Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K99/00—Subject matter not provided for in other groups of this subclass
  • F16K99/0001—Microvalves
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
  • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
  • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
  • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
  • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
  • F15B13/0401—Valve members; Fluid interconnections therefor
  • F15B13/0402—Valve members; Fluid interconnections therefor for linearly sliding valves, e.g. spool valves
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
  • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
  • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K99/00—Subject matter not provided for in other groups of this subclass
  • F16K99/0001—Microvalves
  • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
  • F16K99/0011—Gate valves or sliding valves
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K99/00—Subject matter not provided for in other groups of this subclass
  • F16K99/0001—Microvalves
  • F16K99/0034—Operating means specially adapted for microvalves
  • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
  • F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
• • G—PHYSICS
  • G05—CONTROLLING; REGULATING
  • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
  • G05D16/00—Control of fluid pressure
  • G05D16/04—Control of fluid pressure without auxiliary power
  • G05D16/10—Control of fluid pressure without auxiliary power the sensing element being a piston or plunger
• • G—PHYSICS
  • G05—CONTROLLING; REGULATING
  • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
  • G05D7/00—Control of flow
  • G05D7/06—Control of flow characterised by the use of electric means
  • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
  • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
  • G05D7/0694—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means or flow sources of very small size, e.g. microfluidics
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K99/00—Subject matter not provided for in other groups of this subclass
  • F16K2099/0073—Fabrication methods specifically adapted for microvalves
  • F16K2099/0076—Fabrication methods specifically adapted for microvalves using electrical discharge machining [EDM], milling or drilling
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K99/00—Subject matter not provided for in other groups of this subclass
  • F16K99/0001—Microvalves
  • F16K99/0034—Operating means specially adapted for microvalves

Landscapes

• Engineering & Computer Science (AREA)
• General Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Mechanical Engineering (AREA)
• Chemical & Material Sciences (AREA)
• Dispersion Chemistry (AREA)
• Fluid Mechanics (AREA)
• General Physics & Mathematics (AREA)
• Automation & Control Theory (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Theoretical Computer Science (AREA)
• Fluid-Driven Valves (AREA)
• Control Of Fluid Pressure (AREA)
• Fluid-Pressure Circuits (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=25442021

Family Applications (1)

Country Status (4)

Families Citing this family (5)

Family Cites Families (4)

• 2002
  • 2002-07-31 AT AT02763398T patent/ATE338298T1/de not_active IP Right Cessation
  • 2002-07-31 EP EP02763398A patent/EP1415210B1/de not_active Expired - Lifetime
  • 2002-07-31 WO PCT/US2002/024255 patent/WO2003012566A1/en not_active Ceased
  • 2002-07-31 DE DE60214394T patent/DE60214394T2/de not_active Expired - Lifetime

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