AU2001249575A1 - System for calibrating timing of an integrated circuit wafer tester - Google Patents
System for calibrating timing of an integrated circuit wafer testerInfo
- Publication number
- AU2001249575A1 AU2001249575A1 AU2001249575A AU4957501A AU2001249575A1 AU 2001249575 A1 AU2001249575 A1 AU 2001249575A1 AU 2001249575 A AU2001249575 A AU 2001249575A AU 4957501 A AU4957501 A AU 4957501A AU 2001249575 A1 AU2001249575 A1 AU 2001249575A1
- Authority
- AU
- Australia
- Prior art keywords
- integrated circuit
- circuit wafer
- wafer tester
- calibrating timing
- calibrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
- G01R31/318385—Random or pseudo-random test pattern
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
- G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
- G01R31/31908—Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
- G01R31/3191—Calibration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09598399 | 2000-06-20 | ||
| US09/598,399 US6622103B1 (en) | 2000-06-20 | 2000-06-20 | System for calibrating timing of an integrated circuit wafer tester |
| PCT/US2001/010025 WO2002001234A2 (en) | 2000-06-20 | 2001-03-28 | System for calibrating timing of an integrated circuit wafer tester |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2001249575A1 true AU2001249575A1 (en) | 2002-01-08 |
Family
ID=24395393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2001249575A Abandoned AU2001249575A1 (en) | 2000-06-20 | 2001-03-28 | System for calibrating timing of an integrated circuit wafer tester |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US6622103B1 (en) |
| EP (1) | EP1295139B1 (en) |
| JP (1) | JP2004502174A (en) |
| KR (2) | KR100861602B1 (en) |
| CN (1) | CN1250979C (en) |
| AU (1) | AU2001249575A1 (en) |
| DE (1) | DE60121064T2 (en) |
| TW (1) | TW512471B (en) |
| WO (1) | WO2002001234A2 (en) |
Families Citing this family (90)
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|---|---|---|---|---|
| US6232789B1 (en) | 1997-05-28 | 2001-05-15 | Cascade Microtech, Inc. | Probe holder for low current measurements |
| US5729150A (en) | 1995-12-01 | 1998-03-17 | Cascade Microtech, Inc. | Low-current probe card with reduced triboelectric current generating cables |
| US5914613A (en) | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
| US6034533A (en) | 1997-06-10 | 2000-03-07 | Tervo; Paul A. | Low-current pogo probe card |
| US6256882B1 (en) | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
| US6578264B1 (en) | 1999-06-04 | 2003-06-17 | Cascade Microtech, Inc. | Method for constructing a membrane probe using a depression |
| JP4002378B2 (en) * | 1999-12-27 | 2007-10-31 | エルピーダメモリ株式会社 | Electronic circuit |
| US6801869B2 (en) * | 2000-02-22 | 2004-10-05 | Mccord Don | Method and system for wafer and device-level testing of an integrated circuit |
| US6838890B2 (en) | 2000-02-25 | 2005-01-04 | Cascade Microtech, Inc. | Membrane probing system |
| US6603323B1 (en) * | 2000-07-10 | 2003-08-05 | Formfactor, Inc. | Closed-grid bus architecture for wafer interconnect structure |
| JP2002074988A (en) * | 2000-08-28 | 2002-03-15 | Mitsubishi Electric Corp | Semiconductor device and semiconductor device test method |
| US6927591B2 (en) * | 2000-09-22 | 2005-08-09 | Mccord Don | Method and system for wafer and device level testing of an integrated circuit |
| US6735709B1 (en) | 2000-11-09 | 2004-05-11 | Micron Technology, Inc. | Method of timing calibration using slower data rate pattern |
| DE20114544U1 (en) | 2000-12-04 | 2002-02-21 | Cascade Microtech, Inc., Beaverton, Oreg. | wafer probe |
| US6665627B2 (en) * | 2001-03-30 | 2003-12-16 | Intel Corporation | Method and apparatus for evaluating and correcting the tester derating factor (TDF) in a test environment |
| US6934670B2 (en) * | 2001-03-30 | 2005-08-23 | Intel Corporation | Virtual test environment |
| DE10126591B4 (en) * | 2001-05-31 | 2016-01-14 | Polaris Innovations Ltd. | Test device for dynamic memory modules |
| DE10131386C2 (en) * | 2001-06-28 | 2003-10-16 | Infineon Technologies Ag | Procedure for checking a conductive connection between contact points |
| US6877121B1 (en) * | 2001-07-19 | 2005-04-05 | Cisco Technology, Inc. | Boundary scan cell for testing AC coupled line using phase modulation technique |
| US7355420B2 (en) | 2001-08-21 | 2008-04-08 | Cascade Microtech, Inc. | Membrane probing system |
| US6944692B2 (en) * | 2001-09-13 | 2005-09-13 | Sun Microsystems, Inc. | Automated calibration of I/O over a multi-variable eye window |
| US20030058604A1 (en) * | 2001-09-13 | 2003-03-27 | Canagasaby Karthisha S. | Method and apparatus to emulate external IO interconnection |
| JP4152323B2 (en) * | 2002-01-10 | 2008-09-17 | 株式会社アドバンテスト | Test equipment for LSI to be measured |
| US6798225B2 (en) * | 2002-05-08 | 2004-09-28 | Formfactor, Inc. | Tester channel to multiple IC terminals |
| US6965244B2 (en) * | 2002-05-08 | 2005-11-15 | Formfactor, Inc. | High performance probe system |
| US6784674B2 (en) * | 2002-05-08 | 2004-08-31 | Formfactor, Inc. | Test signal distribution system for IC tester |
| KR100864916B1 (en) | 2002-05-23 | 2008-10-22 | 캐스케이드 마이크로테크 인코포레이티드 | Probes for Testing Devices Under Test |
| US6950770B2 (en) * | 2002-09-25 | 2005-09-27 | Intel Corporation | Method and apparatus for calibration of a delay element |
| US6724205B1 (en) | 2002-11-13 | 2004-04-20 | Cascade Microtech, Inc. | Probe for combined signals |
| US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
| DE10330043B4 (en) * | 2003-06-30 | 2007-09-27 | Infineon Technologies Ag | System and calibration procedure |
| US6911814B2 (en) * | 2003-07-01 | 2005-06-28 | Formfactor, Inc. | Apparatus and method for electromechanical testing and validation of probe cards |
| DE10332008B4 (en) * | 2003-07-14 | 2006-08-10 | Infineon Technologies Ag | Electrical circuit and method for testing electronic components |
| WO2005024445A1 (en) * | 2003-09-03 | 2005-03-17 | Advantest Corporation | Testing apparatus |
| US7185239B2 (en) * | 2003-09-29 | 2007-02-27 | Stmicroelectronics Pvt. Ltd. | On-chip timing characterizer |
| US7250626B2 (en) * | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
| US7154259B2 (en) * | 2003-10-23 | 2006-12-26 | Formfactor, Inc. | Isolation buffers with controlled equal time delays |
| JP4457074B2 (en) * | 2003-11-20 | 2010-04-28 | 株式会社アドバンテスト | Timing comparator, data sampling device, and test device |
| WO2005065258A2 (en) | 2003-12-24 | 2005-07-21 | Cascade Microtech, Inc. | Active wafer probe |
| DE102004009337A1 (en) | 2004-02-26 | 2005-09-22 | Infineon Technologies Ag | Contact plate for use in calibrating tester channels of a tester system and a calibration system with such a contact plate |
| TWI274166B (en) * | 2004-06-18 | 2007-02-21 | Unitest Inc | Semiconductor test apparatus for simultaneously testing plurality of semiconductor devices |
| DE102004031436B4 (en) * | 2004-06-29 | 2006-07-27 | Infineon Technologies Ag | Device and method for calibrating a semiconductor device test system, in particular a probecard or a semiconductor device test device |
| DE202005021386U1 (en) | 2004-07-07 | 2007-11-29 | Cascade Microtech, Inc., Beaverton | Probe with a sensor with membrane suspension |
| US7595629B2 (en) * | 2004-07-09 | 2009-09-29 | Formfactor, Inc. | Method and apparatus for calibrating and/or deskewing communications channels |
| US7184936B1 (en) * | 2004-07-12 | 2007-02-27 | Cisco Technology, Inc. | Timing variation measurement system and method |
| DE102004035556B3 (en) * | 2004-07-22 | 2005-12-08 | Infineon Technologies Ag | Method and device, in particular probecard, for calibrating a semiconductor device test system, in particular a semiconductor device test device |
| US7092827B2 (en) * | 2004-08-10 | 2006-08-15 | Texas Instruments Incorporated | Edge placement accuracy of signals generated by test equipment |
| JP2008512680A (en) | 2004-09-13 | 2008-04-24 | カスケード マイクロテック インコーポレイテッド | Double-sided probing structure |
| FI119079B (en) * | 2004-11-08 | 2008-07-15 | Elektrobit System Test Oy | Characterization of an electronic device's electronic circuit |
| US7323897B2 (en) * | 2004-12-16 | 2008-01-29 | Verigy (Singapore) Pte. Ltd. | Mock wafer, system calibrated using mock wafer, and method for calibrating automated test equipment |
| US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
| US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
| DE102005007103A1 (en) * | 2005-02-16 | 2006-08-24 | Infineon Technologies Ag | Method for testing a circuit unit to be tested with extraction of verification signals and test device for carrying out the method |
| JP4721762B2 (en) * | 2005-04-25 | 2011-07-13 | 株式会社アドバンテスト | Test equipment |
| US7449899B2 (en) | 2005-06-08 | 2008-11-11 | Cascade Microtech, Inc. | Probe for high frequency signals |
| JP5080459B2 (en) | 2005-06-13 | 2012-11-21 | カスケード マイクロテック インコーポレイテッド | Wideband active / passive differential signal probe |
| US7281181B2 (en) * | 2005-06-27 | 2007-10-09 | Verigy (Singapore) Pte. Ltd. | Systems, methods and computer programs for calibrating an automated circuit test system |
| DE602006006353D1 (en) * | 2006-02-07 | 2009-05-28 | Verigy Pte Ltd Singapore | MULTI-STAGE DATA PROCESSOR WITH SIGNAL REPEATER |
| US7421632B2 (en) * | 2006-05-31 | 2008-09-02 | Verigy (Singapore) Pte. Ltd. | Mapping logic for controlling loading of the select ram of an error data crossbar multiplexer |
| US7404122B2 (en) * | 2006-05-31 | 2008-07-22 | Agilent Technologies, Inc. | Mapping logic for loading control of crossbar multiplexer select RAM |
| US7609077B2 (en) | 2006-06-09 | 2009-10-27 | Cascade Microtech, Inc. | Differential signal probe with integral balun |
| US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
| US7443186B2 (en) | 2006-06-12 | 2008-10-28 | Cascade Microtech, Inc. | On-wafer test structures for differential signals |
| US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
| US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
| KR100736680B1 (en) * | 2006-08-10 | 2007-07-06 | 주식회사 유니테스트 | Calibration method of semiconductor device test device |
| DE102006045906A1 (en) * | 2006-09-28 | 2008-04-17 | Infineon Technologies Ag | Module with a controller for a chip card |
| US7453261B1 (en) * | 2006-10-27 | 2008-11-18 | Xilinx, Inc. | Method of and system for monitoring the functionality of a wafer probe site |
| US7852099B1 (en) | 2007-01-31 | 2010-12-14 | Ixys Ch Gmbh | Frequency trimming for internal oscillator for test-time reduction |
| KR100907929B1 (en) * | 2007-06-26 | 2009-07-16 | 주식회사 하이닉스반도체 | BUUB test apparatus and test method for semiconductor chip |
| US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
| JP5207748B2 (en) * | 2008-01-25 | 2013-06-12 | 株式会社アドバンテスト | Measuring apparatus, measuring method and test apparatus |
| US7924035B2 (en) * | 2008-07-15 | 2011-04-12 | Formfactor, Inc. | Probe card assembly for electronic device testing with DC test resource sharing |
| CN101661078A (en) * | 2008-08-26 | 2010-03-03 | 鸿富锦精密工业（深圳）有限公司 | Circuit board and testing device thereof |
| US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
| US8410806B2 (en) | 2008-11-21 | 2013-04-02 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
| FR2941576B1 (en) * | 2009-01-28 | 2016-07-15 | St Wireless Sa | METHOD AND SYSTEM FOR CALIBRATING AN INTEGRATED TIME CONSTANT, AND INTEGRATED CIRCUIT PROVIDED WITH SUCH A SYSTEM |
| TWI386649B (en) * | 2009-03-18 | 2013-02-21 | Mjc Probe Inc | Probe card |
| US8692538B2 (en) * | 2011-06-09 | 2014-04-08 | Teradyne, Inc. | Test equipment calibration |
| US8525168B2 (en) * | 2011-07-11 | 2013-09-03 | International Business Machines Corporation | Integrated circuit (IC) test probe |
| CN103853081B (en) * | 2012-12-06 | 2018-01-30 | 海尔集团公司 | MCU internal clockings calibration system and method and printed circuit board (PCB) |
| TWI591362B (en) * | 2015-02-13 | 2017-07-11 | 何恆春 | A method for automatically configuring a semiconductor component tester |
| FR3033412B1 (en) * | 2015-03-06 | 2019-04-12 | Starchip | INTEGRATED CIRCUIT TESTER ON A SILICON GALETTE AND INTEGRATED CIRCUIT. |
| CN107976617B (en) * | 2017-11-20 | 2020-02-21 | 扬州乾照光电有限公司 | A method for testing LED wafers with stable spectral energy distribution |
| JP2019133457A (en) * | 2018-01-31 | 2019-08-08 | オムロン株式会社 | Control unit and control method |
| TWI693410B (en) * | 2019-03-12 | 2020-05-11 | 新唐科技股份有限公司 | Chip test system and method |
| CN114264939B (en) * | 2021-11-08 | 2024-05-14 | 中国船舶重工集团公司第七0九研究所 | Calibration adapter board of high-speed digital integrated circuit test system |
| CN114779145A (en) * | 2022-03-28 | 2022-07-22 | 无锡中微腾芯电子有限公司 | Integrated circuit multi-station test calibration method, device, test machine and test system |
| KR102873843B1 (en) * | 2022-04-15 | 2025-10-22 | 삼성전자주식회사 | Fan-out buffer with skew control function, method thereof, and probe card including same |
| CN119355611B (en) * | 2024-12-20 | 2025-03-25 | 悦芯科技股份有限公司 | A multi-digital channel EPA calibration method |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2688941B2 (en) * | 1988-08-29 | 1997-12-10 | 株式会社アドバンテスト | Phase correction device |
| US5086271A (en) | 1990-01-12 | 1992-02-04 | Reliability Incorporated | Driver system and distributed transmission line network for driving devices under test |
| JPH03229172A (en) * | 1990-02-02 | 1991-10-11 | Advantest Corp | Ic testing device |
| US5162728A (en) | 1990-09-11 | 1992-11-10 | Cray Computer Corporation | Functional at speed test system for integrated circuits on undiced wafers |
| JP2638274B2 (en) * | 1990-09-18 | 1997-08-06 | 株式会社日立製作所 | Timing correction method |
| US5270643A (en) * | 1990-11-28 | 1993-12-14 | Schlumberger Technologies | Pulsed laser photoemission electron-beam probe |
| AU658014B2 (en) * | 1991-11-19 | 1995-03-30 | Macrovision Corporation | Method and apparatus for scrambling and descrambling of video signals with edge fill |
| US5262716A (en) | 1992-04-21 | 1993-11-16 | Hewlett-Packard Company | Tester calibration procedure which includes fixturing |
| US5754353A (en) * | 1993-07-01 | 1998-05-19 | Cirrus Logic, Inc. | Channel quality circuit in a sampled amplitude read channel |
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| US6163759A (en) * | 1997-11-21 | 2000-12-19 | Advantest Corporation | Method for calibrating variable delay circuit and a variable delay circuit using the same |
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| JP3616247B2 (en) * | 1998-04-03 | 2005-02-02 | 株式会社アドバンテスト | Skew adjustment method in IC test apparatus and pseudo device used therefor |
| DE19817763C2 (en) | 1998-04-21 | 2001-02-15 | Texas Instruments Deutschland | Method for calibrating a measuring device |
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| AU9654198A (en) * | 1998-06-29 | 2000-01-17 | Iliya Valeryevich Klochkov | A skew calibration means and a method of skew calibration |
-
2000
- 2000-06-20 US US09/598,399 patent/US6622103B1/en not_active Expired - Fee Related
- 2000-12-29 US US09/752,839 patent/US6606575B2/en not_active Expired - Fee Related
-
2001
- 2001-03-28 WO PCT/US2001/010025 patent/WO2002001234A2/en not_active Ceased
- 2001-03-28 DE DE60121064T patent/DE60121064T2/en not_active Expired - Lifetime
- 2001-03-28 EP EP01922814A patent/EP1295139B1/en not_active Expired - Lifetime
- 2001-03-28 CN CNB018114571A patent/CN1250979C/en not_active Expired - Fee Related
- 2001-03-28 AU AU2001249575A patent/AU2001249575A1/en not_active Abandoned
- 2001-03-28 JP JP2002506116A patent/JP2004502174A/en active Pending
- 2001-03-28 KR KR1020077017275A patent/KR100861602B1/en not_active Expired - Fee Related
- 2001-03-28 KR KR1020027017431A patent/KR100794080B1/en not_active Expired - Fee Related
- 2001-04-03 TW TW090107924A patent/TW512471B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR100794080B1 (en) | 2008-01-10 |
| US6622103B1 (en) | 2003-09-16 |
| DE60121064D1 (en) | 2006-08-03 |
| KR100861602B1 (en) | 2008-10-07 |
| EP1295139B1 (en) | 2005-12-07 |
| WO2002001234A3 (en) | 2002-04-18 |
| KR20030029062A (en) | 2003-04-11 |
| US6606575B2 (en) | 2003-08-12 |
| KR20070090263A (en) | 2007-09-05 |
| DE60121064T2 (en) | 2006-11-02 |
| CN1437711A (en) | 2003-08-20 |
| TW512471B (en) | 2002-12-01 |
| US20020049554A1 (en) | 2002-04-25 |
| WO2002001234A2 (en) | 2002-01-03 |
| JP2004502174A (en) | 2004-01-22 |
| EP1295139A2 (en) | 2003-03-26 |
| CN1250979C (en) | 2006-04-12 |
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