AU2001289214A1 - Improved structure identification using scattering signatures - Google Patents

Improved structure identification using scattering signatures

Info

Publication number: AU2001289214A1
Authority: AU; Australia
Prior art keywords: improved structure; structure identification; scattering signatures; signatures; scattering
Prior art date: 2000-09-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2001289214A

Inventor

Steve W. Farrer

Richard H. Krukar

Christopher J. Raymond

Scott R. Wilson

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Nanometrics Inc

Original Assignee

Accent Optical Technologies Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2000-09-13

Filing date

2001-09-13

Publication date

2002-03-26

2001-09-13 Application filed by Accent Optical Technologies Inc filed Critical Accent Optical Technologies Inc

2002-03-26 Publication of AU2001289214A1 publication Critical patent/AU2001289214A1/en

Status Abandoned legal-status Critical Current

Classifications

- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
- G06F17/10—Complex mathematical operations
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
- G01N21/274—Calibration, base line adjustment, drift correction
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/12—Circuits of general importance; Signal processing
- G01N2201/129—Using chemometrical methods
- G01N2201/1293—Using chemometrical methods resolving multicomponent spectra

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
General Physics & Mathematics (AREA)
Mathematical Physics (AREA)
Theoretical Computer Science (AREA)
Immunology (AREA)
Data Mining & Analysis (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
Health & Medical Sciences (AREA)
Spectroscopy & Molecular Physics (AREA)
Pathology (AREA)
Life Sciences & Earth Sciences (AREA)
Computational Mathematics (AREA)
Algebra (AREA)
Mathematical Analysis (AREA)
Mathematical Optimization (AREA)
Pure & Applied Mathematics (AREA)
Databases & Information Systems (AREA)
Software Systems (AREA)
General Engineering & Computer Science (AREA)
Complex Calculations (AREA)
Information Retrieval, Db Structures And Fs Structures Therefor (AREA)
Image Analysis (AREA)

AU2001289214A 2000-09-13 2001-09-13 Improved structure identification using scattering signatures Abandoned AU2001289214A1 (en)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
US23257800P	2000-09-13	2000-09-13
US60232578		2000-09-13
US09/952,546 US6728663B2 (en)	2000-09-13	2001-09-12	Structure identification using scattering signatures
US09952546		2001-09-12
PCT/US2001/042123 WO2002023382A1 (en)	2000-09-13	2001-09-13	Improved structure identification using scattering signatures

Publications (1)

Publication Number	Publication Date
AU2001289214A1 true AU2001289214A1 (en)	2002-03-26

Family

ID=26926141

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2001289214A Abandoned AU2001289214A1 (en)	2000-09-13	2001-09-13	Improved structure identification using scattering signatures

Country Status (8)

Country	Link
US (1)	US6728663B2 (en)
EP (1)	EP1323063A4 (en)
JP (1)	JP2004509412A (en)
KR (2)	KR100851417B1 (en)
CN (1)	CN1215423C (en)
AU (1)	AU2001289214A1 (en)
IL (2)	IL154843A0 (en)
WO (1)	WO2002023382A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6483580B1 (en) *	1998-03-06	2002-11-19	Kla-Tencor Technologies Corporation	Spectroscopic scatterometer system
US7099005B1 (en) *	2000-09-27	2006-08-29	Kla-Tencor Technologies Corporation	System for scatterometric measurements and applications
US6900892B2 (en) *	2000-12-19	2005-05-31	Kla-Tencor Technologies Corporation	Parametric profiling using optical spectroscopic systems
US7515279B2 (en)	2001-03-02	2009-04-07	Nanometrics Incorporated	Line profile asymmetry measurement
WO2003054475A2 (en) *	2001-12-19	2003-07-03	Kla-Tencor Technologies Corporation	Parametric profiling using optical spectroscopic systems
US7119893B2 (en) *	2003-04-10	2006-10-10	Accent Optical Technologies, Inc.	Determination of center of focus by parameter variability analysis
US20070091325A1 (en) *	2005-01-07	2007-04-26	Mehrdad Nikoonahad	Multi-channel optical metrology
US7515253B2 (en)	2005-01-12	2009-04-07	Kla-Tencor Technologies Corporation	System for measuring a sample with a layer containing a periodic diffracting structure
US7467064B2 (en) *	2006-02-07	2008-12-16	Timbre Technologies, Inc.	Transforming metrology data from a semiconductor treatment system using multivariate analysis
US7698098B2 (en) *	2008-02-18	2010-04-13	Thermo Electron Scientific Instruments Llc	Efficient spectral matching, particularly for multicomponent spectra
JP5841147B2 (en) *	2011-07-01	2016-01-13	パナソニックインテレクチュアルプロパティコーポレーションオブアメリカＰａｎａｓｏｎｉｃＩｎｔｅｌｌｅｃｔｕａｌＰｒｏｐｅｒｔｙＣｏｒｐｏｒａｔｉｏｎｏｆＡｍｅｒｉｃａ	Receiving device, transmitting device, setting method, and specifying method
CN102798342B (en) *	2012-08-02	2014-11-12	华中科技大学	Fitting error interpolation based library matching method for optical scattering measurement

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5274714A (en) *	1990-06-04	1993-12-28	Neuristics, Inc.	Method and apparatus for determining and organizing feature vectors for neural network recognition
US5241369A (en)	1990-10-01	1993-08-31	Mcneil John R	Two-dimensional optical scatterometer apparatus and process
US5114233A (en)	1990-10-09	1992-05-19	At&T Bell Laboratories	Method for inspecting etched workpieces
DE69327080T2 (en)	1992-09-08	2000-06-08	Hitachi, Ltd.	Information processing device with conclusion and adaptive learning
US6122403A (en) *	1995-07-27	2000-09-19	Digimarc Corporation	Computer system linked by using information in data objects
US5748763A (en) *	1993-11-18	1998-05-05	Digimarc Corporation	Image steganography system featuring perceptually adaptive and globally scalable signal embedding
US5703692A (en)	1995-08-03	1997-12-30	Bio-Rad Laboratories, Inc.	Lens scatterometer system employing source light beam scanning means
US5739909A (en)	1995-10-10	1998-04-14	Lucent Technologies Inc.	Measurement and control of linewidths in periodic structures using spectroscopic ellipsometry
US5867276A (en)	1997-03-07	1999-02-02	Bio-Rad Laboratories, Inc.	Method for broad wavelength scatterometry
US6075594A (en)	1997-07-16	2000-06-13	Ncr Corporation	System and method for spectroscopic product recognition and identification
US6480299B1 (en) *	1997-11-25	2002-11-12	University Technology Corporation	Color printer characterization using optimization theory and neural networks
US20010051856A1 (en)	2000-01-26	2001-12-13	Xinhui Niu	Caching of intra-layer calculations for rapid rigorous coupled-wave analyses
AU2001279247A1 (en)	2000-08-10	2002-02-25	Sensys Instruments Corporation	Database interpolation method for optical measurement of diffractive microstructures

2001
- 2001-09-12 US US09/952,546 patent/US6728663B2/en not_active Expired - Lifetime
- 2001-09-13 WO PCT/US2001/042123 patent/WO2002023382A1/en not_active Ceased
- 2001-09-13 KR KR1020037003721A patent/KR100851417B1/en not_active Expired - Fee Related
- 2001-09-13 JP JP2002527962A patent/JP2004509412A/en active Pending
- 2001-09-13 KR KR1020087001694A patent/KR20080021800A/en not_active Abandoned
- 2001-09-13 EP EP01969017A patent/EP1323063A4/en not_active Withdrawn
- 2001-09-13 AU AU2001289214A patent/AU2001289214A1/en not_active Abandoned
- 2001-09-13 CN CNB018155472A patent/CN1215423C/en not_active Expired - Fee Related
- 2001-09-13 IL IL15484301A patent/IL154843A0/en unknown
2003
- 2003-03-10 IL IL154843A patent/IL154843A/en active IP Right Grant

Also Published As

Publication number	Publication date
KR100851417B1 (en)	2008-08-08
US20020046008A1 (en)	2002-04-18
EP1323063A4 (en)	2006-10-04
EP1323063A1 (en)	2003-07-02
JP2004509412A (en)	2004-03-25
US6728663B2 (en)	2004-04-27
CN1455900A (en)	2003-11-12
IL154843A0 (en)	2003-10-31
KR20080021800A (en)	2008-03-07
KR20030045068A (en)	2003-06-09
IL154843A (en)	2008-11-03
CN1215423C (en)	2005-08-17
WO2002023382A1 (en)	2002-03-21

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AU2001275716A1 (en)	2002-02-13	File analysis
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AU2001210928A1 (en)	2001-12-24	Polypropylene card construction
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AU2002326841A1 (en)	2003-04-14	Card hopper
AU2001289214A1 (en)	2002-03-26	Improved structure identification using scattering signatures
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AU2001267928A1 (en)	2002-01-08	Dispersion section
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