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AU2002243719A1 - Method for providing optical quality silicon surface - Google Patents

Method for providing optical quality silicon surface

Info

Publication number
AU2002243719A1
AU2002243719A1 AU2002243719A AU2002243719A AU2002243719A1 AU 2002243719 A1 AU2002243719 A1 AU 2002243719A1 AU 2002243719 A AU2002243719 A AU 2002243719A AU 2002243719 A AU2002243719 A AU 2002243719A AU 2002243719 A1 AU2002243719 A1 AU 2002243719A1
Authority
AU
Australia
Prior art keywords
silicon surface
optical quality
providing optical
quality silicon
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002243719A
Inventor
Quyen Huynh
Mikhail N. Naydenkov
Sivasubramaniam Yegnanarayanan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of AU2002243719A1 publication Critical patent/AU2002243719A1/en
Abandoned legal-status Critical Current

Links

AU2002243719A 2001-02-02 2002-02-01 Method for providing optical quality silicon surface Abandoned AU2002243719A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US60/266,254 2001-02-02
US09/953,391 2001-09-14

Publications (1)

Publication Number Publication Date
AU2002243719A1 true AU2002243719A1 (en) 2002-08-19

Family

ID=

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