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AU2001277656A1 - Switches and switching arrays that use microelectromechanical devices having oneor more beam members that are responsive to temperature - Google Patents

Switches and switching arrays that use microelectromechanical devices having oneor more beam members that are responsive to temperature

Info

Publication number
AU2001277656A1
AU2001277656A1 AU2001277656A AU7765601A AU2001277656A1 AU 2001277656 A1 AU2001277656 A1 AU 2001277656A1 AU 2001277656 A AU2001277656 A AU 2001277656A AU 7765601 A AU7765601 A AU 7765601A AU 2001277656 A1 AU2001277656 A1 AU 2001277656A1
Authority
AU
Australia
Prior art keywords
oneor
responsive
switches
temperature
beam members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001277656A
Inventor
Robert L. Wood
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Viavi Solutions Inc
Original Assignee
JDS Uniphase Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JDS Uniphase Corp filed Critical JDS Uniphase Corp
Publication of AU2001277656A1 publication Critical patent/AU2001277656A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/031—Thermal actuators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H01H2001/0047—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet operable only by mechanical latching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H01H2061/008—Micromechanical actuator with a cold and a hot arm, coupled together at one end
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H67/00—Electrically-operated selector switches
    • H01H67/22—Switches without multi-position wipers

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
AU2001277656A 2000-08-21 2001-08-20 Switches and switching arrays that use microelectromechanical devices having oneor more beam members that are responsive to temperature Abandoned AU2001277656A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US26674300P 2000-08-21 2000-08-21
US60266743 2000-08-21
PCT/IB2001/001509 WO2002017339A1 (en) 2000-08-21 2001-08-20 Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature

Publications (1)

Publication Number Publication Date
AU2001277656A1 true AU2001277656A1 (en) 2002-03-04

Family

ID=23015822

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001277656A Abandoned AU2001277656A1 (en) 2000-08-21 2001-08-20 Switches and switching arrays that use microelectromechanical devices having oneor more beam members that are responsive to temperature

Country Status (2)

Country Link
AU (1) AU2001277656A1 (en)
WO (1) WO2002017339A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2387480B (en) * 2002-04-09 2005-04-13 Microsaic Systems Ltd Micro-engineered self-releasing switch
US7043910B2 (en) 2003-04-08 2006-05-16 Bookham Technology Plc Thermal actuator
US7036312B2 (en) 2003-04-22 2006-05-02 Simpler Networks, Inc. MEMS actuators
CN100526207C (en) * 2003-04-22 2009-08-12 辛普勒网络公司 MEMS actuators

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4891255A (en) * 1988-09-29 1990-01-02 The United States Of America As Represented By The United States Department Of Energy (110) Oriented silicon wafer latch accelerometer and process for forming the same
US5467067A (en) * 1994-03-14 1995-11-14 Hewlett-Packard Company Thermally actuated micromachined microwave switch
CN1097276C (en) * 1995-10-20 2002-12-25 欧姆龙株式会社 Relay and matrix relay
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
US5994816A (en) * 1996-12-16 1999-11-30 Mcnc Thermal arched beam microelectromechanical devices and associated fabrication methods
US5796152A (en) * 1997-01-24 1998-08-18 Roxburgh Ltd. Cantilevered microstructure

Also Published As

Publication number Publication date
WO2002017339A1 (en) 2002-02-28

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