AU2001275842A1 - Electron-beam curing and patterning of sol-gel - Google Patents
Electron-beam curing and patterning of sol-gelInfo
- Publication number
- AU2001275842A1 AU2001275842A1 AU2001275842A AU7584201A AU2001275842A1 AU 2001275842 A1 AU2001275842 A1 AU 2001275842A1 AU 2001275842 A AU2001275842 A AU 2001275842A AU 7584201 A AU7584201 A AU 7584201A AU 2001275842 A1 AU2001275842 A1 AU 2001275842A1
- Authority
- AU
- Australia
- Prior art keywords
- sol
- patterning
- electron
- gel
- beam curing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000001227 electron beam curing Methods 0.000 title 1
- 238000000609 electron-beam lithography Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/16—Surface shaping of articles, e.g. embossing; Apparatus therefor by wave energy or particle radiation, e.g. infrared heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/165—Processes of additive manufacturing using a combination of solid and fluid materials, e.g. a powder selectively bound by a liquid binder, catalyst, inhibitor or energy absorber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0042—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
- G03F7/0043—Chalcogenides; Silicon, germanium, arsenic or derivatives thereof; Metals, oxides or alloys thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0755—Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
- B29C2035/0877—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation using electron radiation, e.g. beta-rays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
- B29L2011/0075—Light guides, optical cables
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12119—Bend
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12145—Switch
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/31735—Direct-write microstructures
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Nanotechnology (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US64298300A | 2000-08-21 | 2000-08-21 | |
| US09642983 | 2000-08-21 | ||
| PCT/US2001/020264 WO2002017347A1 (fr) | 2000-08-21 | 2001-06-26 | Traitement de composition sol-gel et formation de motifs dans cette composition sol-gel par faisceau electronique |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2001275842A1 true AU2001275842A1 (en) | 2002-03-04 |
Family
ID=24578860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2001275842A Abandoned AU2001275842A1 (en) | 2000-08-21 | 2001-06-26 | Electron-beam curing and patterning of sol-gel |
Country Status (2)
| Country | Link |
|---|---|
| AU (1) | AU2001275842A1 (fr) |
| WO (1) | WO2002017347A1 (fr) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10243827B4 (de) * | 2002-09-14 | 2004-09-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Direktschreibendes Elektronenstrahl - Lithographieverfahren zur Herstellung einer zweidimensionalen Struktur im Submikrometerbereich |
| US20070079750A1 (en) * | 2003-05-09 | 2007-04-12 | Herman Miguez | Method of laser writing refractive index patterns in silicon photonic crystals |
| US20050130076A1 (en) * | 2003-12-11 | 2005-06-16 | Haoren Zhuang | Method for producing a hard mask in a capacitor device and a hard mask for use in a capacitor device |
| ITMO20060414A1 (it) * | 2006-12-21 | 2008-06-22 | Maria Prudenziati | Impianto flessibile innovativo computerizzato per la polimerizzazione passo-passo in tempo reale, durante il processo di realizzazione, di strutture in resina, compositi o simili |
| DE102011107123A1 (de) * | 2011-07-12 | 2013-01-17 | Robert Bosch Gmbh | Verfahren zur Herstellung einer Oberflächenbeschichtung mit einem Mikrostruktur-Gitter und Solarkollektor mit einer solchen Oberflächenbeschichtung |
| US20150307360A1 (en) * | 2013-11-01 | 2015-10-29 | South Dakota State University | Novel solution for electrophoretic deposition of nanoparticles into thin films |
| TW201933433A (zh) * | 2017-10-30 | 2019-08-16 | 美商康寧公司 | 用於形成維度敏感性結構之系統及方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04149090A (ja) * | 1990-10-09 | 1992-05-22 | Onoda Cement Co Ltd | 結晶質誘電体薄膜の作成方法 |
| JP2877588B2 (ja) * | 1991-10-28 | 1999-03-31 | ローム株式会社 | 金属酸化物薄膜のパターン形成法 |
| JP3340461B2 (ja) * | 1992-04-20 | 2002-11-05 | 大日本印刷株式会社 | 電離放射線硬化型金属アルコキシド及びそれを用いた硬化塗膜の形成方法 |
| JPH07307444A (ja) * | 1994-05-16 | 1995-11-21 | Mitsubishi Materials Corp | 不揮発性強誘電体薄膜メモリのパターン形成方法 |
| US5772905A (en) * | 1995-11-15 | 1998-06-30 | Regents Of The University Of Minnesota | Nanoimprint lithography |
| JPH10230560A (ja) * | 1997-02-18 | 1998-09-02 | Dainippon Printing Co Ltd | 光学機能性膜及びその製造方法 |
-
2001
- 2001-06-26 AU AU2001275842A patent/AU2001275842A1/en not_active Abandoned
- 2001-06-26 WO PCT/US2001/020264 patent/WO2002017347A1/fr not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2002017347A1 (fr) | 2002-02-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AU2001234473A1 (en) | Stabilized silica and methods of making and using the same | |
| AU2002243246A1 (en) | Cddo-compounds and combination therapies thereof | |
| AU2002257128A1 (en) | Simplifying and manipulating k-partite graphs | |
| AU2001249463A1 (en) | Concrete form assembly | |
| AU2001257312A1 (en) | Improved face mask structure | |
| AU2001280599A1 (en) | Compounds and methods | |
| AU2001253418A1 (en) | Compounds and methods | |
| AU2001294030A1 (en) | Fibre and its production | |
| AU2001242970A1 (en) | Information-related devices and methods | |
| AU2001288260A1 (en) | Neutrokine-alpha and neutrokine-alpha splice variant | |
| AU2002211717A1 (en) | Stresscopins and their uses | |
| AU2002239454A1 (en) | Ace-2 modulating compounds and use thereof | |
| AU2001292936A1 (en) | Octahydro-indolizines and quinolizines and hexahydro-pyrrolizines | |
| AU2001243394A1 (en) | Compounds and methods | |
| AU2001229439A1 (en) | Bioconjugates and uses thereof | |
| AUPQ872300A0 (en) | Compounds and methods | |
| AU2001275842A1 (en) | Electron-beam curing and patterning of sol-gel | |
| AU4427201A (en) | Noise-abatement structure and its constituting elements | |
| AU2001290641A1 (en) | Substituted fused pyrroleimines and pyrazoleimines | |
| AU2001278951A1 (en) | Compounds and methods | |
| AU2001264863A1 (en) | Preparation of fagopyritols and uses therefor | |
| AU2001269276A1 (en) | Drills and their manufacture | |
| AU2001252627A1 (en) | Polybenzasol fiber and use of the same | |
| AU4432001A (en) | Trityl-type compounds and their use | |
| AU2001228624A1 (en) | Implements and their manufacture |