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AU2003290103A1 - Interferometer system and measuring device - Google Patents

Interferometer system and measuring device

Info

Publication number
AU2003290103A1
AU2003290103A1 AU2003290103A AU2003290103A AU2003290103A1 AU 2003290103 A1 AU2003290103 A1 AU 2003290103A1 AU 2003290103 A AU2003290103 A AU 2003290103A AU 2003290103 A AU2003290103 A AU 2003290103A AU 2003290103 A1 AU2003290103 A1 AU 2003290103A1
Authority
AU
Australia
Prior art keywords
measuring device
interferometer system
interferometer
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003290103A
Inventor
Herbert Gross
Christoph Hauger
Frank Holler
Klaus Knupfer
Theo Lasser
Ludwin Monz
Augustin Siegel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of AU2003290103A1 publication Critical patent/AU2003290103A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
AU2003290103A 2002-12-20 2003-12-19 Interferometer system and measuring device Abandoned AU2003290103A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10260256A DE10260256B9 (en) 2002-12-20 2002-12-20 Interferometer system and measuring / machining tool
DE10260256.5 2002-12-20
PCT/EP2003/014636 WO2004057266A2 (en) 2002-12-20 2003-12-19 Interferometer system and measuring device

Publications (1)

Publication Number Publication Date
AU2003290103A1 true AU2003290103A1 (en) 2004-07-14

Family

ID=32519247

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003290103A Abandoned AU2003290103A1 (en) 2002-12-20 2003-12-19 Interferometer system and measuring device

Country Status (3)

Country Link
AU (1) AU2003290103A1 (en)
DE (2) DE10260256B9 (en)
WO (1) WO2004057266A2 (en)

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Also Published As

Publication number Publication date
DE10260256B4 (en) 2005-02-17
WO2004057266A3 (en) 2004-11-18
DE10260256A1 (en) 2004-07-15
DE10260256B9 (en) 2007-03-01
WO2004057266A2 (en) 2004-07-08
DE10392656D2 (en) 2005-12-22
DE10392656B4 (en) 2012-06-14
WO2004057266A8 (en) 2005-01-20

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MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase