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CN105043539B - Method and device for operating a photodetector - Google Patents

Method and device for operating a photodetector Download PDF

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CN105043539B
CN105043539B CN201510311931.8A CN201510311931A CN105043539B CN 105043539 B CN105043539 B CN 105043539B CN 201510311931 A CN201510311931 A CN 201510311931A CN 105043539 B CN105043539 B CN 105043539B
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CN105043539A (en
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R·施尼策尔
J·施帕贝尔特
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Robert Bosch GmbH
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/0228Control of working procedures; Failure detection; Spectral bandwidth calculation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4228Photometry, e.g. photographic exposure meter using electric radiation detectors arrangements with two or more detectors, e.g. for sensitivity compensation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483Details of pulse systems
    • G01S7/486Receivers
    • G01S7/4861Circuits for detection, sampling, integration or read-out
    • G01S7/4863Detector arrays, e.g. charge-transfer gates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44Electric circuits
    • G01J2001/4446Type of detector
    • G01J2001/446Photodiode
    • G01J2001/4466Avalanche

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  • Light Receiving Elements (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

本发明涉及用于运行光电探测器的方法和装置。提供一种用于运行光电探测器(100)的方法。该光电探测器(100)具有每像点(102)多个可单独激活的雪崩光电二极管(104)。雪崩光电二极管(104)在激活状态下被构造用于当接收光量时提供电脉冲。该雪崩光电二极管(104)在电脉冲之后在再生周期内是光不敏感的。该方法具有激活像点(102)的雪崩光电二极管(104)中的至少两个的步骤。在此,雪崩光电二极管(104)彼此偏移一时长被激活,其中该时长小于再生周期。

The invention relates to methods and devices for operating photodetectors. A method for operating a photodetector (100) is provided. The photodetector (100) has a plurality of individually activatable avalanche photodiodes (104) per image point (102). The avalanche photodiode (104) is configured in an activated state to provide an electrical pulse when receiving an amount of light. The avalanche photodiode (104) is light insensitive during the regeneration period after the electrical pulse. The method has the step of activating at least two of the avalanche photodiodes (104) of the image point (102). Here, the avalanche photodiodes (104) are activated offset from each other by a duration that is less than the regeneration period.

Description

用于运行光电探测器的方法和装置Method and device for operating a photodetector

技术领域technical field

本发明涉及一种用于运行光电探测器的方法、一种相应的装置以及一种相应的计算机程序产品。The invention relates to a method for operating a photodetector, a corresponding device and a corresponding computer program product.

背景技术Background technique

光电二极管需要结构形式决定的光量,以便提供最小亮度值。雪崩光电二极管可以将显著较少的光量转换为电信号。Photodiodes require a structurally determined amount of light in order to provide a minimum brightness value. Avalanche photodiodes can convert significantly smaller amounts of light into electrical signals.

DE 10 2009 029 376 A1描述了一种具有可瘫痪的光子敏感元件的光子探测器以及一种具有这样的光子探测器的测距设备。DE 10 2009 029 376 A1 describes a photon detector with a paralyzable photon sensitive element and a distance measuring device with such a photon detector.

发明内容Contents of the invention

在该背景下利用在此介绍的方案按照独立权利要求介绍一种用于运行光电探测器的方法、此外介绍一种使用该方法的装置以及最后介绍一种相应的计算机程序产品。有利的扩展方案由各自的从属权利要求和随后的说明给出。Against this background, a method for operating a photodetector, a device using the method and finally a corresponding computer program product are described according to the independent claims using the approach presented here. Advantageous refinements are given by the respective subclaims and the ensuing description.

当最小光量落到雪崩光电二极管的光敏感区域上时,雪崩光电二极管(也称为单光子雪崩二极管)触发电脉冲。在单个光子的情况下已经可以达到光量。在已提供了电脉冲之后,雪崩光电二极管需要固定的时间,直至其重新准备好,响应于最小光量的入射而提供另外的电脉冲。在该时间期间不能记录光。Avalanche photodiodes (also known as single-photon avalanche diodes) trigger an electrical pulse when a minimum amount of light falls on the light-sensitive area of the avalanche photodiode. Light volumes are already achievable in the case of single photons. After an electrical pulse has been provided, the avalanche photodiode requires a fixed time until it is ready again to provide another electrical pulse in response to the incidence of a minimum amount of light. Light cannot be recorded during this time.

按照在此介绍的方案,通过以下方式减小不敏感或盲的时间:在该时间之内释放另外的雪崩光电二极管,以便成像在电脉冲中的最小光量。According to the approach presented here, the time of insensitivity or blindness is reduced by releasing an additional avalanche photodiode within which the minimum amount of light in the electrical pulse is imaged.

介绍一种具有每像点多个可单独激活的雪崩光电二极管的光电探测器,其中雪崩光电二极管在激活状态下被构造用于当接收光量时提供电脉冲,并且雪崩光电二极管在提供电脉冲之后在再生周期内是光不敏感的。Introducing a photodetector having a plurality of individually activatable avalanche photodiodes per image point, wherein the avalanche photodiodes are configured in the activated state to provide an electrical pulse when receiving a light quantity, and the avalanche photodiodes after providing the electrical pulse Light insensitive during the regeneration cycle.

此外,介绍一种用于运行光电探测器的方法,其中该方法具有以下步骤:Furthermore, a method for operating a photodetector is presented, wherein the method has the following steps:

激活像点的雪崩光电二极管中的至少两个,其中雪崩光电二极管彼此偏移一时长被激活,其中该时长小于再生周期。At least two of the avalanche photodiodes of the image point are activated, wherein the avalanche photodiodes are activated offset from each other by a period of time, wherein the period of time is less than the regeneration period.

光电探测器可以被理解为图像传感器。光电探测器可以具有多个像点或像素。像点可以按平面矩阵布置。雪崩光电二极管可以被理解为单光子光电二极管。光量可以取决于雪崩光电二极管的实施方式。光量可以是小的,使得射到雪崩光电二极管上的单个光子可以触发脉冲。再生周期可以是雪崩光电二极管为了在提供脉冲之后重新准备好提供另外的脉冲所需的时长。时长可以是光电探测器的采样率的倒数。A photodetector can be understood as an image sensor. A photodetector can have multiple image points or pixels. The image points can be arranged in a planar matrix. Avalanche photodiodes can be understood as single-photon photodiodes. The amount of light can depend on the implementation of the avalanche photodiode. The amount of light can be small so that a single photon hitting the avalanche photodiode can trigger a pulse. The regeneration period may be the length of time required for the avalanche photodiode to be ready to provide another pulse after providing a pulse. The duration may be the reciprocal of the sampling rate of the photodetector.

可以按时间顺序激活像点的雪崩光电二极管。在激活了像点的最后的雪崩光电二极管之后,可以重新激活像点的第一雪崩光电二极管。可以按次序激活像点的雪崩光电二极管。通过依次激活可以实现光电探测器的连续运行。The avalanche photodiodes of the pixels can be activated in time sequence. After the last avalanche photodiode of a pixel has been activated, the first avalanche photodiode of a pixel can be reactivated. The avalanche photodiodes of the pixels can be activated sequentially. Continuous operation of the photodetectors is achieved by sequential activation.

该时长可以大于数量的倒数乘以再生周期,以便能够实现无中断的检测。该时长可以取决于雪崩光电二极管的数量。像点具有越多的雪崩光电二极管,则该时长可以被设定为越短。The duration may be greater than the reciprocal of the number multiplied by the regeneration period in order to enable uninterrupted detection. The duration may depend on the number of avalanche photodiodes. The more avalanche photodiodes a pixel has, the shorter this time period can be set.

如果再生阶段应当持续更长时间,则该时长可以被延长小的时长,使得像点的第一雪崩光电二极管和接着所有其它雪崩光电二极管在其再生周期之后经过用作安全保留的空转阶段。由此可以确保连续的运行。If the regeneration phase should last longer, this duration can be extended by a small duration, so that the first avalanche photodiode of a pixel and then all other avalanche photodiodes go through an idle phase as a safety reserve after their regeneration period. Continuous operation can thus be ensured.

该方法可以具有去激活雪崩光电二极管的步骤。在激活雪崩光电二极管时开始的雪崩光电二极管的激活持续时间到期了之后,可以实施去激活的步骤,以便避免错误探测。激活持续时间可以是雪崩光电二极管应当保持激活的时长。在激活持续时间之后,在重新开始激活之前,可以等待标称的再生周期过去。The method may have the step of deactivating the avalanche photodiode. After the activation duration of the avalanche photodiode that started when the avalanche photodiode was activated has expired, a deactivation step can be carried out in order to avoid false detections. The activation duration may be how long the avalanche photodiode should remain activated. After the activation duration, a nominal regeneration period may be waited to elapse before resuming activation.

可以同时激活每像点至少两个雪崩光电二极管,以便量化所检测的光量。在此,当接收所需的光量、例如一个光子时,可以触发雪崩光电二极管之一。当光量双倍大、例如包括两个光子时,可以触发两个雪崩光电二极管。同时激活越多的雪崩光电二极管,则可以区分强度的越多分级。At least two avalanche photodiodes per image point can be activated simultaneously in order to quantify the amount of light detected. Here, one of the avalanche photodiodes can be triggered when a desired amount of light, for example one photon, is received. When the amount of light is twice as large, for example comprising two photons, two avalanche photodiodes can be triggered. The more avalanche photodiodes are activated simultaneously, the more gradations of intensity can be distinguished.

该方法可以响应于起始时间点而开始。该时长可以是可变的。起始时间点例如可以是光脉冲的发送时间点。从起始时间点起可以测量时间,直至像点的雪崩光电二极管中的一个提供电脉冲。根据流逝的时间和在穿透的介质中的光速可以确定光脉冲经过了的空间路段。当光脉冲在对象处被反射时,与对象的距离取决于光电探测器的几何结构近似地相应于半个路段。The method can start in response to a starting point in time. This duration can be variable. The starting time point may be, for example, the sending time point of the light pulse. Time can be measured from a starting point in time until one of the avalanche photodiodes of the pixel supplies an electrical pulse. From the elapsed time and the speed of light in the penetrating medium, the spatial path traveled by the light pulse can be determined. When the light pulse is reflected at the object, the distance to the object corresponds approximately to half a distance depending on the geometry of the photodetector.

该方法可以具有在使用运行时间信号的情况下确定起始时间点的步骤。运行时间信号可以是在时间上经过的光脉冲的接收情况下在发出光脉冲和接收光脉冲之间已被确定的时长。也就是,运行时间信号可以代表基本知识。因此,当在该时长之内以小的概率预期其光脉冲时,可以匹配方法的起始时间点。The method can have the step of determining the starting point in time using the runtime signal. The runtime signal can be a time period that has been determined between emission of a light pulse and receipt of a light pulse in the case of reception of a temporally elapsed light pulse. That is, run-time signals can represent fundamental knowledge. The starting point in time of the method can thus be adapted if its light pulse is expected with low probability within this duration.

该方法可以具有设定时长的步骤,其中在更靠近起始时间点处比在进一步远离起始时间点处更小地设定时长,以便在更靠近起始时间点处获得比进一步远离起始时间点处更大的时间分辨率。通过在更靠近起始时间点处的更短的时长可以实现更精细的空间分辨率,于是在更大的距离中可以以更粗略的分辨率来检测。通过更精细的分辨率在光强度保持不变的情况下在时长之内的光量与在更粗略的分辨率的情况下相比变得更小。换言之,具有更粗略的分辨率的光电探测器的敏感性变得更大。The method may have the step of setting a duration, wherein the duration is set smaller at a point in time closer to the start than at a point further away from the start in order to obtain a duration closer to the point in time than further away from the start. Greater temporal resolution at time points. A finer spatial resolution can be achieved by shorter durations closer to the starting time point, so detection can be performed with a coarser resolution in larger distances. With a finer resolution, the amount of light within a duration with a constant light intensity becomes smaller than with a coarser resolution. In other words, the sensitivity of the photodetector becomes greater with a coarser resolution.

该方法可以响应于起始时间点而开始。在进一步远离该方法的起始时间点处可以同时激活比更靠近起始时间点处更多的雪崩光电二极管,以便随着距起始时间点的距离增加获得更大的敏感性。同时有效的雪崩光电二极管越多,则用于光的可能的命中面积变得越大。因为在进一步远离起始时间点处预期待接收的光脉冲具有较小的强度,因为该光脉冲通过介质被衰减,所以通过较大的敏感性可以继续确保可靠的接收。The method can start in response to a starting point in time. More avalanche photodiodes may be activated simultaneously at a starting time point further away from the method than closer to the starting time point in order to obtain a greater sensitivity with increasing distance from the starting time point. At the same time, the more active avalanche photodiodes, the larger the possible impingement area for light becomes. Since the light pulse to be received is expected to have a lower intensity further away from the starting point in time, since it is attenuated by the medium, reliable reception can still be ensured by the greater sensitivity.

此外,介绍一种用于运行光电探测器的装置,其中该光电探测器具有每像点多个可单独激活的雪崩光电二极管,其中雪崩光电二极管在激活状态下被构造用于当接收光量时提供电脉冲,并且雪崩光电二极管在电脉冲之后在再生周期内是光不敏感的,其中该装置具有以下特征:Furthermore, a device for operating a photodetector with a plurality of individually activatable avalanche photodiodes per pixel is presented, wherein in the activated state the avalanche photodiodes are designed to provide electrical pulse, and the avalanche photodiode is light-insensitive during the regeneration period following the electrical pulse, wherein the device has the following characteristics:

用于激活像点的雪崩光电二极管中的至少两个的设备,其中雪崩光电二极管彼此偏移一时长被激活,其中该时长小于再生周期。A device for activating at least two of the avalanche photodiodes of an image point, wherein the avalanche photodiodes are activated offset from each other by a period of time, wherein the period of time is less than the regeneration period.

还可以通过本发明的装置形式的该实施变型方案快速且有效地解决本发明所基于的任务。The object on which the invention is based can also be solved quickly and efficiently by this embodiment variant in the form of the device of the invention.

装置当前可以被理解为电设备,其处理传感器信号并且依据传感器信号输出控制和/或数据信号。该装置可以具有接口,该接口可以以硬件和/或软件方式来构造。在以硬件方式构造的情况下接口例如可以是所谓的系统ASIC的部分,该部分包含装置的不同功能。然而也可能的是,接口是特有的、集成的电路或至少部分地由分立的组件组成。在以软件方式构造的情况下接口可以是软件模块,其例如在微控制器上除了其它软件模块之外而存在。A device can be understood as an electrical device which processes sensor signals and outputs control and/or data signals as a function of the sensor signals. The device can have an interface, which can be embodied in hardware and/or software. In the case of a hardware configuration, the interface can, for example, be part of a so-called system ASIC, which contains the various functions of the device. However, it is also possible for the interface to be a dedicated, integrated circuit or to consist at least partially of discrete components. In the case of a software configuration, the interface can be a software module which, for example, exists on a microcontroller in addition to other software modules.

还有利的是具有程序代码的计算机程序产品或计算机程序,该程序代码可以被存储在机器可读的载体或存储介质、诸如半导体存储器、硬盘存储器或光学存储器上,并且特别是当程序产品或程序在计算机或装置上被实施时可以被用于执行、实现和/或控制按照上述实施方式之一的方法的步骤。Also advantageous is a computer program product or computer program with a program code which can be stored on a machine-readable carrier or storage medium, such as a semiconductor memory, hard disk memory or optical memory, and in particular when the program product or program When implemented on a computer or device, it can be used to execute, realize and/or control the steps of the method according to one of the above-described embodiments.

附图说明Description of drawings

在此介绍的方案下面根据附图示例性地更详细地进行解释。The concept presented here is explained in more detail below by way of example with reference to the figures.

图1示出按照本发明的一个实施例的光电探测器的图示;Figure 1 shows a diagram of a photodetector according to one embodiment of the present invention;

图2示出在单个雪崩光电二极管的情况下探测光的时间流程;Figure 2 shows the time course of light detection in the case of a single avalanche photodiode;

图3示出在不同地成形的光脉冲的情况下雪崩光电二极管的探测时间点的图示;3 shows a diagram of the detection times of an avalanche photodiode in the case of differently shaped light pulses;

图4a示出按照本发明的一个实施例具有可单独激活的雪崩光电二极管的像点的图示;FIG. 4 a shows a diagram of an image point with individually activatable avalanche photodiodes according to an exemplary embodiment of the invention;

图4b示出按照本发明的一个实施例由偏移一时长被激活的雪崩光电二极管检测的不同的光脉冲的图示;Figure 4b shows a graphical representation of different light pulses detected by an avalanche photodiode activated offset by a duration according to one embodiment of the present invention;

图5a示出按照本发明的一个实施例具有可按组地激活的雪崩光电二极管的像点的图示;FIG. 5 a shows a diagram of an image point with avalanche photodiodes that can be activated in groups according to an exemplary embodiment of the invention;

图5b示出按照本发明的一个实施例由偏移一时长被激活的雪崩光电二极管组检测的不同的光脉冲的图示;Figure 5b shows a graphical representation of different light pulses detected by groups of avalanche photodiodes activated offset by a duration according to one embodiment of the present invention;

图6a示出按照本发明的一个实施例具有可不同数量地激活的雪崩光电二极管的像点的图示;FIG. 6 a shows a diagram of an image point with different numbers of avalanche photodiodes that can be activated according to an exemplary embodiment of the invention;

图6b示出按照本发明的一个实施例由不同数量的雪崩光电二极管组检测的不同的光脉冲的图示;Figure 6b shows a graphical representation of different light pulses detected by different numbers of avalanche photodiode groups according to one embodiment of the present invention;

图6c示出按照本发明的一个实施例由偏移不同时长被激活的不同大小的雪崩光电二极管组检测的不同的光脉冲的图示;Figure 6c shows a graphical representation of different light pulses detected by different sized avalanche photodiode groups activated for different durations in accordance with one embodiment of the present invention;

图7a示出按照本发明的一个实施例具有可偏移不同时长被激活的雪崩光电二极管的像点的图示;Fig. 7a shows a diagram of an image point with avalanche photodiodes activated for different durations that can be shifted according to an embodiment of the present invention;

图7b示出按照本发明的一个实施例由偏移不同时长被激活的雪崩光电二极管组检测的不同的光脉冲的图示;Figure 7b shows a graphical representation of different light pulses detected by groups of avalanche photodiodes activated for different durations in accordance with one embodiment of the present invention;

图8示出按照本发明的一个实施例由不同大小的雪崩光电二极管组以不同大小的间隔检测的光脉冲的图示;Figure 8 shows a graphical representation of light pulses detected by different sized avalanche photodiode groups at different sized intervals in accordance with one embodiment of the present invention;

图9示出按照本发明的一个实施例的用于运行光电探测器的方法的流程图;和Figure 9 shows a flow chart of a method for operating a photodetector according to one embodiment of the present invention; and

图10示出按照本发明的一个实施例的用于运行光电探测器的装置的方框图。FIG. 10 shows a block diagram of a device for operating a photodetector according to an exemplary embodiment of the invention.

在本发明的有利实施例的随后描述中为在不同图中示出的且起类似作用的元件使用相同或类似的附图标记,其中舍弃对这些元件的重复描述。In the subsequent description of advantageous exemplary embodiments of the invention, identical or similar reference symbols are used for elements shown in different figures and having a similar effect, wherein a repeated description of these elements is omitted.

具体实施方式Detailed ways

图1示出按照本发明的一个实施例的光电探测器100的图示。FIG. 1 shows a diagram of a photodetector 100 according to an exemplary embodiment of the invention.

光电探测器100是示意性示出的并且在此例如具有四个像点102或像素102。光电探测器100可以称为SPAD成像器2×2并且可以每计数周期记录直至100个事件。像点102布置在由行和列组成的矩形栅格中。像点102可以称为SPAD像素5×5并且可以每计数周期各记录直至25个事件。每个像点102具有每像点102多个可单独激活的雪崩光电二极管104(为清楚起见每像点102各仅一个雪崩光电二极管104配备有附图标记)。雪崩光电二极管104可以称为SPAD微单元并且每计数周期各记录一个事件。Photodetector 100 is shown schematically and here has, for example, four image points 102 or pixels 102 . Photodetector 100 may be referred to as a SPAD imager 2x2 and may record up to 100 events per count cycle. Pixels 102 are arranged in a rectangular grid consisting of rows and columns. Pixels 102 can be referred to as SPAD pixels 5×5 and can record up to 25 events per counting cycle. Each pixel 102 has a plurality of individually activatable avalanche photodiodes 104 per pixel 102 (only one avalanche photodiode 104 per pixel 102 is assigned a reference numeral for clarity). Avalanche photodiodes 104 may be referred to as SPAD microcells and each record one event per count cycle.

在该实施例中,光电探测器100具有每像点25个雪崩光电二极管104。雪崩光电二极管104同样布置在由行和列组成的矩形栅格中,其中每行和列并排或上下重叠地布置各五个雪崩光电二极管104。也就是,像点102是近似正方形的。雪崩光电二极管104在激活状态下被构造用于,当每雪崩光电二极管104接收光量时,提供各一个电脉冲。光量可以相应于单个光子。通过光量可以触发电脉冲。在雪崩光电二极管104输出了电脉冲之后,其在再生周期内是光不敏感的,也就是盲的。在该时间内入射的光子不触发脉冲。当雪崩光电二极管104处于去激活状态时,入射的光即使在用于触发电脉冲的光量之上也不触发电脉冲。In this embodiment, the photodetector 100 has 25 avalanche photodiodes 104 per pixel. The avalanche photodiodes 104 are likewise arranged in a rectangular grid of rows and columns, with each row and column having five avalanche photodiodes 104 arranged side by side or one above the other. That is, pixel 102 is approximately square. In the activated state, the avalanche photodiodes 104 are configured to provide one electrical pulse per avalanche photodiode 104 receiving an amount of light. The amount of light may correspond to a single photon. Electrical pulses can be triggered by the amount of light. After the avalanche photodiode 104 has output an electrical pulse, it is light insensitive, ie blind, during the regeneration period. Photons incident during this time do not trigger the pulse. When the avalanche photodiode 104 is in a deactivated state, incident light does not trigger an electrical pulse even above the amount of light used to trigger the electrical pulse.

SPAD接收器100可以以不同的方式实现。以最简单的形式,其由单个SPAD单元104组成。该SPAD单元可以记录或计数各个光子的到达。但是,由于几纳秒、例如10纳秒直至50纳秒的内部复位时间,仅有限的计数率、例如每秒20兆计数(MCounts/s)至100MCounts/s是可能的,除此之外SPAD单元104处于饱和。此外,单个SPAD单元104在计数之内不记录,是否单个光子或多个光子到达了。The SPAD receiver 100 can be implemented in different ways. In its simplest form, it consists of a single SPAD unit 104 . The SPAD unit can record or count the arrival of individual photons. However, due to the internal reset time of a few nanoseconds, such as 10 nanoseconds up to 50 nanoseconds, only limited count rates, such as 20 megacounts per second (MCounts/s) to 100 MCounts/s are possible, otherwise the SPAD Cell 104 is in saturation. Furthermore, individual SPAD units 104 do not record within the count whether a single photon or multiple photons have arrived.

按照一个实施例,单个雪崩光电二极管104不具有针对用于触发电脉冲的光量的阈值。每个单个光子可以触发激活。因此,背景光原则上每时间单位产生一定的干扰计数率或激活。此外,激活也可以是热引起的,这可以称为暗计数率。但是出发点是,通过由有效的光源辐射的有效光,例如反射的激光脉冲,实现总计数率的可测量的提高或明显提高的计数率并且因此可以区分干扰光计数率和/或暗计数率或者接收的功率的噪声分量与有效计数率或接收的功率的信号分量。在有利的情况下,有效计数率在此比干扰光计数率/暗计数率明显更大。在不利的情况下,关系相反。但是通过具有测量的大量重复的长的测量时间可以提高信噪比并且因此然后也可以探测脉冲。According to one embodiment, a single avalanche photodiode 104 has no threshold for the amount of light used to trigger the electrical pulse. Every single photon can trigger activation. The background light thus in principle produces a certain disturbance count rate or activation per time unit. Furthermore, the activation can also be thermally induced, which can be referred to as the dark count rate. However, it is assumed that by means of effective light emitted by an effective light source, such as reflected laser pulses, a measurable increase in the total count rate or a significantly increased count rate is achieved and thus a distinction can be made between the interfering light count rate and/or the dark count rate or The noise component of the received power versus the effective count rate or signal component of the received power. In advantageous cases, the effective count rate is significantly greater than the interference light/dark count rate. In adverse situations, the relationship is reversed. However, the signal-to-noise ratio can be increased by the long measurement time with a large number of repetitions of the measurement and thus pulses can then also be detected.

为了实现较高的敏感性,多个SPAD单元1104可以并排地、例如以矩阵形式并行运行。由此增大有效面积,记录更多光子。但是通过矩阵布置也可以实现方向选择性或角度分辨率,与在照相机的情况下在多个像素上的成像类似。可以连接矩阵布置的SPAD单元104,使得可以记录到达的光子的数量。通过在SPAD(宏)像素102和从多个宏像素102到SPAD成像器100的超结构100之内的微单元104的增加的数量可以实现具有高计数率和高空间分辨率的SPAD成像器100,类似于照相机的像素数量。通过高的计数率可以实现相对于由于环境光的错误计数的高不敏感性。To achieve higher sensitivity, multiple SPAD units 1104 may be operated side by side, eg in parallel in a matrix. This increases the effective area and records more photons. However, directional selectivity or angular resolution can also be achieved by means of a matrix arrangement, analogous to the imaging on multiple pixels in the case of a camera. A matrix arrangement of SPAD units 104 can be connected such that the number of arriving photons can be recorded. A SPAD imager 100 with high count rate and high spatial resolution can be achieved by the increased number of SPAD (macro) pixels 102 and microcells 104 within the superstructure 100 from multiple macro pixels 102 to the SPAD imager 100 , similar to the number of pixels in a camera. A high insensitivity to false counts due to ambient light can be achieved by the high count rate.

例如可以结合车辆的驾驶员辅助系统使用光电探测器100。在驾驶员辅助系统中近年来在市场上设立了大量舒适性功能,诸如自动巡航控制、停车引导、车道保持助手、交通指示牌识别;和安全功能,诸如渐进安全控制、车道偏离警告。目前,发展了高度自动化的行驶功能,其中责任越来越多地从驾驶员转移到车辆。为了实现,需要具有车辆环境的几乎无缝且无错的检测的最高可靠的传感器系统。激光雷达传感器可以满足该要求。For example, the photodetector 100 can be used in connection with a driver assistance system of a vehicle. In driver assistance systems a large number of comfort functions such as automatic cruise control, parking guidance, lane keeping assistant, traffic sign recognition; and safety functions such as progressive safety control, lane departure warning have been installed on the market in recent years. Currently, highly automated driving functions are developed, in which responsibility is increasingly shifted from the driver to the vehicle. To achieve this, the most reliable sensor systems with an almost seamless and error-free detection of the vehicle environment are required. LiDAR sensors can meet this requirement.

在不同的激光雷达技术的情况下这样的系统显得特别感兴趣,在这些系统中光脉冲朝不同的空间方向被发出并且由环境反射的光借助最高敏感的SPAD接收器(单光子雪崩二极管,探测各个光子)来接收。Such systems are of particular interest in the case of different lidar technologies, in which light pulses are emitted in different spatial directions and the light reflected by the environment is detected by means of the most sensitive SPAD receivers (Single Photon Avalanche Diodes, Each photon) to receive.

图2示出在单个雪崩光电二极管的情况下对光的探测的时间流程。雪崩光电二极管例如是像点的组成部分,如在图1中示出的那样。在时间变化曲线上示出了该流程。在此,在一个轴上描绘了时间。横向于该轴提供了信号的强度。如果有效地接通雪崩光电二极管并且光量200落到雪崩光电二极管上,则雪崩光电二极管触发电脉冲202。换言之,当光子到达时点燃SPAD。电脉冲202的强度通过雪崩光电二极管的结构形式预先给定。在雪崩光电二极管输出了脉冲202之后,在再生周期204或复位时间204内,雪崩光电二极管变得不敏感。在再生周期204之内雪崩光电二极管不能提供电信号,即使所需的光量200落到雪崩光电二极管上。换言之,当光子到达时SPAD不记录。即使双重光量206落到准备好接收的且有效地接通的雪崩光电二极管上,也仅提供具有结构形式决定的大小或强度的电脉冲202。换言之,即使两个光子到达,也简单地点燃SPAD。FIG. 2 shows the time course of the detection of light in the case of a single avalanche photodiode. An avalanche photodiode is, for example, a component of a pixel, as shown in FIG. 1 . The flow is shown on the time curve. Here, time is depicted on one axis. Transverse to this axis provides the strength of the signal. If the avalanche photodiode is effectively turned on and an amount of light 200 falls on the avalanche photodiode, the avalanche photodiode triggers an electrical pulse 202 . In other words, the SPAD is ignited when a photon arrives. The intensity of the electrical pulse 202 is predetermined by the design of the avalanche photodiode. After the avalanche photodiode has output a pulse 202, during a regeneration period 204 or reset time 204, the avalanche photodiode becomes insensitive. The avalanche photodiode cannot provide an electrical signal during the regeneration period 204 even though the desired amount of light 200 falls on the avalanche photodiode. In other words, the SPAD does not record when a photon arrives. Even if a double amount of light 206 falls on a ready-to-receive and effectively switched-on avalanche photodiode, only electrical pulses 202 of a structurally determined size or intensity are provided. In other words, even if two photons arrive, the SPAD is simply ignited.

在例如由于在附近对象处反射的激光脉冲而较强的光脉冲到达时,在脉冲开始或在脉冲的上升边沿进行计数。When a stronger light pulse arrives, for example due to a laser pulse reflected at a nearby object, the counting takes place at the beginning of the pulse or at the rising edge of the pulse.

图3示出在不同地成形的光脉冲302、304、306的情况下雪崩光电二极管的探测时间点300的图示。探测时间点300在图表中被提供,该图表在横坐标上提供了时间并且在纵坐标上提供了信号强度。光脉冲302、304、306分别在最小强度的情况下开始和结束。光脉冲302、304、306分别具有强度最大值308,其近似地在一半脉冲持续时间之后出现。第一光脉冲302具有小的脉冲持续时间和小的最大强度308。第二光脉冲304具有小的脉冲持续时间和大的最大强度308。第三光脉冲306具有大的脉冲持续时间和大的最大强度308,其中第三光脉冲306具有比第二光脉冲304更小的最大强度308。当光的强度超过探测极限时,探测时间点300分别处于光脉冲302、304、306之一开始之后不久。换言之,在脉冲开始处SPAD点燃。也就是,以与实际开始小的时间偏移来检测光脉冲302、304、306。因为当单个雪崩光电二极管记录光量时单个雪崩光电二极管输出其电脉冲202,并且紧接着在其再生周期内不能提供其它脉冲,因此不检测光脉冲302、304、306的形状。电脉冲202取决于光脉冲302、304、306的形状具有与最大值308不同的时间偏移。FIG. 3 shows a diagram of detection times 300 of an avalanche photodiode with differently shaped light pulses 302 , 304 , 306 . The detection times 300 are represented in a graph which provides the time on the abscissa and the signal strength on the ordinate. The light pulses 302, 304, 306 respectively start and end at minimum intensity. Light pulses 302 , 304 , 306 each have an intensity maximum 308 which occurs approximately after half the pulse duration. The first light pulse 302 has a short pulse duration and a small maximum intensity 308 . The second light pulse 304 has a small pulse duration and a large maximum intensity 308 . Third light pulse 306 has a greater pulse duration and a greater maximum intensity 308 , wherein third light pulse 306 has a lower maximum intensity 308 than second light pulse 304 . The detection time point 300 is shortly after the start of one of the light pulses 302 , 304 , 306 , respectively, when the intensity of the light exceeds the detection limit. In other words, the SPAD ignites at the beginning of the pulse. That is, the light pulses 302, 304, 306 are detected with a small time offset from the actual onset. The shape of the light pulses 302, 304, 306 is not detected because a single avalanche photodiode outputs its electrical pulse 202 when it records the amount of light and cannot provide further pulses during its regeneration period immediately afterwards. The electrical pulse 202 has a different time offset from the maximum value 308 depending on the shape of the light pulses 302 , 304 , 306 .

通过在此介绍的方案例如可以在激光雷达系统中不仅仅确定上升的脉冲边沿300,而是检测和分析总的脉冲形状。所接收的脉冲形状相对于发送的脉冲形状的改变给予对大气干扰、诸如雨、雾、雪、浪花或反射对象表面的延伸和位置、诸如“软的”灌木丛、“硬的”汽车、“长的、倾斜的”壁的提示。The approach presented here makes it possible, for example, not only to determine rising pulse edges 300 in lidar systems, but to detect and evaluate the overall pulse shape. The change in the shape of the received pulse relative to the shape of the transmitted pulse gives the extent and position to atmospheric disturbances, such as rain, fog, snow, spray, or reflective object surfaces, such as "soft" bushes, "hard" cars, " A hint of a long, sloping" wall.

图4a示出按照本发明的一个实施例的具有可单独激活的雪崩光电二极管104的像点102的图示。像点102基本上相应于图1中的像点之一。像点102在此具有16个可单独激活的雪崩光电二极管104。FIG. 4 a shows a representation of an image point 102 with individually activatable avalanche photodiodes 104 according to an exemplary embodiment of the invention. Pixel 102 essentially corresponds to one of the pixels in FIG. 1 . Image point 102 here has 16 individually activatable avalanche photodiodes 104 .

换言之,图4a示出SPAD像素4×4。每计数周期直至16个事件在两纳秒栅格中等距离地被延展到32ns。In other words, Fig. 4a shows SPAD pixels 4x4. Up to 16 events per count cycle are spread equidistantly over 32 ns in a two nanosecond grid.

在一个实施例中,SPAD像素102由16个SPAD单元104组成,所述SPAD单元的单独的复位时间例如是32ns。通过逐步地以2ns的间隔(相应于15cm的距离)激活和去激活SPAD单元104,SPAD单元104分别在2ns内是有效的。在遍历所有SPAD单元104之后,以第一SPAD单元104重新开始。该运行方式可以被称为滚动。以这种方式实现间隔扫描或间隔采样。如果光脉冲到达,则可以利用该实施例检测脉冲持续时间,但还不能检测脉冲高度。In one embodiment, the SPAD pixel 102 is composed of 16 SPAD units 104 whose individual reset times are, for example, 32 ns. By activating and deactivating the SPAD unit 104 stepwise at intervals of 2 ns (corresponding to a distance of 15 cm), the SPAD unit 104 is active within 2 ns, respectively. After traversing all SPAD units 104 , restart with the first SPAD unit 104 . This mode of operation can be referred to as rolling. Interval scanning or interval sampling is achieved in this manner. If a light pulse arrives, the pulse duration can be detected with this embodiment, but not yet the pulse height.

图4b示出按照本发明的一个实施例由偏移一时长被激活的雪崩光电二极管检测的不同的光脉冲302、304、306的图示。在此由如图4a中那样具有16个雪崩光电二极管的像点来检测光脉冲302、304、306。在该实施例中,每个雪崩光电二极管具有32ns的再生周期204。雪崩光电二极管彼此偏移两纳秒的时长被激活。因此,雪崩光电二极管可以输出电脉冲202、经过其再生周期204或复位时间204并且紧接着直接再次被激活。该时长也可以大于数量16的倒数乘以32ns的再生周期,以便能够实现无中断的检测。在两纳秒的时长到期之后再次去激活雪崩光电二极管,即使其已经不提供电脉冲,以便避免错误探测。因此,该时长相应于雪崩光电二极管每循环的激活持续时间。然后,雪崩光电二极管在相应于再生周期204的静止持续时间内保持去激活直到下一次激活。像点的剩下的15个雪崩光电二极管被偏移地激活和去激活,使得像点的雪崩光电二极管中的一个在有效状态下被偏移至少所有两纳秒并且因此准备好接收。一旦光脉冲302、304、306导致明显提高的计数率,就通过在激活雪崩光电二极管时偏移两纳秒导致两纳秒的时间分辨率。也就是可以将光脉冲302、304、306的脉冲长度400精确地确定为两纳秒。像点的雪崩光电二极管在此按时间顺序被激活。在此,在像点的最后的雪崩光电二极管被激活了之后,重新激活像点的第一雪崩光电二极管。Fig. 4b shows a diagram of different light pulses 302, 304, 306 detected by avalanche photodiodes activated offset by a duration according to an embodiment of the present invention. Here, light pulses 302 , 304 , 306 are detected by a pixel with 16 avalanche photodiodes as in FIG. 4 a . In this embodiment, each avalanche photodiode has a regeneration period 204 of 32ns. The avalanche photodiodes are activated with a two-nanosecond offset from each other. Thus, the avalanche photodiode may output an electrical pulse 202 , pass through its regeneration period 204 or reset time 204 and be activated again directly thereafter. The duration can also be greater than the inverse of the number 16 multiplied by the regeneration period of 32 ns in order to enable uninterrupted detection. The avalanche photodiode is deactivated again after the expiry of a period of two nanoseconds, even though it has not provided electrical pulses, in order to avoid false detections. Thus, this duration corresponds to the activation duration per cycle of the avalanche photodiode. The avalanche photodiode then remains deactivated for a duration of inactivity corresponding to regeneration period 204 until the next activation. The remaining 15 avalanche photodiodes of the pixel are activated and deactivated offset such that one of the avalanche photodiodes of the pixel is offset by at least two nanoseconds in the active state and is therefore ready to receive. Once the light pulses 302, 304, 306 result in a significantly increased count rate, a two nanosecond time resolution results by shifting the avalanche photodiode by two nanoseconds upon activation. That is, the pulse length 400 of the light pulses 302, 304, 306 can be determined exactly to two nanoseconds. The avalanche photodiodes of the pixels are activated here in chronological order. In this case, the first avalanche photodiode of the pixel is reactivated after the last avalanche photodiode of the pixel has been activated.

图5a示出按照本发明的一个实施例具有可按组地激活的雪崩光电二极管104的像点102的图示。像点102基本上相应于图1中的像点之一。与之不同地,像点102在此具有16个可单独激活的二极管组500。二极管组500分别由4个雪崩光电二极管104组成。也就是,在此可以同时激活每像点102至少两个雪崩光电二极管104,以便量化所检测的光量。换言之,图5a示出SPAD像素4×4×4,其中可同时激活四个SPAD。FIG. 5 a shows a diagram of an image point 102 with avalanche photodiodes 104 that can be activated in groups according to an exemplary embodiment of the invention. Pixel 102 essentially corresponds to one of the pixels in FIG. 1 . In contrast, pixel 102 here has 16 individually activatable diode groups 500 . The diode groups 500 are composed of four avalanche photodiodes 104 , respectively. That is to say that at least two avalanche photodiodes 104 per image point 102 can be activated simultaneously in order to quantify the detected light quantity. In other words, Figure 5a shows a SPAD pixel 4x4x4, where four SPADs can be activated simultaneously.

在一个实施例中,SPAD像素102由64个SPAD单元104组成,其中四个分别在相同时间被激活。由此,除了脉冲持续时间之外还可以按四个高度级检测脉冲高度。In one embodiment, a SPAD pixel 102 is composed of 64 SPAD units 104, four of which are each activated at the same time. As a result, pulse heights can be detected in four height levels in addition to pulse durations.

介绍一种利用特别的电路技术的SPAD接收器102,利用该SPAD接收器可以检测到达的光的信号形状。此外,在此介绍的电路技术能够实现较大的动态范围。A SPAD receiver 102 is presented using a special circuit technology with which the signal shape of the incoming light can be detected. In addition, the circuit technique presented here enables a large dynamic range.

在此,有针对性地在时间上激活或去激活各个SPAD单元104。以这种方式,一些SPAD单元104例如可以记录脉冲的上升边沿,而在稍微延迟的时间点激活另外的SPAD单元104并且同样记录脉冲或脉冲形状。通过多倍的不同的推迟,因此可以在时间上采样脉冲。属于推迟的SPAD单元104的数量在此可以关于时间可变地被设计,使得可以实现更高的动态范围和/或更精细的采样和因此测量精确性。In this case, the individual SPAD units 104 are activated or deactivated temporally in a targeted manner. In this way, some SPAD units 104 can record the rising edge of a pulse, for example, while other SPAD units 104 are activated at a slightly delayed point in time and likewise record the pulse or the pulse shape. Pulses can thus be sampled in time by multiple different delays. In this case, the number of SPAD units 104 assigned to the delay can be variably designed with respect to time, so that a higher dynamic range and/or finer sampling and thus measurement accuracy can be achieved.

图5b示出按照本发明的一个实施例由偏移一时长被激活的雪崩光电二极管组检测的不同的光脉冲302、304、306的图示。该组相应于图5a中的二极管组。光脉冲302、304、306相应于图3和图4b中的图示。如图4b中那样,二极管组彼此偏移两纳秒的时长被激活并且在两纳秒之后再次被去激活,以便能够实现光脉冲302、304、306的准连续检测。附加地,可以区分四个强度级502、504、506、508,因为或者一个雪崩光电二极管在该两纳秒之内提供一个电脉冲202、两个雪崩光电二极管在该两纳秒之内共同提供两个电脉冲202、三个雪崩光电二极管在该两纳秒之内共同提供三个电脉冲202或者四个雪崩光电二极管在该两纳秒之内共同提供四个电脉冲202。在此,四个脉冲202代表最高的强度级508;三个脉冲202代表第二最高的强度级506;两个脉冲202代表第三最高的强度级504并且一个脉冲202代表最低的强度级502。没有脉冲代表没有强度级,因为于是没有接收光量。通过强度级502、504、506、508可以除了脉冲长度400之外检测光脉冲的脉冲形状。Fig. 5b shows a diagram of different light pulses 302, 304, 306 detected by groups of avalanche photodiodes activated offset by a duration according to an embodiment of the present invention. This group corresponds to the diode group in Fig. 5a. The light pulses 302, 304, 306 correspond to the illustrations in FIGS. 3 and 4b. As in FIG. 4 b , the diode groups are activated for a duration offset by two nanoseconds from each other and deactivated again after two nanoseconds in order to enable a quasi-continuous detection of the light pulses 302 , 304 , 306 . Additionally, four intensity levels 502, 504, 506, 508 can be distinguished because either one avalanche photodiode provides an electrical pulse 202 within the two nanoseconds, two avalanche photodiodes together provide Two electrical pulses 202 , three avalanche photodiodes jointly provide three electrical pulses 202 within the two nanoseconds, or four avalanche photodiodes jointly provide four electrical pulses 202 within the two nanoseconds. Here, four pulses 202 represent the highest intensity level 508 ; three pulses 202 represent the second highest intensity level 506 ; two pulses 202 represent the third highest intensity level 504 and one pulse 202 represents the lowest intensity level 502 . No pulses represent no intensity level, since then no amount of light is received. In addition to the pulse length 400 , the pulse shape of the light pulse can be detected via the intensity levels 502 , 504 , 506 , 508 .

通过在此介绍的方案可以覆盖大的动态范围。在此可以达到直至140dB。由此可以同时检测在远的距离下具有极其少的光子的极其弱地进行反射的对象和在近场具有极其多的光子的极其强地进行反射的对象,而不会在距离测量中出现测量不精确性或接收器不会由于饱和而不再有测量能力。A large dynamic range can be covered by the scheme presented here. Up to 140 dB can be achieved here. In this way, extremely weakly reflecting objects with extremely few photons at long distances and extremely strongly reflective objects with extremely many photons in the near field can be detected simultaneously without measuring errors in the distance measurement Inaccuracy or the receiver is no longer capable of measuring due to saturation.

在此处介绍的方案中可以精确地确定时间脉冲位置和因此所测量的相应于间隔值的运行时间,因为检测总的脉冲形状。In the approach presented here, the temporal pulse position and thus the measured runtime corresponding to the interval value can be determined precisely because the overall pulse shape is detected.

通过有针对性地、在时间上激活和去激活由多个SPAD单元组成的复合体中的各个SPAD单元,时间上推迟地激活或去激活的SPAD单元能够实现光信号302、304、306的采样。The temporally delayed activation or deactivation of the SPAD units enables the sampling of the optical signals 302 , 304 , 306 by the targeted, temporal activation and deactivation of individual SPAD units in a complex of several SPAD units. .

图6a示出按照本发明的一个实施例具有可不同数量地激活的雪崩光电二极管104的像点102的图示。像点102基本上相应于图5a中的像点。与之不同地,像点具有64个由各四个雪崩光电二极管104组成的二极管组500。也就是,像点102具有264个雪崩光电二极管104。二极管组500的雪崩光电二极管104能够共同地激活。可以单独地控制二极管组500。在此也可以共同地且同时地激活多个二极管组500。二极管组500构成8×8矩阵。换言之,图6a示出SPAD像素4×4×(4-16),其中可同时激活四至16个SPAD。FIG. 6 a shows a diagram of an image point 102 with a different number of avalanche photodiodes 104 that can be activated according to an exemplary embodiment of the invention. Pixel 102 essentially corresponds to the pixel in FIG. 5a. In contrast, the image point has 64 diode groups 500 each consisting of four avalanche photodiodes 104 . That is, a pixel 102 has 264 avalanche photodiodes 104 . The avalanche photodiodes 104 of the diode group 500 can be activated jointly. Diode groups 500 can be controlled individually. Here too, multiple diode groups 500 can be activated jointly and simultaneously. The diode groups 500 form an 8x8 matrix. In other words, Figure 6a shows SPAD pixels 4x4x(4-16), where four to 16 SPADs can be activated simultaneously.

在一个实施例中,SPAD像素102由256个SPAD单元104组成,其中起初四个分别在相同时间被激活,但其数量随着时间增加到16个。由此接收器对于进一步远离的、通常更弱的反射变得更敏感。随之出现动态范围的提高。In one embodiment, the SPAD pixel 102 consists of 256 SPAD units 104, of which initially four are each activated at the same time, but their number increases to 16 over time. The receiver thus becomes more sensitive to reflections that are further away, generally weaker. An increase in dynamic range ensues.

图6b示出按照本发明的一个实施例由不同数量的雪崩光电二极管组检测的不同的光脉冲304、302的图示。光脉冲302、304相应于图3中的光脉冲。也就是,光脉冲302如在图4中那样具有小的脉冲长度400和小的最大强度。同样,光脉冲304如在图4中那样具有小的脉冲长度400以及大的最大强度。光脉冲302、304在图表中被示出,该图表在其横坐标上提供了时间。在纵坐标上提供了光的强度级或脉冲高度。时间在起始点600处开始。起始点600此处代表一个时间点,在该时间点发出光脉冲。光脉冲302、304代表发出的光脉冲的反射的光。在该实施例中,具有大的最大强度的光脉冲304比具有小的最大强度的光脉冲302更靠近起始点600、也就是更早地被检测。不同的最大强度代表在穿透发送光所穿过的介质时发出的和反射的光的衰减。光脉冲304按四个强度级502、504、506、508被检测。换言之,激活四个SPAD,由此像点是不太敏感的并且较少被分辨。光脉冲302按16个强度级被检测。换言之,激活16个SPAD。由此光脉冲302可以比光脉冲304更敏感地或更高地被分辨。为了设定不同的敏感性,在光脉冲304的情况下每时间步长同时激活四个雪崩光电二极管,而在光脉冲302的情况下每时间步长同时激活16个雪崩光电二极管。也就是,进一步远离起始点600比更靠近起始点600同时激活更多雪崩光电二极管,以便随着与起始点600的间隔增加获得更大的敏感性。Figure 6b shows a graphical representation of different light pulses 304, 302 detected by different numbers of avalanche photodiode groups according to one embodiment of the present invention. The light pulses 302 , 304 correspond to the light pulses in FIG. 3 . That is, the light pulse 302 has a small pulse length 400 and a small maximum intensity as in FIG. 4 . Likewise, light pulse 304 has a small pulse length 400 and a high maximum intensity as in FIG. 4 . The light pulses 302, 304 are shown in a graph which provides time on its abscissa. The intensity level or pulse height of the light is provided on the ordinate. Time starts at start point 600 . The starting point 600 here represents a point in time at which a light pulse is emitted. Light pulses 302, 304 represent reflected light of emitted light pulses. In this exemplary embodiment, light pulse 304 with a large maximum intensity is detected closer to starting point 600 , ie earlier than light pulse 302 with a small maximum intensity. The different maximum intensities represent the attenuation of emitted and reflected light when penetrating the medium through which the light is transmitted. The light pulse 304 is detected in four intensity levels 502 , 504 , 506 , 508 . In other words, four SPADs are activated, whereby the pixels are less sensitive and less resolved. Light pulses 302 are detected in 16 intensity levels. In other words, 16 SPADs are activated. As a result, light pulse 302 can be resolved more sensitively or better than light pulse 304 . In order to set the different sensitivities, four avalanche photodiodes are simultaneously activated per time step in the case of light pulse 304 and 16 avalanche photodiodes are simultaneously activated per time step in the case of light pulse 302 . That is, more avalanche photodiodes are simultaneously activated further away from the starting point 600 than closer to the starting point 600 in order to achieve greater sensitivity with increasing separation from the starting point 600 .

图6c示出按照本发明的一个实施例由偏移不同时长被激活的不同大小的雪崩光电二极管组检测的不同的光脉冲304、302的图示。该图示基本上相应于图6b中的图示。附加地,在此动用两个已知的时间点602、604。时间点602、604基于基本知识。该基本知识例如可以在先前的动作中获得。也就是,在使用运行时间信号的情况下确定起始点600。例如,在两个已知的时间点602、604前不久已经记录了各一个光脉冲302、304。时间点602、604分别标记光脉冲302、304的开始。在此从起始点600起直至第一时间点602,以每时间步长各一个二极管组运行像点,由此得出具有四个强度级的分辨率。从第一时间点602起以每时间步长各四个二极管组运行像点。如图6b中那样,由此得出16个强度级的分辨率。附加地,从第一时间点602起,时间步长从2ns缩短到半纳秒。由此得出更精确的时间分辨率。在读入了第二光脉冲304之后,直至第二时间点604重新以每时间步长一个二极管组、也就是以四个强度级运行像点。在此,时间步长可以再次被提高到每时间步长2ns。同样,时间步长可以保持在每时间步长半纳秒。从第二时间点604起,重新以每时间步长四个二极管组来运行图像传感器,这又导致16个可能的强度级。在此,将时间步长设置为每时间步长2ns。通过扩大的时间步长,雪崩光电二极管更长时间地有效。由此可以类似于具有较长曝光时间的摄影机,每时间步长更多光落到雪崩光电二极管上。也就是,图像传感器现在是更敏感的。Fig. 6c shows a graphical representation of different light pulses 304, 302 detected by different sized avalanche photodiode groups activated for different time offsets in accordance with one embodiment of the present invention. This illustration substantially corresponds to the illustration in FIG. 6b. In addition, two known points in time 602 , 604 are used here. Time points 602, 604 are based on basic knowledge. This basic knowledge can be obtained, for example, in previous actions. That is, the starting point 600 is determined using the runtime signal. For example, one light pulse 302 , 304 each has been recorded shortly before two known points in time 602 , 604 . Time points 602, 604 mark the start of light pulses 302, 304, respectively. From the starting point 600 to the first point in time 602 , the pixels are moved with one diode group per time step, resulting in a resolution with four intensity levels. Starting from a first point in time 602 , pixels are operated with four diode groups per time step. This results in a resolution of 16 intensity levels, as in FIG. 6b. Additionally, starting from the first point in time 602, the time step is shortened from 2 ns to half a nanosecond. This results in a more precise time resolution. After the second light pulse 304 has been read in, until a second point in time 604 the pixels are again operated with one diode group per time step, that is to say with four intensity levels. Here, the time step size can again be increased to 2 ns per time step. Likewise, the time step size can be kept at half a nanosecond per time step. From the second point in time 604 onwards, the image sensor is operated again with four diode banks per time step, which in turn leads to 16 possible intensity levels. Here, the time step size is set to 2ns per time step. With an enlarged time step, the avalanche photodiode is effective for longer periods of time. This allows more light to fall on the avalanche photodiode per time step, similar to a video camera with a longer exposure time. That is, the image sensor is now more sensitive.

通过有针对性地、在时间上激活和去激活由多个SPAD单元组成的复合体中的各个SPAD单元,可以可变地设计在发出的和反射的光的运行时间期间激活/去激活的SPAD单元的数量。激活的单元的数量可以随着运行时间相应于对象的距离而增加。因此接收器对于更远离的对象的较弱的信号的敏感性可以增加。By targeting and temporally activating and deactivating individual SPAD units in a complex of multiple SPAD units, it is possible to variably design the SPADs activated/deactivated during the runtime of emitted and reflected light the number of units. The number of activated cells may increase with runtime corresponding to the distance of the object. Thus the sensitivity of the receiver to weaker signals of more distant objects can be increased.

在一个实施例中,例如从之前的测量中已知时间点602、604,其应当有针对性地被检测。首先直接在该时间点602、604之前进行SPAD单元的激活。提高同时有效的SPAD单元的数量和/或降低采样率。以这种方式可以通过现有的基本知识有针对性地提高敏感性和/或精确性。In one exemplary embodiment, time points 602 , 604 are known, for example from previous measurements, which are to be detected in a targeted manner. Activation of the SPAD unit first takes place directly before this point in time 602 , 604 . Increase the number of simultaneously active SPAD units and/or decrease the sampling rate. In this way, the sensitivity and/or precision can be increased in a targeted manner by means of the existing basic knowledge.

图7a示出按照本发明的一个实施例具有可偏移不同时长被激活的雪崩光电二极管104的像点102的图示。像点相应于图6a中的像点并且具有264个雪崩光电二极管104。与之不同地,二极管组500在此包括用于16个强度级的16个雪崩光电二极管104。也就是,像点102具有16个二极管组500。换言之,图7a示出具有可适配的时间栅格的SPAD像素4×4×16。FIG. 7 a shows a diagram of an image point 102 with an avalanche photodiode 104 activated for different durations that can be shifted according to an exemplary embodiment of the invention. The pixel corresponds to the pixel in FIG. 6 a and has 264 avalanche photodiodes 104 . In contrast, the diode array 500 here includes 16 avalanche photodiodes 104 for 16 intensity levels. That is, a pixel 102 has 16 diode groups 500 . In other words, Fig. 7a shows a SPAD pixel 4x4x16 with an adaptable temporal grid.

在一个实施例中,SPAD像素102由256个SPAD单元104组成,其中16个分别在相同时间被激活。起初,SPAD单元104的逐步的激活和去激活以0.5ns的间隔被设定并且因此提高采样。随着时间增加或对象的预期的远离,又将采样时间提高到2ns。以这种方式除了所有之前的优点之外在附近区域内提高间隔精确性。此外,再次提高动态范围,因为较少光子以较小的采样步长落下。In one embodiment, a SPAD pixel 102 is composed of 256 SPAD units 104, 16 of which are each activated at the same time. Initially, the step-by-step activation and deactivation of the SPAD unit 104 is set at 0.5 ns intervals and therefore upsampled. As the time increases or the object is expected to move away, the sampling time is increased to 2ns. In this way, in addition to all the previous advantages, the distance accuracy is increased in the vicinity. Furthermore, the dynamic range is improved again, since fewer photons fall with smaller sampling steps.

图7b示出按照本发明的一个实施例由偏移不同时长被激活的雪崩光电二极管组检测的不同的光脉冲304、302的图示。光脉冲302、304相应于图6b中的光脉冲。如在图6c中那样,以0.5ns的间隔来采样光脉冲304。光脉冲302如在图6c中那样以2ns的间隔来采样。间隔在此取决于起始点600的时间间隔。起始点600经过时间越长,则间隔越大。两个光脉冲302、304以16个强度级来采样。换言之,激活各16个SPAD。在0.5ns间隔的情况下得出高的时间分辨率,在2ns的间隔的情况下得出较小的时间分辨率。也就是,在此介绍的流程响应于起始时间点600而开始。在此,时长是可变的。时长在更靠近起始时间点600处比在进一步远离起始时间点600处更小地被设定,以便在更靠近起始时间点600处获得比在进一步远离起始时间点600处更大的时间分辨率。Fig. 7b shows a graphical representation of different light pulses 304, 302 detected by groups of avalanche photodiodes activated for different time offsets in accordance with one embodiment of the present invention. The light pulses 302, 304 correspond to the light pulses in FIG. 6b. As in Figure 6c, the light pulses 304 are sampled at intervals of 0.5 ns. The light pulses 302 are sampled at intervals of 2 ns as in FIG. 6c. The interval here depends on the time interval of starting point 600 . The longer the elapsed time from the starting point 600, the larger the interval. The two light pulses 302, 304 are sampled with 16 intensity levels. In other words, 16 SPADs each are activated. A high time resolution results with an interval of 0.5 ns, a lower time resolution results with an interval of 2 ns. That is, the process presented herein begins in response to start time point 600 . Here, the duration is variable. The duration is set smaller closer to the starting time point 600 than further away from the starting time point 600, so that a larger time resolution.

图8示出按照本发明的一个实施例由不同大小的雪崩光电二极管组以不同大小的间隔检测的光脉冲302的图示。光脉冲302相应于图3中具有小的振幅的短的光脉冲。光脉冲302以16个强度级来采样。FIG. 8 shows a graphical representation of light pulses 302 detected by different sized avalanche photodiode groups at different sized intervals in accordance with one embodiment of the present invention. Light pulse 302 corresponds to a short light pulse with a small amplitude in FIG. 3 . Light pulses 302 are sampled at 16 intensity levels.

通过有针对性地、在时间上激活和去激活由多个SPAD单元组成的复合体中的各个SPAD单元,可以将激活/去激活的SPAD单元的数量高动态地与接收信号相匹配。By the targeted, temporal activation and deactivation of individual SPAD units in a complex of several SPAD units, the number of activated/deactivated SPAD units can be adapted highly dynamically to the received signal.

在此,激活时间和去激活时间以及激活和去激活的接收器的数量的控制可以源于先前的光信号的先前的采样值的分析。也就是,可以进行与测量情况的动态匹配。In this case, the control of the activation time and deactivation time as well as the number of activated and deactivated receivers can originate from the evaluation of previous sampled values of previous light signals. That is, a dynamic adaptation to the measurement situation is possible.

通过在此介绍的方案可以检测例如脉冲信号的信号形状。得出动态范围的提高和测量精确性的提高。Signal shapes such as pulse signals can be detected by means of the approach presented here. The result is an increase in dynamic range and an increase in measurement accuracy.

在一个实施例中,进行SPAD单元的激活时间点和去激活时间点的高动态的适应性匹配。在基态下所有SPAD单元是有效的,以便实现最高的敏感性。在此检查,在预先给定的时间段之内是否点燃比通过背景光可预期的更多的SPAD单元,也就是是否可能存在上升的脉冲边沿800。由此淡出背景光并且仅少量的SPAD单元处于复位阶段。在脉冲边沿800处点燃的SPAD单元的数量代表在脉冲边沿800处的脉冲高度。由此确定,应当去激活多少还没被点燃的SPAD单元作为对于剩余脉冲302的保留。附加地可以匹配用于下一时间栅格的时间段和/或插入死时间802。In one embodiment, a highly dynamic adaptive adaptation of the activation time point and the deactivation time point of the SPAD unit is performed. All SPAD cells are active in the ground state in order to achieve the highest sensitivity. It is checked here whether more SPAD cells are ignited within a predetermined period of time than would be expected by the background light, ie whether a rising pulse edge 800 is possible. The background light is thus faded out and only a small number of SPAD units are in the reset phase. The number of SPAD cells fired at pulse edge 800 represents the pulse height at pulse edge 800 . From this it is determined how many SPAD cells that have not yet been fired should be deactivated as a reserve for the remaining pulses 302 . In addition, the time periods for the next time grid can be adapted and/or dead times can be inserted 802 .

可以缩短时间栅格,以便能够检测具有较小的动态范围的上升的脉冲高度。在该下一时间栅格之内又确定激活的和点燃的SPAD单元的数量并且由此导出脉冲高度。如果新的脉冲高度更高,则从还被去激活的SPAD单元中激活例如更大数量和/或对于下一周期通过插入较大的死时间802来缩短有效的时间栅格。如果脉冲高度更低,则减小数量和/或降低死时间802。通过在此介绍的各时间栅格对SPAD单元的激活数量的控制和死时间802的匹配,能够以受限制数量的SPAD单元完整地检测脉冲302。甚至在脉冲长度大于复位时间的最不利的情况下,起初被点燃的SPAD单元和所有在脉冲持续时间400上被激活的SPAD单元的总和不高于可用的SPAD单元的数量。The time grid can be shortened in order to be able to detect rising pulse heights with a smaller dynamic range. Within this next time grid, the number of activated and ignited SPAD units is again determined and the pulse height is derived from this. If the new pulse height is higher, activate eg a larger number of still deactivated SPAD units and/or shorten the effective time grid for the next cycle by inserting larger dead times 802 . If the pulse height is lower, reduce the number and/or reduce the dead time 802 . By controlling the activated number of SPAD units and adapting the dead time 802 by each time grid described here, it is possible to completely detect the pulse 302 with a limited number of SPAD units. Even in the most unfavorable case where the pulse length is greater than the reset time, the sum of initially ignited SPAD units and all activated SPAD units over the pulse duration 400 is no higher than the number of available SPAD units.

换言之,在脉冲开始800之前激活所有SPAD,其中没有一个被触发。当触发的SPAD的数量大于极限:N1<<N0SPAD激活,识别边沿开始800。在边沿开始800之后触发的SPAD的数量增加:N3>N2>N1,或时间栅格更小或死时间802更大。在脉冲高度之后数量下降:N4>N3,或时间栅格更大或死时间802更小。在脉冲302之后作为SPAD被激活并且没有一个被触发。In other words, all SPADs are activated before the start of the pulse 800, none of which are triggered. When the number of triggered SPADs is greater than the limit: N1<<N0 SPAD is activated, and the recognition edge starts 800. The number of SPADs triggered after the edge start 800 increases: N3 > N2 > N1 , or the time grid is smaller or the dead time 802 is larger. After the pulse height the number drops: N4>N3, or the time grid is larger or the dead time 802 is smaller. After pulse 302 are activated as SPADs and none are triggered.

图9示出按照本发明的一个实施例的用于运行光电探测器的方法900的流程图。光电探测器每像点具有多个可单独激活的雪崩光电二极管。雪崩光电二极管在激活状态下被构造用于当接收光量时提供电脉冲。雪崩光电二极管在电脉冲之后在再生周期内是光不敏感的。方法900具有激活步骤902。在激活步骤902中激活像点的雪崩光电二极管中的至少两个。雪崩光电二极管彼此偏移一时长被激活。该时长小于再生周期。FIG. 9 shows a flowchart of a method 900 for operating a photodetector according to an exemplary embodiment of the invention. The photodetector has multiple individually activatable avalanche photodiodes per pixel. The avalanche photodiode is configured in an activated state to provide an electrical pulse when receiving an amount of light. Avalanche photodiodes are light insensitive during the regeneration period after the electrical pulse. Method 900 has an activation step 902 . At least two of the avalanche photodiodes of the image point are activated in an activation step 902 . The avalanche photodiodes are activated with a time offset from each other. This duration is less than the regeneration period.

在此介绍的方案描述一种动态单光子雪崩二极管SPAD定时。The scheme presented here describes a dynamic single photon avalanche diode SPAD timing.

可以通过快速计数器、例如TDC、时间至数字转换器进行时间测量,该快速计数器在发出激光束时启动并且在脉冲到达接收器时停止。于是,计数器读数相应于光运行时间并且因此相应于距离。就此可以确定各接收的脉冲的时间点,通常在上升边沿处。Time measurement can be performed by a fast counter, such as a TDC, time-to-digital converter, which is started when the laser beam is emitted and stopped when the pulse reaches the receiver. The counter reading then corresponds to the light travel time and thus to the distance. In this way, the point in time of the respective received pulse can be determined, usually at the rising edge.

在所有在此示出的实施例中,可以从上升脉冲边沿开始在相应于距离栅格的固定或可变的时间栅格内进行光子事件的计数。这样形成的直方图模拟总的脉冲形状。为了技术实现,例如可以使用计数器库,其在用于激光束的发送时间点的共同开始之后在识别了脉冲边沿之后逐步地以所设置的时间栅格停止并且在相应于距离栅格的每个步长中对事件计数并且存储。计数器库的长度明显小于用于完整的时间采样和AD转换的解决方案。这降低用于进一步的处理的数据开销、所需的芯片面积和成本。如果滚动地设计计数器库,则也可以依次检测一个发送脉冲的多个接收脉冲并且实现多目标能力。直方图内容可以极其快速地被复制到直方图存储器中。该直方图存储器的存储器开销远小于用于总的采样的存储器开销。例如,相应于150m的一微秒的采样在纳秒栅格中要求1000个存储器单元。计数器库和直方图在假设15ns的脉冲持续时间和三个待存储的脉冲的情况下要求45个存储器单元。In all exemplary embodiments shown here, the photon events can be counted starting from the rising pulse edge within a fixed or variable time grid corresponding to the distance grid. The histogram thus formed simulates the overall pulse shape. For technical realization, for example, a counter library can be used which, after the common start of the emission time points for the laser beams, stops step by step with a set time grid after the detection of a pulse edge and at each interval corresponding to the distance grid Events are counted and stored in steps. The length of the counter bank is significantly smaller than solutions for full time sampling and AD conversion. This reduces the data overhead, required chip area and costs for further processing. If the counter bank is designed rollingly, it is also possible to detect several received pulses of a transmitted pulse in succession and achieve multi-target capability. Histogram contents can be copied into histogram memory extremely quickly. The memory overhead of the histogram memory is much smaller than that for the total sampling. For example, one microsecond of sampling corresponding to 150m requires 1000 memory cells in the nanosecond grid. The counter bank and the histogram require 45 memory cells assuming a pulse duration of 15 ns and three pulses to be stored.

在此介绍的方案可以被用在针对驾驶员辅助系统的用于环境检测的2D和3D激光雷达传感器中。此外,在其它产品中的使用是可能的。例如在此介绍的方案可以被用在服务机器人技术中、机动车内部空间中的手势识别中、空间测量中、工作空间监视中、建筑空间监视中。The approach presented here can be used in 2D and 3D lidar sensors for environment detection for driver assistance systems. Also, use in other products is possible. For example, the approach presented here can be used in service robotics, in gesture recognition in the interior of a motor vehicle, in spatial measurement, in workspace monitoring, in construction space monitoring.

图10示出按照本发明的一个实施例的用于运行光电探测器的装置1000的方框图。在此,光电探测器基本上相应于图1中所示的光电探测器。装置1000具有用于激活光电探测器的像点的雪崩光电二极管中的至少两个的设备1002。该设备被构造用于将雪崩光电二极管彼此偏移一时长激活。在此,该时长小于再生周期。FIG. 10 shows a block diagram of a device 1000 for operating a photodetector according to an exemplary embodiment of the invention. In this case, the photodetector corresponds essentially to the photodetector shown in FIG. 1 . The arrangement 1000 has a device 1002 for activating at least two of the avalanche photodiodes of an image point of a photodetector. The device is configured to activate the avalanche photodiodes offset from each other for a duration of time. In this case, the duration is shorter than the regeneration period.

所描述的和在图中示出的实施例仅是示例性地选择的。不同的实施例可以完全地或关于各个特征彼此组合。一个实施例也可以通过另外的实施例的特征来补充。The exemplary embodiments described and shown in the figures are chosen as examples only. Different exemplary embodiments can be combined with each other completely or with regard to individual features. An exemplary embodiment can also be supplemented by features of other exemplary embodiments.

此外,在此介绍的方法步骤可以重复地以及按与所描述的顺序不同的顺序来实施。Furthermore, method steps presented here can be carried out repeatedly and in a different sequence than that described.

如果实施例包括第一特征和第二特征之间的“和/或”关联,则这可以被解读为使得该实施例按照一种实施方式具有第一特征以及第二特征并且按照另一实施方式或者仅具有第一特征或者仅具有第二特征。If an embodiment includes an "and/or" association between a first feature and a second feature, this can be read as such that the embodiment has the first feature and the second feature according to one embodiment and also has the second feature according to another embodiment. Or only have the first feature or only have the second feature.

Claims (12)

1.一种用于运行光电探测器(100)的方法(900),其中所述光电探测器(100)具有每像点(102)多个可单独激活的雪崩光电二极管(104),其中雪崩光电二极管(104)在激活状态下被构造用于当接收光量(200)时提供电脉冲(202),并且所述雪崩光电二极管(104)在提供所述电脉冲(202)之后在再生周期(204)内是光不敏感的,其中所述方法(900)具有以下步骤:1. A method (900) for operating a photodetector (100) having a plurality of individually activatable avalanche photodiodes (104) per image point (102), wherein the avalanche The photodiode (104) is configured in an activated state to provide an electrical pulse (202) when receiving an amount of light (200), and the avalanche photodiode (104) after providing the electrical pulse (202) during a regeneration period ( 204), wherein the method (900) has the steps of: 激活(902)像点(102)的雪崩光电二极管(104)中的至少两个,其中所述雪崩光电二极管(104)彼此偏移一时长被激活,其中所述时长小于所述再生周期(204)。activating (902) at least two of the avalanche photodiodes (104) of the image point (102), wherein the avalanche photodiodes (104) are activated offset from each other by a duration, wherein the duration is less than the regeneration period (204 ). 2.根据权利要求1所述的方法(900),其中,按时间顺序激活所述像点(102)的雪崩光电二极管(104),其中在激活了所述像点(102)的最后的雪崩光电二极管(104)之后,重新激活所述像点(102)的第一雪崩光电二极管(104)。2. The method (900) according to claim 1, wherein the avalanche photodiodes (104) of the pixels (102) are activated in time sequence, wherein the last avalanche photodiodes (104) of the pixels (102) are activated After the photodiode (104), the first avalanche photodiode (104) of said image point (102) is reactivated. 3.根据上述权利要求之一所述的方法(900),其中,在激活步骤(902)中所述时长大于数量的倒数乘以所述再生周期(204),以便能够实现无中断的检测。3. The method (900) according to one of the preceding claims, wherein in the activation step (902) the duration is multiplied by the regeneration period (204) by the reciprocal of the quantity, in order to enable uninterrupted detection. 4.根据上述权利要求之一所述的方法(900),具有去激活雪崩光电二极管(104)的步骤,其中在激活(902)所述雪崩光电二极管(104)时开始的所述雪崩光电二极管(104)的激活持续时间到期之后,实施去激活的步骤,以便避免错误探测。4. The method (900) according to any one of the preceding claims, having the step of deactivating an avalanche photodiode (104), wherein said avalanche photodiode starts when activating (902) said avalanche photodiode (104) After the activation duration of (104) has expired, a deactivation step is carried out in order to avoid false detections. 5.根据上述权利要求之一所述的方法(900),其中,在激活步骤(902)中同时激活每像点(102)至少两个雪崩光电二极管(104),以便量化所检测的光量(200)。5. The method (900) according to one of the preceding claims, wherein at least two avalanche photodiodes (104) per image point (102) are simultaneously activated in the activation step (902) in order to quantify the detected light quantity ( 200). 6.根据上述权利要求之一所述的方法(900),其中,所述方法(900)响应于起始时间点(600)而开始,其中在激活步骤(902)中所述时长是可变的。6. The method (900) according to one of the preceding claims, wherein the method (900) starts in response to a starting time point (600), wherein in the activation step (902) the duration is variable of. 7.根据权利要求6所述的方法(900),具有在使用运行时间信号的情况下确定所述起始时间点(600)的步骤。7. The method (900) as claimed in claim 6, comprising the step of determining the starting point in time (600) using a runtime signal. 8.根据权利要求6或7所述的方法(900),具有设定所述时长的步骤,其中在更靠近所述起始时间点(600)处比在进一步远离所述起始时间点(600)处更小地设定所述时长,以便在更靠近所述起始时间点(600)处获得比在进一步远离所述起始时间点(600)处更大的时间分辨率。8. The method (900) according to claim 6 or 7, having the step of setting said duration, wherein closer to said starting time point (600) than further away from said starting time point ( 600) to set the duration smaller in order to obtain a greater temporal resolution closer to the starting time point (600) than further away from the starting time point (600). 9.根据上述权利要求之一所述的方法(900),其中,所述方法(900)响应于起始时间点(600)而开始,其中在激活步骤(902)中在进一步远离所述方法(900)的起始时间点(600)处同时激活比在更靠近所述起始时间点(600)处更多的雪崩光电二极管(104),以便随着距所述起始时间点(600)的距离增加获得更大的敏感性。9. The method (900) according to any one of the preceding claims, wherein the method (900) starts in response to a starting point in time (600), wherein in an activation step (902) further away from the method At the starting time point (600) of (900), more avalanche photodiodes (104) are activated simultaneously than closer to the starting time point (600), so that as the distance from the starting time point (600 ) for greater sensitivity. 10.一种用于运行光电探测器(100)的装置(1000),其中所述光电探测器(100)具有每像点(102)多个可单独激活的雪崩光电二极管(104),其中雪崩光电二极管(104)在激活状态下被构造用于当接收光量(200)时提供电脉冲(202),并且所述雪崩光电二极管(104)在提供所述电脉冲(202)之后在再生周期(204)内是光不敏感的,其中所述装置(1000)具有以下特征:10. A device (1000) for operating a photodetector (100), wherein said photodetector (100) has a plurality of individually activatable avalanche photodiodes (104) per image point (102), wherein the avalanche The photodiode (104) is configured in an activated state to provide an electrical pulse (202) when receiving an amount of light (200), and the avalanche photodiode (104) after providing the electrical pulse (202) during a regeneration period ( 204), wherein the device (1000) has the following characteristics: 用于激活像点(102)的雪崩光电二极管(104)中的至少两个的设备(1002),其中所述雪崩光电二极管(104)彼此偏移一时长被激活,其中所述时长小于所述再生周期(204)。A device (1002) for activating at least two of the avalanche photodiodes (104) of an image point (102), wherein the avalanche photodiodes (104) are activated offset from each other by a duration, wherein the duration is less than the Regeneration cycle (204). 11.一种具有每像点(102)多个可单独激活的雪崩光电二极管(104)的光电探测器(100),其中雪崩光电二极管(104)在激活状态下被构造用于当接收光量(200)时提供电脉冲(202),并且所述雪崩光电二极管(104)在提供所述电脉冲(202)之后在再生周期(204)内是光不敏感的,其中像点(102)的雪崩光电二极管(104)中的至少两个能够彼此偏移一时长被激活,其中所述时长小于所述再生周期(204)。11. A photodetector (100) with a plurality of individually activatable avalanche photodiodes (104) per image point (102), wherein the avalanche photodiodes (104) are configured in an activated state for when the received light amount ( 200) provides an electric pulse (202), and the avalanche photodiode (104) is light-insensitive in the regeneration period (204) after providing the electric pulse (202), wherein the avalanche of the image point (102) At least two of the photodiodes (104) can be activated offset from each other by a duration, wherein the duration is less than the regeneration period (204). 12.一种机器可读的存储介质,具有在其上存储的计算机程序,该计算机程序被设立用于执行根据权利要求1所述的方法的所有步骤。12. A machine-readable storage medium having stored thereon a computer program set up to carry out all the steps of the method according to claim 1.
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