CN105204298A - Filling method for concave quadrilateral FPGA hardware for pattern generator of direct writing photo-etching machine - Google Patents
Filling method for concave quadrilateral FPGA hardware for pattern generator of direct writing photo-etching machine Download PDFInfo
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Abstract
The invention relates to a filling method for concave quadrilateral FPGA (Field Programmable Gate Array) hardware for a pattern generator of a direct writing photo-etching machine. Compared with the prior art, the filling method has the advantage that the defect of being unable to fill a concave quadrilateral is solved. The filling method comprises the following steps: pretreating data, acquiring vertex coordinate information, performing coordinate ligature on the vertex and drawing up four edges of the quadrilateral; inputting data, establishing four edge storages for the four edges and respectively storing the coordinate value information of the four edges in the corresponding edge storages; and confirming a filling area, performing synchronous traversal filling treatment on the four edge storages by taking Ymin as starting addresses, and after ending the treatment, performing traversal filling treatment on Ymin+1 by the four edge storages, till the read address is Ymax. According to the filling method provided by the invention, the concave quadrilateral can be directly filled.
Description
Technical field
The present invention relates to direct-write type lithography machine graphic processing data technical field, specifically a kind of recessed quadrilateral FPGA hardware fill method for direct-write type lithography machine pattern generator.
Background technology
Direct-write type lithography machine is the necessary equipment in semiconductor production process, direct-write type lithography machine equipment utilization pattern generator replaces the mask plate of conventional lithography machine, reflects the laser of specific wavelength and dry film or photoresist react and be transferred directly on PCB or wafer by exposure figure by DMD.The difference of itself and traditional exposure machine is: first via computing machine by exposure figure readout, be then converted into the figure coordinate point data being beneficial to slave computer process, flow to lower computer FPGA to fill by transmission medium and be reduced into binary graphics to be exposed.But due to the restriction by computing machine and slave computer processing graphics classification, at present can only for triangle (mainly) and trapezoidal (special convex quadrangle) for the process of pattern classes, run into recessed dimetric situation when occurring, then need first to be split into several triangles, form multiple leg-of-mutton combination, and then diabolo processes one by one, involved figure coordinate point data amount is large, and charging efficiency is lower, and then have impact on the production capacity of write-through lithographic equipment.How can realize directly carrying out filling operation for recessed quadrilateral and become the technical matters being badly in need of solving.
Summary of the invention
The object of the invention is to solve the defect cannot carrying out filling operation in prior art for recessed quadrilateral, providing a kind of recessed quadrilateral FPGA hardware fill method for direct-write type lithography machine pattern generator to solve the problems referred to above.
To achieve these goals, technical scheme of the present invention is as follows:
For a recessed quadrilateral FPGA hardware fill method for direct-write type lithography machine pattern generator, comprise the following steps:
Data prediction, obtains vertex point coordinate information, carries out coordinate line, draw the four edges of quadrilateral for summit;
Data inputting, sets up four limit storeies for four edges, the coordinate figure information of four edges is stored to respectively in the storer of corresponding limit;
The determination of fill area, to four limit storeies all with Y
mincarry out synchronous traversal for start address and fill process, process terminates rear four limit storeies all to Y
min+1carry out traversal and fill process, until reading address is Y
max.
Described data prediction comprises the following steps:
Definition quadrilateral place frame area size is M*N, obtains four known summits A (x1, y1), B (x2, y2), C (x3, y3), D (x4, y4);
Draw four edges for four summits A, B, C, D, get x, y value on every bar limit;
With y value for benchmark, merge record is carried out to the maximal value of the x value corresponding to y value same on every bar limit and minimum value, is recorded as X
all=(X
min, X
max);
Calculate the maximal value Y of Y-coordinate in four summits A (x1, y1), B (x2, y2), C (x3, y3), D (x4, y4)
max, minimum value Y
min.
Described data inputting comprises the following steps:
Set up four limit storeies, the size of limit storer is: the degree of depth is N, width is 2* (log
2m+1), the initial value of all positions is 0;
By four edges X
all, limit coordinate figure information within the scope of Y-coordinate take Y as write address information, X
all+ 1 deposits in four limit storeies respectively for writing data message.
Described traversal is filled process and is comprised the following steps:
With Y
minfor start address reads the value in the storer of limit, if the value read is 0, then represent that limit that this limit storer is corresponding and current Y value do not have intersection point; If the value read is non-zero, then represent that limit that this limit storer is corresponding and current Y value exist intersection point, by its record;
If a certain Y value and four edges all exist intersection point, then this quadrilateral is recessed quadrilateral, and the X value of this four edges of reading obtains this four intersection point X
a, X
b, X
c, X
d; To X
a, X
b, X
c, X
dcarry out ascending order arrangement; By X
awith X
bbetween and X
cwith X
dbetween be all filled to 1, all the other are 0, and filling result is stored into Frame Handler;
If a certain Y value and two limits all exist intersection point, the X value on these two limits of reading obtains X
aand X
b, by X
awith X
bbetween be filled to 1, all the other are 0, and filling result is stored into Frame Handler.
Beneficial effect
A kind of recessed quadrilateral FPGA hardware fill method for direct-write type lithography machine pattern generator of the present invention, compared with prior art can directly fill recessed quadrilateral.By the programmable features in conjunction with FPGA, utilize its abundant storer and logic gate resource, achieve the filling of recessed quadrilateral by the mode of parallel processing fast, not only save the bandwidth of data transmission, also improve the production capacity of direct-write type lithography machine.
Accompanying drawing explanation
Fig. 1 is method flow diagram of the present invention;
Fig. 2 a-Fig. 2 e is the filling instantiation procedure figure of concave quadrilateral of the present invention;
Fig. 3 is the filling exemplary plot that in the present invention, traversal fills treatment step;
Fig. 4 is the output timing diagram carrying out merge record in data prediction step of the present invention for the maximal value of the x value of same y value and minimum value;
Fig. 5 is the hardware model figure of limit storer.
Embodiment
For making to have a better understanding and awareness architectural feature of the present invention and effect of reaching, coordinating detailed description in order to preferred embodiment and accompanying drawing, being described as follows:
As shown in Figure 1, a kind of recessed quadrilateral FPGA hardware fill method for direct-write type lithography machine pattern generator of the present invention, comprises the following steps:
The first step, data prediction.Obtain vertex point coordinate information, carry out coordinate line for summit, draw the four edges of quadrilateral, namely by process of data preprocessing, x, y value got on recessed quadrilateral on every bar limit can be exported.Its concrete steps are as follows:
(1) defining quadrilateral place frame area size is M*N, by known four summits A (x1, y1), B (x2, y2), C (x3, y3), D (x4, y4), as shown in Figure 2 a, four vertex positions of quadrilateral can directly be oriented.
(2) as shown in Figure 2 b, draw four edges for four summits A, B, C, D, thus get x, y value on every bar limit.
(3) with y value for benchmark, merge record is carried out to the maximal value of the x value corresponding to y value same on every bar limit and minimum value, is recorded as X
all=(X
min, X
max).Determine X
allobject be, when limit or the extended line on limit and the angle of X-direction be less than 45 degree or be greater than 135 degree time, the identical Y in this limit has multiple different x value.And when the limit with such feature is positioned at the left side of place quadrilateral, X
minthen particularly important, when the limit with such feature is positioned at the right of place quadrilateral, X
maxthen particularly important.In litho machine field, the fineness of figure is very important, in order to not lose the edge detail information of figure, then needs to record all X information corresponding to identical Y value accurately.The output timing diagram of this step block as shown in Figure 4, as shown in Figure 2 b when limit or the extended line on limit and the angle of X-direction be less than 45 degree or be greater than 135 degree time, multiple different x value is had (because in order to meet this angle of inclination for identical Y, the trend of hypotenuse must be the continuous distribution of multiple X value in pixel compartments in same Y value, such as X
8, X
9and X
10), be X by maximal value and minimum value merge record
all=(X
min, X
max), effective X of current Y value is indicated by datavalid signal
allsignal.When limit or the extended line on limit and the angle of X-direction are more than or equal to 45 degree and are less than or equal to 135 degree, same X
all=(X
min, X
max), but just due to angle of inclination, now X
min=X
max.The effective marker of all output with datavalid signal for high level ' 1 ' is as the criterion.
(4) the maximal value Y of Y-coordinate in four summits A (x1, y1), B (x2, y2), C (x3, y3), D (x4, y4) is calculated
max, minimum value Y
min, to carry out traversal below from top to bottom filling process.
Second step, data inputting.Four limit storeies are set up for four edges, the coordinate figure information of four edges is stored to respectively in the storer of corresponding limit, FPGA is used to carry out the filling of recessed quadrilateral at this, above-mentioned picture four edges is carried out simultaneously, and the information of four edges is stored in the limit storer of formed objects respectively, the programmable features of recycling FPGA, by judging that the content information being stored in identical address in the storer of limit identifies recessed quadrilateral, and utilize its abundant logical resource to calculate the region of filling 1 and 0, make the traversal for four edges fill processing procedure also synchronously to carry out, implementation procedure is as the filling process of Fig. 2 a-Fig. 2 e.Its concrete steps are as follows:
(1) set up four limit storeies, it is the IP kernel of the customizable of FPGA inside, and name is called DualPortRAM, and the size of limit storer is: the degree of depth is N, width is 2* (log
2m+1), the initial value of all positions is 0, and the hardware model figure of limit storer as shown in Figure 5.
(2) by four edges X
all, limit coordinate figure information in Y-coordinate scope (recessed square range) take Y as write address information, X
all+ 1 deposits in four limit storeies respectively for writing data message, all stores the x value of current this edge, and be take Y as address information in the storer of each limit.
3rd step, the determination of fill area.To four limit storeies all with Y
minfor start address traversal of carrying out synchronously (walking abreast) fills process, it is in the frame memory of M*N that the binary result after filling is stored to size, and process terminates the address of reading of four limit storeies all to be added 1 afterwards simultaneously, and namely four limit storeies are all to Y
min+1carry out traversal and fill process, until reading address is Y
max, now complete the filling of this concave polygon.Traversal is filled process and is comprised the following steps:
(1) with Y
minfor start address reads the value in the storer of limit, if the value read is 0, then represent that limit that this limit storer is corresponding and current Y value do not have intersection point, namely current edge regions does not relate to this coordinate points.If the value read is non-zero, then represent that limit that this limit storer is corresponding and current Y value exist intersection point, by its record, to treat that subsequent analysis is four intersection points or two intersection points.
(2) if a certain Y value and four edges all exist intersection point, then this quadrilateral is recessed quadrilateral, and as shown in the upper horizontal line of Fig. 3, a certain Y value and four edges all exist intersection point, then can there are four intersection point X under same Y value
a, X
b, X
c, X
d.The X value of this four edges read respectively, directly obtains this four intersection point X by limit coordinate information
a, X
b, X
c, X
d.Due to the characteristic of recessed quadrilateral, in four intersection points, middle intersection point adjacent between two can not produce fill area, otherwise can not form recessed quadrilateral.Therefore to X
a, X
b, X
c, X
dcarry out ascending order arrangement; By X
awith X
bbetween and X
cwith X
dbetween be all filled to 1, all the other are 0, X
bwith X
cbetween do not fill, filling result is stored into Frame Handler, as shown in Figure 2 c, now completes the filling work of a Y value (transverse direction).
(3) if a certain Y value and two limits all exist intersection point, as shown in the lower horizontal line of Fig. 3, the X value on these two limits of reading, obtains X by limit coordinate information
aand X
b, by X
awith X
bbetween be filled to 1, all the other are 0, and filling result is stored into Frame Handler.As shown in Figure 2 d, the filling work of a Y value (transverse direction) is now also completed.
From Y
minfor start address starts, add 1 with each Y-axis address and circulate, namely carry out Y
min+1, Y
min+2, Y
min+3deng traversal fill process, synchronously carried out by four limit storeies, as shown in Figure 2 e, until Y
maxtraversal fill after process terminates, the filling work of whole recessed quadrilateral completes.
More than show and describe ultimate principle of the present invention, principal character and advantage of the present invention.The technician of the industry should understand; the present invention is not restricted to the described embodiments; the just principle of the present invention described in above-described embodiment and instructions; the present invention also has various changes and modifications without departing from the spirit and scope of the present invention, and these changes and improvements all fall in claimed scope of the present invention.The protection domain of application claims is defined by appending claims and equivalent thereof.
Claims (4)
1., for a recessed quadrilateral FPGA hardware fill method for direct-write type lithography machine pattern generator, it is characterized in that, comprise the following steps:
11) data prediction, obtains vertex point coordinate information, carries out coordinate line, draw the four edges of quadrilateral for summit;
12) data inputting, sets up four limit storeies for four edges, the coordinate figure information of four edges is stored to respectively in the storer of corresponding limit;
13) determination of fill area, to four limit storeies all with Y
mincarry out synchronous traversal for start address and fill process, process terminates rear four limit storeies all to Y
min+1carry out traversal and fill process, until reading address is Y
max.
2. a kind of recessed quadrilateral FPGA hardware fill method for direct-write type lithography machine pattern generator according to claim 1, it is characterized in that, described data prediction comprises the following steps:
21) defining quadrilateral place frame area size is M*N, obtains four known summits A (x1, y1), B (x2, y2), C (x3, y3), D (x4, y4);
22) draw four edges for four summits A, B, C, D, get x, y value on every bar limit;
23) with y value for benchmark, merge record is carried out to the maximal value of the x value corresponding to y value same on every bar limit and minimum value, is recorded as X
all=(X
min, X
max);
24) the maximal value Y of Y-coordinate in four summits A (x1, y1), B (x2, y2), C (x3, y3), D (x4, y4) is calculated
max, minimum value Y
min.
3. a kind of recessed quadrilateral FPGA hardware fill method for direct-write type lithography machine pattern generator according to claim 1, it is characterized in that, described data inputting comprises the following steps:
31) set up four limit storeies, the size of limit storer is: the degree of depth is N, width is 2* (log
2m+1), the initial value of all positions is 0;
32) by four edges X
all, limit coordinate figure information within the scope of Y-coordinate take Y as write address information, X
all+ 1 deposits in four limit storeies respectively for writing data message.
4. a kind of recessed quadrilateral FPGA hardware fill method for direct-write type lithography machine pattern generator according to claim 1, is characterized in that, described traversal is filled process and comprised the following steps:
41) with Y
minfor start address reads the value in the storer of limit, if the value read is 0, then represent that limit that this limit storer is corresponding and current Y value do not have intersection point; If the value read is non-zero, then represent that limit that this limit storer is corresponding and current Y value exist intersection point, by its record;
42) if a certain Y value and four edges all exist intersection point, then this quadrilateral is recessed quadrilateral, and the X value of this four edges of reading obtains this four intersection point X
a, X
b, X
c, X
d; To X
a, X
b, X
c, X
dcarry out ascending order arrangement; By X
awith X
bbetween and X
cwith X
dbetween be all filled to 1, all the other are 0, and filling result is stored into Frame Handler;
43) if a certain Y value and two limits all exist intersection point, the X value on these two limits of reading obtains X
aand X
b, by X
awith X
bbetween be filled to 1, all the other are 0, and filling result is stored into Frame Handler.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105741337A (en) * | 2016-02-03 | 2016-07-06 | 合肥亚歌半导体科技合伙企业（有限合伙） | Triangle filling method for rasterizing vector data of lithography machines |
| CN111830797A (en) * | 2020-07-27 | 2020-10-27 | 上海华力集成电路制造有限公司 | OPC monitoring graph generating method and generating module thereof |
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