AU2000274149A1 - Trench igbt - Google Patents
Trench igbtInfo
- Publication number
- AU2000274149A1 AU2000274149A1 AU2000274149A AU7414900A AU2000274149A1 AU 2000274149 A1 AU2000274149 A1 AU 2000274149A1 AU 2000274149 A AU2000274149 A AU 2000274149A AU 7414900 A AU7414900 A AU 7414900A AU 2000274149 A1 AU2000274149 A1 AU 2000274149A1
- Authority
- AU
- Australia
- Prior art keywords
- trench igbt
- igbt
- trench
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
- H10D12/01—Manufacture or treatment
- H10D12/031—Manufacture or treatment of IGBTs
- H10D12/032—Manufacture or treatment of IGBTs of vertical IGBTs
- H10D12/038—Manufacture or treatment of IGBTs of vertical IGBTs having a recessed gate, e.g. trench-gate IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
- H10D12/411—Insulated-gate bipolar transistors [IGBT]
- H10D12/441—Vertical IGBTs
- H10D12/461—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions
- H10D12/481—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions having gate structures on slanted surfaces, on vertical surfaces, or in grooves, e.g. trench gate IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
- H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]
- H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/111—Field plates
- H10D64/117—Recessed field plates, e.g. trench field plates or buried field plates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
- H10D64/311—Gate electrodes for field-effect devices
- H10D64/411—Gate electrodes for field-effect devices for FETs
- H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
- H10D64/514—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers
- H10D64/516—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers the thicknesses being non-uniform
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
- H10D64/311—Gate electrodes for field-effect devices
- H10D64/411—Gate electrodes for field-effect devices for FETs
- H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
- H10D64/517—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers
- H10D64/518—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers characterised by their lengths or sectional shapes
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2000/008459 WO2002019434A1 (en) | 2000-08-30 | 2000-08-30 | Trench igbt |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2000274149A1 true AU2000274149A1 (en) | 2002-03-13 |
Family
ID=8164080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2000274149A Abandoned AU2000274149A1 (en) | 2000-08-30 | 2000-08-30 | Trench igbt |
Country Status (3)
| Country | Link |
|---|---|
| AU (1) | AU2000274149A1 (en) |
| DE (1) | DE10085054B4 (en) |
| WO (1) | WO2002019434A1 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10127885B4 (en) * | 2001-06-08 | 2009-09-24 | Infineon Technologies Ag | Trench power semiconductor device |
| DE102006024504B4 (en) * | 2006-05-23 | 2010-09-02 | Infineon Technologies Austria Ag | Power semiconductor device with vertical gate zone and method for producing the same |
| US9166027B2 (en) * | 2013-09-30 | 2015-10-20 | Infineon Technologies Ag | IGBT with reduced feedback capacitance |
| US9337270B2 (en) | 2013-12-19 | 2016-05-10 | Infineon Technologies Ag | Semiconductor device |
| US9337185B2 (en) | 2013-12-19 | 2016-05-10 | Infineon Technologies Ag | Semiconductor devices |
| US9373710B2 (en) | 2014-05-15 | 2016-06-21 | Infineon Technologies Ag | Insulated gate bipolar transistor |
| EP3631862A1 (en) | 2017-05-25 | 2020-04-08 | Dynex Semiconductor Limited | A semiconductor device |
| US12317561B2 (en) | 2020-06-18 | 2025-05-27 | Dynex Semiconductor Limited | SIC MOSFET structures with asymmetric trench oxide |
| CN114788012A (en) | 2020-06-18 | 2022-07-22 | 丹尼克斯半导体有限公司 | IGBT with variation of trench oxide thickness regions |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5448083A (en) * | 1991-08-08 | 1995-09-05 | Kabushiki Kaisha Toshiba | Insulated-gate semiconductor device |
| EP1469524A3 (en) * | 1991-08-08 | 2005-07-06 | Kabushiki Kaisha Toshiba | Insulated trench gate bipolar transistor |
| US5640034A (en) * | 1992-05-18 | 1997-06-17 | Texas Instruments Incorporated | Top-drain trench based resurf DMOS transistor structure |
| US5326711A (en) * | 1993-01-04 | 1994-07-05 | Texas Instruments Incorporated | High performance high voltage vertical transistor and method of fabrication |
| JPH06217346A (en) * | 1993-01-13 | 1994-08-05 | Sony Corp | Signal transmission device and video system |
| US5637898A (en) * | 1995-12-22 | 1997-06-10 | North Carolina State University | Vertical field effect transistors having improved breakdown voltage capability and low on-state resistance |
| US5894149A (en) * | 1996-04-11 | 1999-04-13 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device having high breakdown voltage and method of manufacturing the same |
| GB2314206A (en) * | 1996-06-13 | 1997-12-17 | Plessey Semiconductors Ltd | Preventing voltage breakdown in semiconductor devices |
| DE19705276A1 (en) * | 1996-12-06 | 1998-08-20 | Semikron Elektronik Gmbh | IGBT with trench gate structure |
-
2000
- 2000-08-30 WO PCT/EP2000/008459 patent/WO2002019434A1/en not_active Ceased
- 2000-08-30 AU AU2000274149A patent/AU2000274149A1/en not_active Abandoned
- 2000-08-30 DE DE10085054T patent/DE10085054B4/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| WO2002019434A1 (en) | 2002-03-07 |
| DE10085054B4 (en) | 2005-12-15 |
| DE10085054D2 (en) | 2003-03-13 |
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