可使用例如:乙二醇、二乙二醇、三乙二醇、丙二醇、三亚甲基二醇、四亚甲基二醇、新戊二醇等二元醇;甘油、三羟甲基乙烷、三羟甲基丙烷等三元醇;二甘油、三甘油、季戊四醇(ペンタエリスリトール)、单季戊四醇(ペンタエリトリット)、二季戊四醇、甘露醇、山梨醇等多元醇等。As the polyhydric alcohol, for example: dihydric alcohols such as ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, trimethylene glycol, tetramethylene glycol, neopentyl glycol; glycerin, trihydroxy triols such as methylethane and trimethylolpropane; polyalcohols such as diglycerin, triglycerin, pentaerythritol, monopentaerythritol, dipentaerythritol, mannitol, and sorbitol; and the like.

另外,作为多元酸,可以使用例如:邻苯二甲酸酐、对苯二甲酸、琥珀酸、己二酸、癸二酸等饱和多元酸;马来酸、马来酸酐、富马酸、衣康酸、柠康酸酐、间苯二甲酸、偏苯三酸酐等不饱和多元酸;环戊二烯-马来酸酐加成物、萜烯-马来酸酐加成物、松香-马来酸酐加成物等基于狄尔斯-阿尔德反应(Diels Alder reaction)的多元酸等。需要说明的是,也可以并用苯甲酸。In addition, as the polybasic acid, for example: saturated polybasic acid such as phthalic anhydride, terephthalic acid, succinic acid, adipic acid, sebacic acid; maleic acid, maleic anhydride, fumaric acid, itaconic acid, etc. acid, citraconic anhydride, isophthalic acid, trimellitic anhydride and other unsaturated polyacids; cyclopentadiene-maleic anhydride adducts, terpene-maleic anhydride adducts, rosin-maleic anhydride adducts, etc Diels-Alder reaction (Diels Alder reaction) polyacids, etc. In addition, benzoic acid can also be used together.

另外,作为改性剂,可以使用例如:椰子油、亚麻籽油、桐油、蓖麻油、脱水蓖麻油、以及它们的脂肪酸、辛酸、月桂酸、棕榈酸、硬脂酸、油酸、亚油酸、亚麻酸、桐酸、蓖麻油酸、脱水蓖麻油酸等。In addition, as modifiers, for example, coconut oil, linseed oil, tung oil, castor oil, dehydrated castor oil, and their fatty acids, caprylic acid, lauric acid, palmitic acid, stearic acid, oleic acid, and linoleic acid can be used. , linolenic acid, lyric acid, ricinoleic acid, dehydrated ricinoleic acid, etc.

醇酸树脂(A)的脂-油比(脂肪酸的含有质量比率)优选为例如0~60%、更优选为20~40%。The fat-oil ratio (content ratio of fatty acid) of the alkyd resin (A) is preferably, for example, 0 to 60%, more preferably 20 to 40%.

醇酸树脂(A)的酸值例如优选为1~30mgKOH/g、更优选为5~25mgKOH/g。The acid value of the alkyd resin (A) is, for example, preferably 1 to 30 mgKOH/g, more preferably 5 to 25 mgKOH/g.

另外,醇酸树脂(A)的羟基值例如优选为50~300mgKOH/g、更优选为100~250mgKOH/g。Moreover, it is preferable that the hydroxyl value of an alkyd resin (A) is 50-300 mgKOH/g, for example, More preferably, it is 100-250 mgKOH/g.

另外,在这些醇酸树脂(A)中,也可以将例如丙烯酸类树脂、聚酯树脂、环氧树脂、酚醛树脂等进行改性或混合后再使用。In addition, among these alkyd resins (A), for example, acrylic resins, polyester resins, epoxy resins, phenol resins, etc. may be modified or mixed and used.

本发明中的氨基树脂(B)是指通过包含氨基的化合物与醛的缩合反应而得到的树脂,可列举例如三聚氰胺树脂、苯胺醛树脂、脲醛树脂、苯并胍胺树脂等。The amino resin (B) in the present invention refers to a resin obtained by a condensation reaction between a compound containing an amino group and an aldehyde, and examples thereof include melamine resins, aniline aldehyde resins, urea aldehyde resins, and benzoguanamine resins.

本发明中所使用的氨基树脂可以使用各种市售的氨基树脂,也可以按照公知的方法来合成。The amino resin used in the present invention can use various commercially available amino resins, and can also be synthesized according to a known method.

作为合成方法,可以使用例如以包含羟甲基或其醚的预聚物作为原料树脂所合成的各种氨基树脂。As a synthesis method, for example, various amino resins synthesized using a prepolymer containing a methylol group or an ether thereof as a raw material resin can be used.

更具体而言,可以使用例如甲基化三聚氰胺树脂、丁基化三聚氰胺树脂、甲基化脲醛树脂、丁基化脲醛树脂、甲基化苯并胍胺树脂、丁基化苯并胍胺树脂等各种公知的氨基树脂。从重复使用性的观点出发,优选以甲基化三聚氰胺树脂、尤其是每个三嗪核含有1个以上羟甲基的甲基化三聚氰胺树脂作为主成分。More specifically, for example, methylated melamine resin, butylated melamine resin, methylated urea resin, butylated urea resin, methylated benzoguanamine resin, butylated benzoguanamine resin, etc. can be used Various known amino resins. From the viewpoint of reusability, it is preferable to use a methylated melamine resin, especially a methylated melamine resin containing one or more methylol groups per triazine nucleus, as a main component.

本发明中,作为氨基树脂而特别优选使用的甲基化三聚氰胺树脂通常是通过在碱性下使福尔马林与三聚氰胺进行加成反应、并进一步在酸性下使甲醇进行醚反应而得到。可以通过福尔马林的加成量、甲醇的醚化量的不同来控制作为氨基树脂的官能团的亚氨基、羟甲基、甲醚基量。In the present invention, the methylated melamine resin used particularly preferably as an amino resin is usually obtained by addition reaction of formalin and melamine under basic conditions, and further ether reaction of methanol under acidic conditions. The amount of imino group, methylol group, and methyl ether group, which are functional groups of the amino resin, can be controlled by the difference in the amount of formalin added and the amount of etherification of methanol.

需要说明的是,该每个三嗪核的羟甲基量可以通过滴定分析及仪器分析来计算,例如可以通过用核磁共振装置、元素分析装置等进行测定来计算。It should be noted that the amount of methylol groups per triazine nucleus can be calculated by titration analysis and instrumental analysis, for example, it can be calculated by measuring with a nuclear magnetic resonance device, an elemental analysis device, and the like.

另外,在本发明中,在脱模层用树脂组合物成分向绝缘层的转移得到抑制的范围内,从剥离性的方面出发,可以使脱模层用树脂组合物含有硅酮树脂(C)。In addition, in the present invention, the resin composition for a mold release layer may contain a silicone resin (C) from the viewpoint of releasability within the range in which the migration of the resin composition components for a mold release layer to the insulating layer is suppressed. .

此时,关于硅酮树脂的含有比率,硅酮树脂(C)相对于醇酸树脂(A)与氨基树脂(B)的合计量的含有比率(C/(A+B))以固体成分质量比计优选为20/100以下、更优选为10/100以下。相对于上述成分(A)和上述成分(B)的合计100质量份,成分(C)为20质量份以下时,可得到良好的固化性,存在难以发生硅酮树脂(C)的转移的倾向。At this time, regarding the content ratio of the silicone resin, the content ratio (C/(A+B)) of the silicone resin (C) relative to the total amount of the alkyd resin (A) and the amino resin (B) is expressed in terms of solid content mass The ratio is preferably 20/100 or less, more preferably 10/100 or less. When the component (C) is 20 parts by mass or less with respect to the total of 100 parts by mass of the above-mentioned component (A) and the above-mentioned component (B), good curability is obtained, and migration of the silicone resin (C) tends to hardly occur. .

需要说明的是,本发明中的硅酮树脂(C)是指以二甲基聚硅氧烷作为主成分的具有三维网状结构的有机聚硅氧烷、硅酮橡胶、硅油。本发明所使用的硅酮树脂(C)可以使用各种市售品,也可以按照公知方法来合成。It should be noted that the silicone resin (C) in the present invention refers to organopolysiloxane, silicone rubber, and silicone oil having a three-dimensional network structure mainly composed of dimethylpolysiloxane. The silicone resin (C) used in the present invention can use various commercial products, and can also be synthesized according to a known method.

作为硅酮树脂(C),优选有机聚硅氧烷,只要是能够得到耐热性、光泽、剥离性、表面状态优异的脱模层的硅酮树脂,则可以为直链状、支链状中的任意结构,与上述醇酸树脂(A)及氨基树脂(B)的相容性优异的硅酮树脂适合使用在本发明的脱模层用树脂组合物中。As the silicone resin (C), organopolysiloxane is preferable, and as long as it is a silicone resin capable of obtaining a mold release layer excellent in heat resistance, gloss, releasability, and surface condition, it may be linear or branched. Arbitrary structures in the silicone resin excellent in compatibility with the said alkyd resin (A) and amino resin (B) are used suitably for the resin composition for mold release layers of this invention.

需要说明的是,有机聚硅氧烷可以通过改变有机基团与硅原子的摩尔比来改变树脂的柔软性、弹性等性质。作为此种有机聚硅氧烷,具体而言,可列举下述式(1)所示的有机聚硅氧烷。It should be noted that the organopolysiloxane can change the softness, elasticity and other properties of the resin by changing the molar ratio of the organic group to the silicon atom. As such an organopolysiloxane, the organopolysiloxane represented by following formula (1) is mentioned specifically,.

[化4][chemical 4]

(式中,R1中的至少1个为与醇酸树脂及氨基树脂的至少一方(其中,包括醇酸树脂与氨基树脂的反应物。)具有反应性的取代基,其余为碳数1~12的非取代或取代烷基,X为15~500、优选为25~100,Y为15~500、优选为25~100,X+Y为30~1000、优选为50~200,0.15≤Y/(X+Y)≤0.5。)(In the formula, at least one of R1 is a substituent having reactivity with at least one of alkyd resin and amino resin (including the reactant of alkyd resin and amino resin), and the rest are carbon numbers 1 to 10. 12 unsubstituted or substituted alkyl, X is 15-500, preferably 25-100, Y is 15-500, preferably 25-100, X+Y is 30-1000, preferably 50-200, 0.15≤Y /(X+Y)≤0.5.)

1分子有机聚硅氧烷中的与硅原子键合的有机基团中,优选的是15~50mol%为苯基、更优选的是15~40mol%为苯基。若苯基量为15mol%以上,则存在与醇酸树脂(A)及氨基树脂(B)的相容性变得良好的倾向。另外,若苯基量为50mol%以下,则存在剥离性的降低得到抑制的倾向。Of the organic groups bonded to silicon atoms in one molecule of the organopolysiloxane, preferably 15 to 50 mol% are phenyl groups, and more preferably 15 to 40 mol% are phenyl groups. There exists a tendency for the compatibility with an alkyd resin (A) and an amino resin (B) to become favorable that the amount of a phenyl group is 15 mol% or more. Moreover, when the amount of phenyl groups is 50 mol% or less, there exists a tendency for the fall of peelability to be suppressed.

为了使脱模层充分具有剥离性的性能,优选使上述苯基以外的其余有机基团中的至少1个为与醇酸树脂及氨基树脂的至少一方具有反应性的官能团。作为与醇酸树脂及氨基树脂的至少一方具有反应性的官能团,可列举羟基取代有机基团、氨基取代有机基团、羧基取代有机基团、缩水甘油基取代有机基团等。其中,从导入氨基醇酸树脂的方法的容易程度的观点出发,优选羟基取代有机基团。In order for the release layer to sufficiently have releasable performance, it is preferable that at least one of the remaining organic groups other than the phenyl group be a functional group reactive with at least one of alkyd resin and amino resin. Examples of functional groups reactive with at least one of alkyd resins and amino resins include hydroxyl-substituted organic groups, amino-substituted organic groups, carboxyl-substituted organic groups, and glycidyl-substituted organic groups. Among them, a hydroxyl group-substituted organic group is preferable from the viewpoint of easiness of the method of introducing the amino alkyd resin.

在使用羟基取代有机基团的情况下,每1分子硅酮树脂优选含有1~20个该羟基取代有机基团,更优选含有1~10个该羟基取代有机基团。作为羟基取代有机基团,可列举例如下述式(2)所示的羟基取代有机基团或下述式(3)所示的羟基取代有机基团等。When a hydroxy-substituted organic group is used, the silicone resin preferably contains 1 to 20 such hydroxy-substituted organic groups, and more preferably contains 1 to 10 such hydroxy-substituted organic groups per molecule of the silicone resin. As a hydroxy-substituted organic group, the hydroxy-substituted organic group represented by following formula (2), the hydroxy-substituted organic group represented by following formula (3), etc. are mentioned, for example.

[化5][chemical 5]

-CH2CH2CH2-O(C2H4O)nH (2)-CH 2 CH 2 CH 2 -O(C 2 H 4 O) n H (2)

(式中,n为1~3的平均值。)(In the formula, n is an average value of 1 to 3.)

[化6][chemical 6]

-R-(S)a-R2-OH (3)-R-(S) a -R 2 -OH (3)

(式中,R及R2为碳数1~10的2价烃基,a为0或1。)(In the formula, R and R 2 are divalent hydrocarbon groups with 1 to 10 carbons, and a is 0 or 1.)

通过具有此种与醇酸树脂及氨基树脂的至少一方具有反应性的取代基,从而醇酸树脂及氨基树脂的至少一方与硅酮树脂反应,在脱模层中形成化学键合的结构,从而能够在提高剥离性的同时、抑制硅酮向绝缘层的转移。By having such a substituent reactive with at least one of the alkyd resin and the amino resin, at least one of the alkyd resin and the amino resin reacts with the silicone resin to form a chemically bonded structure in the release layer, thereby enabling While improving peelability, it suppresses the transfer of silicone to the insulating layer.

作为上述有机基团以外的其余的非取代或取代烷基,可列举碳数1~12、优选1~8、更优选1~5的直链烷基或支链烷基。作为该烷基,可列举例如:甲基、乙基、丙基、异丙基、丁基、仲丁基、叔丁基、辛基等非取代烷基;或者这些基团的与碳原子键合的氢原子的一部分或全部被氟、氯、溴、碘等卤素原子、氰基等取代后的氯甲基、三氟丙基、氰基乙基等取代烷基等。需要说明的是,从得到更高的剥离性的观点出发,优选为甲基。Examples of the remaining unsubstituted or substituted alkyl groups other than the aforementioned organic groups include linear or branched alkyl groups having 1 to 12 carbon atoms, preferably 1 to 8 carbon atoms, and more preferably 1 to 5 carbon atoms. Examples of the alkyl group include unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, and octyl; Alkyl groups such as chloromethyl groups, trifluoropropyl groups, cyanoethyl groups, etc. substituted by halogen atoms such as fluorine, chlorine, bromine, and iodine, cyano groups, etc., in which part or all of the combined hydrogen atoms are substituted. In addition, a methyl group is preferable from a viewpoint of obtaining higher peelability.

本发明所使用的脱模层用树脂组合物中可以配合表面活性剂。A surfactant may be blended in the resin composition for a mold release layer used in the present invention.

本发明中的表面活性剂是指用于调节表面现象、且即使在低浓度下也显示表面活性的物质。作为表面活性剂,有活性剂的主体为阴离子的阴离子系表面活性剂、活性剂的主体为阳离子的阳离子系表面活性剂、活性剂的主体为两性的两性表面活性剂、不电离的非离子系表面活性剂,从效果的方面出发,优选具有抗静电性的阳离子系表面活性剂。The surfactant in the present invention refers to a substance that regulates surface phenomena and exhibits surface activity even at a low concentration. As surfactants, there are anionic surfactants in which the main active agent is anionic, cationic surfactants in which the main active agent is cationic, amphoteric surfactants in which the main active agent is amphoteric, and non-ionic nonionic surfactants. The surfactant is preferably a cationic surfactant having antistatic properties from the viewpoint of its effect.

作为阳离子系表面活性剂,可列举例如季铵盐、叔铵盐、酰胺季铵盐等。为了进一步提高抗静电的效果,优选季铵盐。作为季铵盐,可列举例如烷基三甲基铵盐、二烷基二甲基铵盐、四烷基铵盐、烷基二甲基苄基铵盐、烷基吡啶鎓盐、烷基吗啉鎓盐、烷基咪唑啉鎓盐、酰胺铵盐、5,5,7,7-四甲基-2-辛烯基甲基铵氯化物、聚乙烯亚胺的季铵盐、苄基·三(二甲基氨基)鏻氯化物、十六烷基·三(二甲基氨基)鏻氯化物等。As a cationic surfactant, a quaternary ammonium salt, a tertiary ammonium salt, an amide quaternary ammonium salt, etc. are mentioned, for example. In order to further improve the antistatic effect, quaternary ammonium salts are preferred. As quaternary ammonium salts, for example, alkyl trimethyl ammonium salts, dialkyl dimethyl ammonium salts, tetraalkyl ammonium salts, alkyl dimethyl benzyl ammonium salts, alkyl pyridinium salts, alkyl ammonium salts, Phyllinium salts, alkyl imidazolinium salts, amide ammonium salts, 5,5,7,7-tetramethyl-2-octenylmethylammonium chloride, quaternary ammonium salts of polyethyleneimine, benzyl Tris(dimethylamino)phosphonium chloride, hexadecyltris(dimethylamino)phosphonium chloride, and the like.

阳离子系表面活性剂的添加量相对于包含醇酸树脂(A)、氨基树脂(B)及硅酮树脂(C)的组合物100质量份为0.05~10质量份、优选为0.1~5质量份。若添加量为0.05质量份以上,则存在得到良好的抗静电性能的倾向。另外,若添加量为10质量份以下,则可得到良好的涂膜的固化性,存在剥离性的降低得到抑制的倾向。需要说明的是,在本发明中,在体现本发明效果的范围内,除阳离子系表面活性剂外,还可以并用阴离子系表面活性剂、非离子系表面活性剂、两性系表面活性剂。作为阴离子系表面活性剂,可列举例如烷基磷酸盐、烷基磺酸盐、烷基苯磺酸盐等。作为非离子系表面活性剂,可列举例如甘油脂肪酸酯、脱水山梨糖醇脂肪酸酯、聚氧乙烯烷基胺、聚氧乙烯烷基胺脂肪酸酯、N-羟基乙基-N-2-羟基烷基胺、烷基二乙醇酰胺等。另外,作为两性系表面活性剂,可列举例如烷基甜菜碱、烷基咪唑鎓甜菜碱等。需要说明的是,作为上述阳离子系表面活性剂、非离子系表面活性剂、阴离子系表面活性剂、两性系表面活性剂,可以使用各种市售品。The amount of the cationic surfactant to be added is 0.05 to 10 parts by mass, preferably 0.1 to 5 parts by mass relative to 100 parts by mass of the composition containing the alkyd resin (A), the amino resin (B) and the silicone resin (C) . When the addition amount is 0.05 parts by mass or more, favorable antistatic performance tends to be obtained. Moreover, when the addition amount is 10 mass parts or less, favorable curability of a coating film will be obtained, and there exists a tendency for the fall of peelability to be suppressed. In addition, in the present invention, in addition to cationic surfactants, anionic surfactants, nonionic surfactants, and amphoteric surfactants may be used in combination within the range of exhibiting the effects of the present invention. As an anionic surfactant, an alkyl phosphate, an alkyl sulfonate, an alkylbenzene sulfonate, etc. are mentioned, for example. Examples of nonionic surfactants include glycerin fatty acid esters, sorbitan fatty acid esters, polyoxyethylene alkylamines, polyoxyethylene alkylamine fatty acid esters, N-hydroxyethyl-N-2 -Hydroxyalkylamines, alkyldiethanolamides, etc. Moreover, as an amphoteric surfactant, an alkyl betaine, an alkylimidazolium betaine, etc. are mentioned, for example. In addition, various commercial items can be used as said cationic surfactant, nonionic surfactant, anionic surfactant, and amphoteric surfactant.

另外,在本发明中,可以使脱模层用树脂组合物含有酸性催化剂。该酸性催化剂作为上述醇酸树脂(A)与氨基树脂(B)的反应的催化剂而发挥功能。通过使用酸性催化剂,从而能够进行低温下的涂敷,使生产率提高。作为酸性催化剂,可列举例如对甲苯磺酸、草酸、磷酸等。Moreover, in this invention, you may make the resin composition for mold release layers contain an acidic catalyst. This acidic catalyst functions as a catalyst for the reaction between the alkyd resin (A) and the amino resin (B). By using an acidic catalyst, coating at a low temperature is possible and productivity is improved. As an acidic catalyst, p-toluenesulfonic acid, oxalic acid, phosphoric acid etc. are mentioned, for example.

为了调整剥离性,而在脱模层用树脂组合物中引入含有与上述醇酸树脂(A)及氨基树脂(B)的至少一方具有反应性的官能团的硅酮树脂(C)。需要说明的是,在不引入硅酮树脂的情况下,向脱模层上形成粘接层时的涂敷性良好。In order to adjust releasability, the silicone resin (C) containing the functional group reactive with at least one of the above-mentioned alkyd resin (A) and amino resin (B) is introduced into the resin composition for mold release layers. In addition, when the silicone resin was not introduced, the applicability at the time of forming the adhesive layer on the mold release layer was favorable.

需要说明的是,包含如下硅酮树脂的树脂组合物(以下,有时也称作含硅酮的氨基醇酸树脂)可以从商业上购得,该硅酮树脂具有与醇酸树脂(A)、氨基树脂(B)、及使醇酸树脂和氨基树脂反应而得的化合物具有反应性的官能团。可列举例如Hitachi KaseiPolymer株式会社制的商品名:Tesfine 319、TA31-209E等。It should be noted that a resin composition (hereinafter, sometimes also referred to as a silicone-containing amino alkyd resin) containing a silicone resin having a combination with an alkyd resin (A), The compound obtained by reacting an amino resin (B) and an alkyd resin and an amino resin has a reactive functional group. For example, Hitachi Kasei Polymer Co., Ltd. product names: Tesfine 319, TA31-209E, etc. are mentioned.

另外,包含醇酸树脂和氨基树脂的树脂组合物(以下,有时也称作非硅酮系氨基醇酸树脂)也可以从商业上购得。可列举例如Hitachi Kasei Polymer株式会社制的商品名:Tesfine 303、Tesfine 305等。In addition, a resin composition containing an alkyd resin and an amino resin (hereinafter, may also be referred to as a non-silicone-based amino alkyd resin) is also commercially available. For example, the brand names of Hitachi Kasei Polymer Co., Ltd.: Tesfine 303, Tesfine 305 etc. are mentioned.

脱模层用树脂组合物优选最终处于各成分被溶解或分散在有机溶剂中的清漆(以下,有时称作脱模层用树脂清漆)的状态。The resin composition for a release layer is preferably in a final state of a varnish (hereinafter, may be referred to as a resin varnish for a release layer) in which each component is dissolved or dispersed in an organic solvent.

作为在制成清漆时使用的有机溶剂,可列举例如:甲醇、乙醇、丙醇、丁醇、甲基溶纤剂、丁基溶纤剂、丙二醇单甲基醚等醇系溶剂;丙酮、甲乙酮、甲基异丁基酮、环己酮等酮系溶剂;醋酸丁酯、丙二醇单甲基醚乙酸酯等酯系溶剂;四氢呋喃等醚系溶剂;甲苯、二甲苯、均三甲苯等芳香族系溶剂;二甲基甲酰胺、N,N-二甲基乙酰胺、N-甲基吡咯烷酮等含氮原子溶剂;二甲基亚砜等含硫原子溶剂等。这些溶剂可以单独使用1种或混合使用2种以上。As the organic solvent used when making a varnish, for example: alcohol solvents such as methanol, ethanol, propanol, butanol, methyl cellosolve, butyl cellosolve, propylene glycol monomethyl ether; acetone, methyl ethyl ketone, methyl Ketone solvents such as isobutyl ketone and cyclohexanone; ester solvents such as butyl acetate and propylene glycol monomethyl ether acetate; ether solvents such as tetrahydrofuran; aromatic solvents such as toluene, xylene and mesitylene Nitrogen atom-containing solvents such as dimethylformamide, N,N-dimethylacetamide, N-methylpyrrolidone, etc.; sulfur atom-containing solvents such as dimethyl sulfoxide, etc. These solvents can be used individually by 1 type or in mixture of 2 or more types.

其中,例如从溶解性和涂敷时的外观的方面出发,优选芳香族系溶剂、酮系溶剂,进一步优选甲苯与甲乙酮(MEK)的混合溶剂。Among these, aromatic solvents and ketone solvents are preferable, and a mixed solvent of toluene and methyl ethyl ketone (MEK) is more preferable in terms of solubility and appearance during coating.

最终所得的清漆中的树脂组合物的含量(固体成分浓度)例如优选为清漆总体的1~40质量%、更优选为5~30质量%。通过使清漆中的树脂组合物的含量(固体成分浓度)为1~40质量%,从而容易控制涂敷时的膜厚。The content (solid content concentration) of the resin composition in the finally obtained varnish is, for example, preferably 1 to 40% by mass of the entire varnish, more preferably 5 to 30% by mass. By setting the content (solid content concentration) of the resin composition in the varnish to 1 to 40% by mass, it becomes easy to control the film thickness at the time of application.

另外,还可以根据需要在脱模层中即脱模层用树脂组合物中添加易滑剂、抗静电剂等。在热压工序中,由于频繁地产生静电,因此优选添加抗静电剂的方法,此外,可以通过向未形成脱模层的面进行涂布来形成抗静电层。Moreover, you may add a slip agent, an antistatic agent, etc. to a mold release layer, ie, to the resin composition for mold release layers, as needed. In the hot pressing process, since static electricity is frequently generated, a method of adding an antistatic agent is preferable, and an antistatic layer can be formed by applying to a surface on which a release layer is not formed.

作为在聚酰亚胺膜的至少一面上形成所需厚度的脱模层的方法,可列举:在聚酰亚胺膜上,使用逆转辊涂布机、凹版涂布机、棒涂机、气刀涂布机等,例如在50℃~200℃干燥10秒~600秒的方法。As a method of forming a mold release layer with a desired thickness on at least one side of the polyimide film, there may be mentioned: on the polyimide film, using a reverse roll coater, a gravure coater, a bar coater, an air A knife coater etc., for example, a method of drying at 50° C. to 200° C. for 10 seconds to 600 seconds.

(粘接层)(adhesive layer)

本发明的脱模聚酰亚胺膜可以在该脱模层的未设置聚酰亚胺膜的面上具有粘接层。The mold release polyimide film of this invention may have an adhesive layer on the surface which the polyimide film of this mold release layer is not provided.

上述粘接层优选使用含有环氧树脂及环氧树脂固化剂而成的树脂组合物(以下,有时称作粘接层用树脂组合物)而形成于脱模层面上而成。环氧树脂在耐热性、耐碱性等优异这一点上是优选的。需要说明的是,“含有环氧树脂及环氧树脂固化剂而成的”树脂组合物可以以未反应的状态含有环氧树脂和环氧树脂固化剂,也可以以反应后的状态含有环氧树脂和环氧树脂固化剂。The above-mentioned adhesive layer is preferably formed on the release surface using a resin composition (hereinafter, sometimes referred to as an adhesive layer resin composition) containing an epoxy resin and an epoxy resin curing agent. Epoxy resins are preferable because they are excellent in heat resistance, alkali resistance, and the like. It should be noted that the resin composition "containing epoxy resin and epoxy resin curing agent" may contain epoxy resin and epoxy resin curing agent in an unreacted state, or may contain epoxy resin in a reacted state. Resin and epoxy resin curing agent.

粘接层的厚度优选为0.01~10μm、更优选为0.05~8μm。通过使粘接层的厚度为该范围,在热板压制后,更容易在粘接层与脱模层的界面除去脱模聚酰亚胺膜。The thickness of the adhesive layer is preferably 0.01 to 10 μm, more preferably 0.05 to 8 μm. By setting the thickness of the adhesive layer within this range, it becomes easier to remove the release polyimide film at the interface between the adhesive layer and the release layer after hot plate pressing.

在此,“环氧树脂”为分子中具有2个以上的环氧基的环氧树脂。作为分子中具有2个环氧基的树脂,可列举例如双酚A型环氧树脂、双酚F型环氧树脂等。另外,也可以使用在分子中具有平均大于2个的环氧基的多官能环氧树脂。Here, an "epoxy resin" is an epoxy resin having two or more epoxy groups in a molecule. As resin which has two epoxy groups in a molecule|numerator, bisphenol A type epoxy resin, bisphenol F type epoxy resin, etc. are mentioned, for example. In addition, a polyfunctional epoxy resin having an average of more than 2 epoxy groups in the molecule can also be used.

作为多官能环氧树脂,可列举例如联苯芳烷基型环氧树脂、苯酚线型酚醛型环氧树脂、甲酚线型酚醛型环氧树脂、芳烷基型环氧树脂、萘型环氧树脂、萘线型酚醛型环氧树脂等。其中,作为多官能型环氧树脂,优选例如芳烷基线型酚醛型环氧树脂、萘线型酚醛型环氧树脂。另外,从与镀铜的粘接力的观点出发,粘接层的多官能型环氧树脂优选为例如具有联苯结构的树脂。Examples of polyfunctional epoxy resins include biphenyl aralkyl epoxy resins, phenol novolak epoxy resins, cresol novolak epoxy resins, aralkyl epoxy resins, naphthalene ring epoxy resins, and polyfunctional epoxy resins. Oxygen resin, naphthalene novolac epoxy resin, etc. Among them, as the polyfunctional epoxy resin, for example, an aralkyl novolac epoxy resin and a naphthalene novolac epoxy resin are preferable. Moreover, it is preferable that the multifunctional epoxy resin of an adhesive layer is resin which has a biphenyl structure, for example from a viewpoint of the adhesive force with copper plating.

它们可以单独使用或者混合使用2种以上。These can be used individually or in mixture of 2 or more types.

其中,优选例如具有联苯结构的芳烷基线型酚醛型环氧树脂(联苯芳烷基型环氧树脂)。作为具有联苯结构的芳烷基线型酚醛型环氧树脂的市售品,可列举例如日本化药株式会社制的NC-3000、NC-3000-H等。Among these, for example, an aralkyl novolak type epoxy resin (biphenyl aralkyl type epoxy resin) having a biphenyl structure is preferable. As a commercial item of the aralkyl novolak type epoxy resin which has a biphenyl structure, Nippon Kayaku Co., Ltd. NC-3000, NC-3000-H, etc. are mentioned, for example.

另外,作为环氧树脂固化剂,可列举例如苯酚线型酚醛、甲酚线型酚醛等多官能酚化合物;双氰胺、二氨基二苯基甲烷、二氨基二苯基砜等胺化合物;邻苯二甲酸酐、均苯四酸酐、马来酸酐、马来酸酐共聚物等酸酐等。它们可以使用1种或混合使用2种以上。In addition, as the epoxy resin curing agent, for example, polyfunctional phenolic compounds such as phenol novolac and cresol novolac; amine compounds such as dicyandiamide, diaminodiphenylmethane, and diaminodiphenylsulfone; Anhydrides such as phthalic anhydride, pyromellitic anhydride, maleic anhydride, maleic anhydride copolymer, etc. These can be used 1 type or in mixture of 2 or more types.

粘接层用树脂组合物可以为含有固化促进剂而成的树脂组合物。作为固化促进剂,可以使用例如作为潜在性的热固化剂的各种咪唑类、BF3胺络合物及磷系固化促进剂等。The resin composition for an adhesive layer may contain a hardening accelerator. As the curing accelerator, for example, various imidazoles, BF 3 amine complexes, phosphorus-based curing accelerators, etc., which are latent thermosetting agents, can be used.

固化促进剂的配合量相对于环氧树脂的配合量优选为0.1~5质量%。It is preferable that the compounding quantity of a hardening accelerator is 0.1-5 mass % with respect to the compounding quantity of an epoxy resin.

从粘接层用树脂组合物的保存稳定性、B阶状(半固化状)的粘接层用树脂组合物的操作性及焊接耐热性(はんだ耐熱性)的方面出发,优选咪唑类、磷系固化促进剂。In view of the storage stability of the resin composition for an adhesive layer, the handleability of the resin composition for a B-stage (semi-cured) resin composition for an adhesive layer, and solder heat resistance (handa heat resistance), imidazoles, Phosphorus curing accelerator.

作为咪唑类,可列举:2-甲基咪唑、2-乙基咪唑、2-十一烷基咪唑、2-十七烷基咪唑、2-苯基咪唑、1,2-二甲基咪唑、2-乙基-1-甲基咪唑、1,2-二乙基咪唑、1-乙基-2-甲基咪唑、2-乙基-4-甲基咪唑、4-乙基-2-甲基咪唑、2-苯基-4-甲基咪唑、1-苄基-2-甲基咪唑、1-苄基-2-苯基咪唑、1-氰基乙基-2-甲基咪唑、1-氰基乙基-2-乙基咪唑、1-氰基乙基-2-苯基咪唑、1-氰基乙基-2-乙基-4-甲基咪唑、2-苯基-4,5-二羟基甲基咪唑、2-苯基-4-甲基-5-羟基甲基咪唑、2,3-二氢-1H-吡咯[1,2-a]苯并咪唑、2,4-二氨基-6-[2'-甲基咪唑基-(1’)]乙基均三嗪、2,4-二氨基-6-[2'-十一烷基咪唑基-(1’)]乙基均三嗪、2,4-二氨基-6-[2'-乙基-4'-甲基咪唑基-(1’)]乙基均三嗪等咪唑化合物;上述咪唑化合物与偏苯三酸的加成反应物;上述咪唑化合物与异氰脲酸的加成反应物;上述咪唑化合物与氢溴酸的加成反应物;上述咪唑化合物与环氧树脂的加成反应物;上述咪唑化合物与氰酸酯树脂的加成反应物等。其中,优选2-苯基咪唑、2-乙基-4-甲基咪唑。Examples of imidazoles include 2-methylimidazole, 2-ethylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, 2-phenylimidazole, 1,2-dimethylimidazole, 2-Ethyl-1-methylimidazole, 1,2-diethylimidazole, 1-ethyl-2-methylimidazole, 2-ethyl-4-methylimidazole, 4-ethyl-2-methylimidazole Imidazole, 2-phenyl-4-methylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-phenylimidazole, 1-cyanoethyl-2-methylimidazole, 1 -cyanoethyl-2-ethylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 2-phenyl-4, 5-dihydroxymethylimidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole, 2,3-dihydro-1H-pyrrole[1,2-a]benzimidazole, 2,4- Diamino-6-[2'-methylimidazolyl-(1')]ethyl-s-triazine, 2,4-diamino-6-[2'-undecylimidazolyl-(1')] Ethyl-s-triazine, 2,4-diamino-6-[2'-ethyl-4'-methylimidazolyl-(1')]ethyl-s-triazine and other imidazole compounds; Addition reactant of triacid; Addition reactant of above-mentioned imidazole compound and isocyanuric acid; Addition reactant of above-mentioned imidazole compound and hydrobromic acid; Addition reactant of above-mentioned imidazole compound and epoxy resin; Above-mentioned imidazole Addition reaction products of compounds and cyanate resins, etc. Among them, 2-phenylimidazole and 2-ethyl-4-methylimidazole are preferable.

作为磷系固化促进剂,优选的是含有磷原子且促进环氧树脂的固化反应的固化促进剂。例如可以单独使用磷系固化促进剂,也可以并用1种或2种以上其他固化促进剂。作为磷系固化促进剂,可列举例如:三苯基膦、二苯基(烷基苯基)膦、三(烷基苯基)膦、三(烷氧基苯基)膦、三(烷基-烷氧基苯基)膦、三(二烷基苯基)膦、三(三烷基苯基)膦、三(四烷基苯基)膦、三(二烷氧基苯基)膦、三(三烷氧基苯基)膦、三(四烷氧基苯基)膦、三烷基膦、二烷基芳基膦、烷基二芳基膦等有机膦类;这些有机膦类与有机硼类的络合物;叔膦与醌类的加成物等。As the phosphorus-based curing accelerator, one containing a phosphorus atom and accelerating the curing reaction of the epoxy resin is preferable. For example, a phosphorus-based curing accelerator may be used alone, or one or two or more other curing accelerators may be used in combination. Examples of phosphorus-based curing accelerators include triphenylphosphine, diphenyl(alkylphenyl)phosphine, tri(alkylphenyl)phosphine, tri(alkoxyphenyl)phosphine, tri(alkylphenyl)phosphine, - alkoxyphenyl)phosphine, tris(dialkylphenyl)phosphine, tris(trialkylphenyl)phosphine, tris(tetraalkylphenyl)phosphine, tris(dialkoxyphenyl)phosphine, Organic phosphines such as tris(trialkoxyphenyl)phosphine, tris(tetraalkoxyphenyl)phosphine, trialkylphosphine, dialkylarylphosphine, alkyldiarylphosphine; these organic phosphines and Complexes of organic borons; adducts of tertiary phosphine and quinones, etc.

此外,本发明的粘接层用树脂组合物可以根据其目的而任意地使用公知的无机填充材料、有机填充剂、热塑性树脂、阻燃剂、紫外线吸收剂、抗氧化剂、光聚合引发剂、荧光增白剂及粘接性提高剂等。In addition, the resin composition for an adhesive layer of the present invention can optionally use known inorganic fillers, organic fillers, thermoplastic resins, flame retardants, ultraviolet absorbers, antioxidants, photopolymerization initiators, fluorescent Whitening agent and adhesion improving agent, etc.

作为无机填充材料,可列举例如:二氧化硅、氧化铝、滑石、云母、高岭土、氢氧化铝、勃姆石、氢氧化镁、硼酸锌、锡酸锌、氧化锌、氧化钛、氮化硼、碳酸钙、硫酸钡、硼酸铝、钛酸钾、以及E玻璃、T玻璃、D玻璃等玻璃粉或中空玻璃珠等。它们可以单独使用或混合使用2种以上。Examples of inorganic fillers include silica, alumina, talc, mica, kaolin, aluminum hydroxide, boehmite, magnesium hydroxide, zinc borate, zinc stannate, zinc oxide, titanium oxide, and boron nitride. , calcium carbonate, barium sulfate, aluminum borate, potassium titanate, and E glass, T glass, D glass and other glass powder or hollow glass beads. These can be used individually or in mixture of 2 or more types.

作为无机填充材料的含量,在粘接层用树脂组合物中优选为10质量%以下。若配合量为10质量%以下,则可以维持粗化处理后的良好表面形状,可以防止镀敷特性及层间的绝缘可靠性的降低。As content of an inorganic filler, it is preferable that it is 10 mass % or less in the resin composition for adhesive layers. When the compounding quantity is 10 mass % or less, the favorable surface shape after a roughening process can be maintained, and the fall of plating characteristics and insulation reliability between layers can be prevented.

作为有机填充材料,可列举例如:由聚乙烯、聚丙烯、聚苯乙烯、聚苯醚树脂、硅酮树脂、四氟乙烯树脂等形成的均匀结构的树脂粒子;具有由丙烯酸酯系树脂、甲基丙烯酸酯系树脂、共轭二烯系树脂等形成的橡胶状态的核层和由丙烯酸酯系树脂、甲基丙烯酸酯系树脂、芳香族乙烯基系树脂、氰化乙烯基系树脂等形成的玻璃状态的壳层的核壳结构的树脂粒子等。Examples of organic fillers include: resin particles with a uniform structure formed of polyethylene, polypropylene, polystyrene, polyphenylene ether resin, silicone resin, tetrafluoroethylene resin, etc.; The core layer in the rubber state formed by acrylate resin, conjugated diene resin, etc. and the core layer formed by acrylate resin, methacrylate resin, aromatic vinyl resin, vinyl cyanide resin, etc. Resin particles with a core-shell structure of a glassy shell layer, etc.

有机填充剂的含量例如相对于树脂成分的总和100质量份优选为0.5~300质量份、更优选为1~250质量份。The content of the organic filler is, for example, preferably 0.5 to 300 parts by mass, more preferably 1 to 250 parts by mass with respect to 100 parts by mass of the total of the resin components.

作为热塑性树脂,可列举例如聚苯醚树脂、苯氧基树脂、聚碳酸酯树脂、聚酯树脂、聚酰胺树脂、聚酰亚胺树脂、聚酰胺酰亚胺树脂、二甲苯树脂、石油树脂及硅酮树脂等。Examples of thermoplastic resins include polyphenylene ether resins, phenoxy resins, polycarbonate resins, polyester resins, polyamide resins, polyimide resins, polyamideimide resins, xylene resins, petroleum resins, and Silicone resin, etc.

作为阻燃剂,可列举例如:含有溴、氯的含卤素系阻燃剂;磷酸三苯酯、磷酸三甲苯酯、磷酸三(二氯丙基)酯、磷酸酯系化合物、红磷等磷系阻燃剂;氨基磺酸胍、硫酸三聚氰胺、聚磷酸三聚氰胺、三聚氰胺氰脲酸酯等氮系阻燃剂;环磷腈、聚磷腈等磷腈系阻燃剂;三氧化锑等无机系阻燃剂等。Examples of flame retardants include: halogen-containing flame retardants containing bromine and chlorine; triphenyl phosphate, tricresyl phosphate, tris(dichloropropyl) phosphate, phosphoric acid ester compounds, red phosphorus Flame retardants; nitrogen-based flame retardants such as guanidine sulfamate, melamine sulfate, melamine polyphosphate, and melamine cyanurate; phosphazene-based flame retardants such as cyclophosphazene and polyphosphazene; inorganic systems such as antimony trioxide flame retardant etc.

此外,作为紫外线吸收剂,可列举例如苯并三唑系紫外线吸收剂等。作为抗氧化剂,可列举例如受阻酚系抗氧化剂、受阻胺系抗氧化剂等。作为光聚合引发剂,可列举例如二苯甲酮类、苯偶酰缩酮类、噻吨酮系的光聚合引发剂等。作为荧光增白剂,可列举例如二苯乙烯衍生物等。作为粘接性提高剂,可列举例如:脲硅烷等脲化合物;硅烷系、钛酸酯系、铝酸酯系等偶联剂等。Moreover, as a ultraviolet absorber, a benzotriazole type ultraviolet absorber etc. are mentioned, for example. As an antioxidant, a hindered phenolic antioxidant, a hindered amine antioxidant, etc. are mentioned, for example. As a photoinitiator, the photoinitiator of a benzophenone system, a benzil ketal system, a thioxanthone system, etc. are mentioned, for example. As a fluorescent whitening agent, a stilbene derivative etc. are mentioned, for example. Examples of the adhesiveness improving agent include urea compounds such as urea silane; coupling agents such as silane-based, titanate-based, aluminate-based, and the like.

粘接层用树脂组合物优选最终处于各成分被溶解或分散在有机溶剂中的清漆(以下,有时称作粘接层用树脂清漆)的状态。The resin composition for an adhesive layer is preferably in the final state of a varnish (hereinafter, sometimes referred to as a resin varnish for an adhesive layer) in which each component is dissolved or dispersed in an organic solvent.

作为在制成清漆时使用的有机溶剂,可列举例如:甲醇、乙醇、丙醇、丁醇、甲基溶纤剂、丁基溶纤剂、丙二醇单甲基醚等醇系溶剂;丙酮、甲乙酮、甲基异丁基酮、环己酮等酮系溶剂;醋酸丁酯、丙二醇单甲基醚乙酸酯等酯系溶剂;四氢呋喃等醚系溶剂;甲苯、二甲苯、均三甲苯等芳香族系溶剂;二甲基甲酰胺、N,N-二甲基乙酰胺、N-甲基吡咯烷酮等含氮原子溶剂;二甲基亚砜等含硫原子溶剂等,这些溶剂可以单独使用1种或混合使用2种以上。As the organic solvent used when making a varnish, for example: alcohol solvents such as methanol, ethanol, propanol, butanol, methyl cellosolve, butyl cellosolve, propylene glycol monomethyl ether; acetone, methyl ethyl ketone, methyl Ketone solvents such as isobutyl ketone and cyclohexanone; ester solvents such as butyl acetate and propylene glycol monomethyl ether acetate; ether solvents such as tetrahydrofuran; aromatic solvents such as toluene, xylene and mesitylene Nitrogen atom-containing solvents such as dimethylformamide, N,N-dimethylacetamide, and N-methylpyrrolidone; sulfur atom-containing solvents such as dimethyl sulfoxide, etc. These solvents can be used alone or in combination 2 or more.

从树脂的溶解性及涂敷后的外观的观点出发,对这些有机溶剂进行适当选定。These organic solvents are appropriately selected from the viewpoint of the solubility of the resin and the appearance after coating.

其中,从树脂的溶解性及涂敷后的外观的观点出发,优选的是:丙酮、甲乙酮、甲基异丁基酮、环己酮等酮系溶剂;二甲基甲酰胺、N,N-二甲基乙酰胺、N-甲基吡咯烷酮等含氮原子溶剂;酮系溶剂与含氮原子溶剂的混合系溶剂。Among them, from the viewpoint of the solubility of the resin and the appearance after coating, ketone-based solvents such as acetone, methyl ethyl ketone, methyl isobutyl ketone, and cyclohexanone; dimethylformamide, N,N- Nitrogen atom-containing solvents such as dimethylacetamide and N-methylpyrrolidone; mixed solvents of ketone-based solvents and nitrogen-atom-containing solvents.

最终所得的清漆中的树脂组合物例如优选为清漆总体的1~60质量%、更优选为2~50质量%。从涂敷时的膜厚精度及外观的观点出发,优选使清漆中的树脂组合物的含量为1~60质量%。The resin composition in the finally obtained varnish is, for example, preferably 1 to 60% by mass of the entire varnish, more preferably 2 to 50% by mass. The content of the resin composition in the varnish is preferably 1 to 60% by mass from the viewpoint of film thickness accuracy and appearance at the time of coating.

本发明的粘接层是将粘接层用树脂组合物(或含有其的清漆)使用逆涂机、凹版涂布机、气刀涂布机、模具涂布机、模唇涂布机等涂布装置涂布于脱模聚酰亚胺膜的脱模层上,并在例如80~230℃干燥30秒~600秒而得到的。The adhesive layer of the present invention is coated with the resin composition for the adhesive layer (or a varnish containing it) using a reverse coater, gravure coater, air knife coater, die coater, die lip coater, etc. The cloth device is obtained by coating on the release layer of the release polyimide film and drying at, for example, 80 to 230° C. for 30 seconds to 600 seconds.

需要说明的是,在本发明中,脱模聚酰亚胺膜的未设置脱模层的面上可以具有粘接层,也可以以该状态用于热板压制工序中。In addition, in this invention, the surface which the mold release polyimide film is not provided with a mold release layer may have an adhesive layer, and you may use it in the hot plate press process in this state.

通过使用本发明的脱模聚酰亚胺膜,从而热压工序后的绝缘层的表面平坦性提高。该表面平坦性正如利用高精度三维表面形状粗糙度测定系统观察图1及图2的绝缘层的表面状态的结果所显示的那样,在使用图2所示的铜箔的情况下,在表面会产生起伏,但在使用本发明的脱模聚酰亚胺膜的情况下,如图1所示,几乎未观察到起伏。推测该起伏是热膨胀率低的绝缘层与热膨胀率高的铜箔在热压工序时因其热膨胀率差所产生的。By using the mold release polyimide film of this invention, the surface flatness of the insulating layer after a hot press process improves. This surface flatness is as shown by the results of observing the surface state of the insulating layer in Figures 1 and 2 with a high-precision three-dimensional surface roughness measurement system. In the case of using the copper foil shown in Figure 2, the surface will be Although waviness occurred, when using the mold release polyimide film of this invention, as shown in FIG. 1, waviness was hardly observed. It is presumed that the waviness is caused by the difference in thermal expansion between the insulating layer with a low thermal expansion rate and the copper foil with a high thermal expansion rate during the hot pressing process.

[附有带粘接层的脱模聚酰亚胺膜的层叠板、剥离层叠板的脱模聚酰亚胺膜而成的层叠板、附有带粘接层的脱模聚酰亚胺膜的单层或多层布线板、以及多层布线板的制造方法][Laminated sheet with release polyimide film with adhesive layer, laminated sheet with release polyimide film peeled off laminated sheet, release polyimide film with adhesive layer single-layer or multilayer wiring board, and method for manufacturing multilayer wiring board]

本发明的附有带粘接层的脱模聚酰亚胺膜的层叠板为,将带粘接层的脱模聚酰亚胺膜的粘接层侧层叠成形于预浸体或绝缘层的至少一面而成的层叠板。The laminate with the release polyimide film with an adhesive layer of the present invention is formed by laminating the adhesive layer side of the release polyimide film with an adhesive layer on a prepreg or an insulating layer. A laminate made of at least one side.

本发明的附有带粘接层的脱模聚酰亚胺膜的层叠板,可以通过将带粘接层的脱模聚酰亚胺膜按照使粘接层成为内侧的方式重叠于预浸体或绝缘层的单面或两面、并在外侧重叠面板进行压制成型来制造。The laminate with the release polyimide film with an adhesive layer of the present invention can be laminated on a prepreg with the release polyimide film with an adhesive layer so that the adhesive layer is on the inside Or one or both sides of the insulating layer, and laminated panels on the outside are pressed and formed.

另外,本发明的附有带粘接层的脱模聚酰亚胺膜的层叠板,例如可以通过将带粘接层的脱模聚酰亚胺膜按照使粘接层成为内侧的方式重叠于预浸体或绝缘层的单面或两面、利用使用了耐热性橡胶片的层压机进行加热及加压而实施层叠、并在层叠后进行加热使其固化来制造。In addition, the laminate with the release polyimide film with an adhesive layer of the present invention can be formed, for example, by overlapping the release polyimide film with an adhesive layer with the adhesive layer on the inside. One or both sides of the prepreg or insulating layer are laminated by heating and pressurizing with a laminator using a heat-resistant rubber sheet, and heated and cured after lamination.

上述压制成型的加热温度(热板的温度)优选为150~260℃。加压时的压力优选为0.5~10MPa。另外,使用了耐热性橡胶片的层压机的加热温度优选为80~150℃。加压时的压力优选为0.3~10MPa。The heating temperature (temperature of the hot plate) for the press molding is preferably 150 to 260°C. The pressure at the time of pressurization is preferably 0.5 to 10 MPa. In addition, the heating temperature of the laminator using the heat-resistant rubber sheet is preferably 80 to 150°C. The pressure at the time of pressurization is preferably 0.3 to 10 MPa.

在任意方法中,均可在层叠成形后适当剥离脱模聚酰亚胺膜而得到层叠板。In any method, the mold release polyimide film can be peeled off suitably after lamination molding, and a laminated board can be obtained.

本发明的上述附有脱模聚酰亚胺膜(带粘接层的脱模聚酰亚胺膜)的单层或多层布线板为,将带粘接层的脱模聚酰亚胺膜的粘接层侧层叠于预浸体或绝缘层的一面、并将预浸体或绝缘层的另一面层叠于经电路加工而成的单层或多层布线板而成的布线板。该预浸体可以为固化前的预浸体,也可以为至少一部分固化了的预浸体。The single-layer or multilayer wiring board with the above-mentioned release polyimide film (release polyimide film with an adhesive layer) of the present invention is that the release polyimide film with an adhesive layer The adhesive layer side is laminated on one side of the prepreg or insulating layer, and the other side of the prepreg or insulating layer is laminated on a single-layer or multi-layer wiring board formed by circuit processing. The prepreg may be a prepreg before curing or may be at least partially cured.

在此,“经电路加工而成”包括在进行电路加工后、实施在布线板的制造中通常能够进行的处理的情况,具体而言,包括在进行电路加工后实施镀敷处理等的情况。另外,就单层布线板而言,在预浸体或绝缘层仅被层叠于单面的情况下,是指具有1层电路层的布线板,在预浸体或绝缘层被层叠于两面的情况下,是指在两面分别具有1层电路层(即合计2层电路层)的布线板。另一方面,多层布线板是指:在至少一面经电路加工后的芯(コア)、和该经电路加工后的芯的面上层叠至少1层预浸体或绝缘层,并在所层叠的预浸体上或绝缘层上加工电路而成的布线板。Here, "processed by circuit processing" includes the case of performing a process that can be generally performed in the manufacture of a wiring board after circuit processing, and specifically includes the case of performing plating treatment or the like after circuit processing. In addition, in the case of a single-layer wiring board, when a prepreg or an insulating layer is laminated on only one side, it refers to a wiring board having one circuit layer, and a prepreg or an insulating layer is laminated on both sides. In this case, it refers to a wiring board having one circuit layer (that is, a total of two circuit layers) on both sides. On the other hand, a multilayer wiring board means that at least one layer of prepreg or insulating layer is laminated on at least one side of the circuit-processed core (core) and the surface of the circuit-processed core, and A wiring board made by processing a circuit on a prepreg or an insulating layer.

本发明的多层布线板的制造方法包括:通过将上述具有粘接层的脱模聚酰亚胺膜层叠于单层或多层布线板,从而制造附有带粘接层的脱模聚酰亚胺膜的单层或多层布线板的工序;从附有带粘接层的脱模聚酰亚胺膜的单层或多层布线板除去脱模聚酰亚胺膜的工序;以及进行电路加工的工序。在此,作为具有粘接层的脱模聚酰亚胺膜的制造方法,优选包括:在聚酰亚胺膜的一面上涂敷包含醇酸树脂(A)及氨基树脂(B)的脱模剂组合物而形成脱模层的工序(脱模聚酰亚胺膜制造工序);和在上述脱模层的未设置聚酰亚胺膜的面上形成粘接层,制造具有粘接层的脱模聚酰亚胺膜的工序(带粘接层的脱模聚酰亚胺膜制造工序)。The manufacturing method of the multilayer wiring board of the present invention includes: by laminating the above-mentioned release polyimide film with the adhesive layer on the single-layer or multilayer wiring board, thereby manufacturing the release polyimide film with the adhesive layer. A process of single-layer or multi-layer wiring board of imide film; a process of removing the release polyimide film from the single-layer or multi-layer wiring board with the release polyimide film with adhesive layer; and carrying out The process of circuit processing. Here, as the manufacturing method of the release polyimide film having an adhesive layer, it is preferable to include: coating a release agent containing an alkyd resin (A) and an amino resin (B) on one side of the polyimide film. A step of forming a mold release layer with an agent composition (release polyimide film manufacturing process); and forming an adhesive layer on the surface of the above mold release layer on which the polyimide film is not provided to manufacture a film with an adhesive layer. Process of releasing polyimide film (production process of release polyimide film with adhesive layer).

在上述工序中,脱模聚酰亚胺膜制造工序、带粘接层的脱模聚酰亚胺膜制造工序如前所述。Among the above steps, the mold release polyimide film production process and the release polyimide film production process with an adhesive layer are as described above.

以下,对附有带粘接层的脱模聚酰亚胺膜的单层或多层布线板制造工序及脱模聚酰亚胺膜除去工序进行说明。Hereinafter, the manufacturing process of the single-layer or multilayer wiring board with the release polyimide film with an adhesive layer, and the removal process of the release polyimide film are demonstrated.

需要说明的是,从附有带粘接层的脱模聚酰亚胺膜的单层或多层布线板除去脱模聚酰亚胺膜后,该粘接层作为多层布线板的绝缘层发挥功能。It should be noted that after the release polyimide film is removed from the single-layer or multilayer wiring board with the release polyimide film with the adhesive layer, the adhesive layer is used as the insulating layer of the multilayer wiring board. function.

在附有带粘接层的脱模聚酰亚胺膜的单层或多层布线板制造工序中,例如,首先,将形成有粘接层的本发明的脱模聚酰亚胺膜按照使粘接层成为内侧的方式重叠于预浸体或绝缘层,再将其重叠于被电路加工而成的布线板的单面或两面。进一步在外侧重叠面板,进行压制成型。通过取下面板,从而制造在单面或两面配置有本发明的脱模聚酰亚胺膜的单层或多层布线板。之后,将本发明的脱模聚酰亚胺膜剥离除去(脱模聚酰亚胺膜除去工序),经过实施电路加工的工序,得到多层布线板。In the manufacturing process of a single-layer or multilayer wiring board with a release polyimide film with an adhesive layer, for example, first, the release polyimide film of the present invention having an adhesive layer is formed according to The adhesive layer is superimposed on the prepreg or the insulating layer so as to be inside, and this is superposed on one side or both sides of the wiring board to be circuit-processed. The panels are further laminated on the outside and press-molded. By removing the panel, a single-layer or multilayer wiring board in which the release polyimide film of the present invention is arranged on one or both surfaces is manufactured. Thereafter, the release polyimide film of the present invention is peeled and removed (release polyimide film removal step), and a multilayer wiring board is obtained through a step of performing circuit processing.

上述压制成型的加热温度(热板的温度)例如优选设为180~300℃、更优选设为200~250℃。加压时的压力优选设为1~4MPa。The heating temperature (temperature of the hot plate) of the above-mentioned press molding is, for example, preferably 180 to 300°C, more preferably 200 to 250°C. The pressure at the time of pressurization is preferably 1 to 4 MPa.

需要说明的是,也可以根据需要在剥离(脱模聚酰亚胺膜除去工序)之前从聚酰亚胺膜的上面实施钻孔加工及激光加工、然后除去脱模聚酰亚胺膜。通过从聚酰亚胺膜的上面进行开孔加工,从而防止加工时的树脂飞散等,并且成品率显著提高。In addition, before peeling (release polyimide film removal process), you may perform drilling process and laser processing from the upper surface of a polyimide film as needed, and you may remove a release polyimide film after that. By performing hole processing from the upper surface of the polyimide film, resin scattering during processing can be prevented, and the yield rate can be significantly improved.

在此,作为在本发明的多层布线板的制造方法中所使用的预浸体及绝缘层的材料,并无特别限定,可以应用通常所使用的材料。例如可以将混合有多官能环氧树脂、环氧树脂固化剂、固化促进剂、溶剂及根据需要的无机填料的材料作为绝缘层的材料,也可以使用进一步使该材料浸渗或涂敷于层叠板用玻璃布而得的预浸体。作为预浸体,也可以使用市售品,作为市售品,可列举例如日立化成株式会社制的GEA-67N、GEA-679F、GEA-679GT、GEA-700G等。Here, the materials of the prepreg and the insulating layer used in the method of manufacturing the multilayer wiring board of the present invention are not particularly limited, and commonly used materials can be applied. For example, a material mixed with a multifunctional epoxy resin, an epoxy resin curing agent, a curing accelerator, a solvent, and if necessary, an inorganic filler can be used as the material of the insulating layer, and the material can be further impregnated or coated on the laminate. Plates are prepregs derived from glass cloth. A commercial item may be used as a prepreg, and as a commercial item, GEA-67N, GEA-679F, GEA-679GT, GEA-700G etc. by Hitachi Chemical Co., Ltd. are mentioned, for example.

经电路加工而成的单层布线板或多层布线板中的内层电路板例如为表面形成有第一电路层(内层布线)的内层基板,作为内层基板,可以使用在通常的布线板中所使用的公知的层叠板、例如玻璃布-环氧树脂、纸-酚醛树脂、纸-环氧树脂、玻璃布或玻璃纸-环氧树脂等,并无特别限制。另外,也可以使用浸渗有双马来酰亚胺-三嗪树脂的BT基板、以及使用聚酰亚胺膜作为基材的聚酰亚胺膜基板等。The inner layer circuit board in the single-layer wiring board or multi-layer wiring board processed by the circuit is, for example, the inner layer substrate with the first circuit layer (inner layer wiring) formed on the surface. As the inner layer substrate, it can be used in common Known laminated boards used in wiring boards, such as glass cloth-epoxy resin, paper-phenolic resin, paper-epoxy resin, glass cloth, or cellophane-epoxy resin, are not particularly limited. In addition, a BT substrate impregnated with a bismaleimide-triazine resin, a polyimide film substrate using a polyimide film as a base material, and the like can also be used.

对于形成电路的方法,并无特别限制。可以使用例如:使用镀敷工艺而形成电路的半加成法、在绝缘基板的所需部位通过非电解镀敷形成电路的加成法等公知的电路形成方法。There is no particular limitation on the method of forming the circuit. For example, known circuit forming methods such as a semi-additive method of forming a circuit using a plating process and an additive method of forming a circuit on a desired portion of an insulating substrate by electroless plating can be used.

在本发明的层叠板或者单层或多层布线板的粘接层上利用镀敷工艺进行电路加工时,首先,进行粗化处理。作为此时的粗化液,可以使用例如铬/硫酸粗化液、碱性高锰酸粗化液、氟化钠/铬/硫酸粗化液、氟硼酸粗化液等氧化性粗化液。作为粗化处理,可列举例如以下方法:首先,将作为溶胀液的二乙二醇单丁基醚与NaOH的水溶液加温至70℃,对层叠板或者单层或多层布线板进行5分钟浸渍处理。接着,将作为粗化液的KMnO4与NaOH的水溶液加温至80℃,进行10分钟浸渍处理。接着,在室温下在中和液、例如氯化亚锡(SnCl2)的盐酸水溶液中进行5分钟浸渍处理,进行中和。When performing circuit processing by a plating process on the adhesive layer of the laminated board or the single-layer or multi-layer wiring board of the present invention, first, roughening treatment is performed. As the roughening liquid at this time, for example, oxidizing roughening liquids such as chromium/sulfuric acid roughening liquid, alkaline permanganic acid roughening liquid, sodium fluoride/chromium/sulfuric acid roughening liquid, and fluoboric acid roughening liquid can be used. As the roughening treatment, for example, the following method can be cited: First, heat an aqueous solution of diethylene glycol monobutyl ether and NaOH as a swelling liquid to 70°C, and perform 5 minutes on a laminated board or a single-layer or multi-layer wiring board. Dipping treatment. Next, an aqueous solution of KMnO 4 and NaOH as a roughening solution was heated to 80° C. and dipped for 10 minutes. Next, immersion treatment is performed for 5 minutes in a neutralizing solution, for example, an aqueous hydrochloric acid solution of stannous chloride (SnCl 2 ) at room temperature to perform neutralization.

粗化处理后,进行使钯附着的镀敷催化剂赋予处理。镀敷催化剂处理通过浸渍于氯化钯系的镀敷催化剂液中来进行。接着,浸渍于非电解镀敷液而进行在镀敷工艺用底漆层的整个表面析出厚度为0.3~1.5μm的非电解镀敷层(导体层)的非电解镀敷处理。After the roughening treatment, a plating catalyst imparting treatment for attaching palladium is performed. The plating catalyst treatment is performed by immersing in a palladium chloride-based plating catalyst solution. Next, the electroless plating process deposits the electroless-plating layer (conductor layer) with a thickness of 0.3-1.5 micrometers on the whole surface of the primer layer for plating processes by immersing in an electroless-plating liquid.

接着,在形成抗镀膜后,进行电镀处理而在所需的部位形成所需厚度的电路。在非电解镀敷处理中使用的非电解镀敷液可以使用公知的非电解镀敷液,并无特别限制。抗镀膜也可以使用公知的抗镀膜,并无特别限制。另外,电镀处理也可以采用公知的方法,并无特别限制。这些镀敷优选为镀铜。可以进一步将不需要的部位的非电解镀层蚀刻除去而形成外层电路。Next, after the plating resist is formed, a plating process is performed to form a circuit with a desired thickness at a desired location. As the electroless plating solution used in the electroless plating treatment, known electroless plating solutions can be used without any particular limitation. As the anti-plating film, a known anti-plating film can also be used, and it is not particularly limited. In addition, known methods can also be used for electroplating treatment, and are not particularly limited. These platings are preferably copper plating. Furthermore, the electroless plating at unnecessary parts can be etched away to form an outer layer circuit.

另外,根据需要将电路层的表面表面处理成适于粘接性的状态的该做法并无特别限制。可以使用例如:通过次氯酸钠的碱水溶液在电路层1的表面形成氧化铜的针状结晶、并将所形成的氧化铜的针状结晶浸渍于二甲胺硼烷水溶液中进行还原等公知的制造方法。In addition, the method of surface-treating the surface of the circuit layer to a state suitable for adhesiveness is not particularly limited. For example, known production methods such as forming needle-shaped crystals of copper oxide on the surface of the circuit layer 1 with an aqueous alkali solution of sodium hypochlorite, and reducing the formed needle-shaped crystals of copper oxide by immersing them in an aqueous solution of dimethylamine borane can be used. .

以下,可进一步重复同样的工序来制造层数多的多层布线板。Thereafter, a multilayer wiring board having a large number of layers can be produced by further repeating the same steps.

实施例Example

接着,利用实施例对本发明进行说明,但是,本发明的范围并不受这些实施例的限定。Next, the present invention will be described using examples, but the scope of the present invention is not limited by these examples.

[粘接层用树脂清漆的制备][Preparation of resin varnish for adhesive layer]

(制备例1)(preparation example 1)

在甲酚线型酚醛型环氧树脂(新日化Epoxy制造株式会社制、商品名:YDCN-700-10)27.5g中加入苯酚芳烷基树脂(三井化学株式会社制、商品名:XLC-LL)22.5g,加入环己酮850g,进行搅拌混炼。向其中加入丙烯酸类橡胶(Nagase Chemtex株式会社制、商品名:HTR-860P-3、重均分子量80万、玻璃化转变温度:13℃)100g、作为固化促进剂的1-氰基乙基-2-苯基咪唑(四国化成工业株式会社制、商品名:Curezol 2PZ-CN)0.25g,进行搅拌,得到粘接层用树脂清漆A(固体成分浓度为约15质量%)。Phenol aralkyl resin (manufactured by Mitsui Chemicals, Inc., trade name: XLC- LL) 22.5g, add pimelinketone 850g, carry out stirring and kneading. To this was added 100 g of acrylic rubber (manufactured by Nagase Chemtex Co., Ltd., trade name: HTR-860P-3, weight average molecular weight: 800,000, glass transition temperature: 13° C.), and 1-cyanoethyl- 0.25 g of 2-phenylimidazole (manufactured by Shikoku Chemical Industry Co., Ltd., trade name: Curezol 2PZ-CN) was stirred to obtain a resin varnish A for an adhesive layer (solid content concentration: about 15% by mass).

(制备例2)(preparation example 2)

在聚酰胺(日本化药株式会社制、商品名:BPAM-155)18g中配合N,N-二甲基乙酰胺(DMAc)159g后,接着,加入联苯芳烷基型环氧树脂(日本化药株式会社制、商品名:NC3000H)50g、双酚A线型酚醛型酚醛树脂(三菱化学株式会社制、商品名:YLH129)20g,再添加作为固化促进剂的2-苯基咪唑(四国化成工业株式会社制、商品名:2PZ)0.5g,用包含DMAc及甲乙酮的混合溶剂进行稀释后,加入氧化铝填料(CI化成株式会社制、商品名:NanoTek)5g,使用分散机(吉田机械兴业株式会社制、商品名:Nanomizer),得到粘接层用树脂清漆B(固体成分浓度为约25质量%)。After blending 159 g of N,N-dimethylacetamide (DMAc) into 18 g of polyamide (manufactured by Nippon Kayaku Co., Ltd., trade name: BPAM-155), biphenyl aralkyl type epoxy resin (Japan Kayaku Co., Ltd., trade name: NC3000H) 50 g, bisphenol A novolak type phenolic resin (Mitsubishi Chemical Co., Ltd., trade name: YLH129) 20 g, and 2-phenylimidazole (Shikoku 0.5 g of Kasei Kogyo Co., Ltd., trade name: 2PZ) was diluted with a mixed solvent containing DMAc and methyl ethyl ketone, and 5 g of alumina filler (CI Kasei Co., Ltd., trade name: NanoTek) was added. Kogyo Co., Ltd. product, brand name: Nanomizer), and resin varnish B for an adhesive layer (solid content concentration: about 25 mass %) was obtained.

[脱模层用树脂清漆的制备][Preparation of resin varnish for release layer]

(制备例3)(preparation example 3)

在非硅酮系氨基醇酸树脂〔Tesfine 303、Hitachi Kasei Polymer株式会社制、固体成分48.7%〕31.5g中配合作为酸性催化剂的对甲苯磺酸〔Dryer 900、Hitachi KaseiPolymer株式会社制、固体成分50%〕1.5g,接着,用甲苯1050g、MEK 450g进行稀释,得到脱模层用树脂清漆A。31.5 g of non-silicone-based amino alkyd resin [Tesfine 303, manufactured by Hitachi Kasei Polymer Co., Ltd., solid content 48.7%] was mixed with p-toluenesulfonic acid [Dryer 900, manufactured by Hitachi Kasei Polymer Co., Ltd., solid content 50%] as an acidic catalyst %] 1.5 g, and then diluted with 1050 g of toluene and 450 g of MEK to obtain a resin varnish A for a release layer.

(制备例4)(preparation example 4)

在非硅酮系氨基醇酸树脂〔Tesfine 305、Hitachi Kasei Polymer株式会社制、商品名、固体成分48.7%〕31.5g中加入作为酸性催化剂的对甲苯磺酸〔Dryer900、HitachiKasei Polymer株式会社制、商品名、固体成分50%〕1.5g,接着,用甲苯1050g、MEK 450g进行稀释,得到脱模层用树脂清漆B。To 31.5 g of non-silicone-based amino alkyd resin [Tesfine 305, manufactured by Hitachi Kasei Polymer Co., Ltd., trade name, solid content 48.7%], p-toluenesulfonic acid [Dryer900, manufactured by Hitachi Kasei Polymer Co., Ltd., commercial product] was added as an acidic catalyst. name, solid content 50%] 1.5 g, and then diluted with 1050 g of toluene and 450 g of MEK to obtain a resin varnish B for a release layer.

(制备例5)(preparation example 5)

在含硅酮的氨基醇酸树脂〔Tesfine 319、Hitachi Kasei Polymer株式会社制、固体成分48.7%〕31.5g中配合作为酸性催化剂的对甲苯磺酸〔Dryer900、Hitachi KaseiPolymer株式会社制、商品名、固体成分50%〕1.5g,接着,用甲苯1050g、MEK 450g进行稀释,得到脱模层用树脂清漆C。To 31.5 g of silicone-containing amino alkyd resin [Tesfine 319, manufactured by Hitachi Kasei Polymer Co., Ltd., solid content 48.7%], p-toluenesulfonic acid [Dryer900, manufactured by Hitachi Kasei Polymer Co., Ltd., product name, solid] was blended as an acidic catalyst. Component 50%] 1.5 g, and then diluted with 1050 g of toluene and 450 g of MEK to obtain a resin varnish C for a release layer.

(制备例6)(preparation example 6)

在含硅酮的氨基醇酸树脂〔TA31-209E、Hitachi Kasei Polymer株式会社制、商品名、固体成分48.7%〕31.5g中配合作为酸性催化剂的对甲苯磺酸〔Dryer900、HitachiKasei Polymer株式会社制、商品名、固体成分50%〕1.5g,接着,用甲苯1050g、MEK 450g进行稀释,得到脱模层用树脂清漆D。P-toluenesulfonic acid (Dryer900, manufactured by Hitachi Kasei Polymer Co., Ltd., manufactured by Hitachi Kasei Polymer Co., Ltd.) Brand name, solid content 50%] 1.5 g, and then diluted with 1050 g of toluene and 450 g of MEK to obtain a resin varnish D for a release layer.

(实施例1)(Example 1)

·带粘接层的脱模聚酰亚胺膜:Release polyimide film with adhesive layer:

作为聚酰亚胺膜,使用厚度25μm且表面粗糙度Ra不足0.05μm的宇部兴产株式会社制造的Upilex 25SGA(商品名)。在该聚酰亚胺膜上使用模具涂布机涂布制备例3中制备成的脱模层用树脂清漆A,使其在160℃干燥40秒钟,得到厚度0.2μm的脱模层。As the polyimide film, Upilex 25SGA (trade name) manufactured by Ube Industries, Ltd. having a thickness of 25 μm and a surface roughness Ra of less than 0.05 μm was used. The release layer resin varnish A prepared in Production Example 3 was coated on this polyimide film using a die coater, and dried at 160° C. for 40 seconds to obtain a release layer with a thickness of 0.2 μm.

在所得的脱模聚酰亚胺膜的脱模层面涂布制备例1中制备成的粘接层用树脂清漆A,使其在140℃干燥5分钟,形成厚度5μm的粘接层,得到带粘接层的脱模聚酰亚胺膜。The resin varnish A for an adhesive layer prepared in Preparation Example 1 was coated on the release surface of the obtained release polyimide film, and dried at 140° C. for 5 minutes to form an adhesive layer with a thickness of 5 μm to obtain a tape. Release polyimide film for adhesive layer.

·层叠板:· Laminates:

重叠4片预浸体(日立化成株式会社制、商品名:GEA-700G、0.10mm厚),在其上下按照上述带粘接层的脱模聚酰亚胺膜的聚酰亚胺膜面成为外侧的方式重叠带粘接层的脱模聚酰亚胺膜,接着重叠面板和缓冲纸,使用压制机在3.0MPa、240℃下加热固化1小时,得到层叠板。Four sheets of prepreg (manufactured by Hitachi Chemical Co., Ltd., trade name: GEA-700G, 0.10 mm thick) are stacked, and the polyimide film surface of the above-mentioned release polyimide film with an adhesive layer becomes The mold release polyimide film with an adhesive layer was superimposed on the outside, and then the panel and cushion paper were superimposed, and heat-cured at 3.0 MPa and 240° C. for 1 hour using a press machine to obtain a laminated board.

(实施例2)(Example 2)

作为聚酰亚胺膜,使用厚度25μm、表面粗糙度Ra不足0.05μm的Toray Dupont株式会社制造的Kapton 100H(商品名),除此以外,与实施例1同样地得到带粘接层的脱模聚酰亚胺膜及层叠板。As the polyimide film, Kapton 100H (trade name) manufactured by Toray Dupont Co., Ltd. with a thickness of 25 μm and a surface roughness Ra of less than 0.05 μm was used, except that, in the same manner as in Example 1, a mold release with an adhesive layer was obtained. Polyimide films and laminates.

(实施例3)(Example 3)

作为脱模层,使用制备例4中制备成的脱模层用树脂清漆B,并且作为粘接层而使用制备例2中制备成的粘接层用清漆B,除此以外,与实施例1同样地得到带粘接层的脱模聚酰亚胺膜及层叠板。As the release layer, the release layer resin varnish B prepared in Preparation Example 4 was used, and the adhesive layer varnish B prepared in Preparation Example 2 was used as the adhesive layer. Similarly, a release polyimide film with an adhesive layer and a laminated board were obtained.

(实施例4)(Example 4)

作为脱模层,使用制备例5中制备成的脱模层用树脂清漆C,并且作为粘接层而使用制备例2中制备成的粘接层用清漆B,除此以外,与实施例1同样地得到带粘接层的脱模聚酰亚胺膜及层叠板。As the release layer, the release layer resin varnish C prepared in Preparation Example 5 was used, and the adhesive layer varnish B prepared in Preparation Example 2 was used as the adhesive layer. Similarly, a release polyimide film with an adhesive layer and a laminated board were obtained.

(实施例5)(Example 5)

作为脱模层而使用制备例6中制备成的脱模层用树脂清漆D,并且作为粘接层而使用制备例2中制备成的粘接层用清漆B,除此以外,与实施例1同样地得到带粘接层的脱模聚酰亚胺膜及层叠板。The release layer resin varnish D prepared in Preparation Example 6 was used as the release layer, and the adhesive layer varnish B prepared in Preparation Example 2 was used as the adhesive layer. Similarly, a release polyimide film with an adhesive layer and a laminated board were obtained.

(比较例1)(comparative example 1)

代替附有脱模层的聚酰亚胺膜而使用附有脱模层的聚对苯二甲酸乙二醇酯膜(Unipeel TR1、Unitika株式会社制、商品名、厚度38μm),除此以外,与实施例1同样地得到带有粘接层的脱模膜及层叠板。Instead of a polyimide film with a release layer, a polyethylene terephthalate film with a release layer (Unipeel TR1, manufactured by Unitika Co., Ltd., trade name, thickness 38 μm), in addition, In the same manner as in Example 1, a release film with an adhesive layer and a laminate were obtained.

(比较例2)(comparative example 2)

除了在聚酰亚胺膜上未形成脱模层以外,与实施例1同样地操作,在聚酰亚胺膜面上涂布形成粘接层,得到带有粘接层的脱模膜及层叠板。Except not forming a mold release layer on the polyimide film, operate in the same manner as in Example 1, coat and form an adhesive layer on the polyimide film surface, and obtain a release film with an adhesive layer and a laminate. plate.

(比较例3)(comparative example 3)

代替脱模聚酰亚胺膜而在电解铜箔(Furukaw Circuit Foil株式会社制、GTS-18、厚度18μm)的光泽面涂布形成粘接层,与实施例1同样地得到层叠板。Instead of the mold release polyimide film, an adhesive layer was coated on the glossy surface of an electrolytic copper foil (manufactured by Furukaw Circuit Foil Co., Ltd., GTS-18, thickness 18 μm), and a laminate was obtained in the same manner as in Example 1.

(比较例4)(comparative example 4)

除了代替脱模层用树脂清漆A而使用硅酮系脱模剂(信越化学工业株式会社制、KS-774、商品名)以外,与实施例1同样地得到层叠板。A laminated board was obtained in the same manner as in Example 1 except that a silicone-based release agent (Shin-Etsu Chemical Co., Ltd. make, KS-774, brand name) was used instead of the resin varnish A for a release layer.

对于按照以上方式制作的层叠板,按照以下方式实施压制后的膜剥离性的测定,并对能够容易地剥离的剥离后的层叠板,按照以下方式实施了其绝缘层(热固化后的粘接层)的表面粗糙度、非转移性及表面平坦性的测定。将结果示于下述表1及表2中。For the laminated board produced in the above manner, the measurement of film peelability after pressing was carried out in the following manner, and for the laminated board after peeling which could be easily peeled off, the insulating layer (adhesion after thermosetting) was implemented in the following manner Determination of surface roughness, non-transferability and surface flatness of layer). The results are shown in Table 1 and Table 2 below.

[压制后的剥离性][Peelability after pressing]

在压制后,确认是否能够在不发生脱模膜的变形、熔接、破裂的情况下将膜单独剥离。此外,从压制后的层叠样品剥离脱模膜时,通过目视确认了是否能够在与脱模层的界面进行剥离。After pressing, it was confirmed whether the film could be peeled off independently without deformation, welding, or cracking of the release film. Moreover, when the release film was peeled from the laminated sample after pressing, it was confirmed visually whether peeling was possible at the interface with the release layer.

A:在界面能够容易地剥离。A: It can be easily peeled off at the interface.

C:在界面无法容易地剥离。C: It cannot be easily peeled off at the interface.

“在界面无法容易地剥离”是指无法将膜单独剥离的情况、或者剥离后粘接层的树脂组合物附着于脱模膜的情况。"It cannot be easily peeled at the interface" means the case where the film cannot be peeled alone, or the case where the resin composition of the adhesive layer adheres to the release film after peeling.

[表面粗糙度][Surface roughness]

进行压制并将膜剥离后的绝缘层的表面粗糙度使用表面形状测定装置(Veeco公司制、商品名:WykoNT9100)在下述测定条件下进行测定。The surface roughness of the insulating layer after pressing and peeling off the film was measured under the following measurement conditions using a surface shape measuring device (manufactured by Veeco, trade name: WykoNT9100).

-测定条件--Measurement conditions-

内部透镜:1倍Internal lens: 1x

外部透镜:50倍External lens: 50 times

测定范围:0.125×0.095mmMeasuring range: 0.125×0.095mm

测定深度:10μmMeasuring depth: 10μm

测定方式:垂直扫描型干涉方式(VSI方式)Measuring method: vertical scanning interference method (VSI method)

[非转移性][non-metastatic]

从压制后的层叠板剥离聚酰亚胺膜后,在绝缘层上涂布寺西化学工业株式会社制的Magic Ink(注册商标)No.500(黑),观察该墨液的排斥(はじき)状况。排斥墨液的现象表示脱模层成分向绝缘层的转移,因此将排斥的情况评价为“C”,将不排斥的情况评价为“A”。After peeling off the polyimide film from the laminated board after pressing, Magic Ink (registered trademark) No. 500 (black) manufactured by Teranishi Chemical Industry Co., Ltd. was applied on the insulating layer, and the state of ink repellency (はじき) was observed. . The ink repelling phenomenon indicates the transfer of the release layer components to the insulating layer, so the case of repelling was evaluated as "C", and the case of not repelling was evaluated as "A".

[表面平坦性][Surface Flatness]

使用高精度三维表面形状粗糙度测定系统(Veeco公司制、WYKO NT9100),观察压制后的绝缘层的表面形状。图1及图2表示对X轴:125μm、Y轴:95μm的形状范围进行表面观察的结果。The surface shape of the pressed insulating layer was observed using a high-precision three-dimensional surface roughness measuring system (WYKO NT9100, manufactured by Veeco). Fig. 1 and Fig. 2 show the results of surface observation of the X-axis: 125 μm, Y-axis: 95 μm shape range.

[表1][Table 1]

项目project 单位unit 实施例1Example 1 实施例2Example 2 实施例3Example 3 实施例4Example 4 实施例5Example 5 剥离性Stripping - AA AA AA AA AA 表面粗糙度Surface roughness μmμm <0.05<0.05 <0.05<0.05 <0.05<0.05 <0.05<0.05 <0.05<0.05 非转移性Non-metastatic - AA AA AA AA AA

[表2][Table 2]

项目project 单位unit 比较例1Comparative example 1 比较例2Comparative example 2 比较例3Comparative example 3 比较例4Comparative example 4 剥离性Stripping - CC CC CC AA 表面粗糙度Surface roughness μmμm - - - 0.050.05 非转移性Non-metastatic - - - - CC

由表1可知:本发明的脱模聚酰亚胺膜及带有粘接层的层叠板的特性如实施例1~5所示,在240℃这样高温的热板压制后能够容易地剥离脱模聚酰亚胺膜,并且能够得到表面平坦的绝缘层。As can be seen from Table 1: the characteristics of the release polyimide film of the present invention and the laminated board with the adhesive layer are as shown in Examples 1 to 5, and can be easily peeled off after being pressed by a hot plate at a high temperature of 240°C. Molded polyimide film, and can get the insulating layer with flat surface.

另一方面,由表2可知:在使用了聚酰亚胺膜以外的膜的比较例1中,聚对苯二甲酸乙二醇酯膜熔接于面板,无法容易地将脱模膜单独剥离,并且无法得到良好表面状态的绝缘层。此外,在比较例2中可确认到:聚酰亚胺膜破裂,无法将聚酰亚胺膜单独剥离。在比较例3中可确认到:铜箔破裂,无法将铜箔单独剥离。在比较例4中可确认到:若在绝缘层上涂布Magic Ink,则观察到墨液的排斥,脱模层成分转移到绝缘层。On the other hand, as can be seen from Table 2: in Comparative Example 1 using films other than the polyimide film, the polyethylene terephthalate film was welded to the panel, and the release film could not be easily peeled off alone. And an insulating layer with a good surface state cannot be obtained. In addition, in Comparative Example 2, it was confirmed that the polyimide film was broken and the polyimide film could not be peeled off alone. In Comparative Example 3, it was confirmed that the copper foil was cracked and the copper foil could not be peeled off alone. In Comparative Example 4, it was confirmed that when Magic Ink was applied on the insulating layer, repelling of the ink was observed, and components of the release layer migrated to the insulating layer.

另外,将实施例1的表面平坦性的观察结果示于图1中,将比较例3的表面平坦性的观察结果示于图2中,若对它们进行确认,则可确认到图1的使用了本发明的脱模聚酰亚胺膜的绝缘层的表面平坦。In addition, the observation results of the surface flatness of Example 1 are shown in FIG. 1, and the observation results of the surface flatness of Comparative Example 3 are shown in FIG. The surface of the insulating layer of the release polyimide film of the present invention is flat.

产业上的可利用性Industrial availability

本发明的脱模聚酰亚胺膜在通过使用了热板压制、辊层压机、双压制等的成形方法制造多层布线板时可以有效地作为脱模膜来利用。The mold release polyimide film of this invention can be utilized effectively as a mold release film when manufacturing a multilayer wiring board by the shaping|molding method using a hot plate press, a roll laminator, a double press, etc.

Claims (10)

1. a demoulding polyimide film, it has containing alkyd resin (A) and amino at least one side of polyimide film The release layer of resin (B).
Demoulding polyimide film the most according to claim 1, wherein, the thickness of described release layer is 0.01~10 μm.
Demoulding polyimide film the most according to claim 1 and 2, wherein, the thickness of described polyimide film is 10~100 μm。
4. according to the demoulding polyimide film according to any one of claims 1 to 3, wherein, the formation of described polyimide film The surface roughness (Ra) in the face of described release layer side is below 0.2 μm.
5., according to the demoulding polyimide film according to any one of Claims 1 to 4, it is not provided with polyamides described release layer On the face of imines film, there is adhesive linkage.
Demoulding polyimide film the most according to claim 5, wherein, described adhesive linkage uses and comprises epoxy resin and epoxy The resin combination of resin curing agent forms.
7. having a plywood for the demoulding polyimide film of band adhesive linkage, it is by the demoulding polyamides described in claim 5 or 6 The adhesive linkage side at least one side in prepreg or insulating barrier cascading into shape of imines film forms.
8. a plywood, the demoulding polyimide film of the plywood described in claim 7 is peeled off and is formed by it.
9. having a single or multiple lift wiring plate for the demoulding polyimide film of band adhesive linkage, it is by described in claim 5 or 6 The adhesive linkage side of demoulding polyimide film be laminated in prepreg or the one side of insulating barrier and by another of prepreg or insulating barrier Surface layer is laminated on forming through the single or multiple lift wiring plate of circuit fabrication.
10. a manufacture method for multiwiring board, comprising:
By the demoulding polyimide film described in claim 5 or 6 being laminated in single or multiple lift wiring plate, thus manufacture and have The operation of the single or multiple lift wiring plate of the demoulding polyimide film with adhesive linkage;
The operation of demoulding polyimide film is removed from the single or multiple lift wiring plate of the demoulding polyimide film with band adhesive linkage; And
Carry out the operation of circuit fabrication.
CN201480067285.9A 2013-12-09 2014-12-09 Demoulding polyimide film, the plywood of demoulding polyimide film with band adhesive linkage, plywood, with the single or multiple lift wiring plate of demoulding polyimide film of band adhesive linkage and the manufacture method of multiwiring board Pending CN106232355A (en)

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Application publication date: 20161214