AU2002366483A1 - Mass flow measurment sensor for mass flow controller - Google Patents

Mass flow measurment sensor for mass flow controller

Info

Publication number: AU2002366483A1
Authority: AU; Australia
Prior art keywords: mass flow; measurment sensor; flow controller; controller; sensor
Prior art date: 2001-12-19
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2002366483A

Inventor

Wook Hyun Kim

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Individual

Original Assignee

Individual

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-12-19

Filing date

2002-12-16

Publication date

2003-06-30

2002-12-16 Application filed by Individual filed Critical Individual

2003-06-30 Publication of AU2002366483A1 publication Critical patent/AU2002366483A1/en

Status Abandoned legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Fluid Mechanics (AREA)
Engineering & Computer Science (AREA)
Automation & Control Theory (AREA)
Measuring Volume Flow (AREA)

AU2002366483A 2001-12-19 2002-12-16 Mass flow measurment sensor for mass flow controller Abandoned AU2002366483A1 (en)

Applications Claiming Priority (7)

Application Number	Priority Date	Filing Date	Title
KR20010081357		2001-12-19
KR10-2001-0081357		2001-12-19
KR10-2002-0014257		2002-03-16
KR20020014257		2002-03-16
KR1020020020202		2002-04-13
KR10-2002-0020202		2002-04-13
PCT/KR2002/002364 WO2003052356A1 (en)	2001-12-19	2002-12-16	Mass flow measurment sensor for mass flow controller

Publications (1)

Publication Number	Publication Date
AU2002366483A1 true AU2002366483A1 (en)	2003-06-30

Family

ID=27350550

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2002366483A Abandoned AU2002366483A1 (en)	2001-12-19	2002-12-16	Mass flow measurment sensor for mass flow controller

Country Status (3)

Country	Link
KR (1)	KR100395656B1 (en)
AU (1)	AU2002366483A1 (en)
WO (1)	WO2003052356A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR100395657B1 (en) *	2003-01-14	2003-08-21	Wook Hyun Kim	Mass flow controller
GB2553681B (en)	2015-01-07	2019-06-26	Homeserve Plc	Flow detection device
GB201501935D0 (en)	2015-02-05	2015-03-25	Tooms Moore Consulting Ltd And Trow Consulting Ltd	Water flow analysis

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4464932A (en) *	1982-07-12	1984-08-14	Mks Instruments, Inc.	Thermal mass flowmetering
JPS59105520A (en) *	1982-12-08	1984-06-18	Tokyo Keiso Kk	Thermal type mass flowmeter
JPH01114719A (en) *	1987-10-29	1989-05-08	Hitachi Metals Ltd	Heat sensitive type mass flowmeter
JP2814379B2 (en) *	1988-06-20	1998-10-22	忠弘大見	Mass flow controller
JPH0784650A (en) *	1993-07-23	1995-03-31	Hitachi Metals Ltd	Mass flow controller, its operation method and solenoid valve
JPH1038652A (en) *	1996-07-23	1998-02-13	Yokogawa Electric Corp	Thermal mass flow meter
NL1014797C2 (en) *	2000-03-30	2001-10-02	Berkin Bv	Mass flow meter.

2002
- 2002-12-12 KR KR10-2002-0079262A patent/KR100395656B1/en not_active Expired - Lifetime
- 2002-12-16 WO PCT/KR2002/002364 patent/WO2003052356A1/en not_active Ceased
- 2002-12-16 AU AU2002366483A patent/AU2002366483A1/en not_active Abandoned

Also Published As

Publication number	Publication date
KR100395656B1 (en)	2003-08-21
KR20030051284A (en)	2003-06-25
WO2003052356A1 (en)	2003-06-26

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Legal Events

Date	Code	Title	Description
2004-09-16	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase