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ATE339704T1 - Schwenkbarer räumlicher lichtmodulator mit aufgesetztem scharnier und schwenbarem element - Google Patents

Schwenkbarer räumlicher lichtmodulator mit aufgesetztem scharnier und schwenbarem element

Info

Publication number
ATE339704T1
ATE339704T1 AT01905068T AT01905068T ATE339704T1 AT E339704 T1 ATE339704 T1 AT E339704T1 AT 01905068 T AT01905068 T AT 01905068T AT 01905068 T AT01905068 T AT 01905068T AT E339704 T1 ATE339704 T1 AT E339704T1
Authority
AT
Austria
Prior art keywords
hinge
substrate
deflectable
deflectable element
swiveling
Prior art date
Application number
AT01905068T
Other languages
English (en)
Inventor
Andrew G Huibers
Peter J Heureux
Original Assignee
Reflectivity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reflectivity Inc filed Critical Reflectivity Inc
Application granted granted Critical
Publication of ATE339704T1 publication Critical patent/ATE339704T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
AT01905068T 2000-01-28 2001-01-25 Schwenkbarer räumlicher lichtmodulator mit aufgesetztem scharnier und schwenbarem element ATE339704T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17890300P 2000-01-28 2000-01-28
US09/631,536 US6529310B1 (en) 1998-09-24 2000-08-03 Deflectable spatial light modulator having superimposed hinge and deflectable element

Publications (1)

Publication Number Publication Date
ATE339704T1 true ATE339704T1 (de) 2006-10-15

Family

ID=26874792

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01905068T ATE339704T1 (de) 2000-01-28 2001-01-25 Schwenkbarer räumlicher lichtmodulator mit aufgesetztem scharnier und schwenbarem element

Country Status (7)

Country Link
US (1) US6529310B1 (de)
EP (1) EP1230574B1 (de)
AT (1) ATE339704T1 (de)
AU (1) AU2001232986A1 (de)
DE (1) DE60123008T2 (de)
TW (1) TW588398B (de)
WO (1) WO2001055769A1 (de)

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Also Published As

Publication number Publication date
EP1230574A1 (de) 2002-08-14
WO2001055769A1 (en) 2001-08-02
AU2001232986A1 (en) 2001-08-07
TW588398B (en) 2004-05-21
DE60123008D1 (de) 2006-10-26
EP1230574A4 (de) 2005-05-25
US6529310B1 (en) 2003-03-04
DE60123008T2 (de) 2007-05-31
EP1230574B1 (de) 2006-09-13

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