[go: up one dir, main page]

AU2003221350A1 - Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device - Google Patents

Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device

Info

Publication number
AU2003221350A1
AU2003221350A1 AU2003221350A AU2003221350A AU2003221350A1 AU 2003221350 A1 AU2003221350 A1 AU 2003221350A1 AU 2003221350 A AU2003221350 A AU 2003221350A AU 2003221350 A AU2003221350 A AU 2003221350A AU 2003221350 A1 AU2003221350 A1 AU 2003221350A1
Authority
AU
Australia
Prior art keywords
light
light source
amplifying
source device
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003221350A
Inventor
Masaaki Doi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002077744A external-priority patent/JP2003283012A/en
Priority claimed from JP2002138861A external-priority patent/JP2003332653A/en
Priority claimed from JP2002142247A external-priority patent/JP2003332654A/en
Priority claimed from JP2003053891A external-priority patent/JP2003338646A/en
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2003221350A1 publication Critical patent/AU2003221350A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12147—Coupler
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/1215—Splitter
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12183—Ion-exchange
    • G02B2006/12185—Ion-exchange field-assisted ion-exchange

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
  • Light Guides In General And Applications Therefor (AREA)
  • Optical Integrated Circuits (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
AU2003221350A 2002-03-13 2003-03-12 Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device Abandoned AU2003221350A1 (en)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
JP2002-069050 2002-03-13
JP2002069050 2002-03-13
JP2002-077744 2002-03-20
JP2002077744A JP2003283012A (en) 2002-03-20 2002-03-20 Optical amplifying device and manufacturing method thereof, light source device using optical amplifying device, phototherapy device using light source device, and exposure device using light source device
JP2002138861A JP2003332653A (en) 2002-05-14 2002-05-14 Optical amplification device, light source device using optical amplification device, phototherapy device using light source device, and exposure device using light source device
JP2002-138861 2002-05-14
JP2002-142247 2002-05-17
JP2002142247A JP2003332654A (en) 2002-05-17 2002-05-17 Optical amplification device, light source device using optical amplification device, phototherapy device using light source device, and exposure device using light source device
JP2003053891A JP2003338646A (en) 2002-03-13 2003-02-28 Optical amplifying device and manufacturing method thereof, light source device using optical amplifying device, phototherapy device using light source device, and exposure device using light source device
JP2003-053891 2003-02-28
PCT/JP2003/002905 WO2003077383A1 (en) 2002-03-13 2003-03-12 Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device

Publications (1)

Publication Number Publication Date
AU2003221350A1 true AU2003221350A1 (en) 2003-09-22

Family

ID=27808862

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003221350A Abandoned AU2003221350A1 (en) 2002-03-13 2003-03-12 Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device

Country Status (3)

Country Link
AU (1) AU2003221350A1 (en)
TW (1) TW200403463A (en)
WO (1) WO2003077383A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4444368B1 (en) * 2009-07-30 2010-03-31 古河電気工業株式会社 Integrated semiconductor laser device, semiconductor laser module, and optical transmission system
US9726820B2 (en) * 2014-08-14 2017-08-08 Raytheon Company End pumped PWG with tapered core thickness
CN107783360A (en) * 2016-08-25 2018-03-09 深圳市光峰光电技术有限公司 Light supply apparatus and display system
CN109597162B (en) * 2018-12-27 2021-04-09 华为技术有限公司 Planar optical waveguide, PLC chip, beam shaping structure and WSS
CN111025471B (en) * 2019-12-30 2021-04-13 浙江大学绍兴微电子研究中心 Voltage-segmented glass-based buried optical waveguide continuous production method
CN111175891B (en) * 2019-12-30 2020-10-23 浙江大学 Method for fabricating optical waveguide by continuous electric field-assisted ion migration

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329986A (en) * 1986-07-23 1988-02-08 Hoya Corp Light-waveguide type laser
JP2526934B2 (en) * 1987-10-22 1996-08-21 三菱電機株式会社 Optical amplifier
JP2747315B2 (en) * 1989-02-22 1998-05-06 日立電線株式会社 Glass waveguide amplifier for bidirectional transmission
JP2730955B2 (en) * 1989-02-22 1998-03-25 日立電線株式会社 Rare earth element-doped long glass waveguide and method of manufacturing the same
JP2675133B2 (en) * 1989-04-19 1997-11-12 日立電線株式会社 Waveguide type optical star coupler
JP2788652B2 (en) * 1989-06-30 1998-08-20 日立電線株式会社 Method for manufacturing rare earth element-doped glass waveguide
JPH087647Y2 (en) * 1989-09-26 1996-03-04 ホーヤ株式会社 Optical waveguide type laser device
JPH03135081A (en) * 1989-10-20 1991-06-10 Nec Corp Optical amplifier
IT1237135B (en) * 1989-10-30 1993-05-24 Pirelli Cavi Spa LOW NOISE OPTICAL AMPLIFICATION GROUP, WITH REFLECTION OF THE PUMPING POWER.
DE4022090A1 (en) * 1989-12-18 1991-06-20 Forschungszentrum Juelich Gmbh ELECTRO-OPTICAL COMPONENT AND METHOD FOR THE PRODUCTION THEREOF
JPH03252628A (en) * 1990-03-02 1991-11-11 Fujitsu Ltd Optical branching device
JPH04144177A (en) * 1990-10-05 1992-05-18 Nippon Telegr & Teleph Corp <Ntt> Optical fiber amplifier
JPH04199032A (en) * 1990-11-29 1992-07-20 Furukawa Electric Co Ltd:The Optical coupler with optical amplification function
DE59107047D1 (en) * 1991-02-01 1996-01-18 Pirelli Cavi Spa LITHIUM NIOBATE WAVE LADDER STRUCTURES WITH RARE EARTH DOPING.
JP2545719B2 (en) * 1991-03-15 1996-10-23 東京工業大学長 Stacked optical amplifier
JP3055235B2 (en) * 1991-08-26 2000-06-26 日本電信電話株式会社 Optical circuit manufacturing method
JP2859763B2 (en) * 1991-08-30 1999-02-24 日立電線株式会社 Functional glass waveguide for single mode transmission
JP3106201B2 (en) * 1991-11-11 2000-11-06 日本電信電話株式会社 Optical circuit manufacturing method
US5260822A (en) * 1992-01-31 1993-11-09 Massachusetts Institute Of Technology Tapered semiconductor laser gain structure with cavity spoiling grooves
JP3221043B2 (en) * 1992-04-16 2001-10-22 日立電線株式会社 Rare earth element-doped multi-core fiber for single mode transmission and optical fiber amplifier using the same
JPH06194533A (en) * 1992-12-25 1994-07-15 Nippon Sheet Glass Co Ltd Waveguide element for optical amplification
JPH08242030A (en) * 1995-03-02 1996-09-17 Matsushita Electric Ind Co Ltd Optical integrated circuit device and manufacturing method thereof
EP1841022A3 (en) * 1995-03-20 2009-12-02 Fujitsu Limited Apparatus and method for processing an optical signal
US5694408A (en) * 1995-06-07 1997-12-02 Mcdonnell Douglas Corporation Fiber optic laser system and associated lasing method
US5867305A (en) * 1996-01-19 1999-02-02 Sdl, Inc. Optical amplifier with high energy levels systems providing high peak powers
JPH10228007A (en) * 1997-02-13 1998-08-25 Nec Corp Optical waveguide type electrically controlled variable attenuator
JPH10341061A (en) * 1997-06-09 1998-12-22 Fuji Photo Film Co Ltd Semiconductor optical amplification element
IL138374A (en) * 1998-03-11 2004-07-25 Nikon Corp Ultraviolet laser apparatus and exposure apparatus comprising the ultraviolet laser apparatus
JP2001353176A (en) * 2000-04-13 2001-12-25 Nikon Corp Laser therapy equipment
WO2001020397A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Laser device and exposure method
WO2001020398A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Exposure device with laser device
JP2001133649A (en) * 1999-11-05 2001-05-18 Fdk Corp Manufacturing method of optical waveguide grating
JP2001221926A (en) * 1999-11-30 2001-08-17 Fdk Corp Manufacturing method of optical waveguide device
JP2001337356A (en) * 2000-05-29 2001-12-07 Nikon Corp Light source device

Also Published As

Publication number Publication date
WO2003077383A1 (en) 2003-09-18
TW200403463A (en) 2004-03-01

Similar Documents

Publication Publication Date Title
AU2003236023A1 (en) Exposure method, exposure device, and device manufacturing method
AU2003289126A1 (en) Illumination optical system, exposure system, and exposure method
AU2003227194A1 (en) Exposure device, exposure method, and device manufacturing method
AU2003263609A1 (en) Fabrication system and manufacturing method of light emitting device
AU2003260959A1 (en) Light-emitting apparatus and fabrication method of the same
AU2003289271A1 (en) Exposure apparatus, exposure method and method for manufacturing device
AU2003302831A1 (en) Exposure method, exposure apparatus and method for manufacturing device
AU2003275155A1 (en) Medical device components and processes for their manufacturing
AU2003259925A1 (en) Well treatment apparatus and method
NO20052760D0 (en) Process for the treatment of cancer and related methods.
AU2003304482A1 (en) Method and apparatus for single-photon source and quantum memory
AU2003272406A1 (en) Device and method for treating restenosis
AU2003280878A1 (en) Light emitting device and fabrication method thereof
AU2003235124A1 (en) Exposure system and device manufacturing method
EP2434522B8 (en) Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method
AU2003265176A1 (en) Exposure method, exposure mask, and exposure apparatus
AU2003281995A1 (en) Diffuser, wavefront source, wavefront sensor and projection lighting facility
AU2003244222A1 (en) Optical integrator, illumination optical device, exposure apparatus, and exposure method
AU2003273231A1 (en) System and method for authenticating the source of marked objects
AU6022400A (en) Exposure method, exposure system, light source, and method of device manufacture
AU2003259478A1 (en) Surface-plasmon-generated light source and its use
AU2003221350A1 (en) Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device
AU2003284658A1 (en) Production method for exposure system, light source unit, exp0srue system, exposure method and adjustment method for exposure system
AU2003284659A1 (en) Exposure apparatus and exposure method
AU2003284540A1 (en) Exposure system, exposure method, and device fabricating method

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase