[go: up one dir, main page]

AU2003219400A1 - Cleaning head - Google Patents

Cleaning head

Info

Publication number
AU2003219400A1
AU2003219400A1 AU2003219400A AU2003219400A AU2003219400A1 AU 2003219400 A1 AU2003219400 A1 AU 2003219400A1 AU 2003219400 A AU2003219400 A AU 2003219400A AU 2003219400 A AU2003219400 A AU 2003219400A AU 2003219400 A1 AU2003219400 A1 AU 2003219400A1
Authority
AU
Australia
Prior art keywords
cleaning head
cleaning
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003219400A
Inventor
Roel Daamen
Viet Nguyen Hoang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of AU2003219400A1 publication Critical patent/AU2003219400A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
AU2003219400A 2002-05-07 2003-04-11 Cleaning head Abandoned AU2003219400A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP02076829 2002-05-07
EP02076829.7 2002-05-07
PCT/IB2003/001559 WO2003095145A1 (en) 2002-05-07 2003-04-11 Cleaning head

Publications (1)

Publication Number Publication Date
AU2003219400A1 true AU2003219400A1 (en) 2003-11-11

Family

ID=29414762

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003219400A Abandoned AU2003219400A1 (en) 2002-05-07 2003-04-11 Cleaning head

Country Status (2)

Country Link
AU (1) AU2003219400A1 (en)
WO (1) WO2003095145A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070087672A1 (en) * 2005-10-19 2007-04-19 Tbw Industries, Inc. Apertured conditioning brush for chemical mechanical planarization systems
JP5002353B2 (en) * 2007-07-05 2012-08-15 シャープ株式会社 Chemical mechanical polishing equipment
EP4297930A4 (en) * 2021-02-26 2024-12-11 Axus Technology, LLC CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1080840A3 (en) * 1999-08-30 2004-01-02 Mitsubishi Materials Corporation Polishing apparatus, polishing method and method of conditioning polishing pad
US6306008B1 (en) * 1999-08-31 2001-10-23 Micron Technology, Inc. Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization

Also Published As

Publication number Publication date
WO2003095145A1 (en) 2003-11-20

Similar Documents

Publication Publication Date Title
AU2003225269A1 (en) Lint-removing brush
AU2003225307A1 (en) Spray head
AU2003237608A1 (en) Cleaning method
AU151174S (en) Toothbrush head
AU152554S (en) Broom head
AU2003259262A1 (en) Pocket-dampening lacrosse head
AU2003232350A1 (en) Printhead
AU2003224320A1 (en) Selectively operational cleaning tool
AU2003252722A1 (en) Toothbrush
AU2003281271A1 (en) Shower head
AU150078S (en) Toothbrush head
AU150100S (en) Toothbrush head
AU2003289520A1 (en) Sprinkler head
AU2003284973A1 (en) Cleaning wipe
AU2003260421A1 (en) Shower head
AU2003297469A1 (en) Twin-headed toothbrush
AU2003277632A1 (en) Toothbrush
AU2003284954A1 (en) Cleaning wipe
AU2002258241A1 (en) Toothbrush
AU2003219400A1 (en) Cleaning head
AU2003283523A1 (en) Paintbrushes
AU2002344541A1 (en) Multi-purpose shower head
AU2003278900A1 (en) Toothbrush assembly
AU2003260159A1 (en) Brush head
AU2003100548A4 (en) Cleaning unit

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase
TH Corrigenda

Free format text: IN VOL 18, NO 2, PAGE(S) 537 UNDER THE HEADING APPLICATIONS OPI - NAME INDEX UNDER THE NAME KONINKLIJKE PHILIPS ELECTRONICS N.V., APPLICATION NO. 2003219400, UNDER INID (43) CORRECT THE PUBLICATION DATE TO READ 24.11.2003