AU2003284927A1 - Semiconductor device with quantum well and etch stop - Google Patents
Semiconductor device with quantum well and etch stopInfo
- Publication number
- AU2003284927A1 AU2003284927A1 AU2003284927A AU2003284927A AU2003284927A1 AU 2003284927 A1 AU2003284927 A1 AU 2003284927A1 AU 2003284927 A AU2003284927 A AU 2003284927A AU 2003284927 A AU2003284927 A AU 2003284927A AU 2003284927 A1 AU2003284927 A1 AU 2003284927A1
- Authority
- AU
- Australia
- Prior art keywords
- semiconductor device
- quantum well
- etch stop
- etch
- quantum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D10/00—Bipolar junction transistors [BJT]
- H10D10/01—Manufacture or treatment
- H10D10/021—Manufacture or treatment of heterojunction BJTs [HBT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D10/00—Bipolar junction transistors [BJT]
- H10D10/80—Heterojunction BJTs
- H10D10/821—Vertical heterojunction BJTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/015—Manufacture or treatment of FETs having heterojunction interface channels or heterojunction gate electrodes, e.g. HEMT
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/80—FETs having rectifying junction gate electrodes
- H10D30/801—FETs having heterojunction gate electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/81—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
- H10D62/815—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW]
- H10D62/8161—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices
- H10D62/8162—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices having quantum effects only in the vertical direction, i.e. layered structures having quantum effects solely resulting from vertical potential variation
- H10D62/8164—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices having quantum effects only in the vertical direction, i.e. layered structures having quantum effects solely resulting from vertical potential variation comprising only semiconductor materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/05—Manufacture or treatment characterised by using material-based technologies using Group III-V technology
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/82—Heterojunctions
- H10D62/824—Heterojunctions comprising only Group III-V materials heterojunctions, e.g. GaN/AlGaN heterojunctions
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/280,892 US6954473B2 (en) | 2002-10-25 | 2002-10-25 | Optoelectronic device employing at least one semiconductor heterojunction thyristor for producing variable electrical/optical delay |
| US10/280,892 | 2002-10-25 | ||
| US10/340,942 | 2003-01-13 | ||
| US10/340,941 | 2003-01-13 | ||
| US10/340,942 US6841795B2 (en) | 2002-10-25 | 2003-01-13 | Semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation |
| US10/340,941 US7015120B2 (en) | 2002-10-25 | 2003-01-13 | Method of fabricating semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation |
| PCT/US2003/033829 WO2004038764A2 (en) | 2002-10-25 | 2003-10-23 | Semiconductor device with quantum well and etch stop |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AU2003284927A1 true AU2003284927A1 (en) | 2004-05-13 |
| AU2003284927A8 AU2003284927A8 (en) | 2004-05-13 |
Family
ID=32180447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2003284927A Abandoned AU2003284927A1 (en) | 2002-10-25 | 2003-10-23 | Semiconductor device with quantum well and etch stop |
Country Status (2)
| Country | Link |
|---|---|
| AU (1) | AU2003284927A1 (en) |
| WO (1) | WO2004038764A2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115903280A (en) * | 2021-08-20 | 2023-04-04 | 住友电气工业株式会社 | Optical modulator |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6117699A (en) * | 1998-04-10 | 2000-09-12 | Hewlett-Packard Company | Monolithic multiple wavelength VCSEL array |
-
2003
- 2003-10-23 WO PCT/US2003/033829 patent/WO2004038764A2/en not_active Ceased
- 2003-10-23 AU AU2003284927A patent/AU2003284927A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| WO2004038764A8 (en) | 2005-07-07 |
| WO2004038764A2 (en) | 2004-05-06 |
| WO2004038764A3 (en) | 2004-07-15 |
| AU2003284927A8 (en) | 2004-05-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AU2003252741A1 (en) | Submount and semiconductor device | |
| AU2003211502A1 (en) | Submount and semiconductor device | |
| AU2003263979A1 (en) | Semiconductor quantum cryptographic device and method | |
| AU2003207090A1 (en) | Semiconductor light-emitting device and its manufacturing method | |
| AU2003280487A1 (en) | Semiconductor device and its manufacturing method | |
| EP1329956A3 (en) | Semiconductor device and its manufacturing method | |
| EP2175487B8 (en) | Semiconductor device | |
| AU2003244275A1 (en) | Semiconductor device and its manufacturing method | |
| AU2002950888A0 (en) | Quantum device | |
| AU2003220830A1 (en) | Semiconductor manufacturing method and device thereof | |
| AU2003226646A1 (en) | Semiconductor device | |
| TWI318009B (en) | Semiconductor device, display device, and light-emitting device, and methods of manufacturing the same | |
| AU2003230699A1 (en) | Power semiconductor device | |
| AU2003234812A1 (en) | Semiconductor device | |
| AU2003286831A1 (en) | Damascene gate process with sacrificial oxide in semiconductor devices | |
| AU2003242012A1 (en) | Semiconductor device and method for fabricating the same | |
| AU2003235967A1 (en) | Semiconductor device and electronic device | |
| AU2003235286A1 (en) | Semiconductor light-emitting device | |
| AU2003211431A1 (en) | Semiconductor storage device | |
| AU2003241057A1 (en) | Lateral semiconductor device | |
| AU2003236254A1 (en) | Semiconductor device and its manufacturing method | |
| AU2003252371A1 (en) | Semiconductor device | |
| AU2003235175A1 (en) | Semiconductor device and its manufacturing method | |
| AU2003234828A1 (en) | Semiconductor light-emitting device | |
| AU2003244962A1 (en) | Semiconductor device with edge structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |