AU2003248484A1 - Apparatus and method for determining physical properties of ferroelectric single crystal using spectroscopic ellipsometry - Google Patents
Apparatus and method for determining physical properties of ferroelectric single crystal using spectroscopic ellipsometryInfo
- Publication number
- AU2003248484A1 AU2003248484A1 AU2003248484A AU2003248484A AU2003248484A1 AU 2003248484 A1 AU2003248484 A1 AU 2003248484A1 AU 2003248484 A AU2003248484 A AU 2003248484A AU 2003248484 A AU2003248484 A AU 2003248484A AU 2003248484 A1 AU2003248484 A1 AU 2003248484A1
- Authority
- AU
- Australia
- Prior art keywords
- single crystal
- physical properties
- spectroscopic ellipsometry
- determining physical
- ferroelectric single
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000013078 crystal Substances 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 230000000704 physical effect Effects 0.000 title 1
- 238000000391 spectroscopic ellipsometry Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
- G01N2021/1721—Electromodulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
- G01N2021/213—Spectrometric ellipsometry
Landscapes
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2003-0009018 | 2003-02-13 | ||
| KR20030009018 | 2003-02-13 | ||
| PCT/KR2003/001422 WO2004072623A1 (en) | 2003-02-13 | 2003-07-18 | Apparatus and method for determining physical properties of ferroelectric single crystal using spectroscopic ellipsometry |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2003248484A1 true AU2003248484A1 (en) | 2004-09-06 |
Family
ID=32866885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2003248484A Abandoned AU2003248484A1 (en) | 2003-02-13 | 2003-07-18 | Apparatus and method for determining physical properties of ferroelectric single crystal using spectroscopic ellipsometry |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR20040073251A (en) |
| AU (1) | AU2003248484A1 (en) |
| WO (1) | WO2004072623A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113176455A (en) * | 2021-04-23 | 2021-07-27 | 西安交通大学 | Device and method for measuring piezoelectric performance parameters of ferroelectric crystal under strong electric field |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102650514B1 (en) | 2019-07-10 | 2024-03-25 | 한국전력공사 | Method for measuring efficiency of ferroelectric materials containing transition elements and the pellet for measuring efficiency of ferroelectric materials |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5798837A (en) * | 1997-07-11 | 1998-08-25 | Therma-Wave, Inc. | Thin film optical measurement system and method with calibrating ellipsometer |
| US6408048B2 (en) * | 2000-03-14 | 2002-06-18 | Therma-Wave, Inc. | Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements |
| FR2812941B1 (en) * | 2000-08-10 | 2002-10-11 | Air Liquide | METHOD FOR REAL-TIME MONITORING OF THE ELABORATION OF A THIN-FILM STRUCTURE BY ELIPSOMETRIC MEASUREMENT |
-
2003
- 2003-07-18 WO PCT/KR2003/001422 patent/WO2004072623A1/en not_active Ceased
- 2003-07-18 AU AU2003248484A patent/AU2003248484A1/en not_active Abandoned
- 2003-07-18 KR KR1020030049032A patent/KR20040073251A/en not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113176455A (en) * | 2021-04-23 | 2021-07-27 | 西安交通大学 | Device and method for measuring piezoelectric performance parameters of ferroelectric crystal under strong electric field |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20040073251A (en) | 2004-08-19 |
| WO2004072623A1 (en) | 2004-08-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |