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AU2002239362A1 - Electronic device including multiple capacitance value mems capacitor and associated methods - Google Patents

Electronic device including multiple capacitance value mems capacitor and associated methods

Info

Publication number
AU2002239362A1
AU2002239362A1 AU2002239362A AU3936202A AU2002239362A1 AU 2002239362 A1 AU2002239362 A1 AU 2002239362A1 AU 2002239362 A AU2002239362 A AU 2002239362A AU 3936202 A AU3936202 A AU 3936202A AU 2002239362 A1 AU2002239362 A1 AU 2002239362A1
Authority
AU
Australia
Prior art keywords
electronic device
device including
capacitance value
including multiple
associated methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002239362A
Inventor
Calvin Adkins
Michael Gribbons
Claude Hilbert
Richard Nelson
Jason Reed
David Tammen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harris Corp
Original Assignee
Harris Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harris Corp filed Critical Harris Corp
Publication of AU2002239362A1 publication Critical patent/AU2002239362A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0008—Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Filters And Equalizers (AREA)
AU2002239362A 2000-11-28 2001-11-27 Electronic device including multiple capacitance value mems capacitor and associated methods Abandoned AU2002239362A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/724,292 US6437965B1 (en) 2000-11-28 2000-11-28 Electronic device including multiple capacitance value MEMS capacitor and associated methods
US09/724,292 2000-11-28
PCT/US2001/044472 WO2002043089A2 (en) 2000-11-28 2001-11-27 Electronic device including multiple capacitance value mems capacitor and associated methods

Publications (1)

Publication Number Publication Date
AU2002239362A1 true AU2002239362A1 (en) 2002-06-03

Family

ID=24909839

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002239362A Abandoned AU2002239362A1 (en) 2000-11-28 2001-11-27 Electronic device including multiple capacitance value mems capacitor and associated methods

Country Status (3)

Country Link
US (1) US6437965B1 (en)
AU (1) AU2002239362A1 (en)
WO (1) WO2002043089A2 (en)

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US6347237B1 (en) 1999-03-16 2002-02-12 Superconductor Technologies, Inc. High temperature superconductor tunable filter
US6516208B1 (en) * 2000-03-02 2003-02-04 Superconductor Technologies, Inc. High temperature superconductor tunable filter
US20020096421A1 (en) * 2000-11-29 2002-07-25 Cohn Michael B. MEMS device with integral packaging
FR2818795B1 (en) * 2000-12-27 2003-12-05 Commissariat Energie Atomique MICRO-DEVICE WITH THERMAL ACTUATOR
US6531668B1 (en) * 2001-08-30 2003-03-11 Intel Corporation High-speed MEMS switch with high-resonance-frequency beam
US6919784B2 (en) * 2001-10-18 2005-07-19 The Board Of Trustees Of The University Of Illinois High cycle MEMS device
US6747863B2 (en) * 2002-01-11 2004-06-08 Hewlett-Packard Development Company, L.P. Electrostatic drive
US6952044B2 (en) * 2002-05-31 2005-10-04 Motorola, Inc. Monolithic bridge capacitor
GB0214206D0 (en) * 2002-06-19 2002-07-31 Filtronic Compound Semiconduct A micro-electromechanical variable capacitor
ATE434839T1 (en) * 2002-12-13 2009-07-15 Wispry Inc VARACTOR DEVICES AND METHODS
US6943448B2 (en) * 2003-01-23 2005-09-13 Akustica, Inc. Multi-metal layer MEMS structure and process for making the same
US6856499B2 (en) * 2003-03-28 2005-02-15 Northrop Gurmman Corporation MEMS variable inductor and capacitor
TWI260104B (en) * 2003-07-25 2006-08-11 Sony Corp MEMS type resonator, method for manufacturing the same, and communication device
US6954348B1 (en) 2003-11-21 2005-10-11 Memx, Inc. Tunable MEMS capacitor
US7657242B2 (en) * 2004-09-27 2010-02-02 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7653371B2 (en) * 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
FR2876215B1 (en) * 2004-10-04 2007-05-11 Commissariat Energie Atomique VARIABLE CAPACITY WITH DIELECTRIC FLUID
FR2878335B1 (en) * 2004-11-23 2006-12-29 Schneider Electric Ind Sas CURRENT SENSOR USING CAPACITY BRIDGE
CN101390248B (en) * 2004-12-09 2012-12-05 维斯普瑞公司 Pole-zero elements and related systems and methods
US7391090B2 (en) 2004-12-17 2008-06-24 Hewlett-Packard Development Company, L.P. Systems and methods for electrically coupling wires and conductors
US7503989B2 (en) 2004-12-17 2009-03-17 Hewlett-Packard Development Company, L.P. Methods and systems for aligning and coupling devices
US7521784B2 (en) 2004-12-17 2009-04-21 Hewlett-Packard Development Company, L.P. System for coupling wire to semiconductor region
US7429864B2 (en) 2004-12-17 2008-09-30 Hewlett-Packard Development Company, L.P. Systems and methods for rectifying and detecting signals
WO2008047563A1 (en) 2006-09-27 2008-04-24 Nikon Corporation Electronic element, variable capacitor, micro switch, method for driving micro switch, and mems type electronic element
US9099248B2 (en) * 2007-06-29 2015-08-04 Corporation for National Research Iniatives Variable capacitor tuned using laser micromachining
US8195118B2 (en) 2008-07-15 2012-06-05 Linear Signal, Inc. Apparatus, system, and method for integrated phase shifting and amplitude control of phased array signals
NO333724B1 (en) 2009-08-14 2013-09-02 Sintef A micromechanical series with optically reflective surfaces
US8872719B2 (en) 2009-11-09 2014-10-28 Linear Signal, Inc. Apparatus, system, and method for integrated modular phased array tile configuration
EP2387095B1 (en) * 2010-05-12 2016-12-14 Hittite Microwave LLC Combline filter
US9123983B1 (en) 2012-07-20 2015-09-01 Hittite Microwave Corporation Tunable bandpass filter integrated circuit
EP2725595A1 (en) 2012-10-25 2014-04-30 Delfmems MEMS fixed capacitor comprising a gas-containing gap and process for manufacturing said capacitor
US9431473B2 (en) 2012-11-21 2016-08-30 Qualcomm Incorporated Hybrid transformer structure on semiconductor devices
US10002700B2 (en) 2013-02-27 2018-06-19 Qualcomm Incorporated Vertical-coupling transformer with an air-gap structure
JP2014170997A (en) * 2013-03-01 2014-09-18 Seiko Epson Corp MEMS vibrator, method for manufacturing MEMS vibrator, electronic device, and moving body
US9634645B2 (en) 2013-03-14 2017-04-25 Qualcomm Incorporated Integration of a replica circuit and a transformer above a dielectric substrate
US9449753B2 (en) 2013-08-30 2016-09-20 Qualcomm Incorporated Varying thickness inductor
US9906318B2 (en) 2014-04-18 2018-02-27 Qualcomm Incorporated Frequency multiplexer
WO2021038288A1 (en) * 2019-08-30 2021-03-04 Vermon Sa Cmut transducer with motion-stopping structure and cmut transducer forming method

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US5536988A (en) 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
FR2736934B1 (en) * 1995-07-21 1997-08-22 Commissariat Energie Atomique METHOD FOR MANUFACTURING A STRUCTURE WITH A USEFUL LAYER MAINTAINED A DISTANCE FROM A SUBSTRATE BY STOPS, AND FOR DISCONNECTING SUCH A LAYER
US5798283A (en) 1995-09-06 1998-08-25 Sandia Corporation Method for integrating microelectromechanical devices with electronic circuitry
US5963788A (en) 1995-09-06 1999-10-05 Sandia Corporation Method for integrating microelectromechanical devices with electronic circuitry
US5808527A (en) 1996-12-21 1998-09-15 Hughes Electronics Corporation Tunable microwave network using microelectromechanical switches
US5880921A (en) 1997-04-28 1999-03-09 Rockwell Science Center, Llc Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology
US6232847B1 (en) * 1997-04-28 2001-05-15 Rockwell Science Center, Llc Trimmable singleband and tunable multiband integrated oscillator using micro-electromechanical system (MEMS) technology
US5959516A (en) 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
US5867302A (en) 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US5974207A (en) 1997-12-23 1999-10-26 Lucent Technologies, Inc. Article comprising a wavelength-selective add-drop multiplexer
US5982608A (en) * 1998-01-13 1999-11-09 Stmicroelectronics, Inc. Semiconductor variable capacitor
US5989372A (en) 1998-05-07 1999-11-23 Hughes Electronics Corporation Sol-gel bonding solution for anodic bonding
US6242989B1 (en) * 1998-09-12 2001-06-05 Agere Systems Guardian Corp. Article comprising a multi-port variable capacitor
US6347237B1 (en) * 1999-03-16 2002-02-12 Superconductor Technologies, Inc. High temperature superconductor tunable filter
US6094102A (en) * 1999-04-30 2000-07-25 Rockwell Science Center, Llc Frequency synthesizer using micro electro mechanical systems (MEMS) technology and method
US6215644B1 (en) * 1999-09-09 2001-04-10 Jds Uniphase Inc. High frequency tunable capacitors
US6229684B1 (en) * 1999-12-15 2001-05-08 Jds Uniphase Inc. Variable capacitor and associated fabrication method

Also Published As

Publication number Publication date
WO2002043089A9 (en) 2004-04-01
WO2002043089A3 (en) 2004-02-26
WO2002043089A2 (en) 2002-05-30
US6437965B1 (en) 2002-08-20

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