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AU2001275399A1 - Optical mirror system with multi-axis rotational control - Google Patents

Optical mirror system with multi-axis rotational control

Info

Publication number
AU2001275399A1
AU2001275399A1 AU2001275399A AU7539901A AU2001275399A1 AU 2001275399 A1 AU2001275399 A1 AU 2001275399A1 AU 2001275399 A AU2001275399 A AU 2001275399A AU 7539901 A AU7539901 A AU 7539901A AU 2001275399 A1 AU2001275399 A1 AU 2001275399A1
Authority
AU
Australia
Prior art keywords
mirror system
optical mirror
rotational control
axis rotational
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001275399A
Inventor
Paul Merritt Hagelin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CSPEED Corp
Original Assignee
CSPEED CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CSPEED CORP filed Critical CSPEED CORP
Publication of AU2001275399A1 publication Critical patent/AU2001275399A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU2001275399A 2000-06-09 2001-06-07 Optical mirror system with multi-axis rotational control Abandoned AU2001275399A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US59055500A 2000-06-09 2000-06-09
US09590555 2000-06-09
PCT/US2001/018591 WO2001096930A1 (en) 2000-06-09 2001-06-07 Optical mirror system with multi-axis rotational control

Publications (1)

Publication Number Publication Date
AU2001275399A1 true AU2001275399A1 (en) 2001-12-24

Family

ID=24362698

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001275399A Abandoned AU2001275399A1 (en) 2000-06-09 2001-06-07 Optical mirror system with multi-axis rotational control

Country Status (3)

Country Link
AU (1) AU2001275399A1 (en)
TW (1) TW505614B (en)
WO (1) WO2001096930A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6480320B2 (en) 2001-02-07 2002-11-12 Transparent Optical, Inc. Microelectromechanical mirror and mirror array
US7813634B2 (en) 2005-02-28 2010-10-12 Tessera MEMS Technologies, Inc. Autofocus camera
US20040027449A1 (en) * 2002-05-07 2004-02-12 Turner Arthur Monroe Laser printing apparatus using a pivoting scanning mirror
US6843574B2 (en) 2002-08-20 2005-01-18 Intel Corporation Gimbaled micromechanical rotation system
US6733144B2 (en) 2002-09-27 2004-05-11 Intel Corporation Shock protectors for micro-mechanical systems
KR100486716B1 (en) * 2002-10-18 2005-05-03 삼성전자주식회사 2-dimensional actuator and manufacturing method thereof
FR2865201A1 (en) * 2004-06-18 2005-07-22 Commissariat Energie Atomique Vertical comb-drive type electrostatic actuator for very large telescope, has two electrode sets moving with respect to each other, from rest to maximum positions, where sets partially and electrically overlap even in rest position
US6985279B1 (en) * 2004-08-02 2006-01-10 Advanced Nano Systems, Inc. MEMS mirror with drive rotation amplification of mirror rotation angle
TWI484245B (en) * 2005-02-28 2015-05-11 Digitaloptics Corp Mems Autofocus camera
US9621772B2 (en) 2006-11-09 2017-04-11 Digitaloptics Corporation Integrated lens barrel, actuator, and MEMS snubber systems and methods
JP5286906B2 (en) * 2007-06-08 2013-09-11 大日本印刷株式会社 Piezoelectric mirror device, optical apparatus using the same, and method of manufacturing piezoelectric mirror device
CN102043243B (en) * 2009-10-20 2013-01-02 亚洲光学股份有限公司 Optical path control device
US9465187B2 (en) 2010-11-15 2016-10-11 DigitalOptics Corporation MEMS Thermal despace compensation systems and methods
US8947797B2 (en) 2010-11-15 2015-02-03 DigitalOptics Corporation MEMS Miniature MEMS actuator assemblies
WO2014144925A1 (en) * 2013-03-15 2014-09-18 DigitalOptics Corporation MEMS Arcuate motion control in electrostatic actuators
WO2020173919A2 (en) * 2019-02-27 2020-09-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromechanical structure, micromechanical system and method for providing a micromechanical structure

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5353167A (en) * 1992-07-22 1994-10-04 The United States Of America As Represented By The United States Department Of Energy Mirror mount
US5867297A (en) * 1997-02-07 1999-02-02 The Regents Of The University Of California Apparatus and method for optical scanning with an oscillatory microelectromechanical system

Also Published As

Publication number Publication date
TW505614B (en) 2002-10-11
WO2001096930A1 (en) 2001-12-20

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