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AU2003287928A1 - A cantilever sensor using both the longitudinal and the transversal piezoresistive coefficients - Google Patents

A cantilever sensor using both the longitudinal and the transversal piezoresistive coefficients

Info

Publication number
AU2003287928A1
AU2003287928A1 AU2003287928A AU2003287928A AU2003287928A1 AU 2003287928 A1 AU2003287928 A1 AU 2003287928A1 AU 2003287928 A AU2003287928 A AU 2003287928A AU 2003287928 A AU2003287928 A AU 2003287928A AU 2003287928 A1 AU2003287928 A1 AU 2003287928A1
Authority
AU
Australia
Prior art keywords
sup
sub
piezoresistive
longitudinal
sensor unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003287928A
Inventor
Jacob Thaysen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cantion Sciondtu AS
Original Assignee
Cantion AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cantion AS filed Critical Cantion AS
Publication of AU2003287928A1 publication Critical patent/AU2003287928A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Acoustics & Sound (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

The present invention relates to a sensor comprising least one sensor unit e.g. a cantilever. The sensor unit comprises a capture surface area and a piezoresistive detection system, for direct detection of stress change of the sensor unit when applying an electrical field over the piezoresistive element. The piezoresistive element has a longitudinal direction in the current direction and a transverse direction perpendicular there to. The longitudinal direction and the transverse direction each has a stress composant and a current composant. The piezoresistive element is of an anisotropic material, and is arranged so that the numerically value of the sum of the longitudinal piezoresistive coefficient pi<SUB>1 </SUB>and the transverse piezoresistive coefficient pi<SUB>t </SUB>along at least 25% of the length, of the piezoresistive element is at least 10<SUP>-10 </SUP>Pa<SUP>-1</SUP>xP, such as 2x10<SUP>-10 </SUP>Pa<SUP>-1</SUP>xP. such as 3x10<SUP>-10 </SUP>Pa<SUP>-1</SUP>xP, such as 4x10<SUP>-10 </SUP>Pa<SUP>-1</SUP>xP, wherein P is the piezoresistance factor, and wherein the piezoresistive coefficients pi<SUB>1 </SUB>and pi<SUB>t </SUB>are determined as composants in the coordinate system used to determine the longitudinal direction.
AU2003287928A 2002-12-27 2003-12-20 A cantilever sensor using both the longitudinal and the transversal piezoresistive coefficients Abandoned AU2003287928A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
DKPA200202016 2002-12-27
DKPA200202016 2002-12-27
DKPA200300068 2003-01-21
DKPA200300068 2003-01-21
US44467603P 2003-02-04 2003-02-04
US60/444,676 2003-02-04
PCT/DK2003/000918 WO2004059306A1 (en) 2002-12-27 2003-12-20 A cantilever sensor using both the longitudinal and the transversal piezoresistive coefficients

Publications (1)

Publication Number Publication Date
AU2003287928A1 true AU2003287928A1 (en) 2004-07-22

Family

ID=32685695

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003287928A Abandoned AU2003287928A1 (en) 2002-12-27 2003-12-20 A cantilever sensor using both the longitudinal and the transversal piezoresistive coefficients

Country Status (7)

Country Link
US (1) US7284452B2 (en)
EP (1) EP1588153B1 (en)
JP (1) JP2006512589A (en)
AT (1) ATE374937T1 (en)
AU (1) AU2003287928A1 (en)
DE (1) DE60316729T2 (en)
WO (1) WO2004059306A1 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7521257B2 (en) 2003-02-11 2009-04-21 The Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada, Reno Chemical sensor with oscillating cantilevered probe and mechanical stop
US7260980B2 (en) 2003-03-11 2007-08-28 Adams Jesse D Liquid cell and passivated probe for atomic force microscopy and chemical sensing
US20060257286A1 (en) 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection
GB0328054D0 (en) 2003-12-04 2004-01-07 Council Cent Lab Res Councils Fluid probe
US7207206B2 (en) 2004-02-19 2007-04-24 Ut-Battelle, Llc Chemically-functionalized microcantilevers for detection of chemical, biological and explosive material
US20060057026A1 (en) 2004-09-14 2006-03-16 Boiadjiev Vassil I Gold thiolate and photochemically functionalized microcantilevers using molecular recognition agents
GB2437753B8 (en) 2004-10-01 2009-05-20 Nevada System Of Higher Education Cantilevered probe detector with piezoelectric element
GB2432907A (en) * 2005-12-05 2007-06-06 Univ Basel Device for detecting the characteristics of organic molecules
GB0605273D0 (en) 2006-03-16 2006-04-26 Council Cent Lab Res Councils Fluid robe
US7709264B2 (en) * 2006-09-21 2010-05-04 Philip Morris Usa Inc. Handheld microcantilever-based sensor for detecting tobacco-specific nitrosamines
GB0716202D0 (en) 2007-08-11 2007-09-26 Microvisk Ltd Improved fluid probe
WO2009143373A1 (en) 2008-05-21 2009-11-26 Triton Systems, Inc. Detection of peroxide radicals and reaction initiators
WO2010013214A1 (en) * 2008-08-01 2010-02-04 Nxp B.V. Sensing environmental parameter through stress induced in ic
JP5743026B2 (en) * 2012-04-17 2015-07-01 国立研究開発法人物質・材料研究機構 Double-sided surface stress sensor
CN103017946B (en) * 2012-12-05 2014-09-24 北京大学 A MEMS piezoresistive multi-axis force sensor and its preparation method
CN106416298B (en) 2014-01-24 2019-05-28 国立大学法人东京大学 sensor
FR3110284B1 (en) * 2020-05-14 2023-01-13 Commissariat Energie Atomique Detection device using piezoresistive transduction

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4311980A (en) 1978-10-12 1982-01-19 Fabrica Italiana Magneti Marelli, S.P.A. Device for pressure measurement using a resistor strain gauge
JPH05196458A (en) * 1991-01-04 1993-08-06 Univ Leland Stanford Jr Piezoresistive cantilever beam structure for atomic force microscopy
US5275055A (en) 1992-08-31 1994-01-04 Honeywell Inc. Resonant gauge with microbeam driven in constant electric field
JP3399660B2 (en) * 1994-10-06 2003-04-21 株式会社東海理化電機製作所 Manufacturing method of surface type acceleration sensor
US5563341A (en) * 1995-06-07 1996-10-08 Fenner; Ralph L. Vapor pressure sensor and method
GB9801286D0 (en) * 1998-01-21 1998-03-18 Univ Cambridge Tech Sensor
GB9819319D0 (en) 1998-09-05 1998-10-28 Aea Technology Plc Assay of chemical binding
JP2002543403A (en) * 1999-05-03 2002-12-17 カンション アクティーゼルスカブ Method and sensor for detecting presence of substance in liquid, and method of manufacturing sensor
AU2002350427A1 (en) 2001-11-19 2003-06-10 Cantion A/S Sensor system with a reference surface mimicking the detection surface but with low ligand binding capacity
WO2003062135A1 (en) 2002-01-24 2003-07-31 Cantion A/S A sensor
US20050034542A1 (en) 2002-02-08 2005-02-17 Jacob Thaysen Sensor comprising mechanical amplification of surface stress sensitive cantilever
AU2003206688A1 (en) 2002-02-22 2003-09-09 Cantion A/S Sensor comprising an array of piezoresistors
SE0201705D0 (en) 2002-06-05 2002-06-05 Sp Sveriges Provnings Och Fors Improved analysis
AU2003232165A1 (en) * 2002-06-07 2003-12-22 Cantion A/S A cantilever sensor with a current shield and a method for its production

Also Published As

Publication number Publication date
ATE374937T1 (en) 2007-10-15
WO2004059306A8 (en) 2005-07-07
US7284452B2 (en) 2007-10-23
JP2006512589A (en) 2006-04-13
EP1588153B1 (en) 2007-10-03
US20060060003A1 (en) 2006-03-23
EP1588153A1 (en) 2005-10-26
DE60316729D1 (en) 2007-11-15
DE60316729T2 (en) 2008-07-24
WO2004059306A1 (en) 2004-07-15

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase