AU2003214376A1 - Pedestal for mounting semiconductor fabrication equipments - Google Patents

Pedestal for mounting semiconductor fabrication equipments

Info

Publication number: AU2003214376A1
Authority: AU; Australia
Prior art keywords: pedestal; semiconductor fabrication; mounting semiconductor; fabrication equipments; equipments
Prior art date: 2002-03-01
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003214376A

Inventor

Gordon Robert Green

Robert Kenneth Trowell

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Trikon Technologies Ltd

Original Assignee

Trikon Technologies Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-03-01

Filing date

2003-02-27

Publication date

2003-09-16

2002-03-01 Priority claimed from GBGB0204882.5A external-priority patent/GB0204882D0/en

2003-02-27 Application filed by Trikon Technologies Ltd filed Critical Trikon Technologies Ltd

2003-09-16 Publication of AU2003214376A1 publication Critical patent/AU2003214376A1/en

Status Abandoned legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M5/00—Engine beds, i.e. means for supporting engines or machines on foundations
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
General Physics & Mathematics (AREA)
Manufacturing & Machinery (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Ventilation (AREA)

AU2003214376A 2002-03-01 2003-02-27 Pedestal for mounting semiconductor fabrication equipments Abandoned AU2003214376A1 (en)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
GB0204882.5		2002-03-01
GBGB0204882.5A GB0204882D0 (en)	2002-03-01	2002-03-01	Pedestal
US39197302P	2002-06-28	2002-06-28
US60/391,973		2002-06-28
PCT/GB2003/000861 WO2003075325A1 (en)	2002-03-01	2003-02-27	Pedestal for mounting semiconductor fabrication equipments

Publications (1)

Publication Number	Publication Date
AU2003214376A1 true AU2003214376A1 (en)	2003-09-16

Family

ID=27790176

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003214376A Abandoned AU2003214376A1 (en)	2002-03-01	2003-02-27	Pedestal for mounting semiconductor fabrication equipments

Country Status (4)

Country	Link
JP (1)	JP2005519467A (en)
AU (1)	AU2003214376A1 (en)
TW (1)	TWI230430B (en)
WO (1)	WO2003075325A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR101807675B1 (en) *	2016-03-18	2017-12-11	주식회사 에프알디	Semiconductor device setup assistance structure

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3479712A (en) *	1967-01-10	1969-11-25	Federal Tool Eng Co	Parts fabricating apparatus having readily replaceable units and indexable work holding ring structure
JPH065132B2 (en) *	1986-03-03	1994-01-19	清水建設株式会社	Clean room
US5076205A (en) *	1989-01-06	1991-12-31	General Signal Corporation	Modular vapor processor system
US5058491A (en) *	1990-08-27	1991-10-22	Taiwan Semiconductor Manufacturing Company, Ltd.	Building and method for manufacture of integrated circuits
JPH05156444A (en) *	1991-12-04	1993-06-22	Fujitsu Ltd	Structure for installation of device in clean room
JP3313385B2 (en) *	1991-12-11	2002-08-12	富士通株式会社	Clean room
US5350336A (en) *	1993-04-23	1994-09-27	Industrial Technology Research Institute	Building and method for manufacture of integrated semiconductor circuit devices
JP3225170B2 (en) *	1993-10-22	2001-11-05	東京エレクトロン株式会社	Vacuum processing equipment
US6152070A (en) *	1996-11-18	2000-11-28	Applied Materials, Inc.	Tandem process chamber
JPH10325581A (en) *	1997-05-27	1998-12-08	Taisei Corp	Clean room
JP3283000B2 (en) *	1998-06-09	2002-05-20	松下電器産業株式会社	Clean room
JP3884190B2 (en) *	1999-08-09	2007-02-21	株式会社竹中工務店	Semiconductor factory
TW484170B (en) *	1999-11-30	2002-04-21	Applied Materials Inc	Integrated modular processing platform
WO2002036301A2 (en) *	2000-11-03	2002-05-10	Applied Materials, Inc.	Installation docking pedestal for_wafer fabrication equipment

2003
- 2003-02-27 JP JP2003573684A patent/JP2005519467A/en active Pending
- 2003-02-27 AU AU2003214376A patent/AU2003214376A1/en not_active Abandoned
- 2003-02-27 WO PCT/GB2003/000861 patent/WO2003075325A1/en not_active Ceased
- 2003-02-27 TW TW92104276A patent/TWI230430B/en not_active IP Right Cessation

Also Published As

Publication number	Publication date
WO2003075325A1 (en)	2003-09-12
TWI230430B (en)	2005-04-01
TW200305249A (en)	2003-10-16
JP2005519467A (en)	2005-06-30

Publication	Publication Date	Title
EP2175487B8 (en)	2015-05-06	Semiconductor device
AU2003247695A1 (en)	2004-01-19	Silicon-on-insulator wafer for integrated circuit
AU2003226646A1 (en)	2003-10-27	Semiconductor device
AU2002247383A1 (en)	2002-10-08	In-street integrated circuit wafer via
AU2003234812A1 (en)	2003-12-22	Semiconductor device
AU2003298532A1 (en)	2004-05-13	Grating-stabilized semiconductor laser
AU2002316979A1 (en)	2003-01-02	Semiconductor device
AU2003246348A1 (en)	2003-09-09	Method for dividing semiconductor wafer
AU2003248339A1 (en)	2003-09-09	Method for dividing semiconductor wafer
SG127707A1 (en)	2006-12-29	Wafer support plate
AU2003227230A1 (en)	2003-10-20	Semiconductor laser device
AU2003241057A1 (en)	2004-01-19	Lateral semiconductor device
AU2002338003A1 (en)	2003-06-10	Semiconductor Devices
AU2003275373A1 (en)	2004-04-19	Semiconductor device processing
AU2003252371A1 (en)	2004-04-30	Semiconductor device
AU2002320060A1 (en)	2002-12-23	Method for isolating semiconductor devices
AU2003242347A1 (en)	2003-12-19	Semiconductor device
AUPS112202A0 (en)	2002-04-18	Semiconductor manufacture
AU2003251680A1 (en)	2004-03-19	Semiconductor laser device
AU2003264473A1 (en)	2004-04-08	Silicon compound
AU2002355049A1 (en)	2004-04-08	Semiconductor device
GB0218359D0 (en)	2002-09-18	Semiconductor Devices
AU2003281006A1 (en)	2004-02-02	Member for semiconductor device
AU2003235870A1 (en)	2003-11-11	Additional support structure for robot
AU2003268174A1 (en)	2003-11-11	Semiconductor laser

Legal Events

Date	Code	Title	Description
2004-11-18	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase