[go: up one dir, main page]

AU2001278039A1 - Flexureless magnetic micromirror assembly - Google Patents

Flexureless magnetic micromirror assembly

Info

Publication number
AU2001278039A1
AU2001278039A1 AU2001278039A AU7803901A AU2001278039A1 AU 2001278039 A1 AU2001278039 A1 AU 2001278039A1 AU 2001278039 A AU2001278039 A AU 2001278039A AU 7803901 A AU7803901 A AU 7803901A AU 2001278039 A1 AU2001278039 A1 AU 2001278039A1
Authority
AU
Australia
Prior art keywords
flexureless
magnetic
micromirror assembly
micromirror
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001278039A
Inventor
Richard A. Holl
Philip L. Lichtenberger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HOLL TECHNOLOGIES Inc
Original Assignee
HOLL TECHNOLOGIES Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HOLL TECHNOLOGIES Inc filed Critical HOLL TECHNOLOGIES Inc
Publication of AU2001278039A1 publication Critical patent/AU2001278039A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1827—Motorised alignment
    • G02B7/1828—Motorised alignment using magnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU2001278039A 2000-07-27 2001-07-27 Flexureless magnetic micromirror assembly Abandoned AU2001278039A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22104900P 2000-07-27 2000-07-27
US60/221,049 2000-07-27
PCT/US2001/023657 WO2002010836A2 (en) 2000-07-27 2001-07-27 Flexureless magnetic micromirror assembly

Publications (1)

Publication Number Publication Date
AU2001278039A1 true AU2001278039A1 (en) 2002-02-13

Family

ID=22826124

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001278039A Abandoned AU2001278039A1 (en) 2000-07-27 2001-07-27 Flexureless magnetic micromirror assembly

Country Status (3)

Country Link
US (1) US6717715B2 (en)
AU (1) AU2001278039A1 (en)
WO (1) WO2002010836A2 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6735008B2 (en) * 2000-07-31 2004-05-11 Corning Incorporated MEMS mirror and method of fabrication
WO2002016997A1 (en) * 2000-08-18 2002-02-28 Alcatel Optronics Uk Limited Mem device
DE60108413T2 (en) * 2000-11-10 2005-06-02 Unitive Electronics, Inc. METHOD FOR POSITIONING COMPONENTS WITH THE HELP OF LIQUID DRIVES AND STRUCTURES THEREFOR
US20030068117A1 (en) * 2001-08-31 2003-04-10 Syms Richard R.A. Compact, tolerant large-scale mirror-rotation optical cross-connect switch
US6856068B2 (en) * 2002-02-28 2005-02-15 Pts Corporation Systems and methods for overcoming stiction
US20030202264A1 (en) * 2002-04-30 2003-10-30 Weber Timothy L. Micro-mirror device
US6972882B2 (en) 2002-04-30 2005-12-06 Hewlett-Packard Development Company, L.P. Micro-mirror device with light angle amplification
US6844960B2 (en) * 2002-09-24 2005-01-18 Eastman Kodak Company Microelectromechanical device with continuously variable displacement
US6666561B1 (en) * 2002-10-28 2003-12-23 Hewlett-Packard Development Company, L.P. Continuously variable analog micro-mirror device
US7007843B2 (en) * 2003-06-09 2006-03-07 Symbol Technologies, Inc. Light beam shaping arrangement and method in electro-optical readers
WO2005085929A1 (en) * 2004-03-09 2005-09-15 Fujitsu Limited Mirror device, optical controller, control method of mirror and mirror element
US7598688B2 (en) * 2006-06-22 2009-10-06 Orbotech Ltd Tilting device
DE102008049556B4 (en) * 2008-09-30 2011-07-07 Carl Zeiss SMT GmbH, 73447 Microlithographic projection exposure machine
KR101769157B1 (en) * 2008-10-20 2017-08-17 칼 짜이스 에스엠테 게엠베하 Optical module for guiding a radiation beam
WO2011023419A1 (en) * 2009-08-25 2011-03-03 Asml Netherlands B.V. Illumination system, lithographic apparatus and method of adjusting an illumination mode
WO2013142083A2 (en) 2012-03-22 2013-09-26 Nikon Corporation Mirror assembly with heat transfer mechanism
JP5803813B2 (en) * 2012-05-30 2015-11-04 株式会社豊田中央研究所 Deflector
US10114212B2 (en) 2012-05-29 2018-10-30 Kabushiki Kaisha Toyota Chuo Kenkyusho Deflector
US11111133B1 (en) 2017-01-30 2021-09-07 Mirrorcle Technologies, Inc. MEMS actuators with improved performance and cooling
CN113281898B (en) * 2021-05-25 2022-08-05 中国科学院上海微系统与信息技术研究所 MEMS Micromirror Unit and MEMS Micromirror Array

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL171405C (en) 1975-09-29 1983-03-16 Philips Nv SWING MIRROR.
NL181060C (en) 1975-10-03 1987-06-01 Philips Nv ELECTROMAGNETICALLY CONTROLLABLE RADIUS DEFLECTION DEVICE.
US4317611A (en) * 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
DE3667864D1 (en) * 1985-10-16 1990-02-01 British Telecomm DEVICE AND METHOD FOR WAVELENGTH SELECTION.
JP3065435B2 (en) 1992-07-31 2000-07-17 浜松ホトニクス株式会社 Optical fiber component characteristic measuring device
US5345521A (en) 1993-07-12 1994-09-06 Texas Instrument Incorporated Architecture for optical switch
US5583688A (en) 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device
US5650881A (en) 1994-11-02 1997-07-22 Texas Instruments Incorporated Support post architecture for micromechanical devices
US6028689A (en) 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
US6097859A (en) 1998-02-12 2000-08-01 The Regents Of The University Of California Multi-wavelength cross-connect optical switch
EP0979508A4 (en) 1997-04-29 2001-10-24 Terastor Corp Electro-optical storage system with flying head for near-field recording and reading
US5903383A (en) 1997-05-19 1999-05-11 The Charles Stark Draper Laboratory Inc. Electrostatic memory micromirror display system
US6040935A (en) * 1999-01-25 2000-03-21 The United States Of America As Represented By The Secretary Of The Air Force Flexureless multi-stable micromirrors for optical switching
DE29902348U1 (en) * 1999-02-11 1999-04-22 CMS Mikrosysteme GmbH Chemnitz, 09125 Chemnitz Micromechanical optical movement device
JP3993343B2 (en) * 1999-06-29 2007-10-17 富士通株式会社 Galvano micro mirror

Also Published As

Publication number Publication date
US20020067534A1 (en) 2002-06-06
WO2002010836A3 (en) 2002-07-25
US6717715B2 (en) 2004-04-06
WO2002010836A2 (en) 2002-02-07

Similar Documents

Publication Publication Date Title
AU2001289895A1 (en) Magnet coil
AU2000273430A1 (en) Reduced-energy-consumption actuator
AU2001243694A1 (en) Permanent magnet actuator mechanism
AU2002214471A1 (en) Map-aided positioning
AUPR193300A0 (en) Mask assembly
AU2001259628A1 (en) Valve assembly
AU2001278039A1 (en) Flexureless magnetic micromirror assembly
AU2001273238A1 (en) Cassette
AU2002254356A1 (en) Latching magnetic relay assembly
AU2002237542A1 (en) Magnetic motor
EP1184673A3 (en) RF coil assembly
AU2001252628A1 (en) Hydraulic-composition bond magnet
AU2001292938A1 (en) Magnetic field for small closed-drift thruster
AUPQ504000A0 (en) Brake assembly
AU2002331757A1 (en) Magnetic checkpoint
AUPR560501A0 (en) Magnetic motor
AU2001287659A1 (en) Electromagnetic actuator
AU5998200A (en) Magnet assembly
AU2001293749A1 (en) Magnetic component
AUPR183600A0 (en) Lens assembly
AU3590101A (en) A magnetic actuator
AU2001290084A1 (en) Magnetic separator
AU6586401A (en) Optical assembly
AU2001260872A1 (en) Assembling means
AU2001296210A1 (en) Magnetic engine