CN106169537A - Preparation method of solar cell - Google Patents
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- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- 239000000243 solution Substances 0.000 claims abstract description 55
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 41
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 41
- 239000010703 silicon Substances 0.000 claims abstract description 41
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 20
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000002161 passivation Methods 0.000 claims abstract description 17
- 239000002243 precursor Substances 0.000 claims abstract description 17
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims abstract description 16
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 claims abstract description 15
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000004528 spin coating Methods 0.000 claims abstract description 9
- 238000003756 stirring Methods 0.000 claims abstract description 7
- 239000007864 aqueous solution Substances 0.000 claims abstract description 6
- -1 Polytetrafluoroethylene Polymers 0.000 claims abstract description 5
- 238000001704 evaporation Methods 0.000 claims abstract description 5
- 238000012545 processing Methods 0.000 claims abstract description 5
- 229920000144 PEDOT:PSS Polymers 0.000 claims description 16
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 7
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N dimethyl sulfoxide Natural products CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 claims description 6
- 238000000137 annealing Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
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- 229910052782 aluminium Inorganic materials 0.000 claims description 3
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- 238000004140 cleaning Methods 0.000 claims description 3
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- 229910052709 silver Inorganic materials 0.000 claims description 3
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims 2
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- 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 3
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- 239000004810 polytetrafluoroethylene Substances 0.000 abstract 1
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 18
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- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 241000282414 Homo sapiens Species 0.000 description 3
- 238000011161 development Methods 0.000 description 3
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000002803 fossil fuel Substances 0.000 description 2
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 239000002736 nonionic surfactant Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
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- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 239000002028 Biomass Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- MTRXSNADWVEBGQ-UHFFFAOYSA-N [S].[Se].[Zn].[Cu] Chemical compound [S].[Se].[Zn].[Cu] MTRXSNADWVEBGQ-UHFFFAOYSA-N 0.000 description 1
- VQYHBXLHGKQYOY-UHFFFAOYSA-N aluminum oxygen(2-) titanium(4+) Chemical compound [O-2].[Al+3].[Ti+4] VQYHBXLHGKQYOY-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- YHWCPXVTRSHPNY-UHFFFAOYSA-N butan-1-olate;titanium(4+) Chemical compound [Ti+4].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-] YHWCPXVTRSHPNY-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- QNWMNMIVDYETIG-UHFFFAOYSA-N gallium(ii) selenide Chemical compound [Se]=[Ga] QNWMNMIVDYETIG-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000010129 solution processing Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
Description
技术领域technical field
本发明涉及光电器件技术领域,特别是涉及了一种太阳能电池的制备方法。The invention relates to the technical field of photoelectric devices, in particular to a method for preparing a solar cell.
背景技术Background technique
能源是人类社会发展的动力。随着人口增长和经济发展,到本世纪中叶,能源消耗将超过现在的两倍。目前所使用的能源中绝大多数来自于化石燃料,其它能源所占比重相对较少,而化石燃料的数量有限,难以再生,并且其使用对环境会造成巨大污染。因此改变能源结构,使用清洁新能源,保护地球已成为全球的共识。当前的清洁能源主要包括氢能、生物能、太阳能和风能等。其中,太阳能是由太阳内部核聚变所向外界辐射的能量,其提供给地球一小时的能量可供人类社会使用一年,一年到达地面太阳辐射能相当于百万亿吨煤能量,相当于人类现有各种能源在同时期内所提供能量的上万倍。所以,太阳能作为一种绿色可再生能源,取之不尽、用之不竭。其源头巨大,安全保障性高,将是以后最有发展潜力的支撑性能源。Energy is the driving force for the development of human society. With population growth and economic development, energy consumption will more than double by mid-century. Most of the energy currently used comes from fossil fuels, and the proportion of other energy sources is relatively small. However, the amount of fossil fuels is limited, difficult to regenerate, and their use will cause huge pollution to the environment. Therefore, it has become a global consensus to change the energy structure, use clean new energy, and protect the earth. The current clean energy mainly includes hydrogen energy, biomass energy, solar energy and wind energy. Among them, solar energy is the energy radiated to the outside world by nuclear fusion inside the sun. The energy it provides to the earth for one hour can be used by human society for one year, and the solar radiation energy reaching the ground in one year is equivalent to one billion tons of coal energy Human beings have tens of thousands of times the energy provided by various energy sources in the same period. Therefore, as a kind of green renewable energy, solar energy is inexhaustible and inexhaustible. It has a huge source and high security, and will be the supporting energy with the most development potential in the future.
太阳能的利用中,太阳能电池是最有发展前景的可再生能源发电方向之一,太阳能电池是将太阳光能转变成电能的电子器件。目前太阳能电池种类繁多,根据材料不同,可以分为:第一代晶硅太阳能电池,主要是单晶硅电池和多晶硅电池;第二代薄膜太阳能电池,主要是硅基薄膜电池、Ⅲ-Ⅴ族化合物电池、Ⅱ-Ⅵ化合物电池、铜铟镓硒电池和铜锌硒硫电池等;第三代太阳能电池,主要是染料敏化太阳能电池、有机太阳能电池、量子点太阳能电池、钙钛矿太阳能电池和杂化太阳能电池等。In the utilization of solar energy, solar cells are one of the most promising renewable energy generation directions. Solar cells are electronic devices that convert sunlight energy into electrical energy. At present, there are many kinds of solar cells. According to different materials, they can be divided into: the first generation of crystalline silicon solar cells, mainly monocrystalline silicon cells and polycrystalline silicon cells; the second generation of thin film solar cells, mainly silicon-based thin film cells, III-V group Compound batteries, Ⅱ-Ⅵ compound batteries, copper indium gallium selenium batteries and copper zinc selenium sulfur batteries, etc.; third-generation solar cells, mainly dye-sensitized solar cells, organic solar cells, quantum dot solar cells, perovskite solar cells and hybrid solar cells.
在众多太阳能电池中,硅电池占据了90%的市场份额,一直是太阳能电池的研究热点。但是硅电池面临的一个突出问题是,由于界面之间缺陷态较多,载流子在界面的复合严重,造成了器件性能缺失。目前,对于降低载流子界面复合的研究,主要采用氧化硅、氮化硅、无定型硅、氧化钛、氧化铝等材料对界面进行修饰钝化等。然而,上述方法一般要通过比较复杂的工艺才能实现对硅表面的有效钝化,对仪器设备的要求较高,价格相对较高。因此,研究开发利用简单工艺可以实现对表面钝化的工艺对进一步降低硅太阳能电池的成本具有重要的应用价值。Among many solar cells, silicon cells account for 90% of the market share and have always been a research hotspot of solar cells. However, a prominent problem facing silicon batteries is that due to the large number of defect states between the interfaces, the recombination of carriers at the interface is serious, resulting in a lack of device performance. At present, for the research on reducing carrier interface recombination, silicon oxide, silicon nitride, amorphous silicon, titanium oxide, aluminum oxide and other materials are mainly used to modify and passivate the interface. However, the above-mentioned methods generally require a relatively complicated process to achieve effective passivation of the silicon surface, which requires high equipment and relatively high prices. Therefore, the research and development of a process that can realize surface passivation by using a simple process has important application value for further reducing the cost of silicon solar cells.
有鉴于上述的缺陷,本设计人,积极加以研究创新,以期创设一种太阳能电池的制备方法,使其更具有生产上的利用价值。In view of the above-mentioned defects, the designer is actively researching and innovating, in order to create a method for preparing solar cells, so that it has more production value.
发明内容Contents of the invention
为解决上述技术问题,本发明的目的在于提供一种生产成本低、操作工艺简单、物理性能好的一种太阳能电池的制备方法。In order to solve the above technical problems, the object of the present invention is to provide a method for preparing a solar cell with low production cost, simple operation process and good physical properties.
本发明的技术问题主要通过以下技术方案得以解决:Technical problem of the present invention is mainly solved through the following technical solutions:
本发明公开了一种太阳能电池的制备方法,所述太阳能电池通过将硅片经处理、旋涂钝化层溶液以及PEDOT:PSS水溶液、蒸镀后得到,所述钝化层溶液为氧化钛前驱体溶液,所述氧化钛前驱体溶液通过如下方法制备:(1)将异丙醇钛分散在异丙醇溶液中稀释,搅拌,使其分散均匀,制备溶液Ⅰ;(2)将盐酸溶液采用异丙醇稀释,然后滴加到溶液Ⅰ中,搅拌,获得溶液Ⅱ;将制备好的溶液Ⅱ旋涂在经处理后的硅片上。The invention discloses a method for preparing a solar cell. The solar cell is obtained by treating a silicon wafer, spin-coating a passivation layer solution and a PEDOT:PSS aqueous solution, and evaporating. The passivation layer solution is a titanium oxide precursor The titanium oxide precursor solution is prepared by the following method: (1) disperse titanium isopropoxide in isopropanol solution and dilute, stir to make it uniformly dispersed, and prepare solution I; (2) use hydrochloric acid solution Diluted with isopropanol, then added dropwise to solution I and stirred to obtain solution II; the prepared solution II was spin-coated on the treated silicon wafer.
进一步地,所述氧化钛前驱体溶液在低于200℃的温度下制备。Further, the titanium oxide precursor solution is prepared at a temperature lower than 200°C.
进一步地,所述硅片的处理包括以下步骤:(1)将电阻值为0.05-0.1Ω/cm2的硅片清洗之后浸于0.2M AgNO3和4.8M HF的混合溶液中刻蚀5分钟,然后利用去离子水清洗;(2)将处理后的硅片用浓硝酸浸泡5分钟,取出后清洗吹干;(3)再将处理后的硅片浸没于HF溶液中2分钟,然后置于浓度为1%的四甲基氢氧化铵溶液中刻蚀40秒。Further, the processing of the silicon wafer includes the following steps: (1) After cleaning the silicon wafer with a resistance value of 0.05-0.1Ω/cm 2 , immerse it in a mixed solution of 0.2M AgNO3 and 4.8M HF and etch for 5 minutes, Then use deionized water to clean; (2) Soak the treated silicon chip with concentrated nitric acid for 5 minutes, take it out, wash and dry it; (3) immerse the processed silicon chip in HF solution for 2 minutes, and then place Etching in 1% tetramethylammonium hydroxide solution for 40 seconds.
进一步地,将所述溶液Ⅱ旋涂在处理后的硅片下表面,将PEDOT:PSS水溶液旋涂到硅片上表面,进行退火处理,在硅片上表面和下表面上分别形成PEDOT:PSS导电薄膜和氧化钛钝化层。Further, the solution II is spin-coated on the lower surface of the treated silicon wafer, the PEDOT:PSS aqueous solution is spin-coated on the upper surface of the silicon wafer, and annealing is performed to form PEDOT:PSS on the upper surface and the lower surface of the silicon wafer respectively. Conductive thin film and titanium oxide passivation layer.
进一步地,所述PEDOT:PSS水溶液是由导电率为1000的PEDOT:PSS高分子聚合物、DMSO有机化合物和Triton X-100非离子型表面活性剂以94:5:1的比例混合后得到。Further, the PEDOT:PSS aqueous solution is obtained by mixing PEDOT:PSS polymer with a conductivity of 1000, DMSO organic compound and Triton X-100 nonionic surfactant in a ratio of 94:5:1.
进一步地,所述处理后的硅片在150℃的温度下进行退火处理,在3000转/分的转速下旋涂1分钟。Further, the treated silicon wafer is annealed at a temperature of 150° C., and spin-coated at a speed of 3000 rpm for 1 minute.
进一步地,将阳极电极和阴极电极经过所述蒸镀的方式,分别沉积到PEDOT:PSS导电薄膜表面和氧化钛钝化层上。Further, the anode electrode and the cathode electrode are respectively deposited on the surface of the PEDOT:PSS conductive film and the titanium oxide passivation layer through the evaporation method.
进一步地,所述阳极电极为栅状银电极,厚度范围为190-210nm,所述阴极电极为铝电极,厚度范围为190-210nm。。Further, the anode electrode is a grid-shaped silver electrode with a thickness in the range of 190-210 nm, and the cathode electrode is an aluminum electrode with a thickness in the range of 190-210 nm. .
借由上述方案,本发明提供的前驱体溶液法制备氧化物钝化层,相比于常规的原子层沉积、高温热氧化生长,化学沉积法等制备钝化修饰层的方式,至少具有以下优点:By means of the above scheme, the precursor solution method provided by the present invention to prepare the oxide passivation layer, compared with the conventional atomic layer deposition, high temperature thermal oxidation growth, chemical deposition method, etc. to prepare the passivation modification layer, has at least the following advantages :
1、制备工艺简单,可以使用溶液加工如旋涂、喷涂、丝网印刷、打印等方法,设备要求相对比较低,有利于实现大面积的制备;1. The preparation process is simple, and solution processing such as spin coating, spray coating, screen printing, printing and other methods can be used, and the equipment requirements are relatively low, which is conducive to the realization of large-area preparation;
2、氧化物的制备过程温度低于200摄氏度,有利于大幅度降低太阳能电池的加工成本;2. The temperature of the oxide preparation process is lower than 200 degrees Celsius, which is conducive to greatly reducing the processing cost of solar cells;
3、利用氧化物良好的钝化特性,减少了硅片的缺陷态,有利于提高短路电流和开路电压;3. Using the good passivation properties of oxides, the defect states of silicon wafers are reduced, which is beneficial to improve short-circuit current and open-circuit voltage;
4、所选择的氧化物分散溶剂,对身体和环境危害较小,更加安全。4. The selected oxide dispersing solvent is less harmful to the body and the environment and is safer.
上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,并可依照说明书的内容予以实施,以下以本发明的较佳实施例并配合附图详细说明如后。The above description is only an overview of the technical solutions of the present invention. In order to understand the technical means of the present invention more clearly and implement them according to the contents of the description, the preferred embodiments of the present invention and accompanying drawings are described in detail below.
附图说明Description of drawings
图1为实施案例所得的硅-有机杂化太阳能电池的结构示意图;Fig. 1 is the structural representation of the silicon-organic hybrid solar cell that embodiment case obtains;
图2为实施案例所得的硅-有机杂化太阳能电池的I-V曲线;Fig. 2 is the I-V curve of the silicon-organic hybrid solar cell that embodiment case obtains;
图3为实施案例所得的硅-有机杂化太阳能电池的外量子效率曲线;Fig. 3 is the external quantum efficiency curve of the silicon-organic hybrid solar cell obtained by the implementation case;
图4为实施案例所得的硅-有机杂化太阳能电池的少数载流子寿命曲线;Fig. 4 is the minority carrier lifetime curve of the silicon-organic hybrid solar cell obtained by the implementation case;
以上附图中,I-V曲线是在100mW/cm2的AM1.5太阳光模拟器的照射下测量得到的。In the above figures, the IV curve is measured under the irradiation of 100mW/cm 2 AM1.5 solar simulator.
具体实施方式detailed description
下面结合附图和实施例,对本发明的具体实施方式作进一步详细描述。以下实施例用于说明本发明,但不用来限制本发明的范围。The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
实施例:Example:
本实施例提供的一种太阳能电池的制备方法步骤如下:The steps of a method for preparing a solar cell provided in this embodiment are as follows:
(1)对硅片进行清洗,并刻蚀结构;具体步骤包括:1、将电阻值为0.05-0.1Ω/cm2的硅片清洗之后浸于0.2M AgNO3和4.8M HF的混合溶液中刻蚀5分钟,然后利用去离子水清洗;2、将处理后的硅片用浓硝酸浸泡5分钟,取出后清洗吹干;3、再将处理后的硅片浸没于HF溶液中2分钟,然后置于浓度为1%的四甲基氢氧化铵溶液中刻蚀40秒。本发明采用硅-有机杂化太阳能电池作为电池实施案例,太阳能电池范围不限制在硅-有机杂化太阳能电池,包含所有硅基太阳能电池,单晶硅、多晶硅、薄膜硅等太阳能电池。(1) Clean the silicon wafer and etch the structure; the specific steps include: 1. After cleaning the silicon wafer with a resistance value of 0.05-0.1Ω/ cm2 , immerse it in a mixed solution of 0.2M AgNO3 and 4.8M HF to etch etched for 5 minutes, and then cleaned with deionized water; 2. Soak the treated silicon wafer in concentrated nitric acid for 5 minutes, take it out and wash and dry it; 3. Submerge the treated silicon wafer in HF solution for 2 minutes, and then Place in a 1% tetramethylammonium hydroxide solution and etch for 40 seconds. The present invention uses silicon-organic hybrid solar cells as battery implementation examples, and the scope of solar cells is not limited to silicon-organic hybrid solar cells, including all silicon-based solar cells, solar cells such as monocrystalline silicon, polycrystalline silicon, and thin-film silicon.
(2)制备氧化钛前驱体溶液:将异丙醇钛分散在异丙醇溶液中稀释,搅拌5分钟,使其分散均匀,制备溶液Ⅰ。将盐酸溶液采用异丙醇稀释,然后滴加到溶液Ⅰ中,搅拌3小时,获得溶液Ⅱ。氧化钛前驱体溶液作为氧化物溶液实施案例,氧化物前驱体溶液范围不限制在氧化钛前驱体溶液,包含氧化铝、氧化硅、氧化钛、氧化钼、氧化铌、氧化锌和氧化锡等金属氧化物。以异丙醇钛作为氧化钛前驱体溶液制备原料的实施案例,氧化钛前驱体溶液制备的原料范围不限制在异丙醇钛,包括异丙醇钛,钛酸四丁酯,四氯化钛等烷基钛化合物。(2) Preparation of titanium oxide precursor solution: Dilute titanium isopropoxide in isopropanol solution, stir for 5 minutes to make it uniformly dispersed, and prepare solution I. The hydrochloric acid solution was diluted with isopropanol, then added dropwise to solution I, and stirred for 3 hours to obtain solution II. Titanium oxide precursor solution is used as an oxide solution. The range of oxide precursor solutions is not limited to titanium oxide precursor solutions, including aluminum oxide, silicon oxide, titanium oxide, molybdenum oxide, niobium oxide, zinc oxide, and tin oxide. oxide. An implementation case of using titanium isopropoxide as the raw material for the preparation of the titanium oxide precursor solution. The range of raw materials for the preparation of the titanium oxide precursor solution is not limited to titanium isopropoxide, including titanium isopropoxide, tetrabutyl titanate, and titanium tetrachloride and other alkyl titanium compounds.
(3)将氧化钛前驱体溶液旋涂到硅片下表面:将溶液Ⅱ以转速为3000转/分旋涂到氢氟酸处理后的硅片的下表面,旋涂时间为1分钟。在150℃的条件下退火30min,氧化物前驱体溶液在退火过程中水解,形成氧化物薄膜,在硅片表面生成Si-O-M键(M指代金属),减少硅片表面的悬挂键和缺陷态,实现对硅片表面钝化,提高硅表面的少数载流子寿命,增加短路电流,开路电压,最终提高器件效率。(3) Spin-coat the titanium oxide precursor solution on the lower surface of the silicon wafer: Spin-coat solution II on the lower surface of the silicon wafer treated with hydrofluoric acid at a speed of 3000 rpm, and the spin-coating time is 1 minute. Anneal at 150°C for 30 minutes, the oxide precursor solution is hydrolyzed during the annealing process to form an oxide film, and generate Si-O-M bonds (M refers to metal) on the surface of the silicon wafer to reduce dangling bonds and defects on the surface of the silicon wafer state, realize the passivation of the surface of the silicon chip, improve the lifetime of minority carriers on the silicon surface, increase the short-circuit current, open-circuit voltage, and finally improve the efficiency of the device.
(4)将电导率为1000的PEDOT:PSS,DMSO有机化合物和Triton X-100非离子型表面活性剂以94:5:1的比例混合后,搅拌均匀,在150摄氏度的条件下退火30min,采用旋涂法,以转速为3000转/分,旋涂时间为1分钟,在硅片的上表面沉积得到PEDOT:PSS导电薄膜。(4) After mixing PEDOT:PSS with a conductivity of 1000, DMSO organic compound and Triton X-100 nonionic surfactant in a ratio of 94:5:1, stir evenly, and anneal at 150 degrees Celsius for 30 minutes, The PEDOT:PSS conductive thin film was deposited on the upper surface of the silicon wafer by spin coating method with a rotation speed of 3000 rpm and a spin coating time of 1 minute.
(5)将栅状阳极银电极经过真空蒸镀的的方式沉积在PEDOT:PSS导电薄膜表面,厚度为190-210nm。(5) Deposit the grid-shaped anode silver electrode on the surface of the PEDOT:PSS conductive film by vacuum evaporation, with a thickness of 190-210nm.
(6)将阴极铝电极经过真空蒸镀的方式沉积在氧化钛上,得到具有钝化层的硅-有机杂化太阳能电池。(6) Depositing the cathode aluminum electrode on the titanium oxide through vacuum evaporation to obtain a silicon-organic hybrid solar cell with a passivation layer.
该硅-有机杂化太阳能电池的结构如图1所示,从上至下依次是栅状阳极电极、有机聚合物(PEDOT:PSS薄膜)、n-型硅片基底(吸光层)、氧化钛与阴极铝电极。The structure of the silicon-organic hybrid solar cell is shown in Figure 1. From top to bottom, there are grid-shaped anode electrode, organic polymer (PEDOT:PSS film), n-type silicon substrate (light-absorbing layer), titanium oxide Aluminum electrode with cathode.
在室温环境下,结合图2所示的硅-有机杂化太阳能电池的I-V曲线,可以看出制得的硅-有机杂化太阳能电池短路电流为30.67mA/cm2,开路电压为643mV;结合图3所示的硅-有机杂化太阳能电池的外量子效率曲线与如图4所示的硅-有机杂化太阳能电池的少数载流子寿命曲线,可以看出制得的硅-有机杂化太阳能电池填充因子为0.72,光电转化效率为14.22%,外量子效率最大超过90%。At room temperature, combined with the IV curve of the silicon-organic hybrid solar cell shown in Figure 2, it can be seen that the short-circuit current of the prepared silicon-organic hybrid solar cell is 30.67mA/cm 2 , and the open-circuit voltage is 643mV; The external quantum efficiency curve of the silicon-organic hybrid solar cell shown in Figure 3 and the minority carrier lifetime curve of the silicon-organic hybrid solar cell shown in Figure 4, it can be seen that the prepared silicon-organic hybrid The filling factor of the solar cell is 0.72, the photoelectric conversion efficiency is 14.22%, and the maximum external quantum efficiency exceeds 90%.
以上所述仅是本发明的优选实施方式,并不用于限制本发明,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明技术原理的前提下,还可以做出若干改进和变型,这些改进和变型也应视为本发明的保护范围。The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention. It should be pointed out that for those of ordinary skill in the art, some improvements can be made without departing from the technical principle of the present invention. and modifications, these improvements and modifications should also be considered as the protection scope of the present invention.
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