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AU2001286619A1 - Fluid mass flow meter with substantial measurement range - Google Patents

Fluid mass flow meter with substantial measurement range

Info

Publication number
AU2001286619A1
AU2001286619A1 AU2001286619A AU8661901A AU2001286619A1 AU 2001286619 A1 AU2001286619 A1 AU 2001286619A1 AU 2001286619 A AU2001286619 A AU 2001286619A AU 8661901 A AU8661901 A AU 8661901A AU 2001286619 A1 AU2001286619 A1 AU 2001286619A1
Authority
AU
Australia
Prior art keywords
mass flow
flow meter
measurement range
fluid mass
substantial measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001286619A
Inventor
Daniel T Mudd
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fugasity Corp
Original Assignee
Fugasity Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fugasity Corp filed Critical Fugasity Corp
Publication of AU2001286619A1 publication Critical patent/AU2001286619A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F7/00—Volume-flow measuring devices with two or more measuring ranges; Compound meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F7/00—Volume-flow measuring devices with two or more measuring ranges; Compound meters
    • G01F7/005—Volume-flow measuring devices with two or more measuring ranges; Compound meters by measuring pressure or differential pressure, created by the use of flow constriction

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
AU2001286619A 2000-08-22 2001-08-21 Fluid mass flow meter with substantial measurement range Abandoned AU2001286619A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22680600P 2000-08-22 2000-08-22
US60226806 2000-08-22
PCT/US2001/026206 WO2002016885A1 (en) 2000-08-22 2001-08-21 Fluid mass flow meter with substantial measurement range

Publications (1)

Publication Number Publication Date
AU2001286619A1 true AU2001286619A1 (en) 2002-03-04

Family

ID=22850488

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001286619A Abandoned AU2001286619A1 (en) 2000-08-22 2001-08-21 Fluid mass flow meter with substantial measurement range

Country Status (3)

Country Link
US (1) US20020046612A1 (en)
AU (1) AU2001286619A1 (en)
WO (1) WO2002016885A1 (en)

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US20050000570A1 (en) 2003-01-17 2005-01-06 Mohammed Balarabe Nuhu Combination manual/pneumatic shut-off valve
US6843139B2 (en) * 2003-03-12 2005-01-18 Rosemount Inc. Flow instrument with multisensors
US20050120805A1 (en) * 2003-12-04 2005-06-09 John Lane Method and apparatus for substrate temperature control
DE102004008930A1 (en) * 2004-02-24 2005-09-01 Bayerische Motoren Werke Ag Air flow measurement device for a combustion engine is arranged in a bypass to a main gas carrying pipe, which is routed outside the main pipe, so that the measurement device can be easily accessed
US7409871B2 (en) * 2006-03-16 2008-08-12 Celerity, Inc. Mass flow meter or controller with inclination sensor
US7775236B2 (en) 2007-02-26 2010-08-17 Applied Materials, Inc. Method and apparatus for controlling gas flow to a processing chamber
US8074677B2 (en) 2007-02-26 2011-12-13 Applied Materials, Inc. Method and apparatus for controlling gas flow to a processing chamber
US7846497B2 (en) 2007-02-26 2010-12-07 Applied Materials, Inc. Method and apparatus for controlling gas flow to a processing chamber
CN101354273B (en) * 2008-07-17 2010-07-07 美新半导体（无锡）有限公司 Method and device for measuring compound type gas flow
KR101041434B1 (en) * 2009-04-08 2011-06-14 엠케이프리시젼 주식회사 Mass flow meter
US8707754B2 (en) * 2010-04-30 2014-04-29 Applied Materials, Inc. Methods and apparatus for calibrating flow controllers in substrate processing systems
SE535494C2 (en) * 2010-05-17 2012-08-28 Mindray Medical Sweden Ab Coaxial flowmeter element and method for measuring flow
SE534896C2 (en) * 2010-05-17 2012-02-07 Mindray Medical Sweden Ab Flow restrictors and method of reducing a flow resistance
EP2572170A1 (en) * 2010-05-17 2013-03-27 Mindray Medical Sweden AB Coaxial means for measuring a flow and a method of measuring a flow
US8393228B2 (en) 2010-05-18 2013-03-12 Mindray Medical Sweden Ab Method and system for measuring a flow
US20110284779A1 (en) * 2010-05-18 2011-11-24 Mindray Medical Sweden Ab Method and apparatus for controlling a high-pressure valve
CN102269604B (en) * 2010-12-31 2012-09-05 北京谊安医疗系统股份有限公司 Gas flowmeter and throttling device used therein, breathing machine and anaesthesia machine
US9976887B1 (en) 2011-06-22 2018-05-22 Daniel T. Mudd Wider dynamic accuracy range for gas delivery devices
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9690301B2 (en) 2012-09-10 2017-06-27 Reno Technologies, Inc. Pressure based mass flow controller
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
US10466045B2 (en) * 2012-01-31 2019-11-05 Nikon Corporation Fluid gauges comprising multiple differential pressure sensors
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6415889B2 (en) * 2014-08-01 2018-10-31 株式会社堀場エステック Flow control device, program for flow control device, and flow control method
US9804011B2 (en) * 2014-09-30 2017-10-31 Dieterich Standard, Inc. Flow measurement probe with pitot tube and thermal flow measurement
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
DE202018107099U1 (en) * 2018-12-12 2019-01-04 Anni Hjorth Blum Device for measuring the flow of ballast water through a pipeline
CN110361062B (en) * 2019-08-28 2024-10-22 浙江奥新仪表有限公司 High maintenance type right-angle electromagnetic flowmeter
JP7583186B2 (en) 2021-03-03 2024-11-13 アイコール・システムズ・インク Fluid flow control system with manifold assembly - Patents.com
US12436049B2 (en) 2023-02-16 2025-10-07 Te Connectivity Solutions Gmbh Sensor die with a diaphragm

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US3559482A (en) * 1968-11-27 1971-02-02 Teledyne Inc Fluid flow measuring apparatus
US4686856A (en) * 1983-02-28 1987-08-18 Vavra Randall J Mass flow meter
US4576043A (en) * 1984-05-17 1986-03-18 Chevron Research Company Methods for metering two-phase flow
US4877051A (en) * 1988-11-28 1989-10-31 Mks Instruments, Inc. Flow controller
US5044199A (en) * 1989-11-13 1991-09-03 Dxl International, Inc. Flowmeter
US5804717A (en) * 1996-04-05 1998-09-08 Mks Instruments, Inc. Mass flow transducer having extended flow rate measurement range
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
US5824894A (en) * 1997-05-07 1998-10-20 Mks Instruments, Inc. Mass flowmeter and laminar flow elements for use therein
US6152162A (en) * 1998-10-08 2000-11-28 Mott Metallurgical Corporation Fluid flow controlling
US6210482B1 (en) * 1999-04-22 2001-04-03 Fujikin Incorporated Apparatus for feeding gases for use in semiconductor manufacturing
US6343617B1 (en) * 1999-07-09 2002-02-05 Millipore Corporation System and method of operation of a digital mass flow controller

Also Published As

Publication number Publication date
WO2002016885A1 (en) 2002-02-28
US20020046612A1 (en) 2002-04-25

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