[go: up one dir, main page]

AU2001233228A1 - Micro-electro-mechanical-system (mems) mirror device and methods for fabricatingthe same - Google Patents

Micro-electro-mechanical-system (mems) mirror device and methods for fabricatingthe same

Info

Publication number
AU2001233228A1
AU2001233228A1 AU2001233228A AU3322801A AU2001233228A1 AU 2001233228 A1 AU2001233228 A1 AU 2001233228A1 AU 2001233228 A AU2001233228 A AU 2001233228A AU 3322801 A AU3322801 A AU 3322801A AU 2001233228 A1 AU2001233228 A1 AU 2001233228A1
Authority
AU
Australia
Prior art keywords
fabricatingthe
mems
electro
micro
mechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001233228A
Inventor
John E. Bowers
Charles M. Corbalis
Roger Jonathan Helkey
Seung Bok Lee
Noel Macdonald
Robert Kehl Sink
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Calient Networks Inc
Original Assignee
Calient Networks Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Calient Networks Inc filed Critical Calient Networks Inc
Publication of AU2001233228A1 publication Critical patent/AU2001233228A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
AU2001233228A 2000-02-01 2001-02-01 Micro-electro-mechanical-system (mems) mirror device and methods for fabricatingthe same Abandoned AU2001233228A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/497,270 US20020071169A1 (en) 2000-02-01 2000-02-01 Micro-electro-mechanical-system (MEMS) mirror device
US09497270 2000-02-01
PCT/US2001/003357 WO2001056919A2 (en) 2000-02-01 2001-02-01 Micro-electro-mechanical-system (mems) mirror device and methods for fabricating the same

Publications (1)

Publication Number Publication Date
AU2001233228A1 true AU2001233228A1 (en) 2001-08-14

Family

ID=23976147

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001233228A Abandoned AU2001233228A1 (en) 2000-02-01 2001-02-01 Micro-electro-mechanical-system (mems) mirror device and methods for fabricatingthe same

Country Status (3)

Country Link
US (2) US20020071169A1 (en)
AU (1) AU2001233228A1 (en)
WO (1) WO2001056919A2 (en)

Families Citing this family (165)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7297471B1 (en) * 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US7550794B2 (en) 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US6180426B1 (en) 1999-03-01 2001-01-30 Mou-Shiung Lin High performance sub-system design and assembly
US6753638B2 (en) * 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US7190854B1 (en) * 2000-05-24 2007-03-13 Active Optical Networks, Inc. Methods for forming an array of MEMS optical elements
US6632374B1 (en) * 2000-09-28 2003-10-14 Xerox Corporation Method for an optical switch on a silicon on insulator substrate
US6632373B1 (en) * 2000-09-28 2003-10-14 Xerox Corporation Method for an optical switch on a substrate
US6504643B1 (en) * 2000-09-28 2003-01-07 Xerox Corporation Structure for an optical switch on a substrate
EP1193530B1 (en) * 2000-09-28 2006-02-01 Xerox Corporation Method of manufacturing a mirror structure
TWI313507B (en) 2002-10-25 2009-08-11 Megica Corporatio Method for assembling chips
US6618184B2 (en) * 2001-04-03 2003-09-09 Agere Systems Inc. Device for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor
US6704475B2 (en) * 2001-04-03 2004-03-09 Agere Systems Inc. Mirror for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor
JP2003005101A (en) * 2001-06-26 2003-01-08 Seiko Epson Corp Light modulation device and method of manufacturing the same
JP3775276B2 (en) * 2001-10-24 2006-05-17 株式会社デンソー Electrostatic actuator
WO2003042094A2 (en) * 2001-11-09 2003-05-22 Movaz Networks, Inc. Multi-chip module integrating mems mirror array with electronics
EP1518822A3 (en) * 2001-12-06 2007-02-28 Microfabrica Inc. Complex microdevices and apparatus and methods for fabricating such devices
TW503496B (en) 2001-12-31 2002-09-21 Megic Corp Chip packaging structure and manufacturing process of the same
TW584950B (en) 2001-12-31 2004-04-21 Megic Corp Chip packaging structure and process thereof
US6673698B1 (en) 2002-01-19 2004-01-06 Megic Corporation Thin film semiconductor package utilizing a glass substrate with composite polymer/metal interconnect layers
TW544882B (en) 2001-12-31 2003-08-01 Megic Corp Chip package structure and process thereof
US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US7027203B2 (en) * 2002-03-19 2006-04-11 Xanoptix Inc. Combination micromachine and optical device array
US7728339B1 (en) 2002-05-03 2010-06-01 Calient Networks, Inc. Boundary isolation for microelectromechanical devices
US6992810B2 (en) 2002-06-19 2006-01-31 Miradia Inc. High fill ratio reflective spatial light modulator with hidden hinge
US20040069742A1 (en) * 2002-06-19 2004-04-15 Pan Shaoher X. Fabrication of a reflective spatial light modulator
US7206110B2 (en) * 2002-06-19 2007-04-17 Miradia Inc. Memory cell dual protection
US20040004753A1 (en) * 2002-06-19 2004-01-08 Pan Shaoher X. Architecture of a reflective spatial light modulator
US7034984B2 (en) 2002-06-19 2006-04-25 Miradia Inc. Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
US20030234994A1 (en) * 2002-06-19 2003-12-25 Pan Shaoher X. Reflective spatial light modulator
US7290207B2 (en) * 2002-07-03 2007-10-30 Bbn Technologies Corp. Systems and methods for providing multimedia information management
US7208809B2 (en) * 2002-09-19 2007-04-24 Nippon Telegraph And Telephone Corporation Semiconductor device having MEMS
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
US7138293B2 (en) * 2002-10-04 2006-11-21 Dalsa Semiconductor Inc. Wafer level packaging technique for microdevices
JP4550578B2 (en) * 2002-10-10 2010-09-22 富士通株式会社 Micro movable element with torsion bar
TW594360B (en) 2003-04-21 2004-06-21 Prime View Int Corp Ltd A method for fabricating an interference display cell
US7095546B2 (en) 2003-04-24 2006-08-22 Metconnex Canada Inc. Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US7221495B2 (en) * 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
TWI231865B (en) 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
US7065736B1 (en) 2003-09-24 2006-06-20 Sandia Corporation System for generating two-dimensional masks from a three-dimensional model using topological analysis
TW593126B (en) * 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US7012726B1 (en) 2003-11-03 2006-03-14 Idc, Llc MEMS devices with unreleased thin film components
US7026695B2 (en) * 2003-11-19 2006-04-11 Miradia Inc. Method and apparatus to reduce parasitic forces in electro-mechanical systems
US7295726B1 (en) * 2003-12-02 2007-11-13 Adriatic Research Institute Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same
US7428353B1 (en) 2003-12-02 2008-09-23 Adriatic Research Institute MEMS device control with filtered voltage signal shaping
US7091057B2 (en) * 2003-12-19 2006-08-15 Agency For Science, Technology And Research Method of making a single-crystal-silicon 3D micromirror
FR2864634B1 (en) * 2003-12-26 2006-02-24 Commissariat Energie Atomique OPTICAL COMPONENTS AND METHOD FOR PRODUCING THE SAME
US20050255666A1 (en) * 2004-05-11 2005-11-17 Miradia Inc. Method and structure for aligning mechanical based device to integrated circuits
US7449284B2 (en) 2004-05-11 2008-11-11 Miradia Inc. Method and structure for fabricating mechanical mirror structures using backside alignment techniques
TWI235735B (en) * 2004-06-18 2005-07-11 Walsin Lihwa Corp Two-axis element and manufacturing method thereof
US7042619B1 (en) * 2004-06-18 2006-05-09 Miradia Inc. Mirror structure with single crystal silicon cross-member
US7068417B2 (en) * 2004-07-28 2006-06-27 Miradia Inc. Method and apparatus for a reflective spatial light modulator with a flexible pedestal
US7081728B2 (en) * 2004-08-27 2006-07-25 Sequence Controls Inc. Apparatus for controlling heat generation and recovery in an induction motor
US7349136B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and device for a display having transparent components integrated therein
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7429334B2 (en) 2004-09-27 2008-09-30 Idc, Llc Methods of fabricating interferometric modulators by selectively removing a material
US7405861B2 (en) 2004-09-27 2008-07-29 Idc, Llc Method and device for protecting interferometric modulators from electrostatic discharge
US7161730B2 (en) * 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
US7373026B2 (en) 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7553684B2 (en) 2004-09-27 2009-06-30 Idc, Llc Method of fabricating interferometric devices using lift-off processing techniques
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7492502B2 (en) 2004-09-27 2009-02-17 Idc, Llc Method of fabricating a free-standing microstructure
US7616987B2 (en) * 2004-10-05 2009-11-10 Agency For Science, Technology And Research Microprobe for 3D bio-imaging, method for fabricating the same and use thereof
KR100624436B1 (en) * 2004-10-19 2006-09-15 삼성전자주식회사 2-axis actuator and its manufacturing method
KR100661347B1 (en) * 2004-10-27 2006-12-27 삼성전자주식회사 Micro thin film structure and MEMS switch using the same and method for manufacturing them
IL165212A (en) 2004-11-15 2012-05-31 Elbit Systems Electro Optics Elop Ltd Device for scanning light
US7242515B2 (en) * 2004-12-22 2007-07-10 Texas Instruments Incorporated Structure and method for reducing thermal stresses on a torsional hinged device
US7172921B2 (en) * 2005-01-03 2007-02-06 Miradia Inc. Method and structure for forming an integrated spatial light modulator
US8207004B2 (en) 2005-01-03 2012-06-26 Miradia Inc. Method and structure for forming a gyroscope and accelerometer
US7199918B2 (en) * 2005-01-07 2007-04-03 Miradia Inc. Electrical contact method and structure for deflection devices formed in an array configuration
US7142349B2 (en) * 2005-01-07 2006-11-28 Miradia Inc. Method and structure for reducing parasitic influences of deflection devices on spatial light modulators
TW200628877A (en) 2005-02-04 2006-08-16 Prime View Int Co Ltd Method of manufacturing optical interference type color display
CA2536722A1 (en) * 2005-02-16 2006-08-16 Jds Uniphase Inc. Articulated mems structures
US7410907B2 (en) * 2005-03-31 2008-08-12 Lucent Technologies Inc. Fabricating integrated devices using embedded masks
TWI269420B (en) 2005-05-03 2006-12-21 Megica Corp Stacked chip package and process thereof
US7457033B2 (en) * 2005-05-27 2008-11-25 The Regents Of The University Of California MEMS tunable vertical-cavity semiconductor optical amplifier
US7298539B2 (en) * 2005-06-01 2007-11-20 Miradia Inc. Co-planar surface and torsion device mirror structure and method of manufacture for optical displays
US7202989B2 (en) 2005-06-01 2007-04-10 Miradia Inc. Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate
US7190508B2 (en) 2005-06-15 2007-03-13 Miradia Inc. Method and structure of patterning landing pad structures for spatial light modulators
US7184195B2 (en) 2005-06-15 2007-02-27 Miradia Inc. Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator
US7372617B2 (en) * 2005-07-06 2008-05-13 Peter Enoksson Hidden hinge MEMS device
EP2495212A3 (en) 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
RU2468988C2 (en) * 2005-07-22 2012-12-10 Квалкомм Инкорпорэйтэд Mems devices with support structures and methods of their production
CN101228091A (en) 2005-07-22 2008-07-23 高通股份有限公司 Support structures and methods for MEMS devices
JP2009503564A (en) 2005-07-22 2009-01-29 クアルコム，インコーポレイテッド Support structure for MEMS device and method thereof
US7502158B2 (en) 2005-10-13 2009-03-10 Miradia Inc. Method and structure for high fill factor spatial light modulator with integrated spacer layer
US7630114B2 (en) 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US7173426B1 (en) 2005-11-29 2007-02-06 General Electric Company Optical link for transmitting data through air from a plurality of receiver coils in a magnetic resonance imaging system
US7416908B2 (en) * 2005-12-14 2008-08-26 Spatial Photonics, Inc. Method for fabricating a micro structure
KR100650876B1 (en) * 2005-12-26 2006-11-28 동부일렉트로닉스 주식회사 Digital Micromirror Device and Manufacturing Method Thereof
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
DE102006003718B4 (en) * 2006-01-26 2008-07-17 Atmel Germany Gmbh Micro-electro-mechanical device and manufacturing process for integrated micro-electro-mechanical devices
US7547568B2 (en) 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7643203B2 (en) 2006-04-10 2010-01-05 Qualcomm Mems Technologies, Inc. Interferometric optical display system with broadband characteristics
US7417784B2 (en) 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7527996B2 (en) 2006-04-19 2009-05-05 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7623287B2 (en) 2006-04-19 2009-11-24 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7369292B2 (en) 2006-05-03 2008-05-06 Qualcomm Mems Technologies, Inc. Electrode and interconnect materials for MEMS devices
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
US7405863B2 (en) 2006-06-01 2008-07-29 Qualcomm Mems Technologies, Inc. Patterning of mechanical layer in MEMS to reduce stresses at supports
KR100846569B1 (en) * 2006-06-14 2008-07-15 매그나칩 반도체 유한회사 Package of MEMS element and manufacturing method thereof
KR100766600B1 (en) * 2006-07-18 2007-10-12 삼성전자주식회사 scanner
JP4327183B2 (en) * 2006-07-31 2009-09-09 株式会社日立製作所 High pressure fuel pump control device for internal combustion engine
US7566664B2 (en) 2006-08-02 2009-07-28 Qualcomm Mems Technologies, Inc. Selective etching of MEMS using gaseous halides and reactive co-etchants
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
JP2008051992A (en) * 2006-08-24 2008-03-06 Olympus Corp Micro mirror array device
US9079762B2 (en) 2006-09-22 2015-07-14 Ethicon Endo-Surgery, Inc. Micro-electromechanical device
US7545552B2 (en) 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US7561317B2 (en) 2006-11-03 2009-07-14 Ethicon Endo-Surgery, Inc. Resonant Fourier scanning
US7713265B2 (en) 2006-12-22 2010-05-11 Ethicon Endo-Surgery, Inc. Apparatus and method for medically treating a tattoo
US8273015B2 (en) 2007-01-09 2012-09-25 Ethicon Endo-Surgery, Inc. Methods for imaging the anatomy with an anatomically secured scanner assembly
US8801606B2 (en) 2007-01-09 2014-08-12 Ethicon Endo-Surgery, Inc. Method of in vivo monitoring using an imaging system including scanned beam imaging unit
US7589316B2 (en) 2007-01-18 2009-09-15 Ethicon Endo-Surgery, Inc. Scanning beam imaging with adjustable detector sensitivity or gain
US8216214B2 (en) 2007-03-12 2012-07-10 Ethicon Endo-Surgery, Inc. Power modulation of a scanning beam for imaging, therapy, and/or diagnosis
US7995045B2 (en) 2007-04-13 2011-08-09 Ethicon Endo-Surgery, Inc. Combined SBI and conventional image processor
US8626271B2 (en) 2007-04-13 2014-01-07 Ethicon Endo-Surgery, Inc. System and method using fluorescence to examine within a patient's anatomy
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US8160678B2 (en) 2007-06-18 2012-04-17 Ethicon Endo-Surgery, Inc. Methods and devices for repairing damaged or diseased tissue using a scanning beam assembly
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
US7982776B2 (en) 2007-07-13 2011-07-19 Ethicon Endo-Surgery, Inc. SBI motion artifact removal apparatus and method
US9125552B2 (en) 2007-07-31 2015-09-08 Ethicon Endo-Surgery, Inc. Optical scanning module and means for attaching the module to medical instruments for introducing the module into the anatomy
US7983739B2 (en) 2007-08-27 2011-07-19 Ethicon Endo-Surgery, Inc. Position tracking and control for a scanning assembly
US7925333B2 (en) 2007-08-28 2011-04-12 Ethicon Endo-Surgery, Inc. Medical device including scanned beam unit with operational control features
US8776514B2 (en) * 2007-12-14 2014-07-15 Lei Wu Electrothermal microactuator for large vertical displacement without tilt or lateral shift
US8050520B2 (en) 2008-03-27 2011-11-01 Ethicon Endo-Surgery, Inc. Method for creating a pixel image from sampled data of a scanned beam imager
US8332014B2 (en) 2008-04-25 2012-12-11 Ethicon Endo-Surgery, Inc. Scanned beam device and method using same which measures the reflectance of patient tissue
KR101001666B1 (en) * 2008-07-08 2010-12-15 광주과학기술원 Manufacturing method of micro vertical structure
US7924441B1 (en) 2008-08-08 2011-04-12 Mirrorcle Technologies, Inc. Fast and high-precision 3D tracking and position measurement with MEMS micromirrors
US7719754B2 (en) * 2008-09-30 2010-05-18 Qualcomm Mems Technologies, Inc. Multi-thickness layers for MEMS and mask-saving sequence for same
DE102008054784B4 (en) 2008-12-17 2021-09-16 Robert Bosch Gmbh Micromirrors
US10739460B2 (en) 2010-08-11 2020-08-11 Apple Inc. Time-of-flight detector with single-axis scan
CN103053167B (en) 2010-08-11 2016-01-20 苹果公司 Scanning projector and the image capture module mapped for 3D
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
CN102496611B (en) * 2011-12-31 2016-03-16 上海集成电路研发中心有限公司 For the reliability testing of integrated circuit metal interconnection or the structure of MEMS electrode layer
CN104160240B (en) * 2012-02-15 2017-02-22 苹果公司 Scanning depth engine
US9435638B2 (en) * 2012-03-22 2016-09-06 Apple Inc. Gimbaled scanning mirror array
WO2014016794A1 (en) 2012-07-26 2014-01-30 Primesense Ltd. Dual-axis scanning mirror
KR20150063540A (en) * 2012-10-23 2015-06-09 애플 인크. Production of micro-mechanical devices
CN105143820B (en) 2013-03-15 2017-06-09 苹果公司 Deep scan with multiple emitters
US20160320609A1 (en) * 2013-12-20 2016-11-03 Pioneer Corporation Driving apparatus
US9784838B1 (en) 2014-11-26 2017-10-10 Apple Inc. Compact scanner with gimbaled optics
US9835853B1 (en) 2014-11-26 2017-12-05 Apple Inc. MEMS scanner with mirrors of different sizes
US9798135B2 (en) 2015-02-16 2017-10-24 Apple Inc. Hybrid MEMS scanning module
US9525863B2 (en) 2015-04-29 2016-12-20 Apple Inc. Time-of-flight depth mapping with flexible scan pattern
US9703096B2 (en) 2015-09-30 2017-07-11 Apple Inc. Asymmetric MEMS mirror assembly
US9897801B2 (en) 2015-09-30 2018-02-20 Apple Inc. Multi-hinge mirror assembly
US10324171B2 (en) 2015-12-20 2019-06-18 Apple Inc. Light detection and ranging sensor
US10969574B2 (en) 2016-04-01 2021-04-06 Intel Corporation Process for creating piezo-electric mirrors in package
ITUA20164785A1 (en) * 2016-06-30 2017-12-30 St Microelectronics Srl MICRO-ELECTRO-MECHANICAL DEVICE EQUIPPED WITH A ADJUSTABLE STRUCTURE, WITH DETECTION OF THE POSITION OF THE ADJUSTABLE STRUCTURE
IT201600079455A1 (en) 2016-07-28 2018-01-28 St Microelectronics Srl PROCEDURE FOR MANUFACTURING A MEMS TYPE MICROSPECTOR DEVICE AND ITS DEVICE
US10298913B2 (en) 2016-08-18 2019-05-21 Apple Inc. Standalone depth camera
US10488652B2 (en) 2016-09-21 2019-11-26 Apple Inc. Prism-based scanner
DE102016118268B4 (en) * 2016-09-27 2025-06-26 Infineon Technologies Ag Method for processing a single-crystalline substrate and micromechanical structure
US10399179B2 (en) 2016-12-14 2019-09-03 General Electric Company Additive manufacturing systems and methods
DE102017120290B3 (en) 2017-09-04 2018-11-08 Infineon Technologies Ag Method for processing a layer structure
JP2020030067A (en) * 2018-08-21 2020-02-27 セイコーエプソン株式会社 Physical quantity sensor, sensor device, electronic device, and movable body
WO2021034371A1 (en) 2019-08-18 2021-02-25 Apple Inc. Force-balanced micromirror with electromagnetic actuation
US11726240B2 (en) 2020-02-14 2023-08-15 Google Llc Variable mesh low mass MEMS mirrors
US11994785B2 (en) 2020-06-03 2024-05-28 Raytheon Company Dispersive beam steering based on optical-frequency shift patterns
CN114763248A (en) * 2021-01-15 2022-07-19 中强光电股份有限公司 Micro-electromechanical device and optical device

Family Cites Families (94)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3493820A (en) 1966-12-01 1970-02-03 Raytheon Co Airgap isolated semiconductor device
US4104086A (en) 1977-08-15 1978-08-01 International Business Machines Corporation Method for forming isolated regions of silicon utilizing reactive ion etching
FR2458195B1 (en) 1979-05-30 1986-02-28 Materiel Telephonique VERY LARGE NUMBER OF CHANNELS OPTICAL SWITCH
US4421381A (en) 1980-04-04 1983-12-20 Yokogawa Hokushin Electric Corp. Mechanical vibrating element
US4654663A (en) 1981-11-16 1987-03-31 Piezoelectric Technology Investors, Ltd. Angular rate sensor system
JPS5961045A (en) 1982-09-29 1984-04-07 Fujitsu Ltd Manufacture of semiconductor device
US4553436A (en) 1982-11-09 1985-11-19 Texas Instruments Incorporated Silicon accelerometer
US4519128A (en) 1983-10-05 1985-05-28 International Business Machines Corporation Method of making a trench isolated device
US4598585A (en) 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US4688069A (en) 1984-03-22 1987-08-18 International Business Machines Corporation Isolation for high density integrated circuits
JPS6197572A (en) 1984-10-19 1986-05-16 Nissan Motor Co Ltd Manufacturing method of semiconductor acceleration sensor
US4571819A (en) 1984-11-01 1986-02-25 Ncr Corporation Method for forming trench isolation structures
US4784720A (en) 1985-05-03 1988-11-15 Texas Instruments Incorporated Trench etch process for a single-wafer RIE dry etch reactor
US4855017A (en) 1985-05-03 1989-08-08 Texas Instruments Incorporated Trench etch process for a single-wafer RIE dry etch reactor
GB2175705B (en) 1985-05-24 1989-04-19 Stc Plc Dirigible reflector and mounting made of crystal material
US5172262A (en) 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
US4670092A (en) 1986-04-18 1987-06-02 Rockwell International Corporation Method of fabricating a cantilever beam for a monolithic accelerometer
US4922756A (en) 1988-06-20 1990-05-08 Triton Technologies, Inc. Micro-machined accelerometer
US4838631A (en) 1986-12-22 1989-06-13 General Electric Company Laser beam directing system
US4851080A (en) 1987-06-29 1989-07-25 Massachusetts Institute Of Technology Resonant accelerometer
US5016072A (en) 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
US4876217A (en) 1988-03-24 1989-10-24 Motorola Inc. Method of forming semiconductor structure isolation regions
JPH0623782B2 (en) 1988-11-15 1994-03-30 株式会社日立製作所 Capacitance type acceleration sensor and semiconductor pressure sensor
US4932745A (en) 1989-07-25 1990-06-12 At&T Bell Laboratories Radiation switching arrangement with moving deflecting element
US5097354A (en) 1989-07-27 1992-03-17 Omron Corporation Beam scanner
GB2239101B (en) * 1989-11-17 1993-09-22 Marconi Gec Ltd Optical device
US5428259A (en) 1990-02-02 1995-06-27 Nec Corporation Micromotion mechanical structure and a process for the production thereof
US5126812A (en) 1990-02-14 1992-06-30 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical accelerometer
EP0461761B1 (en) 1990-05-18 1994-06-22 British Aerospace Public Limited Company Inertial sensors
US5083857A (en) 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5068203A (en) 1990-09-04 1991-11-26 Delco Electronics Corporation Method for forming thin silicon membrane or beam
US5203208A (en) 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5235187A (en) 1991-05-14 1993-08-10 Cornell Research Foundation Methods of fabricating integrated, aligned tunneling tip pairs
US5121180A (en) 1991-06-21 1992-06-09 Texas Instruments Incorporated Accelerometer with central mass in support
US5198390A (en) 1992-01-16 1993-03-30 Cornell Research Foundation, Inc. RIE process for fabricating submicron, silicon electromechanical structures
US5393375A (en) 1992-02-03 1995-02-28 Cornell Research Foundation, Inc. Process for fabricating submicron single crystal electromechanical structures
US5397904A (en) 1992-07-02 1995-03-14 Cornell Research Foundation, Inc. Transistor microstructure
US5287082A (en) 1992-07-02 1994-02-15 Cornell Research Foundation, Inc. Submicron isolated, released resistor structure
DE4224601A1 (en) 1992-07-23 1994-01-27 Somatel Sondermaschinenbau Tel Electrostatic positioning system for optical beam deflection mirror, e.g. for colour image projection - produces component of force along plane of mirror using parallel fixed electrodes above and below plane of mirror
DE4241045C1 (en) 1992-12-05 1994-05-26 Bosch Gmbh Robert Process for anisotropic etching of silicon
CA2154357C (en) 1993-02-04 2004-03-02 Kevin A. Shaw Microstructures and single-mask, single-crystal process for fabrication thereof
US5399415A (en) 1993-02-05 1995-03-21 Cornell Research Foundation, Inc. Isolated tungsten microelectromechanical structures
GB2275787A (en) * 1993-03-05 1994-09-07 British Aerospace Silicon micro-mirror unit
US5427975A (en) 1993-05-10 1995-06-27 Delco Electronics Corporation Method of micromachining an integrated sensor on the surface of a silicon wafer
US5610335A (en) 1993-05-26 1997-03-11 Cornell Research Foundation Microelectromechanical lateral accelerometer
US5563343A (en) 1993-05-26 1996-10-08 Cornell Research Foundation, Inc. Microelectromechanical lateral accelerometer
US5426070A (en) 1993-05-26 1995-06-20 Cornell Research Foundation, Inc. Microstructures and high temperature isolation process for fabrication thereof
US5536988A (en) 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5673139A (en) 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
US5629790A (en) 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US6044705A (en) 1993-10-18 2000-04-04 Xros, Inc. Micromachined members coupled for relative rotation by torsion bars
US5488862A (en) 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
US5483158A (en) 1993-10-21 1996-01-09 The Regents Of The University Of California Method and apparatus for tuning MRI RF coils
US5508231A (en) 1994-03-07 1996-04-16 National Semiconductor Corporation Apparatus and method for achieving mechanical and thermal isolation of portions of integrated monolithic circuits
US5645684A (en) 1994-03-07 1997-07-08 The Regents Of The University Of California Multilayer high vertical aspect ratio thin film structures
US5444566A (en) 1994-03-07 1995-08-22 Texas Instruments Incorporated Optimized electronic operation of digital micromirror devices
DE4414968A1 (en) 1994-04-28 1995-11-02 Siemens Ag Microsystem with integrated circuit and micromechanical component and manufacturing process
US5454906A (en) * 1994-06-21 1995-10-03 Texas Instruments Inc. Method of providing sacrificial spacer for micro-mechanical devices
US5703728A (en) * 1994-11-02 1997-12-30 Texas Instruments Incorporated Support post architecture for micromechanical devices
US5628917A (en) 1995-02-03 1997-05-13 Cornell Research Foundation, Inc. Masking process for fabricating ultra-high aspect ratio, wafer-free micro-opto-electromechanical structures
US5869916A (en) 1995-05-26 1999-02-09 Asmo Co., Ltd. Electrostatic actuator with different electrode spacing
US5770465A (en) 1995-06-23 1998-06-23 Cornell Research Foundation, Inc. Trench-filling etch-masking microfabrication technique
US6000280A (en) 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers
US5626716A (en) 1995-09-29 1997-05-06 Lam Research Corporation Plasma etching of semiconductors
US5907425A (en) 1995-12-19 1999-05-25 The Board Of Trustees Of The Leland Stanford Junior University Miniature scanning confocal microscope
US5670881A (en) 1996-02-09 1997-09-23 Toshiba America, Inc. Discrete step remotely adjustable matching circuit for MRI RF coils
US5933746A (en) 1996-04-23 1999-08-03 Harris Corporation Process of forming trench isolation device
US5759913A (en) 1996-06-05 1998-06-02 Advanced Micro Devices, Inc. Method of formation of an air gap within a semiconductor dielectric by solvent desorption
US5637189A (en) 1996-06-25 1997-06-10 Xerox Corporation Dry etch process control using electrically biased stop junctions
US5872880A (en) 1996-08-12 1999-02-16 Ronald S. Maynard Hybrid-optical multi-axis beam steering apparatus
US5798557A (en) 1996-08-29 1998-08-25 Harris Corporation Lid wafer bond packaging and micromachining
US5914801A (en) * 1996-09-27 1999-06-22 Mcnc Microelectromechanical devices including rotating plates and related methods
US5804084A (en) 1996-10-11 1998-09-08 Sandia Corporation Use of chemical mechanical polishing in micromachining
US6072617A (en) 1996-11-26 2000-06-06 Texas Instruments Incorporated Micro mechanical device with memory metal component
JP3301334B2 (en) 1997-01-31 2002-07-15 三菱電機株式会社 Sensor element and method of manufacturing the same
US5999303A (en) * 1997-03-24 1999-12-07 Seagate Technology Inc. Micro-machined mirror using tethered elements
EP0877272B1 (en) 1997-05-08 2002-07-31 Texas Instruments Incorporated Improvements in or relating to spatial light modulators
US6121552A (en) 1997-06-13 2000-09-19 The Regents Of The University Of Caliofornia Microfabricated high aspect ratio device with an electrical isolation trench
US5969848A (en) 1997-07-03 1999-10-19 The Regents Of The University Of California Micromachined electrostatic vertical actuator
US6075639A (en) 1997-10-22 2000-06-13 The Board Of Trustees Of The Leland Stanford Junior University Micromachined scanning torsion mirror and method
US6028690A (en) 1997-11-26 2000-02-22 Texas Instruments Incorporated Reduced micromirror mirror gaps for improved contrast ratio
DE19757181A1 (en) 1997-12-19 1999-07-01 Bosch Gmbh Robert Arrangement for coupling glass fibers
DE19800745A1 (en) * 1998-01-12 1999-07-15 Bosch Gmbh Robert Design and manufacturing process for a micromechanical device
US5998906A (en) 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof
DE69942486D1 (en) 1998-01-15 2010-07-22 Cornell Res Foundation Inc TRACK INSULATION FOR MICROMECHANICAL COMPONENTS
US6147790A (en) * 1998-06-02 2000-11-14 Texas Instruments Incorporated Spring-ring micromechanical device
US6097860A (en) 1998-06-05 2000-08-01 Astarte Fiber Networks, Inc. Compact optical matrix switch with fixed location fibers
US6101299A (en) 1998-06-05 2000-08-08 Astarte Fiber Networks, Inc. Optical switch targeting system
US6020272A (en) 1998-10-08 2000-02-01 Sandia Corporation Method for forming suspended micromechanical structures
JP3993343B2 (en) 1999-06-29 2007-10-17 富士通株式会社 Galvano micro mirror
US6229640B1 (en) * 1999-08-11 2001-05-08 Adc Telecommunications, Inc. Microelectromechanical optical switch and method of manufacture thereof
US6201631B1 (en) 1999-10-08 2001-03-13 Lucent Technologies Inc. Process for fabricating an optical mirror array
US6253001B1 (en) 2000-01-20 2001-06-26 Agilent Technologies, Inc. Optical switches using dual axis micromirrors
US6396975B1 (en) 2000-01-21 2002-05-28 Jds Uniphase Corporation MEMS optical cross-connect switch

Also Published As

Publication number Publication date
WO2001056919A3 (en) 2002-03-28
US20020071169A1 (en) 2002-06-13
US6563106B1 (en) 2003-05-13
WO2001056919A2 (en) 2001-08-09

Similar Documents

Publication Publication Date Title
AU2001233228A1 (en) Micro-electro-mechanical-system (mems) mirror device and methods for fabricatingthe same
AU2001234700A1 (en) Micro-electromechanical system device
AU2001291271A1 (en) Micromechanical resonator device
AU2001265426A1 (en) Damped micromechanical device and method for making same
AUPP653998A0 (en) Micromechanical device and method (ij46B)
AUPP654598A0 (en) Micromechanical device and method (ij46h)
AUPP653498A0 (en) Micromechanical device and method (ij46a)
AUPP654398A0 (en) Micromechanical device and method (ij46g)
AU2001281381A1 (en) Bonded wafer optical mems process
AU2001249285A1 (en) Device and method for optical signal switching
AU2002306898A1 (en) Optical device and method therefor
AU2002214221A1 (en) Optical device
AUPP993199A0 (en) A micromechanical device and method (ij46p2a)
AU2001290279A1 (en) Optical device
AU2001267704A1 (en) Optical security device
AU2001289424A1 (en) Laser device
AUPP702298A0 (en) Micromechanical device and method (IJ46I)
AU2001280121A1 (en) Optical element holding device
AU2002344738A1 (en) Packaged optical micro-mechanical device
AUPP653898A0 (en) Micromechanical device and method (ij46F)
AU2001234610A1 (en) Micro electro-mechanical component and system architecture
AUPP654198A0 (en) Micromechanical device and method (ij46d)
AU2002332452A1 (en) Mems mirror
AUPP654298A0 (en) Micromechanical device and method (ij46e)
AUPP702398A0 (en) Micromechanical device and method (IJ46J)