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AU2000274149A1 - Trench igbt - Google Patents

Trench igbt

Info

Publication number
AU2000274149A1
AU2000274149A1 AU2000274149A AU7414900A AU2000274149A1 AU 2000274149 A1 AU2000274149 A1 AU 2000274149A1 AU 2000274149 A AU2000274149 A AU 2000274149A AU 7414900 A AU7414900 A AU 7414900A AU 2000274149 A1 AU2000274149 A1 AU 2000274149A1
Authority
AU
Australia
Prior art keywords
trench igbt
igbt
trench
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2000274149A
Inventor
Frank Pfirsch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Publication of AU2000274149A1 publication Critical patent/AU2000274149A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/01Manufacture or treatment
    • H10D12/031Manufacture or treatment of IGBTs
    • H10D12/032Manufacture or treatment of IGBTs of vertical IGBTs
    • H10D12/038Manufacture or treatment of IGBTs of vertical IGBTs having a recessed gate, e.g. trench-gate IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411Insulated-gate bipolar transistors [IGBT]
    • H10D12/441Vertical IGBTs
    • H10D12/461Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions
    • H10D12/481Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions having gate structures on slanted surfaces, on vertical surfaces, or in grooves, e.g. trench gate IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/106Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]  having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/111Field plates
    • H10D64/117Recessed field plates, e.g. trench field plates or buried field plates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/514Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers
    • H10D64/516Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers the thicknesses being non-uniform
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/517Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers
    • H10D64/518Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers characterised by their lengths or sectional shapes
AU2000274149A 2000-08-30 2000-08-30 Trench igbt Abandoned AU2000274149A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2000/008459 WO2002019434A1 (en) 2000-08-30 2000-08-30 Trench igbt

Publications (1)

Publication Number Publication Date
AU2000274149A1 true AU2000274149A1 (en) 2002-03-13

Family

ID=8164080

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2000274149A Abandoned AU2000274149A1 (en) 2000-08-30 2000-08-30 Trench igbt

Country Status (3)

Country Link
AU (1) AU2000274149A1 (en)
DE (1) DE10085054B4 (en)
WO (1) WO2002019434A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10127885B4 (en) * 2001-06-08 2009-09-24 Infineon Technologies Ag Trench power semiconductor device
DE102006024504B4 (en) * 2006-05-23 2010-09-02 Infineon Technologies Austria Ag Power semiconductor device with vertical gate zone and method for producing the same
US9166027B2 (en) * 2013-09-30 2015-10-20 Infineon Technologies Ag IGBT with reduced feedback capacitance
US9337270B2 (en) 2013-12-19 2016-05-10 Infineon Technologies Ag Semiconductor device
US9337185B2 (en) 2013-12-19 2016-05-10 Infineon Technologies Ag Semiconductor devices
US9373710B2 (en) 2014-05-15 2016-06-21 Infineon Technologies Ag Insulated gate bipolar transistor
EP3631862A1 (en) 2017-05-25 2020-04-08 Dynex Semiconductor Limited A semiconductor device
US12317561B2 (en) 2020-06-18 2025-05-27 Dynex Semiconductor Limited SIC MOSFET structures with asymmetric trench oxide
CN114788012A (en) 2020-06-18 2022-07-22 丹尼克斯半导体有限公司 IGBT with variation of trench oxide thickness regions

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5448083A (en) * 1991-08-08 1995-09-05 Kabushiki Kaisha Toshiba Insulated-gate semiconductor device
EP1469524A3 (en) * 1991-08-08 2005-07-06 Kabushiki Kaisha Toshiba Insulated trench gate bipolar transistor
US5640034A (en) * 1992-05-18 1997-06-17 Texas Instruments Incorporated Top-drain trench based resurf DMOS transistor structure
US5326711A (en) * 1993-01-04 1994-07-05 Texas Instruments Incorporated High performance high voltage vertical transistor and method of fabrication
JPH06217346A (en) * 1993-01-13 1994-08-05 Sony Corp Signal transmission device and video system
US5637898A (en) * 1995-12-22 1997-06-10 North Carolina State University Vertical field effect transistors having improved breakdown voltage capability and low on-state resistance
US5894149A (en) * 1996-04-11 1999-04-13 Mitsubishi Denki Kabushiki Kaisha Semiconductor device having high breakdown voltage and method of manufacturing the same
GB2314206A (en) * 1996-06-13 1997-12-17 Plessey Semiconductors Ltd Preventing voltage breakdown in semiconductor devices
DE19705276A1 (en) * 1996-12-06 1998-08-20 Semikron Elektronik Gmbh IGBT with trench gate structure

Also Published As

Publication number Publication date
WO2002019434A1 (en) 2002-03-07
DE10085054B4 (en) 2005-12-15
DE10085054D2 (en) 2003-03-13

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