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AU2002306457A1 - Surface polishing method and apparatus - Google Patents

Surface polishing method and apparatus

Info

Publication number
AU2002306457A1
AU2002306457A1 AU2002306457A AU2002306457A AU2002306457A1 AU 2002306457 A1 AU2002306457 A1 AU 2002306457A1 AU 2002306457 A AU2002306457 A AU 2002306457A AU 2002306457 A AU2002306457 A AU 2002306457A AU 2002306457 A1 AU2002306457 A1 AU 2002306457A1
Authority
AU
Australia
Prior art keywords
polishing method
surface polishing
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002306457A
Inventor
Erik A. Larsen
Colin H. Wess
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Larsen Erik A
Larsen Equipment Design Inc
Original Assignee
Larsen Erik A
Larsen Equipment Design Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Larsen Erik A, Larsen Equipment Design Inc filed Critical Larsen Erik A
Publication of AU2002306457A1 publication Critical patent/AU2002306457A1/en
Abandoned legal-status Critical Current

Links

AU2002306457A 2001-01-30 2002-01-30 Surface polishing method and apparatus Abandoned AU2002306457A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/774,225 2001-01-30

Publications (1)

Publication Number Publication Date
AU2002306457A1 true AU2002306457A1 (en) 2002-08-19

Family

ID=

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