CN105319855B - Glue head and rubber tube integrated motion structure - Google Patents
Glue head and rubber tube integrated motion structure Download PDFInfo
- Publication number
- CN105319855B CN105319855B CN201410294868.7A CN201410294868A CN105319855B CN 105319855 B CN105319855 B CN 105319855B CN 201410294868 A CN201410294868 A CN 201410294868A CN 105319855 B CN105319855 B CN 105319855B
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- Prior art keywords
- rubber
- bracket
- head
- rubber tube
- actuating mechanism
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- 239000003292 glue Substances 0.000 title claims abstract description 33
- 238000004026 adhesive bonding Methods 0.000 claims abstract description 7
- 229920002120 photoresistant polymer Polymers 0.000 claims description 4
- 230000010354 integration Effects 0.000 claims description 2
- 238000004528 spin coating Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 238000010073 coating (rubber) Methods 0.000 abstract description 2
- 230000002452 interceptive effect Effects 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
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- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Transmission Devices (AREA)
Abstract
The invention relates to equipment in semiconductor production, in particular to an integrated moving structure of a rubber head and a rubber tube. The structure sets up inside the rubber coating unit, including actuating mechanism, rubber tube, gluey head and bracket structure, wherein actuating mechanism sets up in one side of gluing the cup, bracket structure sliding connection is on actuating mechanism, a plurality of rubber tubes have been laid in proper order along the direction of motion on the bracket structure, still be equipped with a plurality ofly on the bracket structure and glue the head with each rubber tube is corresponding, the one end and the bracket structure of each rubber tube are connected, and the other end is connected rather than corresponding gluey head, the rubber tube bracket drives the rubber tube and glues the head and removes along being on a parallel with the rubber tube array direction together. The invention realizes the replacement of a plurality of rubber heads, prevents the rubber pipes from interfering with each other and improves the stability of the equipment.
Description
Technical Field
The invention relates to equipment in semiconductor production, in particular to an integrated moving structure of a rubber head and a rubber tube.
Background
In the interior of a glue homogenizing and developing device in semiconductor wafer production, the fixing of a glue coating head and the fixing of a rubber tube are separated, the glue coating head is usually placed on a moving platform, and the root of the rubber tube is fixed on the fixed platform. In the process of replacing the rubber head, the rubber head moves, the fixed part of the rubber tube does not move, under the condition, the rubber tube can be twisted, the rubber tube and the rubber tube interfere with each other, friction is generated, the rubber tube is damaged, stable operation of equipment is not facilitated, dust particles can be generated due to friction of the rubber tube, and the particles can reduce the yield of semiconductor production.
In order to solve the problem of complaints, a novel distribution structure of the rubber heads and the rubber tubes and a novel movement mode are needed, and the problems caused by interference and friction between the rubber tubes are avoided.
Disclosure of Invention
In view of the above problems, the present invention is directed to a moving structure for integrating a glue head and a glue tube, which is located inside a gluing unit in semiconductor manufacturing, and by which mutual interference and friction of the glue tubes are avoided.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a glue head and rubber tube integration motion, the structure sets up inside the rubber coating unit, including actuating mechanism, rubber tube, glue head and bracket structure, wherein actuating mechanism sets up in one side of gluing the cup, bracket structure connects on actuating mechanism and makes linear motion through actuating mechanism's drive, a plurality of rubber tubes have been laid in proper order along the direction of motion on the bracket structure, still be equipped with a plurality ofly on the bracket structure and glue the head corresponding with each rubber tube, the one end and the bracket structure of each rubber tube are connected, and the other end is connected rather than corresponding gluey head, bracket structure passes through actuating mechanism's drive, drives the rubber tube and glues the head and removes along being on a parallel with the rubber tube array direction together.
The bracket structure comprises a rubber tube bracket, a general bracket and a rubber head bracket, wherein the general bracket is connected to the actuating mechanism, the rubber tube bracket and the rubber head bracket are arranged on the general bracket, one end of the rubber tube is connected with the rubber tube bracket, and the rubber head is arranged on the rubber head bracket.
Each rubber tube is of an inverted U-shaped structure. The arrangement direction of the rubber heads is parallel to the movement direction of the bracket structure. The actuating mechanism comprises a frame body, a motor, a ball screw and a nut, wherein the motor and the ball screw are arranged on the frame body, the output end of the motor is connected with the ball screw, the nut is connected with the ball screw, and the bracket structure is connected with the nut.
The invention has the advantages and beneficial effects that:
the structure is arranged inside the coating unit in the spin coating developing equipment, is a structure for replacing a plurality of photoresist heads, and can realize replacement of a plurality of photoresist heads by applying the integrated motion structure, thereby preventing mutual interference of rubber pipes and improving the stability of the equipment.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic top view of an end of the present invention in an extreme position;
fig. 3 is a schematic top view of the other end of the present invention in its extreme position.
Wherein: the rubber tube bracket is 1, the overall bracket is 2, the actuating mechanism is 3, the rubber tube is 4, the rubber head is 5, the rubber head bracket is 6, the rubber cup is 7, and the central point of the rubber cup is 8.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
As shown in figure 1, the glue spreading device is arranged in a glue spreading unit and comprises an actuating mechanism 3, a glue tube 4, a glue head 5 and a bracket structure, wherein the actuating mechanism 3 is arranged on one side of a glue cup 7, the bracket structure is connected to the actuating mechanism 3, and a plurality of glue tubes 4 are sequentially distributed on the bracket structure along the movement direction. The bracket structure is also provided with a plurality of rubber heads 5 corresponding to the rubber tubes 4, one end of each rubber tube 4 is connected with the bracket structure, and the other end is connected with the corresponding rubber head 5. The bracket structure drives the rubber tube 4 and the rubber head 5 to move together along the direction parallel to the arrangement direction of the rubber tube 4.
The bracket structure comprises a rubber pipe bracket 1, an overall bracket 2 and a rubber head bracket 6, wherein the overall bracket 2 is connected to an actuating mechanism 3 in a sliding manner, and the rubber pipe bracket 1 and the rubber head bracket 6 are arranged on the overall bracket 2. Each rubber tube 4 is of an inverted U-shaped structure, one end of each rubber tube 4 is connected with the rubber tube bracket 1, and the rubber tubes 4 are connected to the outside from the rubber tube outlets through the rubber tube brackets 1. The other end of each rubber tube 4 is connected with a rubber head 5, and the rubber heads 5 are arranged on a rubber head bracket 6. The arrangement direction of the rubber heads 5 is parallel to the movement direction of the bracket structure. The overall bracket 2 is driven by the actuating mechanism to drive the rubber head bracket 6 and the rubber heads 5 thereon to move together with the rubber pipe bracket 1 and the rubber pipes 4 thereon, and the moving direction is parallel to the arrangement direction of the rubber pipes 4. Actuating mechanism includes support body, ball, nut and motor, and the motor is connected with ball and all installs on the support body, total bracket 2 passes through the nut and is connected with ball, the linear motion is done with the nut through ball under the drive of motor to the bracket structure.
The working process of the invention is as follows:
in the production process of semiconductors, when different photoresists are required to be homogenized, the required glue head 5 and the rubber tube 4 are driven by the actuating mechanism to move to the position where the connecting line of the glue head and the rubber tube passes through the circle center of the glue cup 7. At this time, the glue head 5 can perform gluing operation at the glue cup central point 8 inside the glue cup 7, and at this time, the glue head 5 and the rubber tube 4 are arranged in a straight line which passes through the glue cup central point 8, so that interference with other rubber tubes is avoided. The moving limit positions of the glue heads 5 at the two ends are shown in fig. 2 and 3.
In the invention, the rubber heads 5 and the rubber tubes 4 can avoid the mutual interference between different rubber heads and different rubber tubes connected with the rubber heads in the process of gluing.
Claims (4)
1. The utility model provides a gluey head and rubber tube integration motion which characterized in that: the structure is arranged in the gluing unit and comprises an actuating mechanism (3), rubber tubes (4), a gluing head (5) and a bracket structure, wherein the actuating mechanism (3) is arranged on one side of a glue cup (7), the bracket structure is connected to the actuating mechanism (3) and is driven by the actuating mechanism (3) to move linearly, and a plurality of rubber tubes (4) are sequentially distributed on the bracket structure along the moving direction;
the bracket structure comprises a rubber pipe bracket (1), an overall bracket (2) and a rubber head bracket (6), wherein the overall bracket (2) is connected to the actuating mechanism (3), and the rubber pipe bracket (1) and the rubber head bracket (6) are arranged on the overall bracket (2);
the rubber head bracket (6) is provided with a plurality of rubber heads (5) corresponding to the rubber tubes (4), one end of each rubber tube (4) is connected with the rubber tube bracket (1), the other end of each rubber tube (4) is connected with the corresponding rubber head (5), and the bracket structure drives the rubber tubes (4) and the rubber heads (5) to move together along the direction parallel to the arrangement direction of the rubber tubes (4) through the driving of the actuating mechanism (3);
when different photoresists are required to carry out spin coating, the required glue head (5) and the rubber tube (4) move to the position where the connecting line of the glue head and the rubber tube passes through the circle center of the glue cup (7) under the driving of the actuating mechanism (3).
2. The integrated motion structure of the rubber head and the rubber tube according to claim 1, characterized in that: each rubber tube (4) is of an inverted U-shaped structure.
3. The integrated motion structure of the rubber head and the rubber tube according to claim 1, characterized in that: the arrangement direction of the rubber heads (5) is parallel to the movement direction of the bracket structure.
4. The integrated motion structure of the rubber head and the rubber tube according to claim 1, characterized in that: actuating mechanism (3) includes support body, motor, ball and nut, and wherein motor and ball set up on the support body and the output and the ball of motor are connected, the nut is connected with ball, the bracket structure is connected with the nut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410294868.7A CN105319855B (en) | 2014-06-25 | 2014-06-25 | Glue head and rubber tube integrated motion structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410294868.7A CN105319855B (en) | 2014-06-25 | 2014-06-25 | Glue head and rubber tube integrated motion structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105319855A CN105319855A (en) | 2016-02-10 |
| CN105319855B true CN105319855B (en) | 2020-02-07 |
Family
ID=55247545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410294868.7A Active CN105319855B (en) | 2014-06-25 | 2014-06-25 | Glue head and rubber tube integrated motion structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105319855B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1625797A (en) * | 2002-04-26 | 2005-06-08 | 东京毅力科创株式会社 | Substrate processing equipment |
| CN101738867A (en) * | 2008-11-07 | 2010-06-16 | 沈阳芯源微电子设备有限公司 | Photoresist conveying device |
| CN201815441U (en) * | 2010-08-16 | 2011-05-04 | 广东常青树化工有限公司 | Multi-feeding point adhesive-feeding machine |
| CN102266837A (en) * | 2011-06-23 | 2011-12-07 | 上海泓阳机械有限公司 | Reciprocating UV (ultraviolet) adhesive-dripping coating method and device thereof |
| CN203044263U (en) * | 2013-02-25 | 2013-07-10 | 杭州德源科技有限公司 | Glue coating machine |
| CN203561823U (en) * | 2013-09-23 | 2014-04-23 | 西安神光安瑞光电科技有限公司 | Gluing machine chamber |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7041172B2 (en) * | 2003-02-20 | 2006-05-09 | Asml Holding N.V. | Methods and apparatus for dispensing semiconductor processing solutions with multi-syringe fluid delivery systems |
-
2014
- 2014-06-25 CN CN201410294868.7A patent/CN105319855B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1625797A (en) * | 2002-04-26 | 2005-06-08 | 东京毅力科创株式会社 | Substrate processing equipment |
| CN101738867A (en) * | 2008-11-07 | 2010-06-16 | 沈阳芯源微电子设备有限公司 | Photoresist conveying device |
| CN201815441U (en) * | 2010-08-16 | 2011-05-04 | 广东常青树化工有限公司 | Multi-feeding point adhesive-feeding machine |
| CN102266837A (en) * | 2011-06-23 | 2011-12-07 | 上海泓阳机械有限公司 | Reciprocating UV (ultraviolet) adhesive-dripping coating method and device thereof |
| CN203044263U (en) * | 2013-02-25 | 2013-07-10 | 杭州德源科技有限公司 | Glue coating machine |
| CN203561823U (en) * | 2013-09-23 | 2014-04-23 | 西安神光安瑞光电科技有限公司 | Gluing machine chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105319855A (en) | 2016-02-10 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Applicant after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Applicant before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |