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AU2003284927A1 - Semiconductor device with quantum well and etch stop - Google Patents

Semiconductor device with quantum well and etch stop

Info

Publication number
AU2003284927A1
AU2003284927A1 AU2003284927A AU2003284927A AU2003284927A1 AU 2003284927 A1 AU2003284927 A1 AU 2003284927A1 AU 2003284927 A AU2003284927 A AU 2003284927A AU 2003284927 A AU2003284927 A AU 2003284927A AU 2003284927 A1 AU2003284927 A1 AU 2003284927A1
Authority
AU
Australia
Prior art keywords
semiconductor device
quantum well
etch stop
etch
quantum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003284927A
Other versions
AU2003284927A8 (en
Inventor
Scott W. Duncan
Geoff W. Taylor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CENTER FOR SCIENCE AND TECHNOLOGY COMMERCIALIZATION
Opel Inc
Original Assignee
CT FOR SCIENCE AND TECHNOLOGY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/280,892 external-priority patent/US6954473B2/en
Priority claimed from US10/340,942 external-priority patent/US6841795B2/en
Priority claimed from US10/340,941 external-priority patent/US7015120B2/en
Application filed by CT FOR SCIENCE AND TECHNOLOGY filed Critical CT FOR SCIENCE AND TECHNOLOGY
Publication of AU2003284927A1 publication Critical patent/AU2003284927A1/en
Publication of AU2003284927A8 publication Critical patent/AU2003284927A8/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00Bipolar junction transistors [BJT]
    • H10D10/01Manufacture or treatment
    • H10D10/021Manufacture or treatment of heterojunction BJTs [HBT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00Bipolar junction transistors [BJT]
    • H10D10/80Heterojunction BJTs
    • H10D10/821Vertical heterojunction BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/015Manufacture or treatment of FETs having heterojunction interface channels or heterojunction gate electrodes, e.g. HEMT
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/80FETs having rectifying junction gate electrodes
    • H10D30/801FETs having heterojunction gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/81Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
    • H10D62/815Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW]
    • H10D62/8161Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices
    • H10D62/8162Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices having quantum effects only in the vertical direction, i.e. layered structures having quantum effects solely resulting from vertical potential variation
    • H10D62/8164Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices having quantum effects only in the vertical direction, i.e. layered structures having quantum effects solely resulting from vertical potential variation comprising only semiconductor materials 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/05Manufacture or treatment characterised by using material-based technologies using Group III-V technology
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/82Heterojunctions
    • H10D62/824Heterojunctions comprising only Group III-V materials heterojunctions, e.g. GaN/AlGaN heterojunctions
AU2003284927A 2002-10-25 2003-10-23 Semiconductor device with quantum well and etch stop Abandoned AU2003284927A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US10/280,892 US6954473B2 (en) 2002-10-25 2002-10-25 Optoelectronic device employing at least one semiconductor heterojunction thyristor for producing variable electrical/optical delay
US10/280,892 2002-10-25
US10/340,942 2003-01-13
US10/340,941 2003-01-13
US10/340,942 US6841795B2 (en) 2002-10-25 2003-01-13 Semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation
US10/340,941 US7015120B2 (en) 2002-10-25 2003-01-13 Method of fabricating semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation
PCT/US2003/033829 WO2004038764A2 (en) 2002-10-25 2003-10-23 Semiconductor device with quantum well and etch stop

Publications (2)

Publication Number Publication Date
AU2003284927A1 true AU2003284927A1 (en) 2004-05-13
AU2003284927A8 AU2003284927A8 (en) 2004-05-13

Family

ID=32180447

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003284927A Abandoned AU2003284927A1 (en) 2002-10-25 2003-10-23 Semiconductor device with quantum well and etch stop

Country Status (2)

Country Link
AU (1) AU2003284927A1 (en)
WO (1) WO2004038764A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115903280A (en) * 2021-08-20 2023-04-04 住友电气工业株式会社 Optical modulator

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6117699A (en) * 1998-04-10 2000-09-12 Hewlett-Packard Company Monolithic multiple wavelength VCSEL array

Also Published As

Publication number Publication date
WO2004038764A8 (en) 2005-07-07
WO2004038764A2 (en) 2004-05-06
WO2004038764A3 (en) 2004-07-15
AU2003284927A8 (en) 2004-05-13

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase