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BR112014014911A2 - dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom - Google Patents

dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom

Info

Publication number
BR112014014911A2
BR112014014911A2 BR112014014911A BR112014014911A BR112014014911A2 BR 112014014911 A2 BR112014014911 A2 BR 112014014911A2 BR 112014014911 A BR112014014911 A BR 112014014911A BR 112014014911 A BR112014014911 A BR 112014014911A BR 112014014911 A2 BR112014014911 A2 BR 112014014911A2
Authority
BR
Brazil
Prior art keywords
substrate
ultrasound transducer
transducer device
cavity
manufacturing
Prior art date
Application number
BR112014014911A
Other languages
English (en)
Inventor
Marcelis Bout
Mulder Marcel
Dekker Ronald
Mauczok Ruediger
Original Assignee
Koninklijke Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Nv filed Critical Koninklijke Philips Nv
Publication of BR112014014911A2 publication Critical patent/BR112014014911A2/pt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

resumo dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom a presente invenção se refere a um dispositivo transdutor de ultrassom que compreende pelo menos uma célula cmut (30) para a transmissão e/ou a recepção de ondas de ultrassom, e a célula cmut (30) compreende uma membrana celular (30a) e uma cavidade (30b) sob a membrana celular. o dispositivo compreende ainda um substrato (10) com um primeiro lado (10a) e um segundo lado (10b), e pelo menos uma célula cmut (30) disposta no primeiro lado (10a) do substrato (10). o substrato (10) compreende a camada de base do substrato (12) e pluralidade de trincheiras adjacentes (17a) que se estendem para a camada de base de substrato (10) em uma direção ortogonal aos lados do substrato (10a, 10b), em que os espaçadores (12a) são formados, cada um, entre trincheiras adjacentes, (17a). o substrato (10) compreende ainda uma cavidade de conexão (17b) que conecta as trincheiras (17a), e que se estende em uma direção paralela aos lados do substrato (10a, 10b), as trincheiras (17a) e a cavidade de conexão (17b) em conjunto formam uma cavidade de substrato (17) no substrato (10). o substrato 10 compreende ainda uma membrana de substrato (23) que cobre a cavidade do substrato (17). a cavidade do substrato (17) está localizada em uma região do substrato (10) sob a célula cmut (30). a presente invenção se refere ainda a um método de fabricação do dito dispositivo transdutor de ultrassom.
BR112014014911A 2011-12-20 2012-12-13 dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom BR112014014911A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161577704P 2011-12-20 2011-12-20
PCT/IB2012/057273 WO2013093728A1 (en) 2011-12-20 2012-12-13 Ultrasound transducer device and method of manufacturing the same

Publications (1)

Publication Number Publication Date
BR112014014911A2 true BR112014014911A2 (pt) 2017-06-13

Family

ID=47631486

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112014014911A BR112014014911A2 (pt) 2011-12-20 2012-12-13 dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom

Country Status (8)

Country Link
US (2) US9802224B2 (pt)
EP (1) EP2750806B1 (pt)
JP (1) JP6069798B2 (pt)
CN (1) CN104023860B (pt)
BR (1) BR112014014911A2 (pt)
IN (1) IN2014CN04975A (pt)
RU (1) RU2607720C2 (pt)
WO (1) WO2013093728A1 (pt)

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BR112014014911A2 (pt) * 2011-12-20 2017-06-13 Koninklijke Philips Nv dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom
US9259206B2 (en) * 2013-02-20 2016-02-16 Georgia Tech Research Corporation CMUT-on-CMOS based guidewire intravascular imaging
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JP6932085B2 (ja) 2015-07-02 2021-09-08 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． マルチモード容量性マイクロマシン超音波トランスデューサ並びに関連するデバイス、システム及び方法
CN109311055B (zh) 2016-06-13 2021-06-29 皇家飞利浦有限公司 宽带超声换能器
US20180180724A1 (en) * 2016-12-26 2018-06-28 Nxp Usa, Inc. Ultrasonic transducer integrated with supporting electronics
JP7145892B2 (ja) * 2017-06-30 2022-10-03 コーニンクレッカ フィリップス エヌ ヴェ 複数の離間されたセグメントに分離された基板を有する腔内超音波撮像装置、溝を有する腔内超音波撮像装置、及び製造する方法
JP7180129B2 (ja) * 2018-06-06 2022-11-30 セイコーエプソン株式会社 超音波装置および電子機器
CN109759306B (zh) * 2019-02-03 2020-11-13 中国科学院微电子研究所 超声换能器阵列结构及其制备方法
DE102019214261B3 (de) * 2019-09-19 2020-08-20 Robert Bosch Gmbh Herstellungsverfahren für ein mikromechanisches System und mikromechanisches System
EP3909692A1 (en) * 2020-05-14 2021-11-17 Koninklijke Philips N.V. An ultrasound transducer and a tiled array of ultrasound transducers
EP3909691A1 (en) * 2020-05-14 2021-11-17 Koninklijke Philips N.V. An ultrasound transducer and a tiled array of ultrasound transducers
DE102022122821A1 (de) 2022-09-08 2024-03-14 Infineon Technologies Ag Sensorvorrichtungen mit akustischem Koppelmedium und zugehörige Herstellungsverfahren

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MX347686B (es) * 2011-10-28 2017-05-09 Koninklijke Philips Nv Celda transductora, micro-labrada, capacitiva, pre-colapsada con capa de tensión.
RU2595800C2 (ru) * 2011-10-28 2016-08-27 Конинклейке Филипс Н.В. Ячейка емкостного микрообработанного преобразователя предварительно прижатого типа с заглушкой
BR112014014911A2 (pt) * 2011-12-20 2017-06-13 Koninklijke Philips Nv dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom
WO2013111040A1 (en) * 2012-01-27 2013-08-01 Koninklijke Philips N.V. Capacitive micro-machined transducer and method of manufacturing the same
CN104812504B (zh) * 2012-11-20 2018-01-26 皇家飞利浦有限公司 电容性微加工换能器和制造所述电容性微加工换能器的方法

Also Published As

Publication number Publication date
RU2014129830A (ru) 2016-02-10
CN104023860A (zh) 2014-09-03
US10835922B2 (en) 2020-11-17
JP2015509304A (ja) 2015-03-26
IN2014CN04975A (pt) 2015-09-18
US20180029077A1 (en) 2018-02-01
US9802224B2 (en) 2017-10-31
JP6069798B2 (ja) 2017-02-01
RU2607720C2 (ru) 2017-01-10
EP2750806A1 (en) 2014-07-09
CN104023860B (zh) 2016-06-15
WO2013093728A1 (en) 2013-06-27
EP2750806B1 (en) 2019-05-08
US20140307528A1 (en) 2014-10-16

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Legal Events

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B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B07A Application suspended after technical examination (opinion) [chapter 7.1 patent gazette]
B350 Update of information on the portal [chapter 15.35 patent gazette]
B09B Patent application refused [chapter 9.2 patent gazette]
B09B Patent application refused [chapter 9.2 patent gazette]

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