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AU2003252731A1 - Work transfer means - Google Patents

Work transfer means

Info

Publication number
AU2003252731A1
AU2003252731A1 AU2003252731A AU2003252731A AU2003252731A1 AU 2003252731 A1 AU2003252731 A1 AU 2003252731A1 AU 2003252731 A AU2003252731 A AU 2003252731A AU 2003252731 A AU2003252731 A AU 2003252731A AU 2003252731 A1 AU2003252731 A1 AU 2003252731A1
Authority
AU
Australia
Prior art keywords
transfer means
work transfer
work
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003252731A
Inventor
Shoji Kitamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Machinery Inc
Original Assignee
NEC Machinery Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Machinery Corp filed Critical NEC Machinery Corp
Publication of AU2003252731A1 publication Critical patent/AU2003252731A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/0404Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408Incorporating a pick-up tool
    • H05K13/0409Sucking devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Die Bonding (AREA)
  • Manipulator (AREA)
AU2003252731A 2003-07-30 2003-07-30 Work transfer means Abandoned AU2003252731A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2003/009670 WO2005011927A1 (en) 2003-07-30 2003-07-30 Work transfer means

Publications (1)

Publication Number Publication Date
AU2003252731A1 true AU2003252731A1 (en) 2005-02-15

Family

ID=34113459

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003252731A Abandoned AU2003252731A1 (en) 2003-07-30 2003-07-30 Work transfer means

Country Status (2)

Country Link
AU (1) AU2003252731A1 (en)
WO (1) WO2005011927A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5447565B2 (en) * 2012-03-21 2014-03-19 セイコーエプソン株式会社 Handler teaching method and handler
JP2024046799A (en) * 2022-09-26 2024-04-05 ファスフォードテクノロジ株式会社 Semiconductor manufacturing apparatus and method for manufacturing semiconductor device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06204266A (en) * 1992-12-28 1994-07-22 Toshiba Seiki Kk Picking-up method for semiconductor pellet
JP3507704B2 (en) * 1998-07-16 2004-03-15 松下電器産業株式会社 Method for detecting suction height of micro ball and method for suction of micro ball

Also Published As

Publication number Publication date
WO2005011927A1 (en) 2005-02-10

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase