AU2003288566A1 - Deformable-mirror cooling - Google Patents

Deformable-mirror cooling

Info

Publication number: AU2003288566A1
Authority: AU; Australia
Prior art keywords: deformable; mirror cooling; mirror; cooling
Prior art date: 2002-12-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003288566A

Other versions

AU2003288566A8 (en

Inventor

Nicholas John Archer

Michael Stewart Griffith

Leslie Charles Laycock

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

BAE Systems PLC

Original Assignee

BAE Systems PLC

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-12-23

Filing date

2003-12-18

Publication date

2004-07-14

2002-12-23 Priority claimed from GB0230040A external-priority patent/GB0230040D0/en

2002-12-23 Priority claimed from GB0230038A external-priority patent/GB0230038D0/en

2003-04-30 Priority claimed from GB0310423A external-priority patent/GB0310423D0/en

2003-12-18 Application filed by BAE Systems PLC filed Critical BAE Systems PLC

2004-07-14 Publication of AU2003288566A1 publication Critical patent/AU2003288566A1/en

2004-07-14 Publication of AU2003288566A8 publication Critical patent/AU2003288566A8/en

Status Abandoned legal-status Critical Current

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
- G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Optical Elements Other Than Lenses (AREA)

AU2003288566A 2002-12-23 2003-12-18 Deformable-mirror cooling Abandoned AU2003288566A1 (en)

Applications Claiming Priority (7)

Application Number	Priority Date	Filing Date	Title
GB0230040A GB0230040D0 (en)	2002-12-23	2002-12-23	Deformable-mirror cooling
GB0230038A GB0230038D0 (en)	2002-12-23	2002-12-23	Deformable-mirror holder
GB0230038.2		2002-12-23
GB0230040.8		2002-12-23
GB0310423.9		2003-04-30
GB0310423A GB0310423D0 (en)	2002-12-23	2003-04-30	Deformable-mirror cooling
PCT/GB2003/005507 WO2004057406A2 (en)	2002-12-23	2003-12-18	Deformable-mirror cooling

Publications (2)

Publication Number	Publication Date
AU2003288566A1 true AU2003288566A1 (en)	2004-07-14
AU2003288566A8 AU2003288566A8 (en)	2004-07-14

Family

ID=32685761

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003288566A Abandoned AU2003288566A1 (en)	2002-12-23	2003-12-18	Deformable-mirror cooling

Country Status (4)

Country	Link
US (1)	US7264363B2 (en)
EP (1)	EP1576407A2 (en)
AU (1)	AU2003288566A1 (en)
WO (1)	WO2004057406A2 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
AU2003290284A1 (en) *	2002-12-23	2004-07-14	Bae Systems Plc	Deformable-mirror holder
EP1676163A2 (en)	2003-10-20	2006-07-05	BAE Systems PLC	Improvements relating to deformable mirror holders
GB0511692D0 (en)	2005-06-08	2005-07-13	Digital Projection Ltd	Heat transfer apparatus
US20080055755A1 (en) *	2006-08-31	2008-03-06	Searete Llc, A Limited Liability Corporation Of The State Of Delaware	Electromagnetic device and method
US7473878B2 (en) *	2007-06-08	2009-01-06	The Boeing Company	High power bimorph wave-front correction mirror
GB2451684A (en) *	2007-08-09	2009-02-11	Digital Projection Ltd	Heat transfer apparatus for cooling a light valve or digital micro mirror
US20090171422A1 (en) *	2007-12-31	2009-07-02	Searete Llc , A Limited Liability Corporation Of The State Of Delaware	Radiation treatment device
DE102008014619C5 (en) *	2008-03-17	2015-06-25	Friedrich-Schiller-Universität Jena	Adaptive mirror and method for its production
US7649691B2 (en) *	2008-06-20	2010-01-19	The Boeing Company	Dynamic variable shape optical element
WO2010136815A1 (en) *	2009-05-29	2010-12-02	Bae Systems Plc	Self-deformable mirrors and the support thereof
JP5506473B2 (en) *	2010-03-12	2014-05-28	キヤノン株式会社	Holding device, optical device and telescope
DE102012210712A1 (en) *	2012-06-25	2014-01-02	Carl Zeiss Smt Gmbh	Method and cooling system for cooling an optical element for EUV applications
US11372235B2 (en)	2019-07-25	2022-06-28	Lawrence Livermore National Security, Llc	Deformable mirror with integrated microchannel support
CN115220174B (en) *	2022-08-18	2023-09-26	苏州吉天星舟空间技术有限公司	Integrated opening flexible supporting structure for supporting reflector

Family Cites Families (27)

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Publication number	Priority date	Publication date	Assignee	Title
US3644020A (en) *	1970-03-06	1972-02-22	United Aircraft Corp	Variable contour reflector with cooling system
US3731992A (en) *	1972-04-06	1973-05-08	States Of Air Force	Spiral grooved liquid cooled laser mirror
DE2255937A1 (en) *	1972-11-15	1974-05-22	Braun Ag	MIRROR WITH ADJUSTABLE FOCAL LENGTH
US3923383A (en) *	1974-06-12	1975-12-02	Caterpillar Tractor Co	Fluid-cooled laser mirror
US3986768A (en) *	1974-11-04	1976-10-19	Caterpillar Tractor Co.	Center cooled laser mirror
US4143946A (en) *	1977-12-05	1979-03-13	The United States Of America As Represented By The Secretary Of The Navy	Impingement cooled deformable laser mirror
US4239343A (en) *	1979-09-04	1980-12-16	General Dynamics Corporation	Actuator configuration for a deformable mirror
JPS61285424A (en)	1985-06-13	1986-12-16	Olympus Optical Co Ltd	Optical beam deflector
US4733945A (en) *	1986-01-15	1988-03-29	The Perkin-Elmer Corporation	Precision lens mounting
US4674848A (en) *	1986-03-17	1987-06-23	Itek Corporation	Laser mirror having a cooled, deformable surface
DE4029075C1 (en)	1990-09-13	1991-12-05	Messerschmitt-Boelkow-Blohm Gmbh, 8012 Ottobrunn, De
US5094519A (en) *	1990-10-29	1992-03-10	Litton System, Inc.	Cooled laser mirror having adaptive flow control
US5172277A (en) *	1991-03-20	1992-12-15	The United States Of America As Represented By The Secretary Of The Air Force	Kinematic fixturing of optic components
US5209291A (en) *	1991-06-28	1993-05-11	Hughes Aircraft Company	Cooling apparatus for optical devices
GB9402086D0 (en)	1994-02-03	1994-03-30	Oxford Lensats Ltd	Improved adjustable mirror
JPH07261100A (en)	1994-03-17	1995-10-13	Hitachi Ltd	Deformable mirror
RU2068191C1 (en)	1996-02-12	1996-10-20	Йелстаун Корпорейшн Н.В.	Multilayer piezoelectric deformed bimorphous mirror
US6048070A (en) *	1996-02-28	2000-04-11	Raytheon Company	Durable large stroke deformable mirror
US5801891A (en) *	1997-04-14	1998-09-01	Eastman Kodak Company	Flat mirror mounting flexure
DE19827603A1 (en)	1998-06-20	1999-12-23	Zeiss Carl Fa	Projection light exposure system for microlithography
DE19859634A1 (en) *	1998-12-23	2000-06-29	Zeiss Carl Fa	Optical system, in particular projection exposure system for microlithography
US7069975B1 (en) *	1999-09-16	2006-07-04	Raytheon Company	Method and apparatus for cooling with a phase change material and heat pipes
US6425671B1 (en) *	2000-04-13	2002-07-30	Alan Adler	Optical mirror flexing structure and assembly
US6388231B1 (en) *	2000-06-15	2002-05-14	Xerox Corporation	Systems and methods for controlling depths of a laser cut
US6398373B1 (en)	2000-08-09	2002-06-04	Asml Us, Inc.	Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems
DE10052249A1 (en)	2000-10-21	2002-04-25	Lt Ultra Prec Technology Gmbh	Adaptive deformable mirror for use as a laser beam guidance component includes a casing assigned with a mirror element able to be reshaped and cooled by a substance.
DE10140608A1 (en)	2001-08-18	2003-03-06	Zeiss Carl	Device for adjusting an optical element

2003
- 2003-12-18 WO PCT/GB2003/005507 patent/WO2004057406A2/en not_active Ceased
- 2003-12-18 EP EP03780405A patent/EP1576407A2/en not_active Withdrawn
- 2003-12-18 US US10/537,894 patent/US7264363B2/en not_active Expired - Fee Related
- 2003-12-18 AU AU2003288566A patent/AU2003288566A1/en not_active Abandoned

Also Published As

Publication number	Publication date
AU2003288566A8 (en)	2004-07-14
WO2004057406A2 (en)	2004-07-08
US7264363B2 (en)	2007-09-04
EP1576407A2 (en)	2005-09-21
WO2004057406A3 (en)	2005-03-24
US20060103955A1 (en)	2006-05-18

Publication	Publication Date	Title
AU2002238861A1 (en)	2003-09-22	Refrigerator
AU2003235312A1 (en)	2003-11-03	Refrigerator
AU2003291995A1 (en)	2004-06-23	Cooling device
EP1394485A3 (en)	2004-09-22	Refrigerator
AU2003239909A1 (en)	2004-05-25	Enhanced-service provision
AU2002335152A1 (en)	2003-09-04	Robot-phone
AU2002953193A0 (en)	2003-01-02	Cooling helmet
AU2003286949A1 (en)	2004-07-22	Refrigerator
AU2003288566A1 (en)	2004-07-14	Deformable-mirror cooling
AU2003295133A1 (en)	2004-07-14	Deformable-mirror cooling
AU2003260327A1 (en)	2004-02-25	Refrigerator
AU2002318053A1 (en)	2004-02-02	Suplier
AU2002348964A1 (en)	2004-01-19	Snowbike
AU2002341221A1 (en)	2004-04-19	Honey-brandy
AU2003228146A1 (en)	2003-11-10	Cooling device
AU2002344387A1 (en)	2003-12-22	Multifunction-pillow
AUPS008102A0 (en)	2002-02-07	Cooling means
AU2003270207A1 (en)	2004-04-23	Cooling method
AUPS217202A0 (en)	2002-06-06	Cooling devices
AU2002100498A4 (en)	2002-11-21	Linline
AU2002100026A4 (en)	2002-02-07	Disc400
AU2002100957A4 (en)	2003-06-12	Sluggit
AU2002100747A4 (en)	2003-03-20	Powersell
AU2002100508A4 (en)	2002-11-14	Photocard
AU2002100482A4 (en)	2002-10-31	Tail-gate-ezy

Legal Events

Date	Code	Title	Description
2005-09-08	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase