AU2001233136A1 - Wet processing method for the electronic components using liquids of varying density - Google Patents

Wet processing method for the electronic components using liquids of varying density

Info

Publication number: AU2001233136A1
Authority: AU; Australia
Prior art keywords: liquids; processing method; electronic components; wet processing; varying density
Prior art date: 2000-01-31
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2001233136A

Other languages

English (en)

Inventor

Jennifer Ware Parker

Steven Verhaverbeke

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

CFMT Inc

Original Assignee

CFMT Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2000-01-31

Filing date

2001-01-31

Publication date

2001-08-07

2001-01-31 Application filed by CFMT Inc filed Critical CFMT Inc

2001-08-07 Publication of AU2001233136A1 publication Critical patent/AU2001233136A1/en

Status Abandoned legal-status Critical Current

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid

AU2001233136A 2000-01-31 2001-01-31 Wet processing method for the electronic components using liquids of varying density Abandoned AU2001233136A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US49539900A	2000-01-31	2000-01-31
US09/495,399		2000-01-31
PCT/US2001/003040 WO2001054835A1 (fr)	2000-01-31	2001-01-31	Procedes de traitement par voie humide de composants electroniques au moyen liquides de densite variable

Publications (1)

Publication Number	Publication Date
AU2001233136A1 true AU2001233136A1 (en)	2001-08-07

Family

ID=23968505

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2001233136A Abandoned AU2001233136A1 (en)	2000-01-31	2001-01-31	Wet processing method for the electronic components using liquids of varying density

Country Status (3)

Country	Link
AU (1)	AU2001233136A1 (fr)
TW (1)	TW492102B (fr)
WO (1)	WO2001054835A1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4911761A (en) *	1984-05-21	1990-03-27	Cfm Technologies Research Associates	Process and apparatus for drying surfaces
US4795497A (en) *	1985-08-13	1989-01-03	Mcconnell Christopher F	Method and system for fluid treatment of semiconductor wafers
JP3154814B2 (ja) *	1991-06-28	2001-04-09	株式会社東芝	半導体ウエハの洗浄方法および洗浄装置
US5656097A (en) *	1993-10-20	1997-08-12	Verteq, Inc.	Semiconductor wafer cleaning system
US5811358A (en) *	1997-01-03	1998-09-22	Mosel Vitelic Inc.	Low temperature dry process for stripping photoresist after high dose ion implantation

2001
- 2001-01-31 WO PCT/US2001/003040 patent/WO2001054835A1/fr not_active Ceased
- 2001-01-31 AU AU2001233136A patent/AU2001233136A1/en not_active Abandoned
- 2001-03-23 TW TW90106912A patent/TW492102B/zh not_active IP Right Cessation

Also Published As

Publication number	Publication date
TW492102B (en)	2002-06-21
WO2001054835A1 (fr)	2001-08-02
WO2001054835A9 (fr)	2002-10-24

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