[go: up one dir, main page]

ATE467238T1 - Verfahren zur herstellung eines piezoelektrischen aktors - Google Patents

Verfahren zur herstellung eines piezoelektrischen aktors

Info

Publication number
ATE467238T1
ATE467238T1 AT06008839T AT06008839T ATE467238T1 AT E467238 T1 ATE467238 T1 AT E467238T1 AT 06008839 T AT06008839 T AT 06008839T AT 06008839 T AT06008839 T AT 06008839T AT E467238 T1 ATE467238 T1 AT E467238T1
Authority
AT
Austria
Prior art keywords
drive sections
plate
shaped member
piezoelectric actuator
piezoelectric
Prior art date
Application number
AT06008839T
Other languages
English (en)
Inventor
Hiroto Sugahara
Original Assignee
Brother Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Ind Ltd filed Critical Brother Ind Ltd
Application granted granted Critical
Publication of ATE467238T1 publication Critical patent/ATE467238T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Fuel-Injection Apparatus (AREA)
AT06008839T 2005-04-28 2006-04-27 Verfahren zur herstellung eines piezoelektrischen aktors ATE467238T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005131574 2005-04-28

Publications (1)

Publication Number Publication Date
ATE467238T1 true ATE467238T1 (de) 2010-05-15

Family

ID=36659707

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06008839T ATE467238T1 (de) 2005-04-28 2006-04-27 Verfahren zur herstellung eines piezoelektrischen aktors

Country Status (4)

Country Link
US (1) US7793394B2 (de)
EP (1) EP1717874B1 (de)
AT (1) ATE467238T1 (de)
DE (1) DE602006014051D1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6891619B2 (ja) 2017-04-27 2021-06-18 セイコーエプソン株式会社 振動アクチュエーターの制御装置、振動アクチュエーターの制御方法、ロボット、電子部品搬送装置、プリンターおよびプロジェクター

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US66177A (en) * 1867-06-25 secor
JPH0688680B2 (ja) * 1989-03-20 1994-11-09 輝 林 記録媒体搬送装置及びこの装置に用いられる圧電素子付枠体
EP0408306B1 (de) * 1989-07-11 1996-05-01 Ngk Insulators, Ltd. Einen piezoelektrischen/elektrostriktiven Film enthaltende piezoelektrischer/elektrostriktiver Antrieb
US5265315A (en) * 1990-11-20 1993-11-30 Spectra, Inc. Method of making a thin-film transducer ink jet head
JPH05105291A (ja) 1991-10-18 1993-04-27 Ricoh Co Ltd 搬送装置
US5489930A (en) * 1993-04-30 1996-02-06 Tektronix, Inc. Ink jet head with internal filter
GB9400036D0 (en) * 1994-01-04 1994-03-02 Xaar Ltd Manufacture of ink jet printheads
JP3503386B2 (ja) * 1996-01-26 2004-03-02 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法
JP3521708B2 (ja) * 1997-09-30 2004-04-19 セイコーエプソン株式会社 インクジェット式記録ヘッドおよびその製造方法
ES2169939T3 (es) * 1999-11-25 2002-07-16 Fiat Ricerche Accionador piezoelectrico en forma de gancho.
EP1104034B1 (de) * 1999-11-25 2002-07-24 C.R.F. Società Consortile per Azioni Dachförmiger piezoelektrischer Antrieb
US6631980B2 (en) * 2000-01-19 2003-10-14 Seiko Epson Corporation Liquid jetting head
JP2003111456A (ja) 2001-09-28 2003-04-11 Rikogaku Shinkokai 圧電アクチュエータ及び能動点字装置並びにワーク支持装置
JP3986793B2 (ja) 2001-10-19 2007-10-03 アルプス電気株式会社 記録紙搬送用振動子およびこれを備えた記録紙搬送機構
GB2381376B (en) * 2001-10-25 2005-04-20 1 Ltd Micromotor
JP3767470B2 (ja) * 2001-11-30 2006-04-19 ブラザー工業株式会社 インクジェットヘッド及びその製造方法
US7033001B2 (en) * 2001-12-18 2006-04-25 Matsushita Electric Industrial Co., Ltd. Piezoelectric element, ink jet head, angular velocity sensor, manufacturing method thereof, and ink jet type recording apparatus
GB0201458D0 (en) * 2002-01-23 2002-03-13 1 Ltd Curved electro-active actuators
US6895669B2 (en) * 2002-02-08 2005-05-24 Konica Corporation Method of manufacturing an ink jet head
GB0203897D0 (en) * 2002-02-19 2002-04-03 Pbt Ip Ltd Low cost actuator with 2 dimensional motion
CN1288631C (zh) * 2002-06-05 2006-12-06 新科实业有限公司 防止压电微致动器中的操作和制造缺陷的系统和方法
US6993840B2 (en) * 2002-07-18 2006-02-07 Canon Kabushiki Kaisha Manufacturing method of liquid jet head
JP2004278911A (ja) 2003-03-17 2004-10-07 Sanyo Electric Co Ltd 調理器
US20050046312A1 (en) * 2003-09-01 2005-03-03 Fuji Photo Film Co., Ltd. Laminated structure, piezoelectric actuator and method of manufacturing the same
US7179718B2 (en) * 2003-10-17 2007-02-20 Fuji Photo Film Co., Ltd. Structure and method of manufacturing the same
JP4717344B2 (ja) * 2003-12-10 2011-07-06 キヤノン株式会社 誘電体薄膜素子、圧電アクチュエータおよび液体吐出ヘッド
DE602005014718D1 (de) * 2004-09-27 2009-07-16 Brother Ind Ltd Aktor und Transportvorrichtung, bewegliches Gerät sowie Vorrichtung ausgestattet mit dem Aktor
JP4344942B2 (ja) * 2004-12-28 2009-10-14 セイコーエプソン株式会社 インクジェット式記録ヘッドおよび圧電アクチュエーター
US7456548B2 (en) * 2006-05-09 2008-11-25 Canon Kabushiki Kaisha Piezoelectric element, piezoelectric actuator, and ink jet recording head

Also Published As

Publication number Publication date
EP1717874A2 (de) 2006-11-02
US20060242806A1 (en) 2006-11-02
EP1717874B1 (de) 2010-05-05
US7793394B2 (en) 2010-09-14
DE602006014051D1 (de) 2010-06-17
EP1717874A3 (de) 2007-10-24

Similar Documents

Publication Publication Date Title
ATE490037T1 (de) Verfahren zur herstellung einer mikronadel oder eines mikroimplantats
ATE486844T1 (de) Verfahren zur herstellung von adipodinitril durch hydrocyanierung von 1,3-butadien
DE602008005556D1 (de) Verfahren zur Herstellung beschichteter Paneele und beschichtetes Paneel
DE602005022661D1 (de) Herstellungsverfahren und Vorrichtung zur Herstellung eines Nanofiltermediums
ATE448033T1 (de) Verfahren zur herstellung von wabenstrukturkörpern
DE602006010307D1 (de) Verfahren zur Herstellung eines Stempel für Mikro/Nano Imprint-Lithographie
EP1588989A3 (de) Verfahren zur Herstellung eines Masters, Master und Verfahren zur Herstellung von optischen Elementen sowie optisches Element
FR2928293B1 (fr) Procede de fabrication d'un produit composite multi axial plan et produit obtenu par ce procede
EP1925461A3 (de) Verfahren und Vorrichtung zur Herstellung einer großen Oberflächentafel, große Oberflächentafel und Einzeltafelsatz
ATE528786T1 (de) Substrat zur massenspektrometrie und herstellungsverfahren für das substrat zur massenspektrometrie
DE502005004156D1 (de) Verfahren zur Herstellung eines Mehrlagenrohres
ATE489015T1 (de) Verfahren zur herstellung von verschlüssen
ATE530332T1 (de) Verfahren zur herstellung von verbundmaterial durch aufwachsen einer verstärkungsschicht und verwandte vorrichtung
EP1887612A4 (de) Prozess zur herstellung eines gebondeten wafers
DE102004035617B8 (de) Verfahren zur Herstellung von Substraten für Fotomaskenrohlinge
EP2036117A4 (de) Verfahren zur herstellung von silicium-nanodrähten unter verwendung eines silicium-nanopunkt-dünnfilms
ATE409565T1 (de) Verfahren zur herstellung eines gegenstands aus verbundwerkstoff
EP1852877A4 (de) Supraleitendes dünnfilmmaterial, supraleitender drahtstab und verfahren zur herstellung eines solchen supraleitenden dünnfilmmaterials und supraleitenden drahtstabs
DE602006011362D1 (de) Verfahren zur herstellung eines (110) silizium-wafers
ATE548200T1 (de) Dokument sowie verfahren zur herstellung eines dokumentes
ATE467238T1 (de) Verfahren zur herstellung eines piezoelektrischen aktors
ATE555920T1 (de) Verfahren zur herstellung von fliesen oder folien aus mosaikteilen und dadurch hergestellte fliesen
WO2007096654A3 (en) Methods for production of dioic acids
DE602006011999D1 (de) Verfahren zur Herstellung eines Strukturbauteils mit einer nanometrische oder submikronische Korngefüge
EP1940925A4 (de) Verfahren zur herstellung von thermisch leitfähigem flächengebilde und danach hergestelltes thermisch leitfähiges flächengebilde

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties