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ATE495533T1 - Kapazitive vorrichtung mit optimiertem kapazitivem volumen - Google Patents

Kapazitive vorrichtung mit optimiertem kapazitivem volumen

Info

Publication number
ATE495533T1
ATE495533T1 AT06777625T AT06777625T ATE495533T1 AT E495533 T1 ATE495533 T1 AT E495533T1 AT 06777625 T AT06777625 T AT 06777625T AT 06777625 T AT06777625 T AT 06777625T AT E495533 T1 ATE495533 T1 AT E495533T1
Authority
AT
Austria
Prior art keywords
capacitive
comb
finger
optimized
volume
Prior art date
Application number
AT06777625T
Other languages
English (en)
Inventor
Ghislain Despesse
Jean-Jacques Chaillout
Thomas Jager
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE495533T1 publication Critical patent/ATE495533T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
  • Networks Using Active Elements (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Ceramic Capacitors (AREA)
AT06777625T 2005-07-08 2006-07-06 Kapazitive vorrichtung mit optimiertem kapazitivem volumen ATE495533T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0552111A FR2888394A1 (fr) 2005-07-08 2005-07-08 Dispositif capacitif a volume capacitif optimise
PCT/EP2006/063980 WO2007006729A1 (fr) 2005-07-08 2006-07-06 Dispositif capacitif a volume capacitif optimise

Publications (1)

Publication Number Publication Date
ATE495533T1 true ATE495533T1 (de) 2011-01-15

Family

ID=36043461

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06777625T ATE495533T1 (de) 2005-07-08 2006-07-06 Kapazitive vorrichtung mit optimiertem kapazitivem volumen

Country Status (8)

Country Link
US (1) US7808766B2 (de)
EP (1) EP1902453B1 (de)
JP (1) JP5543105B2 (de)
AT (1) ATE495533T1 (de)
DE (1) DE602006019596D1 (de)
ES (1) ES2359732T3 (de)
FR (1) FR2888394A1 (de)
WO (1) WO2007006729A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2888394A1 (fr) 2005-07-08 2007-01-12 Commissariat Energie Atomique Dispositif capacitif a volume capacitif optimise
FR2889371A1 (fr) 2005-07-29 2007-02-02 Commissariat Energie Atomique Dispositif de conversion de l'energie mecanique en energie electrique par cycle de charges et de decharges electriques sur les peignes d'un condensateur
US8207569B2 (en) 2007-06-06 2012-06-26 Qualcomm, Incorporated Intertwined finger capacitors
FR2924856B1 (fr) * 2007-12-11 2012-02-10 Memscap Condensateur a capacite variable comprenant un peigne mobile et un peigne fixe interdigites, accelerometre et gyrometre comprenant un tel condensateur
FR2925792B1 (fr) * 2007-12-21 2012-12-07 Commissariat Energie Atomique Dispositif de recuperation d'energie a electrode liquide
FR2936351B1 (fr) * 2008-09-25 2010-10-15 Commissariat Energie Atomique Systeme a capacite variable a dielectrique souple.
WO2011042041A1 (de) * 2009-10-05 2011-04-14 Siemens Aktiengesellschaft Mikroelektromechanischer sensor mit differentialkondensatorprinzip
JP5597484B2 (ja) * 2010-08-27 2014-10-01 京セラ株式会社 圧力検出用部品および圧力検出用装置
FI127287B (en) * 2013-11-01 2018-03-15 Murata Manufacturing Co Microelectromechanical sensor device with improved quadrature compensation
TWI616656B (zh) 2014-12-01 2018-03-01 村田製作所股份有限公司 微機電系統感測器和半導體封裝
JP6354603B2 (ja) 2015-01-21 2018-07-11 株式会社デンソー 加速度センサおよび加速度センサの実装構造
JP6866624B2 (ja) * 2016-12-07 2021-04-28 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体
US10958191B2 (en) 2018-02-15 2021-03-23 The Charles Stark Draper Laboratory, Inc. Electrostatic motor
JP7176353B2 (ja) * 2018-10-29 2022-11-22 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
DE102022213678A1 (de) * 2022-12-15 2024-06-20 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil und Verfahren zum Erzeugen und/oder Verstärken eines Schallsignals

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US2266057A (en) 1933-02-13 1941-12-16 Massolle Joseph Electrostatic converter
GB1242488A (en) * 1968-10-02 1971-08-11 Suwa Seikosha Kk Improvements relating to miniature variable condensers
US4127804A (en) 1976-05-24 1978-11-28 The United States Of America As Represented By The Secretary Of The Air Force Electrostatic energy conversion system
FR2558263B1 (fr) 1984-01-12 1986-04-25 Commissariat Energie Atomique Accelerometre directif et son procede de fabrication par microlithographie
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
JPH06167400A (ja) * 1992-12-01 1994-06-14 Murata Mfg Co Ltd 力学量センサ
US5563343A (en) * 1993-05-26 1996-10-08 Cornell Research Foundation, Inc. Microelectromechanical lateral accelerometer
US5447068A (en) * 1994-03-31 1995-09-05 Ford Motor Company Digital capacitive accelerometer
US5901031A (en) * 1995-02-01 1999-05-04 Murata Manufacturing Co., Ltd. Variable capacitor
US5640133A (en) * 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
JPH09318649A (ja) * 1996-05-30 1997-12-12 Texas Instr Japan Ltd 複合センサ
JPH11214706A (ja) * 1998-01-27 1999-08-06 Toyota Motor Corp 半導体センサおよびその製造方法
US6133670A (en) * 1999-06-24 2000-10-17 Sandia Corporation Compact electrostatic comb actuator
JP3606164B2 (ja) * 2000-06-02 2005-01-05 株式会社村田製作所 静電容量型外力検出装置
WO2002019509A2 (en) * 2000-08-28 2002-03-07 Honeywell International Inc. Comb drive assembly having comb drive fingers with varying cross-sections and methods of making same
JP2002228678A (ja) * 2001-02-02 2002-08-14 Denso Corp 半導体力学量センサとその製造方法
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FR2858853B1 (fr) * 2003-08-13 2006-01-13 Sercel Rech Const Elect Accelerometre a vibrations parasites reduites par forme des electrodes amelioree
DE10357870B4 (de) * 2003-12-11 2013-02-07 Robert Bosch Gmbh Sensor mit symmetrischer Begrenzung eines Signals
FR2888394A1 (fr) 2005-07-08 2007-01-12 Commissariat Energie Atomique Dispositif capacitif a volume capacitif optimise
FR2889371A1 (fr) 2005-07-29 2007-02-02 Commissariat Energie Atomique Dispositif de conversion de l'energie mecanique en energie electrique par cycle de charges et de decharges electriques sur les peignes d'un condensateur
FR2896635A1 (fr) 2006-01-23 2007-07-27 Commissariat Energie Atomique Procede et dispositif de conversion d'energie mecanique en energie electrique
FR2897486B1 (fr) 2006-02-13 2011-07-22 Commissariat Energie Atomique Systeme de conversion d'energie a distance d'entrefer variable et procede de recuperation d'energie
US8165323B2 (en) * 2006-11-28 2012-04-24 Zhou Tiansheng Monolithic capacitive transducer

Also Published As

Publication number Publication date
US20080192406A1 (en) 2008-08-14
FR2888394A1 (fr) 2007-01-12
US7808766B2 (en) 2010-10-05
DE602006019596D1 (de) 2011-02-24
JP2009500618A (ja) 2009-01-08
ES2359732T3 (es) 2011-05-26
EP1902453A1 (de) 2008-03-26
JP5543105B2 (ja) 2014-07-09
EP1902453B1 (de) 2011-01-12
WO2007006729A1 (fr) 2007-01-18

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