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AU2003270110A1 - Arrangement for determining variations in layer thickness - Google Patents

Arrangement for determining variations in layer thickness

Info

Publication number
AU2003270110A1
AU2003270110A1 AU2003270110A AU2003270110A AU2003270110A1 AU 2003270110 A1 AU2003270110 A1 AU 2003270110A1 AU 2003270110 A AU2003270110 A AU 2003270110A AU 2003270110 A AU2003270110 A AU 2003270110A AU 2003270110 A1 AU2003270110 A1 AU 2003270110A1
Authority
AU
Australia
Prior art keywords
arrangement
layer thickness
determining variations
variations
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003270110A
Inventor
Margrit Killenberg-Jabs
Peter Pfeifer
Carsten Rogge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Analytik Jena GmbH and Co KG
Original Assignee
Analytik Jena GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analytik Jena GmbH and Co KG filed Critical Analytik Jena GmbH and Co KG
Publication of AU2003270110A1 publication Critical patent/AU2003270110A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AU2003270110A 2002-08-28 2003-08-27 Arrangement for determining variations in layer thickness Abandoned AU2003270110A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE20213343.5 2002-08-28
DE20213343U DE20213343U1 (en) 2002-08-28 2002-08-28 Arrangement for determining changes in layer thickness
PCT/EP2003/009468 WO2004025282A1 (en) 2002-08-28 2003-08-27 Arrangement for determining variations in layer thickness

Publications (1)

Publication Number Publication Date
AU2003270110A1 true AU2003270110A1 (en) 2004-04-30

Family

ID=7974578

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003270110A Abandoned AU2003270110A1 (en) 2002-08-28 2003-08-27 Arrangement for determining variations in layer thickness

Country Status (3)

Country Link
AU (1) AU2003270110A1 (en)
DE (1) DE20213343U1 (en)
WO (1) WO2004025282A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7394547B2 (en) 2003-11-06 2008-07-01 Fortebio, Inc. Fiber-optic assay apparatus based on phase-shift interferometry
US7319525B2 (en) 2003-11-06 2008-01-15 Fortebio, Inc. Fiber-optic assay apparatus based on phase-shift interferometry
US20100261288A1 (en) 2005-06-13 2010-10-14 Fortebio, Inc. Tip tray assembly for optical sensors

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1623319A1 (en) * 1967-06-22 1971-03-18 Telefunken Patent Device for determining the thickness of air permeable layers
NL8701463A (en) * 1987-06-23 1989-01-16 Philips Nv COATING THICKNESS METERS.
US6025916A (en) * 1997-02-27 2000-02-15 Wisconsin Alumni Research Foundation Wall deposition thickness sensor for plasma processing chamber

Also Published As

Publication number Publication date
DE20213343U1 (en) 2002-11-14
WO2004025282A1 (en) 2004-03-25

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase