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CA2460129C - Spectroscopie infrarouge de matrice plane (pair) simultanee, a plusieurs faisceaux - Google Patents

Spectroscopie infrarouge de matrice plane (pair) simultanee, a plusieurs faisceaux Download PDF

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Publication number
CA2460129C
CA2460129C CA002460129A CA2460129A CA2460129C CA 2460129 C CA2460129 C CA 2460129C CA 002460129 A CA002460129 A CA 002460129A CA 2460129 A CA2460129 A CA 2460129A CA 2460129 C CA2460129 C CA 2460129C
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CA
Canada
Prior art keywords
sample
samples
detector
fpa
dispersed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002460129A
Other languages
English (en)
Other versions
CA2460129A1 (fr
Inventor
Douglas L. Elmore
Mei-Wei Tsao
John F. Rabolt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Delaware
Original Assignee
UD Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2001/030724 external-priority patent/WO2003029769A1/fr
Priority claimed from US09/984,137 external-priority patent/US6784428B2/en
Application filed by UD Technology Corp filed Critical UD Technology Corp
Publication of CA2460129A1 publication Critical patent/CA2460129A1/fr
Application granted granted Critical
Publication of CA2460129C publication Critical patent/CA2460129C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/14Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/40Measuring the intensity of spectral lines by determining density of a photograph of the spectrum; Spectrography
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0216Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using light concentrators or collectors or condensers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0294Multi-channel spectroscopy
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/42Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3577Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
CA002460129A 2001-10-01 2002-03-19 Spectroscopie infrarouge de matrice plane (pair) simultanee, a plusieurs faisceaux Expired - Fee Related CA2460129C (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
USPCT/US01/30724 2001-10-01
PCT/US2001/030724 WO2003029769A1 (fr) 2001-10-01 2001-10-01 Appareil et procede de spectroscopie infrarouge en temps reel
US09/984,137 2001-10-29
US09/984,137 US6784428B2 (en) 2001-10-01 2001-10-29 Apparatus and method for real time IR spectroscopy
PCT/US2002/008346 WO2003031923A1 (fr) 2001-10-01 2002-03-19 Spectroscopie infrarouge de matrice plane (pair) simultanee, a plusieurs faisceaux

Publications (2)

Publication Number Publication Date
CA2460129A1 CA2460129A1 (fr) 2003-04-17
CA2460129C true CA2460129C (fr) 2006-06-13

Family

ID=26680578

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002460129A Expired - Fee Related CA2460129C (fr) 2001-10-01 2002-03-19 Spectroscopie infrarouge de matrice plane (pair) simultanee, a plusieurs faisceaux

Country Status (6)

Country Link
EP (1) EP1432967A4 (fr)
JP (1) JP2005504980A (fr)
KR (2) KR100650571B1 (fr)
AU (1) AU2002258552B2 (fr)
CA (1) CA2460129C (fr)
WO (1) WO2003031923A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220317389A1 (en) * 2019-06-21 2022-10-06 Cailabs Light source comprising at least one semiconductor chip bearing at least one diode

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7623234B2 (en) * 2004-03-22 2009-11-24 Quantaspec, Inc. System and method for detecting and identifying an analyte
CA2566799C (fr) * 2004-05-14 2019-02-12 Chemometec A/S Procede et systeme d'evaluation d'echantillons
US7336357B2 (en) 2004-08-13 2008-02-26 University Of Pittsburgh Multi-channel dual phase lock-in optical spectrometer
EP1793732A4 (fr) * 2004-09-29 2009-11-11 Univ Delaware Spectrographe a infrarouge et methode pour diagnostiquer une maladie
KR100757379B1 (ko) 2006-04-16 2007-09-11 한양대학교 산학협력단 화소 광량 조절형 다중채널 분광 타원해석기
WO2009064670A2 (fr) * 2007-11-13 2009-05-22 Zygo Corporation Interferomètre à balayage de polarisation
US9587804B2 (en) * 2012-05-07 2017-03-07 Chia Ming Chen Light control systems and methods
US9423879B2 (en) 2013-06-28 2016-08-23 Chia Ming Chen Systems and methods for controlling device operation according to hand gestures
US9717118B2 (en) 2013-07-16 2017-07-25 Chia Ming Chen Light control systems and methods
WO2015009795A1 (fr) * 2013-07-16 2015-01-22 Chia Ming Chen Systèmes et procédés de commande de lumière
WO2015168218A2 (fr) 2014-04-29 2015-11-05 Chia Ming Chen Systèmes et procédés de commande de lumière
RU2572460C1 (ru) * 2014-09-30 2016-01-10 Федеральное государственное бюджетное учреждение науки Специальная астрофизическая обсерватория Российской академии наук Способ сравнительного анализа спектра звезды
WO2017136187A2 (fr) * 2016-02-01 2017-08-10 Micro Detect, Inc. Détection uv à l'état solide et procédés associés
FR3059104B1 (fr) * 2016-11-18 2020-12-11 Electricite De France Dispositif et procede d'estimation d'un parametre d'un materiau polymere
EP3826528A4 (fr) 2018-07-25 2022-07-27 Natus Medical Incorporated Suppression en temps réel de reflets de del ir d'une image
US20240019302A1 (en) * 2022-07-15 2024-01-18 Verity Instruments, Inc. Very high resolution spectrometer for monitoring of semiconductor processes

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1392379A (en) * 1972-08-17 1975-04-30 Rank Organisation Ltd Analytical apparatus
US4158505A (en) * 1976-12-27 1979-06-19 International Business Machines Corporation Spectrum analyzing system with photodiode array
DE2938844A1 (de) * 1979-09-26 1981-04-23 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur auswertung optischer spektren
JPS6073343A (ja) * 1983-09-30 1985-04-25 Shimadzu Corp 分光光度計
US5002392A (en) * 1989-12-01 1991-03-26 Akzo N.V. Multichannel optical monitoring system
US5528368A (en) * 1992-03-06 1996-06-18 The United States Of America As Represented By The Department Of Health And Human Services Spectroscopic imaging device employing imaging quality spectral filters
JPH0626930A (ja) * 1992-03-24 1994-02-04 Nec Corp 分光スペクトル測定器
US6204919B1 (en) * 1993-07-22 2001-03-20 Novachem Bv Double beam spectrometer
US5444236A (en) * 1994-03-09 1995-08-22 Loral Infrared & Imaging Systems, Inc. Multicolor radiation detector method and apparatus
US5550373A (en) * 1994-12-30 1996-08-27 Honeywell Inc. Fabry-Perot micro filter-detector
EP0851658A3 (fr) * 1996-12-27 2000-05-10 Hewlett-Packard Company Balayeur d'image avec vitesse et rapport signal-sur-bruit variable qui dépendent de la définition de balayage demandée et du type de données demandé
US6141100A (en) * 1997-08-15 2000-10-31 Bio-Rad Laboratories, Inc. Imaging ATR spectrometer
US20010028036A1 (en) * 1998-03-25 2001-10-11 Thundat Thomas G. Wavelength dispersive infrared detector and microspectrometer using microcantilevers
AUPP365298A0 (en) * 1998-05-21 1998-06-11 Elan Group Ltd An optical apparatus
US6483112B1 (en) * 1998-07-14 2002-11-19 E. Neil Lewis High-throughput infrared spectroscopy
JP2001141563A (ja) * 1999-11-17 2001-05-25 Toshiba Corp 分光測定方法と装置および温度測定装置と膜圧測定装置
US6704104B2 (en) * 2000-03-16 2004-03-09 Spectrumedix Llc Multi-wavelength array reader for biological assay

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220317389A1 (en) * 2019-06-21 2022-10-06 Cailabs Light source comprising at least one semiconductor chip bearing at least one diode
US12235495B2 (en) * 2019-06-21 2025-02-25 Cailabs Light source comprising at least one semiconductor chip bearing at least one diode

Also Published As

Publication number Publication date
WO2003031923A1 (fr) 2003-04-17
AU2002258552B2 (en) 2006-03-09
KR100650571B1 (ko) 2006-11-27
EP1432967A4 (fr) 2004-12-22
KR20060028657A (ko) 2006-03-30
KR100612530B1 (ko) 2006-08-11
CA2460129A1 (fr) 2003-04-17
EP1432967A1 (fr) 2004-06-30
JP2005504980A (ja) 2005-02-17
KR20040037219A (ko) 2004-05-04

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Effective date: 20140319