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AU2001272418A1 - Differential pressure sensor - Google Patents

Differential pressure sensor

Info

Publication number
AU2001272418A1
AU2001272418A1 AU2001272418A AU7241801A AU2001272418A1 AU 2001272418 A1 AU2001272418 A1 AU 2001272418A1 AU 2001272418 A AU2001272418 A AU 2001272418A AU 7241801 A AU7241801 A AU 7241801A AU 2001272418 A1 AU2001272418 A1 AU 2001272418A1
Authority
AU
Australia
Prior art keywords
differential pressure
chambers
pressure sensor
outer edges
overload
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001272418A
Inventor
Dietfried Burczyk
Wolfgang Dannhauer
Frank Loffler
Ralf Nurnberger
Friedrich Schwabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of AU2001272418A1 publication Critical patent/AU2001272418A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Semiconductor Lasers (AREA)
  • Steroid Compounds (AREA)

Abstract

Differential pressure transducer has a sensor element (1), two adjoining pressure measurement chambers (2, 3), two sealed pressure sensing chambers (22, 23) with separating membranes (21, 31) and two separate overload chambers (23, 33) with an overload membrane (6). The latter has closed inner and outer edges and is firmly clamped along its inner and outer edges.
AU2001272418A 2000-07-13 2001-05-23 Differential pressure sensor Abandoned AU2001272418A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP00115175A EP1172640A1 (en) 2000-07-13 2000-07-13 Differential pressure sensor
EP00115175 2000-07-13
PCT/EP2001/005929 WO2002006785A1 (en) 2000-07-13 2001-05-23 Differential pressure sensor

Publications (1)

Publication Number Publication Date
AU2001272418A1 true AU2001272418A1 (en) 2002-01-30

Family

ID=8169241

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001272418A Abandoned AU2001272418A1 (en) 2000-07-13 2001-05-23 Differential pressure sensor

Country Status (9)

Country Link
US (1) US6631644B2 (en)
EP (2) EP1172640A1 (en)
JP (1) JP3684229B2 (en)
CN (1) CN1188677C (en)
AT (1) ATE271215T1 (en)
AU (1) AU2001272418A1 (en)
DE (1) DE50102860D1 (en)
EA (1) EA005793B1 (en)
WO (1) WO2002006785A1 (en)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20311320U1 (en) * 2003-07-22 2003-10-09 Endress + Hauser GmbH + Co. KG, 79689 Maulburg Dynamic diaphragm seal
DE10334853A1 (en) * 2003-07-29 2005-03-24 Endress + Hauser Gmbh + Co. Kg Differential pressure
DE102004017580A1 (en) * 2004-04-07 2005-12-01 Endress + Hauser Gmbh + Co. Kg Differential pressure sensor with dynamic overload protection
DE102004019389A1 (en) * 2004-04-19 2005-11-03 Endress + Hauser Gmbh + Co. Kg Pressure transducer with exchangeable process connection
DE102004047419B4 (en) * 2004-09-28 2011-09-15 Endress + Hauser Gmbh + Co. Kg Diaphragm seal and pressure sensor with diaphragm seal
JP4940786B2 (en) * 2006-06-29 2012-05-30 株式会社デンソー Pressure sensor
US7467555B2 (en) * 2006-07-10 2008-12-23 Rosemount Inc. Pressure transmitter with multiple reference pressure sensors
DE102006057829A1 (en) * 2006-12-06 2008-06-12 Endress + Hauser Gmbh + Co. Kg Differential manometric sensor for recording differential pressure and for industrial measuring technique, has base body and recess is divided into two pressure measuring chamber, which are connected with overload chambers
DE102006057828A1 (en) * 2006-12-06 2008-06-12 Endress + Hauser Gmbh + Co. Kg Differential manometric sensor for recording differential pressure and for industrial measuring technique, has base body and recess is divided into two pressure measuring chamber, which are connected with overload chambers
NO326583B1 (en) 2007-06-08 2009-01-12 Presens As Differential pressure Templates
DE102008054991A1 (en) 2008-12-19 2010-06-24 Endress + Hauser Gmbh + Co. Kg Differential
DE102012025070A1 (en) 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Hydraulic measuring unit with coplanar pressure inputs and differential pressure sensor with such a measuring unit
DE102012113033A1 (en) 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Mechanical stabilization and electrical and hydraulic adaptation of a silicon chip by ceramics
DE102013106601B4 (en) 2013-06-25 2025-12-04 Endress+Hauser SE+Co. KG Pressure gauge, especially differential pressure gauge
DE102013113171A1 (en) 2013-11-28 2015-05-28 Endress + Hauser Gmbh + Co. Kg Piezoresistive silicon differential pressure cell and method for its production
DE102014104831A1 (en) 2014-04-04 2015-10-08 Endress + Hauser Gmbh + Co. Kg Differential Pressure Sensor
DE102014109491A1 (en) 2014-07-08 2016-02-11 Endress + Hauser Gmbh + Co. Kg Differential pressure measuring cell
US9683675B2 (en) * 2014-11-24 2017-06-20 General Electric Company Pressure modulator
US9766145B2 (en) * 2015-07-03 2017-09-19 WIKA Alexander Weigand SE & Co. KG Active diaphragm seal assembly for pressure measurement
US10060813B2 (en) 2015-09-29 2018-08-28 Rosemount Inc. High over-pressure capable silicon die pressure sensor
US9719872B2 (en) * 2015-09-29 2017-08-01 Rosemount Inc. High over-pressure capable silicon die pressure sensor with extended pressure signal output
DE102016107238B4 (en) 2016-04-19 2025-12-04 Endress+Hauser SE+Co. KG Method for joining a differential pressure measuring cell and differential pressure measuring cell
DE102016107236B4 (en) 2016-04-19 2025-12-24 Endress+Hauser SE+Co. KG Method for joining a differential pressure measuring cell and differential pressure measuring cell
DE102016107235B3 (en) * 2016-04-19 2017-01-26 Endress + Hauser Gmbh + Co. Kg Differential pressure measuring cell
US10203258B2 (en) 2016-09-26 2019-02-12 Rosemount Inc. Pressure sensor diaphragm with overpressure protection
CN110402378B (en) * 2017-03-10 2022-03-08 霍尼韦尔国际公司 Pressure sensor with coplanar gauge body with sensor overpressure protection
WO2018165263A1 (en) 2017-03-10 2018-09-13 Honeywell International Inc. Pressure sensor having overpressure protection with reduced output error
US10378987B2 (en) * 2017-03-10 2019-08-13 Honeywell International Inc. Pressure sensor with flow porting having integral flame-proof safety mechanism
DE202017107618U1 (en) * 2017-12-14 2018-01-08 Endress + Hauser Gmbh + Co. Kg Differenzdruckmessaufnehmer
EP4078128A1 (en) 2019-12-20 2022-10-26 Endress+Hauser SE+Co. KG Differential pressure sensor for determining the differential pressure between two pressures
DE102020132960A1 (en) 2020-12-10 2022-06-15 Endress+Hauser SE+Co. KG Differential pressure sensor with overload protection
CN114413976A (en) * 2021-12-13 2022-04-29 重庆市伟岸测器制造股份有限公司 Shape stabilizing structure of capacitance type differential pressure sensor
CN116878720B (en) * 2023-04-20 2024-10-11 汉斯韦尔(山东)物联技术有限公司 A High Stability Silicon Differential Pressure Sensor

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2712846A1 (en) * 1976-03-24 1977-11-24 Ict Instr Inc TRANSDUCER FOR MEASURING PRESSURE DIFFERENCES
US4091682A (en) * 1977-04-04 1978-05-30 Sensor-Matic, Inc. Digital differential pressure measurement apparatus
JPS5930444Y2 (en) * 1980-05-09 1984-08-30 株式会社山武 differential pressure detector
DE3222620A1 (en) * 1982-02-15 1983-08-25 Siemens AG, 1000 Berlin und 8000 München PRESSURE OR PRESSURE DIFFERENCE MEASURING DEVICE WITH A PRESSURE SENSOR DEVICE PROTECTED FROM OVERLOAD
US4713969A (en) * 1983-09-30 1987-12-22 Kabushiki Kaisha Toshiba Differential pressure transmission apparatus
JPS6073427A (en) * 1983-09-30 1985-04-25 Toshiba Corp Differential pressure transmitter
DE3422945C2 (en) * 1984-06-20 1986-04-24 Endress U. Hauser Gmbh U. Co, 7867 Maulburg sensor
JPH0526985Y2 (en) * 1987-09-08 1993-07-08
DE4244257A1 (en) * 1992-12-22 1994-06-23 Grw Druckmestechnik Teltow Gmb Pressure and difference pressure measuring transducer

Also Published As

Publication number Publication date
EP1299701B1 (en) 2004-07-14
CN1449489A (en) 2003-10-15
WO2002006785A1 (en) 2002-01-24
JP2004516454A (en) 2004-06-03
JP3684229B2 (en) 2005-08-17
EA005793B1 (en) 2005-06-30
ATE271215T1 (en) 2004-07-15
EA200300140A1 (en) 2003-06-26
EP1299701A1 (en) 2003-04-09
EP1172640A1 (en) 2002-01-16
CN1188677C (en) 2005-02-09
DE50102860D1 (en) 2004-08-19
US20020017143A1 (en) 2002-02-14
US6631644B2 (en) 2003-10-14

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