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AU2001265776A1 - Device for guiding a table in the x-y plane and air bearing table equipped with such a device - Google Patents

Device for guiding a table in the x-y plane and air bearing table equipped with such a device

Info

Publication number
AU2001265776A1
AU2001265776A1 AU2001265776A AU6577601A AU2001265776A1 AU 2001265776 A1 AU2001265776 A1 AU 2001265776A1 AU 2001265776 A AU2001265776 A AU 2001265776A AU 6577601 A AU6577601 A AU 6577601A AU 2001265776 A1 AU2001265776 A1 AU 2001265776A1
Authority
AU
Australia
Prior art keywords
guiding
plane
air bearing
bearing table
table equipped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001265776A
Inventor
Frank Brosette
Mario Schroeder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mycrona Gesellschaft fuer Innovative Messtechnik mbH
Original Assignee
Mycrona Gesellschaft fuer Innovative Messtechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mycrona Gesellschaft fuer Innovative Messtechnik mbH filed Critical Mycrona Gesellschaft fuer Innovative Messtechnik mbH
Publication of AU2001265776A1 publication Critical patent/AU2001265776A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Credit Cards Or The Like (AREA)
AU2001265776A 2000-05-16 2001-05-14 Device for guiding a table in the x-y plane and air bearing table equipped with such a device Abandoned AU2001265776A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE20008723 2000-05-16
DE20008723U DE20008723U1 (en) 2000-05-16 2000-05-16 Device for guiding a table in the X-Y plane
PCT/DE2001/001787 WO2001087536A1 (en) 2000-05-16 2001-05-14 Device for guiding a table in the x-y plane and air bearing table equipped with such a device

Publications (1)

Publication Number Publication Date
AU2001265776A1 true AU2001265776A1 (en) 2001-11-26

Family

ID=7941542

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001265776A Abandoned AU2001265776A1 (en) 2000-05-16 2001-05-14 Device for guiding a table in the x-y plane and air bearing table equipped with such a device

Country Status (3)

Country Link
AU (1) AU2001265776A1 (en)
DE (2) DE20008723U1 (en)
WO (1) WO2001087536A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112007000386A5 (en) * 2006-02-14 2008-12-24 Inspire AG für mechatronische Produktionssysteme und Fertigungstechnik machine tool
CN103869835B (en) * 2014-04-01 2016-06-01 哈尔滨工业大学 Based on the three-axis air-bearing table centroid adjustment device of non-orthohormbic structure
CN106347692B (en) * 2016-09-09 2018-12-07 瑞邦晟达科技（北京）有限公司 The sampling container automatic installation apparatus of environmentally friendly unmanned plane
CN115735064A (en) * 2020-06-16 2023-03-03 发那科株式会社 Fluid balancer and machine tool
US12123459B1 (en) * 2023-10-18 2024-10-22 Wuxi Xivi Science And Technology Co., Ltd. Combinable multi-axis structure and linear motion platform having the structure

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3218108A (en) * 1962-10-11 1965-11-16 Link Division Of General Prec Precision positioning apparatus
US3377111A (en) * 1966-02-15 1968-04-09 Optomechanisms Inc Precision coordinate axes table means
DE6921062U (en) * 1969-05-23 1969-12-11 Hamuel Werkzeugfab Kirschbaum MOVABLE WORK PIECE TABLE WITH ROLLER BEARING
EP0583035B1 (en) * 1992-08-12 1996-11-27 Koninklijke Philips Electronics N.V. Transmission mechanism, positioning device provided with such a transmission mechanism and lithographic device provided with such a positioning device

Also Published As

Publication number Publication date
DE20008723U1 (en) 2001-09-27
WO2001087536A1 (en) 2001-11-22
DE10191938B4 (en) 2006-03-09
DE10191938D2 (en) 2003-04-24

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