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CN105336768B - The packaging technology of highly reliable surface mount glass sealed diode - Google Patents

The packaging technology of highly reliable surface mount glass sealed diode Download PDF

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Publication number
CN105336768B
CN105336768B CN201510668834.4A CN201510668834A CN105336768B CN 105336768 B CN105336768 B CN 105336768B CN 201510668834 A CN201510668834 A CN 201510668834A CN 105336768 B CN105336768 B CN 105336768B
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chip
temperature
glass
glass bulb
lead
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CN105336768A (en
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李东华
马捷
侯杰
韩希方
侯秀萍
张庆猛
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JINAN JINGHENG ELECTRONICS CO Ltd
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JINAN SEMICONDUCTOR RESEARCH INSTITUTE
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/01Manufacture or treatment
    • H10D8/051Manufacture or treatment of Schottky diodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/858Bonding techniques
    • H01L2224/8584Sintering

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  • Joining Of Glass To Other Materials (AREA)

Abstract

本发明公开了一种高可靠表面贴装玻封二极管的封装工艺,所述二极管包括玻壳、位于玻壳内的芯片、套设在玻壳两端的引出端,引出端与芯片之间设有焊片,二极管的引出端与玻壳、引出端与焊片、芯片通过高温冶金工艺键合在一起。冶金键合结构具有可靠性高、耐大电流冲击、热阻小的优点,且工作温度范围宽(‑55℃~125℃),耐高温焊接(在550℃环境下15分钟,参数不恶化);产品选材实现了产品的全工作温度范围的热匹配;整个工艺过程中采用氮气为保护气体,生产安全,无危险气体使用;制成的二极管安装体积小,组装密度高,重量轻;工艺操作简单,易实现批量或大规模生产。

The invention discloses a packaging process of a highly reliable surface-mounted glass-encapsulated diode. The diode includes a glass bulb, a chip inside the glass bulb, and lead-out ends sleeved at both ends of the glass bulb. Solder tab, the lead-out end of the diode and the glass bulb, the lead-out end and the solder tab, and the chip are bonded together through high-temperature metallurgy. The metallurgical bonding structure has the advantages of high reliability, high current impact resistance, small thermal resistance, and a wide operating temperature range (-55°C ~ 125°C), high temperature welding resistance (15 minutes at 550°C, the parameters do not deteriorate) ;The material selection of the product realizes the thermal matching of the product's full working temperature range; Nitrogen is used as the protective gas in the whole process, which is safe in production and no dangerous gas is used; the diodes made have small installation volume, high assembly density and light weight; Simple, easy to achieve batch or large-scale production.

Description

高可靠表面贴装玻封二极管的封装工艺Encapsulation Technology of High Reliable Surface Mounted Glass-encapsulated Diodes

技术领域technical field

本发明涉及一种二极管的封装工艺,具体的说,是一种高可靠表面贴装玻封二极管的封装工艺,属于二极管封装技术领域。The invention relates to a packaging process for diodes, in particular to a packaging process for highly reliable surface-mounted glass-sealed diodes, and belongs to the technical field of diode packaging.

背景技术Background technique

目前大量使用的小电流肖特基二极管,其封装形式为轴向引线玻璃封装,安装体积大、重量大、引线阻抗大,导致整机的体积增大、可靠性降低,已经不适合高精尖武器装备系统的高密度、高性能、高可靠要求。表面贴装小电流肖特基二极管是以金属硅化物(如MoSi2)为正极,以N型半导体为负极,利用二者接触面上形成的势垒制成的金属硅化物—硅接触半导体器件。器件芯片势垒是采用金属硅化物—硅接触的肖特基势垒,提高了器件的正向特性;同时芯片采用保护环和多层金属化结构,提高了器件的反向耐压反向特性和抗热疲劳性能。表面贴装玻封小电流肖特基二极管系列具有正向压降低、反向恢复快、体积小、重量轻、效率高等特点,主要作为开关、整流二极管用于开关电源、高频整流等电路中,产品的性能直接影响到主电源系统的运行速度及工作效率,对于提高整机的性能及优化系统设计等方面起到至关重要的作用,产品可广泛应用于计算机、雷达、通讯发射机、航天飞行器、仪器仪表等方面。At present, the small current Schottky diodes used in large quantities are packaged in the form of axial lead glass package, which has large installation volume, heavy weight, and high lead resistance, resulting in increased volume and reduced reliability of the whole machine, which is no longer suitable for high-precision diodes. High-density, high-performance, and high-reliability requirements for weaponry systems. The surface-mounted low-current Schottky diode is a metal silicide-silicon contact semiconductor device made of a metal silicide (such as MoSi2) as the positive electrode and an N-type semiconductor as the negative electrode, using the potential barrier formed on the contact surface of the two. The chip barrier of the device is a metal silicide-silicon contact Schottky barrier, which improves the forward characteristics of the device; at the same time, the chip adopts a guard ring and a multi-layer metallization structure, which improves the reverse withstand voltage and reverse characteristics of the device and thermal fatigue resistance. Surface mount glass-encapsulated low-current Schottky diode series have the characteristics of forward voltage drop, fast reverse recovery, small size, light weight, high efficiency, etc. They are mainly used as switches and rectifier diodes in switching power supply, high-frequency rectification and other circuits , the performance of the product directly affects the running speed and work efficiency of the main power supply system, and plays a vital role in improving the performance of the whole machine and optimizing the system design. The product can be widely used in computers, radars, communication transmitters, Aerospace vehicles, instrumentation, etc.

目前,表面贴装玻封二极管的芯片与引出端的连接方式为压接,即利用外力(如弹片的形变压力,玻璃高温形变的收缩力)实现芯片与引出端的接卸机械接触,这种连接方式可靠性低,不能满足长期可靠性的要求。At present, the connection method between the chip and the lead-out of the surface-mounted glass-encapsulated diode is crimping, that is, the use of external force (such as the deformation pressure of the shrapnel, the shrinkage force of the high-temperature deformation of the glass) to realize the mechanical contact between the chip and the lead-out. Low reliability, can not meet the requirements of long-term reliability.

发明内容Contents of the invention

针对现有技术的缺陷,本发明提供一种高可靠表面贴装玻封二极管的封装工艺,利用该封装工艺制成的二极管可靠性高,工作温度宽,耐高温焊接,热匹配良好。Aiming at the defects of the prior art, the present invention provides a packaging process for highly reliable surface-mounted glass-encapsulated diodes. The diodes made by the packaging process have high reliability, wide operating temperature, high-temperature welding resistance, and good thermal matching.

为了解决所述技术问题,本发明采用的技术方案是:一种高可靠表面贴装玻封二极管的封装工艺,所述二极管包括玻壳、位于玻壳内的芯片、套设在玻壳两端的引出端,引出端与芯片之间设有焊片,其特征在于:二极管的引出端与玻壳、引出端与焊片、芯片通过高温冶金工艺键合在一起。In order to solve the technical problem, the technical solution adopted in the present invention is: a packaging process for a highly reliable surface-mounted glass-encapsulated diode, the diode includes a glass bulb, a chip located in the glass bulb, and a chip set at both ends of the glass bulb. There is a soldering piece between the terminal and the chip, which is characterized in that the terminal of the diode is bonded to the glass bulb, the terminal and the soldering piece, and the chip through a high-temperature metallurgical process.

进一步的,本发明所述高可靠表面贴装玻封二极管的封装工艺包括以下步骤:Further, the packaging process of the high-reliability surface-mounted glass-encapsulated diode of the present invention includes the following steps:

1)、制备芯片,芯片厚度为210μm±50μm;1) Prepare a chip with a chip thickness of 210μm±50μm;

2)、用模具将芯片、焊片、引出端和玻壳装配在一起;2), use the mold to assemble the chip, solder piece, terminal and glass bulb together;

3)、氮气烧结,打开烧结炉,按工艺条件设置工作温度及氮气流量,氮气流量为1000ml/min±10ml/min,待炉口温度升到300℃±20℃时,将装有半成品器件的模具放至炉口预热至少10min;炉温升到620℃±20℃后,将模具推入恒温区,达到预定的恒温时间将模具拉至炉口冷却30min,最后取出模具自然冷却到室温,完成封装,实现引出端、焊片与芯片良好的冶金键合以及玻壳与引出端的密封。3) Nitrogen sintering, open the sintering furnace, set the working temperature and nitrogen flow rate according to the process conditions, the nitrogen flow rate is 1000ml/min±10ml/min, when the temperature of the furnace mouth rises to 300℃±20℃, the semi-finished device will be installed Put the mold in the furnace mouth to preheat for at least 10 minutes; after the furnace temperature rises to 620°C±20°C, push the mold into the constant temperature zone, and pull the mold to the furnace mouth to cool for 30 minutes after reaching the predetermined constant temperature time, and finally take out the mold and let it cool down to room temperature naturally. Complete the packaging to achieve good metallurgical bonding of the leads, solder pads and chips, and the sealing of the glass bulb and the leads.

进一步的,上述恒温过程中,恒温时间为10-30min。Further, in the above constant temperature process, the constant temperature time is 10-30min.

进一步的,所述焊片为银铜锡片,银铜锡的重量比为6:3:1。Further, the solder sheet is silver-copper-tin sheet, and the weight ratio of silver-copper-tin is 6:3:1.

进一步的,所述芯片为势垒能耐600℃以上高温烧结的表面镀银的芯片。Further, the chip is a chip plated with silver on the surface and the barrier can withstand high temperature sintering above 600°C.

进一步的,所述引出端的材料为杜美丝,引出端的外表面为铜,里面为铁镍合金。Further, the material of the lead-out end is Dumet wire, the outer surface of the lead-out end is copper, and the inside is iron-nickel alloy.

本发明的有益效果:本发明所述封装工艺利用高温冶金工艺将二极管的引出端与玻壳、引出端与焊片、芯片键合在一起,冶金键合结构具有可靠性高、 耐大电流冲击、热阻小的优点,且工作温度范围宽(-55℃~125℃),耐高温焊接(在550℃环境下15分钟,参数不恶化);产品选材实现了产品的全工作温度范围的热匹配;整个工艺过程中采用氮气为保护气体,生产安全,无危险气体使用;制成的二极管安装体积小,组装密度高,重量轻;工艺操作简单,易实现批量或大规模生产。Beneficial effects of the present invention: the packaging process of the present invention utilizes the high-temperature metallurgical process to bond the lead-out end of the diode with the glass bulb, the lead-out end, the solder piece, and the chip, and the metallurgical bonding structure has high reliability and high current shock resistance , the advantages of small thermal resistance, and a wide operating temperature range (-55 ° C ~ 125 ° C), high temperature welding (15 minutes at 550 ° C environment, the parameters do not deteriorate); product selection to achieve the product's full operating temperature range of heat Matching; Nitrogen is used as the protective gas in the whole process, which is safe in production and no dangerous gas is used; the installed diode is small in size, high in assembly density, and light in weight; the process is simple to operate, and it is easy to realize batch or large-scale production.

附图说明Description of drawings

图1为本发明所述表面贴装玻封二极管的结构示意图;Fig. 1 is the structural representation of the surface-mounted glass-encapsulated diode of the present invention;

图2为本发明所述表面贴装玻封二极管封装时的结构示意图;Fig. 2 is the schematic structural view when the surface mount glass-encapsulated diode of the present invention is packaged;

图3为封装过程中的温度曲线图;Fig. 3 is a temperature curve diagram during the encapsulation process;

图中:1、玻壳,2、芯片,3、引出端,4、焊片。In the figure: 1. Glass bulb, 2. Chip, 3. Lead terminal, 4. Solder tab.

具体实施方式Detailed ways

下面结合附图和具体实施例对本发明做进一步的说明和限定。The present invention will be further described and defined below in conjunction with the accompanying drawings and specific embodiments.

如图1所示,为本实施例中所述表面贴装玻封二极管的结构示意图,包括玻壳1、位于玻壳1中间的芯片2、套设在玻壳1两端的引出端3以及位于引出端3和芯片2之间的焊片4,本实施例中,通过高温冶金键合工艺将玻壳1与引出端3、玻壳1与焊片4、芯片2键合在一起。As shown in Figure 1, it is a schematic structural diagram of the surface-mounted glass-encapsulated diode described in this embodiment, including a glass bulb 1, a chip 2 located in the middle of the glass bulb 1, a lead-out terminal 3 sleeved at both ends of the glass bulb 1, and a The solder tab 4 between the terminal 3 and the chip 2, in this embodiment, the glass bulb 1 and the terminal 3, the glass bulb 1 and the solder tab 4, and the chip 2 are bonded together through a pyrometallurgical bonding process.

本实施中,所述高可靠表面贴装玻封二极管的封装工艺包括以下步骤:In this implementation, the packaging process of the high-reliability surface-mounted glass-encapsulated diode includes the following steps:

1)、制备芯片,芯片厚度为210μm±50μm;1) Prepare a chip with a chip thickness of 210μm±50μm;

2)、用模具将芯片、焊片、引出端和玻壳装配在一起,如图2所示;2) Assemble the chip, solder piece, terminal and glass bulb together with a mold, as shown in Figure 2;

3)、氮气烧结,打开烧结炉,按工艺条件设置工作温度及氮气流量,氮气流量为1000ml/min±10ml/min,待炉口温度升到300℃±20℃时,将装有半成品器件的模具放至炉口预热至少10min;炉温升到620℃±20℃后,将模具推入恒温区,恒温20min后将模具拉至炉口冷却30min,最后取出模具自然冷却到室温,完成封装,实现引出端、焊片与芯片良好的冶金键合以及玻壳与引出端的密封。烧结过程中的温度变化曲线如图3所示。3) Nitrogen sintering, open the sintering furnace, set the working temperature and nitrogen flow rate according to the process conditions, the nitrogen flow rate is 1000ml/min±10ml/min, when the temperature of the furnace mouth rises to 300℃±20℃, the semi-finished device will be installed Put the mold in the furnace mouth to preheat for at least 10 minutes; after the furnace temperature rises to 620°C±20°C, push the mold into the constant temperature zone, keep the temperature for 20 minutes, pull the mold to the furnace mouth to cool for 30 minutes, and finally take out the mold and let it cool naturally to room temperature to complete the packaging , to achieve good metallurgical bonding of the terminal, the solder piece and the chip, and the sealing of the glass bulb and the terminal. The temperature change curve during the sintering process is shown in Figure 3.

本实施例中,所述焊片为银铜锡片,银铜锡的重量比为6:3:1。所述芯片的表面为银,其势垒能耐600℃以上高温烧结。所述引出端的材料为杜美丝,引出端的外表面为铜,里面为铁镍合金。In this embodiment, the solder sheet is a silver-copper-tin sheet, and the weight ratio of silver-copper-tin is 6:3:1. The surface of the chip is silver, and its potential barrier can withstand high temperature sintering above 600°C. The material of the lead-out end is Dumet wire, the outer surface of the lead-out end is copper, and the inside is iron-nickel alloy.

本实施例所述高可靠表面贴装玻封二极管具有耐大电流冲击、连接可靠、热阻小等优势。封装时,需要综合考虑肖特基芯片耐受高温能力、芯片金属化、玻壳材料、引出端材料等因素,满足热匹配、机械强度、电流传输等要求。因此,为了实现产品的电参数要求和可靠连接,应该考虑产品的参数特点和结构特性。The high-reliability surface-mounted glass-encapsulated diode described in this embodiment has the advantages of high current impact resistance, reliable connection, and small thermal resistance. When packaging, it is necessary to comprehensively consider factors such as the high temperature resistance of the Schottky chip, chip metallization, glass bulb material, and lead-out material to meet the requirements of thermal matching, mechanical strength, and current transmission. Therefore, in order to achieve the electrical parameter requirements and reliable connection of the product, the parameter characteristics and structural characteristics of the product should be considered.

玻壳采用GLASS8532型玻壳,玻壳软化点温度为560℃,玻壳工作点最高温度为760℃;焊片采用银铜锡片,在600℃左右出现液态,到720 ℃全部液态,密度为9.57g/cc,因此确定高温键合温度为620℃±20℃。引出端的材料为杜美丝,引出端的外表面为铜,里面为铁镍合金。所述芯片的表面为银,其势垒能耐600℃以上高温烧结。The glass bulb adopts GLASS8532 type glass bulb, the temperature of the softening point of the glass bulb is 560°C, and the maximum temperature of the glass bulb's working point is 760°C; the solder piece is made of silver-copper-tin sheet, which appears liquid at about 600°C and completely liquid at 720°C, with a density of 9.57g/cc, so the high-temperature bonding temperature is determined to be 620°C±20°C. The material of the lead-out end is Dumet wire, the outer surface of the lead-out end is copper, and the inside is iron-nickel alloy. The surface of the chip is silver, and its potential barrier can withstand high temperature sintering above 600°C.

组成二极管的主要原料为引出端、玻壳、芯片、焊片(主要成分是Ag),各种材料的热膨胀系数见表1原材料热膨胀洗漱表,根据材料的膨胀系数来确定产品芯片硅层的厚度x和芯片银层厚度和焊片厚度y,一般取硅层厚度x为0.21mm,芯片银层厚度0.01mm,根据公式(x+0.01+y)*8.0×10-6=x*4.2×10-6+(0.01+y)*18.9×10-6计算出焊片厚度y,实现热匹配。The main raw materials that make up the diode are lead-out terminals, glass bulbs, chips, and solder pads (the main component is Ag). The thermal expansion coefficients of various materials are shown in Table 1. The thermal expansion table of raw materials, and the thickness of the silicon layer of the product chip is determined according to the expansion coefficient of the material. x and the thickness of the silver layer of the chip and the thickness of the solder piece y, generally take the thickness x of the silicon layer as 0.21mm, and the thickness of the silver layer of the chip as 0.01mm, according to the formula (x+0.01+y)*8.0×10 -6 =x*4.2×10 -6 +(0.01+y)*18.9×10 -6 Calculate the thickness y of the solder piece to achieve thermal matching.

根据产品结构特征,主要考虑玻壳和杜美丝引出端的热匹配性。从上表中可以看出,这两种材料的热膨胀系数相近,热匹配性良好。所以我们采用与杜美丝膨胀系数相匹配的玻壳,并在氮气保护气氛中烧结,保证产品长期可靠性。According to the structural characteristics of the product, the thermal matching between the glass bulb and the lead-out end of the Dumet wire is mainly considered. As can be seen from the above table, the thermal expansion coefficients of the two materials are similar, and the thermal matching is good. Therefore, we use a glass bulb that matches the expansion coefficient of Dumet wire, and sinter it in a nitrogen protective atmosphere to ensure long-term reliability of the product.

产品烧结成型后做过多次有关热匹配的试验,包括抗玻璃裂化试验,热冲击试验(液体-液体),500次温度冲击试验等各项环境机械试验考核合格,从而证明产品的高可靠性满足国家军用标准要求。After the product is sintered and formed, it has done many tests related to thermal matching, including glass cracking resistance test, thermal shock test (liquid-liquid), 500 times of temperature shock test and other environmental mechanical tests, which proves the high reliability of the product Meet the national military standard requirements.

以上只是对本发明的原理进行进一步的描述和解释,以使本领域技术人员能够更好的理解本发明,应该明白的是,下述内容仅起到解释、说明的作用,并不对本发明实质性内容进行限定,所有在本发明思路之内的改进,都应该在本发明保护范围之内。The above is only a further description and explanation of the principle of the present invention, so that those skilled in the art can better understand the present invention, it should be understood that the following content only serves to explain and illustrate, and does not have a substantial impact on the present invention. The content is limited, and all improvements within the idea of the present invention should be within the protection scope of the present invention.

Claims (4)

1.一种表面贴装玻封二极管的封装工艺,所述二极管包括玻壳、位于玻壳内的芯片、套设在玻壳两端的引出端,引出端与芯片之间设有焊片,其特征在于:二极管的引出端与玻壳通过高温冶金工艺键合在一起,引出端与焊片、芯片通过高温冶金工艺键合在一起,高温冶金键合温度为620℃±20℃;具体包括以下步骤:1. A packaging process for a surface-mounted glass-sealed diode, said diode comprising a glass bulb, a chip positioned in the glass bulb, lead-outs sleeved at both ends of the glass-bulb, soldering tabs are provided between the lead-out and the chip, and It is characterized in that: the leading end of the diode and the glass bulb are bonded together through a high-temperature metallurgical process, and the leading end is bonded with the solder piece and the chip through a high-temperature metallurgical process. The high-temperature metallurgical bonding temperature is 620 ° C ± 20 ° C; specifically includes the following step: 1)、制备芯片,设芯片硅层厚度为x,单位mm,芯片银层厚度0.01mm,芯片厚度为210μm±50μm,根据公式(x+0.01+y)*8.0×10-6=x*4.2×10-6+(0.01+y)*18.9×10-6计算出焊片厚度y,单位mm,实现热匹配,焊片为银铜锡片,银铜锡的重量比为6:3:1;1) To prepare the chip, set the thickness of the silicon layer of the chip to x, the unit is mm, the thickness of the silver layer of the chip is 0.01mm, and the thickness of the chip is 210μm±50μm, according to the formula (x+0.01+y)*8.0×10 -6 =x*4.2 ×10 -6 +(0.01+y)*18.9×10 -6 Calculate the thickness y of the solder sheet, in mm, to achieve thermal matching, the solder sheet is silver-copper-tin sheet, and the weight ratio of silver-copper-tin is 6:3:1 ; 2)、用模具将芯片、焊片、引出端和玻壳装配在一起;2), use the mold to assemble the chip, solder piece, terminal and glass bulb together; 3)、氮气烧结,打开烧结炉,按工艺条件设置工作温度及氮气流量,氮气流量为1000ml/min±10ml/min,待炉口温度升到300℃±20℃时,将装有半成品器件的模具放至炉口预热至少10min;炉温升到620℃±20℃后,将模具推入恒温区,达到预定的恒温时间将模具拉至炉口冷却30min,最后取出模具自然冷却到室温,完成封装,实现引出端、焊片与芯片的冶金键合以及玻壳与引出端的密封。3) Nitrogen sintering, open the sintering furnace, set the working temperature and nitrogen flow rate according to the process conditions, the nitrogen flow rate is 1000ml/min±10ml/min, when the temperature of the furnace mouth rises to 300℃±20℃, the semi-finished device will be installed Put the mold in the furnace mouth to preheat for at least 10 minutes; after the furnace temperature rises to 620°C±20°C, push the mold into the constant temperature zone, and pull the mold to the furnace mouth to cool for 30 minutes after reaching the predetermined constant temperature time, and finally take out the mold and let it cool down to room temperature naturally. Complete the packaging, realize the metallurgical bonding of the terminal, the solder piece and the chip, and the sealing of the glass bulb and the terminal. 2.根据权利要求1所述的表面贴装玻封二极管的封装工艺,其特征在于:所述恒温时间为10-30min。2. The packaging process of surface mount glass-encapsulated diodes according to claim 1, characterized in that: the constant temperature time is 10-30 minutes. 3.根据权利要求2所述的表面贴装玻封二极管的封装工艺,其特征在于:所述芯片为势垒能耐600℃以上高温烧结的表面镀银的芯片。3. The packaging process of surface-mounted glass-encapsulated diodes according to claim 2, wherein the chip is a silver-plated chip whose barrier can withstand high temperature sintering above 600°C. 4.根据权利要求3所述的表面贴装玻封二极管的封装工艺,其特征在于:所述引出端的材料为杜美丝,引出端的外表面为铜,里面为铁镍合金。4. The packaging process of surface mount glass-encapsulated diodes according to claim 3, characterized in that: the material of the lead-out end is Dumet wire, the outer surface of the lead-out end is copper, and the inside is iron-nickel alloy.
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Title
高可靠表面贴装玻封小电流肖特基二极管制造技术研究;李东华;《中国优秀硕士学位论文全文数据库》;20150430;I135-74 *

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