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AU2003248484A1 - Apparatus and method for determining physical properties of ferroelectric single crystal using spectroscopic ellipsometry - Google Patents

Apparatus and method for determining physical properties of ferroelectric single crystal using spectroscopic ellipsometry

Info

Publication number
AU2003248484A1
AU2003248484A1 AU2003248484A AU2003248484A AU2003248484A1 AU 2003248484 A1 AU2003248484 A1 AU 2003248484A1 AU 2003248484 A AU2003248484 A AU 2003248484A AU 2003248484 A AU2003248484 A AU 2003248484A AU 2003248484 A1 AU2003248484 A1 AU 2003248484A1
Authority
AU
Australia
Prior art keywords
single crystal
physical properties
spectroscopic ellipsometry
determining physical
ferroelectric single
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003248484A
Inventor
Kyoung Yoon Bang
Jaehwan Eun
Sang-Goo Lee
Sung Min Rhim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IBULE PHOTONICS Inc
Original Assignee
Ibule Photonics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibule Photonics Co Ltd filed Critical Ibule Photonics Co Ltd
Publication of AU2003248484A1 publication Critical patent/AU2003248484A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • G01N21/211Ellipsometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G01N2021/1721Electromodulation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • G01N21/211Ellipsometry
    • G01N2021/213Spectrometric ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AU2003248484A 2003-02-13 2003-07-18 Apparatus and method for determining physical properties of ferroelectric single crystal using spectroscopic ellipsometry Abandoned AU2003248484A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR10-2003-0009018 2003-02-13
KR20030009018 2003-02-13
PCT/KR2003/001422 WO2004072623A1 (en) 2003-02-13 2003-07-18 Apparatus and method for determining physical properties of ferroelectric single crystal using spectroscopic ellipsometry

Publications (1)

Publication Number Publication Date
AU2003248484A1 true AU2003248484A1 (en) 2004-09-06

Family

ID=32866885

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003248484A Abandoned AU2003248484A1 (en) 2003-02-13 2003-07-18 Apparatus and method for determining physical properties of ferroelectric single crystal using spectroscopic ellipsometry

Country Status (3)

Country Link
KR (1) KR20040073251A (en)
AU (1) AU2003248484A1 (en)
WO (1) WO2004072623A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113176455A (en) * 2021-04-23 2021-07-27 西安交通大学 Device and method for measuring piezoelectric performance parameters of ferroelectric crystal under strong electric field

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102650514B1 (en) 2019-07-10 2024-03-25 한국전력공사 Method for measuring efficiency of ferroelectric materials containing transition elements and the pellet for measuring efficiency of ferroelectric materials

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5798837A (en) * 1997-07-11 1998-08-25 Therma-Wave, Inc. Thin film optical measurement system and method with calibrating ellipsometer
US6408048B2 (en) * 2000-03-14 2002-06-18 Therma-Wave, Inc. Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements
FR2812941B1 (en) * 2000-08-10 2002-10-11 Air Liquide METHOD FOR REAL-TIME MONITORING OF THE ELABORATION OF A THIN-FILM STRUCTURE BY ELIPSOMETRIC MEASUREMENT

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113176455A (en) * 2021-04-23 2021-07-27 西安交通大学 Device and method for measuring piezoelectric performance parameters of ferroelectric crystal under strong electric field

Also Published As

Publication number Publication date
KR20040073251A (en) 2004-08-19
WO2004072623A1 (en) 2004-08-26

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase