CN105819390B - Sensor - Google Patents
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- CN105819390B CN105819390B CN201510000425.7A CN201510000425A CN105819390B CN 105819390 B CN105819390 B CN 105819390B CN 201510000425 A CN201510000425 A CN 201510000425A CN 105819390 B CN105819390 B CN 105819390B
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- elastic cantilever
- elastic
- outline border
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- fixed part
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- 239000000758 substrate Substances 0.000 claims abstract description 12
- 230000003139 buffering effect Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 7
- 230000004048 modification Effects 0.000 abstract description 4
- 238000012986 modification Methods 0.000 abstract description 4
- 230000008901 benefit Effects 0.000 abstract description 2
- 230000008859 change Effects 0.000 description 9
- 238000005538 encapsulation Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000010327 methods by industry Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
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- Force Measurement Appropriate To Specific Purposes (AREA)
- Pressure Sensors (AREA)
Abstract
The present invention provides a kind of sensor, including an outline border and one first elastic cantilever group, every one first elastic cantilever both ends of the first elastic cantilever group are connect with an internal component and the outline border respectively, for the internal component to be connected to the outline border, the outline border includes a framework and an at least buffer part, each buffer part includes a fixed part and one second elastic cantilever group, the anchor point that the fixed part is arranged on substrate substrate with one is fixedly connected, the both ends of every one second elastic cantilever of the second elastic cantilever group are connect with the fixed part and the framework respectively, for the buffer part to be connected to the framework, every one first elastic cantilever of the axial direction and the first elastic cantilever group of every one second elastic cantilever of the second elastic cantilever group it is axially vertical.The invention has the advantages that reducing the knots modification of working frequency, or even keep working frequency constant, improves the detection accuracy of sensor.
Description
Technical field
The present invention relates to micro mechanical technology field more particularly to a kind of sensors.
Background technique
Micro mechanical sensor is the microsensor manufactured using microelectronic process engineering and micromachining technology.
Compared with traditional sensor, it has, and small in size, light weight and cost is low, low in energy consumption, high reliablity, is suitable for batch production, is easy
In integrated and realize intelligentized feature.Meanwhile it is allowed to complete certain tradition machineries in the characteristic size of micron dimension
The irrealizable function of sensor institute.
But existing micro mechanical sensor Shortcomings.Referring to Fig. 1, the internal component 10 of sensor passes through at least one
Elastic cantilever 11 is connect with the outline border 12 of sensor, and the outline border 12 in the two anchor point 13(attached drawings being oppositely arranged by using
Dotted line mark) it is fixed on substrate substrate (not indicated in attached drawing).It, will be in the bullet when the sensor is by encapsulation pressure
Property cantilever beam 11 on generate an axial force so that the rigidity of elastic cantilever 11 changes, change working frequency, to influence
The detection accuracy of sensor.
Summary of the invention
The technical problem to be solved by the invention is to provide a kind of sensors, can offset the shadow of device encapsulation pressure
It rings, reduces the knots modification of working frequency, or even keep working frequency constant, improve the detection accuracy of sensor.
To solve the above-mentioned problems, the present invention provides a kind of sensors, including an outline border and one first elastic cantilever
Group, every one first elastic cantilever both ends of the first elastic cantilever group connect with an internal component and the outline border respectively
It connects, for the internal component to be connected to the outline border, the outline border includes a framework and an at least buffer part, each described
Buffer part includes a fixed part and one second elastic cantilever group, and it is solid that the anchor point on substrate substrate is arranged in the fixed part and one
Fixed connection, the both ends of every one second elastic cantilever of the second elastic cantilever group respectively with the fixed part and the frame
Body connection, for the buffer part to be connected to the framework, every one second elastic cantilever of the second elastic cantilever group
The axial direction of beam is axially vertical with every one first elastic cantilever of the first elastic cantilever group.
Further, the outline border includes two symmetrically arranged buffer parts.
Further, the second elastic cantilever group includes two the second elastic cantilevers, described two second elastic suspendeds
Arm beam is symmetricly set on the fixed part both ends.
Further, the side of the outline border towards the fixed part is provided with a recess, for accommodating second bullet
Property cantilever beam.
It is an advantage of the current invention that the sensor of the prior art is under the influence of encapsulating pressure, in connection internal component and
An axial force can be generated on first elastic cantilever of outline border, the rigidity of the first elastic cantilever can change, and change work
Frequency, to influence the detection accuracy of sensor, in order to solve the technical problem, buffering is arranged in the present invention on the outline border
Portion, the buffer part have one and first elastic cantilever the second axially vertical elastic cantilever, when the sensor by
To encapsulation pressure influence when, second elastic cantilever can offset the shadow of encapsulation pressure by itself Flexible change
It rings, so that the rigidity of the first elastic cantilever be avoided to change, keeps working frequency constant, improve the detection essence of sensor
Degree.
Detailed description of the invention
Fig. 1 is the structure schematic diagram of existing sensor；
Fig. 2 is the structure schematic diagram of inventive sensor.
Specific embodiment
It elaborates with reference to the accompanying drawing to the specific embodiment of sensor provided by the invention.
Referring to fig. 2, inventive sensor includes an outline border 20 and one first elastic cantilever group (not indicating in attached drawing).Institute
Stating the first elastic cantilever group includes at least one first elastic cantilever 23, the both ends difference of every one first elastic cantilever 23
It is connect with an internal component 24 and the outline border 20, first elastic cantilever 23 is used for 24 elasticity of internal component even
It is connected to the outline border 20.In this embodiment, two the first elastic cantilevers 23 are schematically drawn.In the present invention
In, the axial direction for defining first elastic cantilever 23 is first direction, in this embodiment, first elastic suspended
The axial direction of arm beam 23 is horizontal direction.
The outline border 20 includes a framework 21 and an at least buffer part 22.Each first elastic cantilever 23 with it is described
Framework 21 connects.
Each buffer part 22 includes a fixed part 25 and one second elastic cantilever group (not indicating in attached drawing).
The fixed part 25 and the anchor point 30 that is arranged on the substrate substrate (not indicating in attached drawing) of the sensor are solid
Fixed connection, the outline border 20 is fixed on the substrate substrate.It blocks since anchor point 30 is fixed portion 25, is used in Fig. 2
Indicate to dotted line anchor point 30.
The second elastic cantilever group includes at least one second elastic cantilever 26.Each second elastic cantilever
One end of beam 26 is connect with the fixed part 25, and the other end is connect with the framework 21, and second elastic cantilever 26 is used for
The buffer part 22 is elastically connected to the framework 21, the fixed part 25 by 26 elasticity of the second elastic cantilever with
The framework 21 connects, and then the outline border 20 is fixed on the anchor point 30.In this embodiment, described second is outstanding
Arm beam group includes two the second elastic cantilevers 26, and described two second elastic cantilevers 26 are symmetricly set on the fixed part 25
Both ends, and then the fixed part 25 is elastically connected to the framework 21.
In the present invention, the axial direction for defining every one second elastic cantilever 26 is second direction.Then second elastic suspended
The second direction of arm beam 26 is vertical with the first direction of first elastic cantilever 23 with the first elastic cantilever group
Every one first elastic cantilever it is axially vertical.Such as in this embodiment, the first direction is horizontal direction, then
The second direction is vertical direction.
Under the influence of the encapsulation pressure of sensor in the prior art, in connection internal component 24 and the first bullet of outline border 20
Property cantilever beam 23 on can generate an axial force, the rigidity of the first elastic cantilever 23 can change, thus change first elasticity
The working frequency of cantilever beam 23, and then influence the detection accuracy of sensor.Buffer part 22 is arranged in the present invention on the outline border 20.
The buffer part 22 have one and first elastic cantilever 23 the second axially vertical elastic cantilever 26, when the sensor
When being influenced by encapsulation pressure, second elastic cantilever 26 can offset encapsulation pressure by itself Flexible change
Influence keep the working frequency of the first elastic cantilever 23 so that the rigidity of the first elastic cantilever 23 be avoided to change
It is constant, improve the detection accuracy of sensor.In this embodiment, the working frequency of first elastic cantilever 23 is
Refer to the driving frequency of the first elastic cantilever 23.
Preferably, the outline border 20 includes two symmetrically arranged buffer parts 22, with further counteracting encapsulation pressure to biography
The influence of sensor.Preferably, the side of the outline border 20 towards the fixed part 25 is provided with a recess 27, the recess 27 with
For accommodating second elastic cantilever 26, second elastic cantilever 26 and the framework 21 of 27 bottoms of the recess connect
It connects, further to save space.The size for exaggerating second elastic cantilever 26 in this embodiment, in practice
On, the size of second elastic cantilever 26 can be needed according to the design of real sensor and is adjusted.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (3)
1. a kind of sensor, including an outline border and one first elastic cantilever group, every the 1 of the first elastic cantilever group
One elastic cantilever both ends are connect with an internal component and the outline border respectively, described outer for the internal component to be connected to
Frame, which is characterized in that the outline border includes a framework and an at least buffer part, and each buffer part includes a fixed part and one
Second elastic cantilever group, the anchor point that the fixed part is arranged on substrate substrate with one are fixedly connected, second elastic suspended
The both ends of every one second elastic cantilever of arm beam group are connect with the fixed part and the framework respectively, are used for the buffering
Portion is connected to the framework, the axial direction of every one second elastic cantilever of the second elastic cantilever group and first elasticity
Every one first elastic cantilever of cantilever beam group it is axially vertical；Described second elastic overarm group includes two the second elastic cantilevers
Beam, the both ends of the fixed part are arranged in described two elastic cantilevers, and described two second elastic cantilevers are along its axial direction
Direction is symmetrical arranged opposite to each other.
2. sensor according to claim 1, which is characterized in that the outline border includes two symmetrically arranged buffer parts.
3. sensor according to claim 1, which is characterized in that the side of the outline border towards the fixed part is provided with
One recess, for accommodating second elastic cantilever.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510000425.7A CN105819390B (en) | 2015-01-04 | 2015-01-04 | Sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510000425.7A CN105819390B (en) | 2015-01-04 | 2015-01-04 | Sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105819390A CN105819390A (en) | 2016-08-03 |
| CN105819390B true CN105819390B (en) | 2019-05-21 |
Family
ID=56986725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510000425.7A Active CN105819390B (en) | 2015-01-04 | 2015-01-04 | Sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105819390B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8555719B2 (en) * | 2011-01-24 | 2013-10-15 | Freescale Semiconductor, Inc. | MEMS sensor with folded torsion springs |
| US8710597B1 (en) * | 2010-04-21 | 2014-04-29 | MCube Inc. | Method and structure for adding mass with stress isolation to MEMS structures |
| CN103797331A (en) * | 2011-09-16 | 2014-05-14 | 因文森斯公司 | Micromachined gyroscope including guided mass system |
| EP2811260A1 (en) * | 2013-06-07 | 2014-12-10 | MCube, Inc. | Method and structure of an integrated mems inertial sensor device using electrostatic quadrature-cancellation |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9097524B2 (en) * | 2009-09-11 | 2015-08-04 | Invensense, Inc. | MEMS device with improved spring system |
-
2015
- 2015-01-04 CN CN201510000425.7A patent/CN105819390B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8710597B1 (en) * | 2010-04-21 | 2014-04-29 | MCube Inc. | Method and structure for adding mass with stress isolation to MEMS structures |
| US8555719B2 (en) * | 2011-01-24 | 2013-10-15 | Freescale Semiconductor, Inc. | MEMS sensor with folded torsion springs |
| CN103797331A (en) * | 2011-09-16 | 2014-05-14 | 因文森斯公司 | Micromachined gyroscope including guided mass system |
| EP2811260A1 (en) * | 2013-06-07 | 2014-12-10 | MCube, Inc. | Method and structure of an integrated mems inertial sensor device using electrostatic quadrature-cancellation |
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| Publication number | Publication date |
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| CN105819390A (en) | 2016-08-03 |
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Address after: 200000 room 307, floor 3, No. 1328, Dingxi Road, Changning District, Shanghai Patentee after: Shanghai Sirui Technology Co.,Ltd. Address before: 201815 room 3157, building 3, No. 1368, Xingxian Road, Jiading District, Shanghai Patentee before: Shanghai Silicon Technology Co.,Ltd. |