AU2003211799A1 - Cassette for substrates - Google Patents
Cassette for substratesInfo
- Publication number
- AU2003211799A1 AU2003211799A1 AU2003211799A AU2003211799A AU2003211799A1 AU 2003211799 A1 AU2003211799 A1 AU 2003211799A1 AU 2003211799 A AU2003211799 A AU 2003211799A AU 2003211799 A AU2003211799 A AU 2003211799A AU 2003211799 A1 AU2003211799 A1 AU 2003211799A1
- Authority
- AU
- Australia
- Prior art keywords
- cassette
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2003/000004 WO2004061940A1 (en) | 2003-01-03 | 2003-01-03 | Cassette for substrates |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AU2003211799A1 true AU2003211799A1 (en) | 2004-07-29 |
| AU2003211799A8 AU2003211799A8 (en) | 2004-07-29 |
Family
ID=32686801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2003211799A Abandoned AU2003211799A1 (en) | 2003-01-03 | 2003-01-03 | Cassette for substrates |
Country Status (2)
| Country | Link |
|---|---|
| AU (1) | AU2003211799A1 (en) |
| WO (1) | WO2004061940A1 (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08217183A (en) * | 1995-02-10 | 1996-08-27 | Sharp Corp | Plate-shaped storage cassette |
| JPH11121580A (en) * | 1997-10-13 | 1999-04-30 | Hitachi Ltd | Method and apparatus for supporting plate-like object |
| KR100247138B1 (en) * | 1997-11-20 | 2000-03-15 | 구본준, 론 위라하디락사 | Glass substrate cassette |
| JP2001110868A (en) * | 1999-10-08 | 2001-04-20 | Ricoh Co Ltd | Storage device |
| JP4328496B2 (en) * | 2001-06-26 | 2009-09-09 | 株式会社日立プラントテクノロジー | Single substrate transfer equipment |
-
2003
- 2003-01-03 WO PCT/CN2003/000004 patent/WO2004061940A1/en not_active Ceased
- 2003-01-03 AU AU2003211799A patent/AU2003211799A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| WO2004061940A1 (en) | 2004-07-22 |
| AU2003211799A8 (en) | 2004-07-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| TH | Corrigenda |
Free format text: IN VOL 18, NO 34, PAGE(S) 8895 UNDER THE HEADING APPLICATIONS OPI - NAME INDEX UNDER THE NAME QUANTA DISPLAY INC., APPLICATION NO. 2003211799, UNDER INID (71) CORRECT THE NAME TO READ QUANTA DISPLAY INC.; QUANTA DISPLAY JAPAN INC. |
|
| MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |