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AU2002346001A1 - Source chemical container assembly - Google Patents

Source chemical container assembly

Info

Publication number
AU2002346001A1
AU2002346001A1 AU2002346001A AU2002346001A AU2002346001A1 AU 2002346001 A1 AU2002346001 A1 AU 2002346001A1 AU 2002346001 A AU2002346001 A AU 2002346001A AU 2002346001 A AU2002346001 A AU 2002346001A AU 2002346001 A1 AU2002346001 A1 AU 2002346001A1
Authority
AU
Australia
Prior art keywords
container assembly
chemical container
source chemical
source
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002346001A
Inventor
Marko J. Kukkonen
Sven Lindors
Jan Von Zweybergk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASM International NV
ASM America Inc
Original Assignee
ASM International NV
ASM America Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASM International NV, ASM America Inc filed Critical ASM International NV
Publication of AU2002346001A1 publication Critical patent/AU2002346001A1/en
Abandoned legal-status Critical Current

Links

AU2002346001A 2001-07-03 2002-06-28 Source chemical container assembly Abandoned AU2002346001A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60/302,774 2001-07-03

Publications (1)

Publication Number Publication Date
AU2002346001A1 true AU2002346001A1 (en) 2003-01-21

Family

ID=

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