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AU6267299A - Method for manufacturing carbon nanotubes as functional elements of mems devices - Google Patents

Method for manufacturing carbon nanotubes as functional elements of mems devices

Info

Publication number
AU6267299A
AU6267299A AU62672/99A AU6267299A AU6267299A AU 6267299 A AU6267299 A AU 6267299A AU 62672/99 A AU62672/99 A AU 62672/99A AU 6267299 A AU6267299 A AU 6267299A AU 6267299 A AU6267299 A AU 6267299A
Authority
AU
Australia
Prior art keywords
carbon nanotubes
functional elements
mems devices
manufacturing carbon
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU62672/99A
Inventor
Vladimir Mancevski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xidex Corp
Original Assignee
Xidex Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xidex Corp filed Critical Xidex Corp
Publication of AU6267299A publication Critical patent/AU6267299A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G01Q70/12—Nanotube tips
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Micromachines (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
AU62672/99A 1998-09-28 1999-09-28 Method for manufacturing carbon nanotubes as functional elements of mems devices Abandoned AU6267299A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10215998P 1998-09-28 1998-09-28
US60102159 1998-09-28
PCT/US1999/022334 WO2000019494A1 (en) 1998-09-28 1999-09-28 Method for manufacturing carbon nanotubes as functional elements of mems devices
CA002308015A CA2308015A1 (en) 1998-09-28 2000-05-11 Method for manufacturing carbon nanotubes as functional elements of mems devices

Publications (1)

Publication Number Publication Date
AU6267299A true AU6267299A (en) 2000-04-17

Family

ID=25681792

Family Applications (1)

Application Number Title Priority Date Filing Date
AU62672/99A Abandoned AU6267299A (en) 1998-09-28 1999-09-28 Method for manufacturing carbon nanotubes as functional elements of mems devices

Country Status (5)

Country Link
EP (1) EP1135792A4 (en)
JP (1) JP2002526354A (en)
AU (1) AU6267299A (en)
CA (1) CA2308015A1 (en)
WO (1) WO2000019494A1 (en)

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EP1194960B1 (en) 1999-07-02 2010-09-15 President and Fellows of Harvard College Nanoscopic wire-based devices, arrays, and methods of their manufacture
US6495116B1 (en) 2000-04-10 2002-12-17 Lockheed Martin Corporation Net shape manufacturing using carbon nanotubes
US7301199B2 (en) 2000-08-22 2007-11-27 President And Fellows Of Harvard College Nanoscale wires and related devices
EP1314189B1 (en) 2000-08-22 2013-02-27 President and Fellows of Harvard College Electrical device comprising doped semiconductor nanowires and method for its production
GB0023983D0 (en) 2000-09-29 2000-11-15 Prolifix Ltd Therapeutic compounds
JP2002162335A (en) * 2000-11-26 2002-06-07 Yoshikazu Nakayama Cantilever for perpendicular scanning microscope and probe for perpendicular scanning microscope using this cantilever
WO2002048701A2 (en) 2000-12-11 2002-06-20 President And Fellows Of Harvard College Nanosensors
US6574130B2 (en) 2001-07-25 2003-06-03 Nantero, Inc. Hybrid circuit having nanotube electromechanical memory
US6835591B2 (en) 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
US6911682B2 (en) 2001-12-28 2005-06-28 Nantero, Inc. Electromechanical three-trace junction devices
US7259410B2 (en) 2001-07-25 2007-08-21 Nantero, Inc. Devices having horizontally-disposed nanofabric articles and methods of making the same
US6924538B2 (en) 2001-07-25 2005-08-02 Nantero, Inc. Devices having vertically-disposed nanofabric articles and methods of making the same
US6706402B2 (en) 2001-07-25 2004-03-16 Nantero, Inc. Nanotube films and articles
US7566478B2 (en) 2001-07-25 2009-07-28 Nantero, Inc. Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles
US6643165B2 (en) 2001-07-25 2003-11-04 Nantero, Inc. Electromechanical memory having cell selection circuitry constructed with nanotube technology
US6919592B2 (en) 2001-07-25 2005-07-19 Nantero, Inc. Electromechanical memory array using nanotube ribbons and method for making same
JP2003090788A (en) * 2001-09-19 2003-03-28 Olympus Optical Co Ltd Spm cantilever and method of manufacturing the same
US6784028B2 (en) 2001-12-28 2004-08-31 Nantero, Inc. Methods of making electromechanical three-trace junction devices
US7176505B2 (en) 2001-12-28 2007-02-13 Nantero, Inc. Electromechanical three-trace junction devices
EP1466333B1 (en) * 2002-01-15 2011-06-22 International Business Machines Corporation Microstructures
US7351313B2 (en) * 2002-03-08 2008-04-01 National Institute Of Information And Communications Technology, Incorporated Administrative Agency Production device and production method for conductive nano-wire
US7335395B2 (en) 2002-04-23 2008-02-26 Nantero, Inc. Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
WO2004010552A1 (en) 2002-07-19 2004-01-29 President And Fellows Of Harvard College Nanoscale coherent optical components
JP2004202602A (en) * 2002-12-24 2004-07-22 Sony Corp Method for producing microstructure and method for producing mold material
US7560136B2 (en) 2003-01-13 2009-07-14 Nantero, Inc. Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
US7910064B2 (en) 2003-06-03 2011-03-22 Nanosys, Inc. Nanowire-based sensor configurations
JP4329014B2 (en) * 2003-09-05 2009-09-09 ソニー株式会社 MICROSTRUCTURE MANUFACTURING METHOD, MICROSTRUCTURE, DISPLAY DEVICE, RECORDING DEVICE MANUFACTURING METHOD, AND RECORDING DEVICE
FR2862156B1 (en) * 2003-11-06 2007-01-05 Commissariat Energie Atomique CONDUCTIVE MICRO-POINT DATA RECORDING DEVICE AND METHOD FOR MANUFACTURING SUCH A DEVICE
JP4834957B2 (en) 2004-02-27 2011-12-14 住友電気工業株式会社 Catalyst structure and carbon nanotube production method using the same
JP4604563B2 (en) 2004-06-08 2011-01-05 住友電気工業株式会社 Method for producing carbon nanostructure
JP4360544B2 (en) 2004-06-16 2009-11-11 パイオニア株式会社 Probe, recording apparatus, reproducing apparatus and recording / reproducing apparatus
FR2876831B1 (en) * 2004-10-15 2007-02-02 Commissariat Energie Atomique DATA RECORDING DEVICE HAVING INCLINED CARBON NANOTUBES AND METHOD FOR MANUFACTURING THE SAME
JP2006125846A (en) * 2004-10-26 2006-05-18 Olympus Corp Cantilever
JP2008523590A (en) 2004-12-06 2008-07-03 プレジデント・アンド・フェロウズ・オブ・ハーバード・カレッジ Nanoscale wire-based data storage device
EP1672648B1 (en) * 2004-12-14 2007-03-14 Nanoworld AG SPM-probe with an EBD-tip.
US20100227382A1 (en) 2005-05-25 2010-09-09 President And Fellows Of Harvard College Nanoscale sensors
WO2006132659A2 (en) 2005-06-06 2006-12-14 President And Fellows Of Harvard College Nanowire heterostructures
DE102005043974B4 (en) * 2005-09-15 2010-04-29 Team Nanotec Gmbh Micromechanical scanning sensor
AU2007309660A1 (en) 2006-06-12 2008-05-02 President And Fellows Of Harvard College Nanosensors and related technologies
WO2008033303A2 (en) 2006-09-11 2008-03-20 President And Fellows Of Harvard College Branched nanoscale wires
US8575663B2 (en) 2006-11-22 2013-11-05 President And Fellows Of Harvard College High-sensitivity nanoscale wire sensors
JP5269352B2 (en) * 2007-06-08 2013-08-21 学校法人早稲田大学 Single-walled carbon nanotube manufacturing method, semiconductor wiring structure manufacturing method, field emission display electronic component manufacturing method, and probe manufacturing method
ATE516247T1 (en) * 2008-02-15 2011-07-15 Imec SYNTHESIS OF ZEOLITE CRYSTALS AND FORMATION OF CARBON NANOSTRUCTURES IN PATTERNED STRUCTURES
KR101507129B1 (en) * 2008-03-28 2015-03-31 서울바이오시스 주식회사 Light emitting diode and method of manufacturing the same
WO2010138506A1 (en) 2009-05-26 2010-12-02 Nanosys, Inc. Methods and systems for electric field deposition of nanowires and other devices
US9297796B2 (en) 2009-09-24 2016-03-29 President And Fellows Of Harvard College Bent nanowires and related probing of species
US10006888B2 (en) * 2016-04-21 2018-06-26 The Boeing Company MEMS transducers in a phased array coupled to a flexible substrate using carbon nanotubes for conformal ultrasound scanning
EP3654075A1 (en) * 2018-11-13 2020-05-20 Koninklijke Philips N.V. Structured grating component, imaging system and manufacturing method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4405768A1 (en) * 1994-02-23 1995-08-24 Till Keesmann Field emission cathode device and method for its manufacture
US5697827A (en) * 1996-01-11 1997-12-16 Rabinowitz; Mario Emissive flat panel display with improved regenerative cathode
US6057637A (en) * 1996-09-13 2000-05-02 The Regents Of The University Of California Field emission electron source
JPH10203810A (en) * 1997-01-21 1998-08-04 Canon Inc Manufacturing method of carbon nanotube
EP1015384B1 (en) * 1997-03-07 2005-07-13 William Marsh Rice University Carbon fibers formed from single-wall carbon nanotubes
JP3740295B2 (en) * 1997-10-30 2006-02-01 キヤノン株式会社 Carbon nanotube device, manufacturing method thereof, and electron-emitting device
JP3902883B2 (en) * 1998-03-27 2007-04-11 キヤノン株式会社 Nanostructure and manufacturing method thereof

Also Published As

Publication number Publication date
CA2308015A1 (en) 2001-11-11
EP1135792A4 (en) 2005-06-08
WO2000019494A1 (en) 2000-04-06
EP1135792A1 (en) 2001-09-26
JP2002526354A (en) 2002-08-20

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase