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AU2002214089A1 - Device for treating gas with plasma - Google Patents

Device for treating gas with plasma

Info

Publication number
AU2002214089A1
AU2002214089A1 AU2002214089A AU1408902A AU2002214089A1 AU 2002214089 A1 AU2002214089 A1 AU 2002214089A1 AU 2002214089 A AU2002214089 A AU 2002214089A AU 1408902 A AU1408902 A AU 1408902A AU 2002214089 A1 AU2002214089 A1 AU 2002214089A1
Authority
AU
Australia
Prior art keywords
plasma
gas
large face
making
injector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002214089A
Other languages
English (en)
Inventor
Danielle Keroack
Michel Moisan
Jean-Christophe Rostaing
Zenon Zakrzewski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of AU2002214089A1 publication Critical patent/AU2002214089A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/126—Microwaves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/806—Microwaves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0871—Heating or cooling of the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1209—Features relating to the reactor or vessel
    • B01J2219/1212—Arrangements of the reactor or the reactors
    • B01J2219/1215—Single reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1209—Features relating to the reactor or vessel
    • B01J2219/1221—Features relating to the reactor or vessel the reactor per se
    • B01J2219/1224—Form of the reactor
    • B01J2219/123—Vessels in the form of a cup
    • B01J2219/1233—Closure means, such as lids, caps, seals
    • B01J2219/1236—Frames for holding the lid in place
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1248—Features relating to the microwave cavity
    • B01J2219/1269—Microwave guides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1275—Controlling the microwave irradiation variables
    • B01J2219/1281—Frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1275—Controlling the microwave irradiation variables
    • B01J2219/1284—Intensity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1287—Features relating to the microwave source
    • B01J2219/129—Arrangements thereof
    • B01J2219/1293—Single source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Incineration Of Waste (AREA)
  • Drying Of Semiconductors (AREA)
AU2002214089A 2000-10-27 2001-10-23 Device for treating gas with plasma Abandoned AU2002214089A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0013840 2000-10-27
FR0013840A FR2815888B1 (fr) 2000-10-27 2000-10-27 Dispositif de traitement de gaz par plasma
PCT/FR2001/003293 WO2002035575A1 (fr) 2000-10-27 2001-10-23 Dispositif de traitement de gaz par plasma

Publications (1)

Publication Number Publication Date
AU2002214089A1 true AU2002214089A1 (en) 2002-05-06

Family

ID=8855829

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002214089A Abandoned AU2002214089A1 (en) 2000-10-27 2001-10-23 Device for treating gas with plasma

Country Status (12)

Country Link
US (1) US6916400B2 (fr)
EP (1) EP1332511B1 (fr)
JP (1) JP4339588B2 (fr)
KR (1) KR100858396B1 (fr)
AT (1) ATE266257T1 (fr)
AU (1) AU2002214089A1 (fr)
DE (1) DE60103178T2 (fr)
ES (1) ES2219573T3 (fr)
FR (1) FR2815888B1 (fr)
PT (1) PT1332511E (fr)
TW (1) TW519856B (fr)
WO (1) WO2002035575A1 (fr)

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0309932D0 (en) * 2003-04-30 2003-06-04 Boc Group Plc Apparatus and method for forming a plasma
US7282244B2 (en) * 2003-09-05 2007-10-16 General Electric Company Replaceable plate expanded thermal plasma apparatus and method
US20050163696A1 (en) * 2004-01-28 2005-07-28 Uhm Han S. Synthesis of carbon nanotubes by making use of microwave plasma torch
US7164095B2 (en) * 2004-07-07 2007-01-16 Noritsu Koki Co., Ltd. Microwave plasma nozzle with enhanced plume stability and heating efficiency
US20060052883A1 (en) * 2004-09-08 2006-03-09 Lee Sang H System and method for optimizing data acquisition of plasma using a feedback control module
US20070228008A1 (en) * 2004-12-06 2007-10-04 University Of Houston Medium pressure plasma system for removal of surface layers without substrate loss
DE602005004124T2 (de) * 2005-04-29 2008-12-24 Alter S.R.L. Plasmaerzeuger
GB0521830D0 (en) * 2005-10-26 2005-12-07 Boc Group Plc Plasma reactor
US7679024B2 (en) * 2005-12-23 2010-03-16 Lam Research Corporation Highly efficient gas distribution arrangement for plasma tube of a plasma processing chamber
US7554053B2 (en) * 2005-12-23 2009-06-30 Lam Research Corporation Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system
US7562638B2 (en) * 2005-12-23 2009-07-21 Lam Research Corporation Methods and arrangement for implementing highly efficient plasma traps
US7369320B2 (en) * 2005-12-30 2008-05-06 3M Innovative Properties Company Projection system with beam homogenizer
TW200742506A (en) * 2006-02-17 2007-11-01 Noritsu Koki Co Ltd Plasma generation apparatus and work process apparatus
US20100074810A1 (en) * 2008-09-23 2010-03-25 Sang Hun Lee Plasma generating system having tunable plasma nozzle
US7921804B2 (en) * 2008-12-08 2011-04-12 Amarante Technologies, Inc. Plasma generating nozzle having impedance control mechanism
US20100201272A1 (en) * 2009-02-09 2010-08-12 Sang Hun Lee Plasma generating system having nozzle with electrical biasing
US20100254853A1 (en) * 2009-04-06 2010-10-07 Sang Hun Lee Method of sterilization using plasma generated sterilant gas
US10658161B2 (en) * 2010-10-15 2020-05-19 Applied Materials, Inc. Method and apparatus for reducing particle defects in plasma etch chambers
JP6323849B2 (ja) 2012-08-28 2018-05-16 アジレント・テクノロジーズ・インクＡｇｉｌｅｎｔ Ｔｅｃｈｎｏｌｏｇｉｅｓ， Ｉｎｃ． 電磁導波路およびプラズマ源を含む機器、プラズマ生成方法
TWI603913B (zh) * 2012-12-13 2017-11-01 財團法人工業技術研究院 石墨烯片的形成裝置與形成方法
US9427821B2 (en) * 2013-03-15 2016-08-30 Agilent Technologies, Inc. Integrated magnetron plasma torch, and related methods
US9247629B2 (en) 2013-03-15 2016-01-26 Agilent Technologies, Inc. Waveguide-based apparatus for exciting and sustaining a plasma
US11939477B2 (en) 2014-01-30 2024-03-26 Monolith Materials, Inc. High temperature heat integration method of making carbon black
US10138378B2 (en) 2014-01-30 2018-11-27 Monolith Materials, Inc. Plasma gas throat assembly and method
US10100200B2 (en) 2014-01-30 2018-10-16 Monolith Materials, Inc. Use of feedstock in carbon black plasma process
US10370539B2 (en) 2014-01-30 2019-08-06 Monolith Materials, Inc. System for high temperature chemical processing
KR102497660B1 (ko) * 2014-01-31 2023-02-07 모놀리스 머티어리얼스 인코포레이티드 플라즈마 토치 설계
US11987712B2 (en) 2015-02-03 2024-05-21 Monolith Materials, Inc. Carbon black generating system
PL3253904T3 (pl) 2015-02-03 2021-01-11 Monolith Materials, Inc. Urządzenia i sposób chłodzenia regeneracyjnego
TWI539043B (zh) * 2015-07-21 2016-06-21 財團法人工業技術研究院 石墨烯花的形成方法
CA3032246C (fr) 2015-07-29 2023-12-12 Monolith Materials, Inc. Procede et appareil de conception d'alimentation electrique de torche a plasma a courant continu
CA2995081C (fr) 2015-08-07 2023-10-03 Monolith Materials, Inc. Procede de fabrication de noir de carbone
CN108290738A (zh) 2015-09-09 2018-07-17 巨石材料公司 圆形多层石墨烯
EP3350855A4 (fr) 2015-09-14 2019-08-07 Monolith Materials, Inc. Noir de carbone issu du gaz naturel
EP3448553A4 (fr) 2016-04-29 2019-12-11 Monolith Materials, Inc. Ajout de chaleur secondaire à un processus de production de particules et appareil
CA3060565C (fr) 2016-04-29 2024-03-12 Monolith Materials, Inc. Procede et appareil de gougeage au chalumeau
US12281013B2 (en) 2016-10-06 2025-04-22 Lyten, Inc. Microwave reactor system enclosing a self-igniting plasma
EP3523013A4 (fr) 2016-10-06 2020-05-27 Lyten, Inc. Système de réacteur à micro-ondes avec séparation gaz-solides
US9812295B1 (en) 2016-11-15 2017-11-07 Lyten, Inc. Microwave chemical processing
US9997334B1 (en) 2017-02-09 2018-06-12 Lyten, Inc. Seedless particles with carbon allotropes
US9767992B1 (en) 2017-02-09 2017-09-19 Lyten, Inc. Microwave chemical processing reactor
WO2018165483A1 (fr) 2017-03-08 2018-09-13 Monolith Materials, Inc. Systèmes et procédés de production de particules de carbone à l'aide un gaz de transfert thermique
US10920035B2 (en) 2017-03-16 2021-02-16 Lyten, Inc. Tuning deformation hysteresis in tires using graphene
CN110418816B (zh) 2017-03-16 2022-05-31 利腾股份有限公司 碳和弹性体整合
US9862606B1 (en) 2017-03-27 2018-01-09 Lyten, Inc. Carbon allotropes
CN110799602A (zh) 2017-04-20 2020-02-14 巨石材料公司 颗粒系统和方法
CA3074216A1 (fr) 2017-08-28 2019-03-07 Monolith Materials, Inc. Systemes particulaires et procedes
MX2020002215A (es) 2017-08-28 2020-08-20 Monolith Mat Inc Sistemas y metodos para generacion de particulas.
US10465128B2 (en) 2017-09-20 2019-11-05 Lyten, Inc. Cracking of a process gas
EP3700980A4 (fr) 2017-10-24 2021-04-21 Monolith Materials, Inc. Systèmes particulaires et procédés
WO2019126196A1 (fr) 2017-12-22 2019-06-27 Lyten, Inc. Matériaux composites structurés
CN112105922B (zh) 2018-01-04 2024-09-03 利腾股份有限公司 谐振气体传感器
US10644368B2 (en) 2018-01-16 2020-05-05 Lyten, Inc. Pressure barrier comprising a transparent microwave window providing a pressure difference on opposite sides of the window
CA3107944A1 (fr) 2018-08-23 2020-02-27 David S. Soane Systemes et procedes pour traiter des gaz
US11633710B2 (en) 2018-08-23 2023-04-25 Transform Materials Llc Systems and methods for processing gases
US11676798B2 (en) * 2019-04-08 2023-06-13 Lam Research Corporation Cooling for a plasma-based reactor
US11623197B2 (en) * 2020-01-23 2023-04-11 Lyten, Inc. Complex modality reactor for materials production and synthesis
CN111465161B (zh) * 2020-03-18 2023-06-02 苏州迈微能等离子科技有限公司 一种常压自点火式微波等离子炬及微波等离子发生系统
KR20210129598A (ko) * 2020-04-17 2021-10-28 에이에스엠 아이피 홀딩 비.브이. 수직형 퍼니스의 반응기 내에 배열되도록 구성된 인젝터와 수직형 퍼니스
WO2022046297A1 (fr) * 2020-08-31 2022-03-03 Lyten, Inc. Système réacteur à micro-ondes renfermant un plasma à auto-allumage
KR102687218B1 (ko) * 2021-12-21 2024-07-22 주식회사 휴온스메디텍 실내에 존재하는 살균제가스를 분해하는 장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2533397A2 (fr) * 1982-09-16 1984-03-23 Anvar Perfectionnements aux torches a plasma
FR2751565B1 (fr) * 1996-07-26 1998-09-04 Air Liquide Procede et installation de traitement de gaz perfluores et hydrofluorocarbones en vue de leur destruction
FR2757082B1 (fr) 1996-12-13 1999-01-15 Air Liquide Procede d'epuration d'un gaz plasmagene et installation pour la mise en oeuvre d'un tel procede
FR2762748B1 (fr) * 1997-04-25 1999-06-11 Air Liquide Dispositif d'excitation d'un gaz par plasma d'onde de surface
FR2766321B1 (fr) 1997-07-16 1999-09-03 Air Liquide Dispositif d'excitation d'un gaz par plasma d'onde de surface
FR2787677B1 (fr) * 1998-12-22 2001-01-19 Air Liquide Element de canalisation pour dispositif de traitement de gaz et dispositif incorporant un tel element de canalisation

Also Published As

Publication number Publication date
KR20040005851A (ko) 2004-01-16
FR2815888B1 (fr) 2003-05-30
EP1332511A1 (fr) 2003-08-06
PT1332511E (pt) 2004-09-30
US20020050323A1 (en) 2002-05-02
JP2004512648A (ja) 2004-04-22
JP4339588B2 (ja) 2009-10-07
KR100858396B1 (ko) 2008-09-11
ES2219573T3 (es) 2004-12-01
WO2002035575A1 (fr) 2002-05-02
DE60103178T2 (de) 2005-04-21
DE60103178D1 (de) 2004-06-09
ATE266257T1 (de) 2004-05-15
EP1332511B1 (fr) 2004-05-06
FR2815888A1 (fr) 2002-05-03
TW519856B (en) 2003-02-01
US6916400B2 (en) 2005-07-12

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