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AU2001285636A1 - Method and device for treating surfaces using a glow discharge plasma - Google Patents

Method and device for treating surfaces using a glow discharge plasma

Info

Publication number
AU2001285636A1
AU2001285636A1 AU2001285636A AU8563601A AU2001285636A1 AU 2001285636 A1 AU2001285636 A1 AU 2001285636A1 AU 2001285636 A AU2001285636 A AU 2001285636A AU 8563601 A AU8563601 A AU 8563601A AU 2001285636 A1 AU2001285636 A1 AU 2001285636A1
Authority
AU
Australia
Prior art keywords
glow discharge
discharge plasma
treating surfaces
treating
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001285636A
Inventor
Pierre Fayet
Bertrand Roessler
Walter Schwarzenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tetra Pak Suisse SA
Original Assignee
Tetra Pak Suisse SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tetra Pak Suisse SA filed Critical Tetra Pak Suisse SA
Publication of AU2001285636A1 publication Critical patent/AU2001285636A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using DC or AC discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
AU2001285636A 2000-09-22 2001-09-17 Method and device for treating surfaces using a glow discharge plasma Abandoned AU2001285636A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH01850/00A CH694949A5 (en) 2000-09-22 2000-09-22 Method and apparatus for the treatment of surfaces by means of a glow discharge plasma.
CH1850/00 2000-09-22
PCT/CH2001/000559 WO2002025693A1 (en) 2000-09-22 2001-09-17 Method and device for treating surfaces using a glow discharge plasma

Publications (1)

Publication Number Publication Date
AU2001285636A1 true AU2001285636A1 (en) 2002-04-02

Family

ID=4566500

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001285636A Abandoned AU2001285636A1 (en) 2000-09-22 2001-09-17 Method and device for treating surfaces using a glow discharge plasma

Country Status (7)

Country Link
US (1) US6919107B2 (en)
EP (1) EP1325509B1 (en)
JP (1) JP2004535037A (en)
AU (1) AU2001285636A1 (en)
CH (1) CH694949A5 (en)
DE (1) DE50115255D1 (en)
WO (1) WO2002025693A1 (en)

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US8357242B2 (en) * 2007-05-03 2013-01-22 Jewett Russell F Crystalline film devices, apparatuses for and methods of fabrication
EP1705965A1 (en) * 2005-03-21 2006-09-27 Universiteit Gent Method and system for plasma treatment under high pressure
CH697933B1 (en) * 2005-11-03 2009-03-31 Tetra Laval Holdings & Finance Method and apparatus for coating plastic films with an oxide layer.
CN101765902B (en) * 2007-08-31 2011-09-21 东芝三菱电机产业系统株式会社 Apparatus for generating dielectric barrier discharge gas
JP5491755B2 (en) * 2009-03-26 2014-05-14 パナソニック株式会社 Deposition equipment
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
DK2251454T3 (en) 2009-05-13 2014-10-13 Sio2 Medical Products Inc Container coating and inspection
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
DE102010026722A1 (en) * 2010-07-09 2012-01-12 Ahlbrandt System Gmbh Device for modifying surface area of e.g. sheet goods, has plasma generation device whose electrodes are arranged at front side, gap formed between electrodes, and another gap formed between electrodes and goods
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
AU2012318242A1 (en) 2011-11-11 2013-05-30 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
EP2846755A1 (en) 2012-05-09 2015-03-18 SiO2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US20150297800A1 (en) 2012-07-03 2015-10-22 Sio2 Medical Products, Inc. SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS
CA2890066C (en) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Coating inspection method
WO2014078666A1 (en) 2012-11-16 2014-05-22 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
EP2925903B1 (en) 2012-11-30 2022-04-13 Si02 Medical Products, Inc. Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like
EP2961858B1 (en) 2013-03-01 2022-09-07 Si02 Medical Products, Inc. Coated syringe.
CN105392916B (en) 2013-03-11 2019-03-08 Sio2医药产品公司 Coated Packaging Materials
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
EP2971227B1 (en) 2013-03-15 2017-11-15 Si02 Medical Products, Inc. Coating method.
US9435028B2 (en) * 2013-05-06 2016-09-06 Lotus Applied Technology, Llc Plasma generation for thin film deposition on flexible substrates
EP3693493A1 (en) 2014-03-28 2020-08-12 SiO2 Medical Products, Inc. Antistatic coatings for plastic vessels
US9725802B2 (en) 2014-11-11 2017-08-08 Graham Packaging Company, L.P. Method for making pet containers with enhanced silicon dioxide barrier coating
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
CN112175220B (en) * 2020-09-03 2023-01-03 广东以色列理工学院 High-temperature-resistant modified polypropylene film and preparation method and application thereof

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JP2589599B2 (en) * 1989-11-30 1997-03-12 住友精密工業株式会社 Blow-out type surface treatment device
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JPH1129873A (en) * 1997-07-11 1999-02-02 Sekisui Chem Co Ltd Formation of laminated film and forming device therefor
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NL1010287C2 (en) * 1998-10-09 2000-04-11 Fuji Photo Film Bv A method for treating a photographic support with an atmospheric pressure glow discharge.
JP3959906B2 (en) * 1998-10-26 2007-08-15 松下電工株式会社 Plasma processing apparatus and plasma processing method
JP3555470B2 (en) * 1998-12-04 2004-08-18 セイコーエプソン株式会社 Etching method by atmospheric pressure high frequency plasma
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JP2002094221A (en) * 2000-09-20 2002-03-29 Sekisui Chem Co Ltd Normal pressure pulse plasma treatment method and its device

Also Published As

Publication number Publication date
WO2002025693A1 (en) 2002-03-28
EP1325509B1 (en) 2009-12-09
EP1325509A1 (en) 2003-07-09
US20030185982A1 (en) 2003-10-02
US6919107B2 (en) 2005-07-19
JP2004535037A (en) 2004-11-18
CH694949A5 (en) 2005-09-30
DE50115255D1 (en) 2010-01-21

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