AU2003243309A1 - Cooling mechanisms for shaft coupled to a rotary seal - Google Patents

Cooling mechanisms for shaft coupled to a rotary seal

Info

Publication number: AU2003243309A1
Authority: AU; Australia
Prior art keywords: rotary seal; shaft coupled; cooling mechanisms; mechanisms; cooling
Prior art date: 2002-05-29
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003243309A

Inventor

William Leavitt

Richard Muka

Steven Richards

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ibis Technology Corp

Original Assignee

Ibis Technology Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-05-29

Filing date

2003-05-27

Publication date

2003-12-19

2003-05-27 Application filed by Ibis Technology Corp filed Critical Ibis Technology Corp

2003-12-19 Publication of AU2003243309A1 publication Critical patent/AU2003243309A1/en

Status Abandoned legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Analytical Chemistry (AREA)
Manufacturing & Machinery (AREA)
Materials Engineering (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
General Physics & Mathematics (AREA)
Chemical Kinetics & Catalysis (AREA)
Physics & Mathematics (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Condensed Matter Physics & Semiconductors (AREA)
Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Physical Vapour Deposition (AREA)

AU2003243309A 2002-05-29 2003-05-27 Cooling mechanisms for shaft coupled to a rotary seal Abandoned AU2003243309A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US10/157,687 US6863736B2 (en)	2002-05-29	2002-05-29	Shaft cooling mechanisms
US10/157,687		2002-05-29
PCT/US2003/016544 WO2003102261A1 (en)	2002-05-29	2003-05-27	Cooling mechanisms for shaft coupled to a rotary seal

Publications (1)

Publication Number	Publication Date
AU2003243309A1 true AU2003243309A1 (en)	2003-12-19

Family

ID=29582530

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003243309A Abandoned AU2003243309A1 (en)	2002-05-29	2003-05-27	Cooling mechanisms for shaft coupled to a rotary seal

Country Status (3)

Country	Link
US (1)	US6863736B2 (en)
AU (1)	AU2003243309A1 (en)
WO (1)	WO2003102261A1 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20040187787A1 (en) *	2003-03-31	2004-09-30	Dawson Keith E.	Substrate support having temperature controlled substrate support surface
US20090103684A1 (en) *	2004-10-26	2009-04-23	Koninklijke Philips Electronics, N.V.	Molybdenum-molybdenum brazing and rotary-anode x-ray tube comprising such a brazing
KR101121417B1 (en) *	2004-10-28	2012-03-15	주성엔지니어링(주)	Manufacturing apparatus for display device
US8450193B2 (en) *	2006-08-15	2013-05-28	Varian Semiconductor Equipment Associates, Inc.	Techniques for temperature-controlled ion implantation
US8422193B2 (en) *	2006-12-19	2013-04-16	Axcelis Technologies, Inc.	Annulus clamping and backside gas cooled electrostatic chuck
CN100458243C (en) *	2007-04-29	2009-02-04	浙江工业大学	Magnetofluid seal driving device for vacuum equipment driving shaft
US9036326B2 (en) *	2008-04-30	2015-05-19	Axcelis Technologies, Inc.	Gas bearing electrostatic chuck
US9558980B2 (en)	2008-04-30	2017-01-31	Axcelis Technologies, Inc.	Vapor compression refrigeration chuck for ion implanters
JP2010015774A (en) *	2008-07-02	2010-01-21	Sumco Corp	Ion implantation apparatus
JP2013532354A (en)	2010-05-28	2013-08-15	アクセリステクノロジーズ，インコーポレイテッド	Heated rotary seal and bearing for cooled ion implantation system
US8481969B2 (en) *	2010-06-04	2013-07-09	Axcelis Technologies, Inc.	Effective algorithm for warming a twist axis for cold ion implantations
WO2013096462A1 (en) *	2011-12-20	2013-06-27	R. Morley Inc.	Shaft for rotating machinery and methods of making and using same
US9711324B2 (en)	2012-05-31	2017-07-18	Axcelis Technologies, Inc.	Inert atmospheric pressure pre-chill and post-heat
JP2017199610A (en) *	2016-04-28	2017-11-02	株式会社ニューフレアテクノロジー	Stage mechanism
AU2019277655B2 (en) *	2018-05-31	2022-02-17	Wavetamer Llc	Gyroscopic Boat Roll Stabilizer
WO2021178201A1 (en)	2020-03-02	2021-09-10	Wavetamer Llc	Gyroscopic boat roll stabilizer with bearing cooling
WO2022072433A1 (en)	2020-09-30	2022-04-07	Wavetamer Llc	Gyroscopic roll stabilizer with flywheel cavity seal arrangement
AU2021353490B2 (en)	2020-09-30	2023-09-28	Wavetamer Llc	Gyroscopic roll stabilizer with flywheel shaft through passage
CN116951003A (en) *	2022-04-20	2023-10-27	江苏鲁汶仪器股份有限公司	Magnetic fluid shaft

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4256453A (en) *	1978-10-16	1981-03-17	Selas Corporation Of America	Calciner screw construction
DE3407275A1 (en) *	1984-02-28	1985-08-29	Kraftwerk Union AG, 4330 Mülheim	DEVICE ON A ROTATING MACHINE FOR HEAT-MOVABLE AND SEALING COUPLING OF TWO CONCENTRIC SHAFTS
JPS61160671A (en)	1984-12-29	1986-07-21	Nippon Fueroo Furuideikusu Kk	Magnetic fluid seal device
US4592557A (en) *	1985-02-07	1986-06-03	Iversen Arthur H	Liquid cooled rotating seals
JPH05326388A (en) *	1992-05-18	1993-12-10	Canon Inc	Thin film forming method, coating type thin film forming apparatus, etching method, etching apparatus, and ferroelectric liquid crystal injection method
US5830277A (en) *	1995-05-26	1998-11-03	Mattson Technology, Inc.	Thermal processing system with supplemental resistive heater and shielded optical pyrometry
US5641969A (en) *	1996-03-28	1997-06-24	Applied Materials, Inc.	Ion implantation apparatus
US5826885A (en) *	1996-10-02	1998-10-27	Rigaku/Usa, Inc.	Magnetic fluid sealing device
GB2354062A (en) *	1999-09-13	2001-03-14	British Broadcasting Corp	Cooling system for use in cooling electronic equipment

2002
- 2002-05-29 US US10/157,687 patent/US6863736B2/en not_active Expired - Fee Related
2003
- 2003-05-27 WO PCT/US2003/016544 patent/WO2003102261A1/en not_active Ceased
- 2003-05-27 AU AU2003243309A patent/AU2003243309A1/en not_active Abandoned

Also Published As

Publication number	Publication date
US20030221626A1 (en)	2003-12-04
US6863736B2 (en)	2005-03-08
WO2003102261A1 (en)	2003-12-11

Publication	Publication Date	Title
AU2003243309A1 (en)	2003-12-19	Cooling mechanisms for shaft coupled to a rotary seal
AU2003224749A1 (en)	2003-10-13	Shaft seal
EP1476685A4 (en)	2006-03-15	Shaft sealing system for a rotary mechanical device
AU2003231129A1 (en)	2003-11-10	Low torque seal assembly
AU2003238080A1 (en)	2003-12-22	Sealing arrangement for a rotor of a turbomachine
EP1492969A4 (en)	2005-05-11	Improved valve seal for rotary valve engine
AU2003207953A1 (en)	2003-07-30	Rotary motion mechanism
AU2003301723A1 (en)	2004-05-25	Valve seal for rotary valve engine
AU2003201828A1 (en)	2003-07-24	Rotating positive displacement engine
AU2002952005A0 (en)	2002-10-31	A rotary engine
AU2003298436A1 (en)	2004-06-30	Rotor for a rotary machine
AU2003287852A1 (en)	2004-06-07	Direct drive for a cylinder
AU2003291137A1 (en)	2004-06-18	Hermetic seal for devices with limited rotation
AU2003227951A1 (en)	2003-12-12	Rotary valve seal
AU2003251987A1 (en)	2004-02-09	Rotary actuator assembly
AU2003902189A0 (en)	2003-05-22	Seal for a roller assembly
AU2003269230A1 (en)	2004-04-23	Rotary positive displacement machine with orbiting piston
AU2003291209A1 (en)	2004-06-07	A rotary scrubber
AU2003269260A1 (en)	2004-05-04	Rotary compressor
AU2002953289A0 (en)	2003-01-02	Improved rotary stamper
GB0223531D0 (en)	2002-11-13	Rotary drive means
AU2002242568A1 (en)	2003-11-10	Drive unit for horizontally turning rotational solid
AU2003269237A1 (en)	2004-05-04	Rotary compressor
AU2003240343A1 (en)	2004-02-02	Compressed-air operated rotary vane motor
AU2003271911A1 (en)	2004-05-04	Rotary compressor

Legal Events

Date	Code	Title	Description
2005-03-03	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase