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ATE374264T1 - Verfahren und vorrichtung zur innenbeschichtung von vorgefertigter rohrleitungen an ort und stelle - Google Patents

Verfahren und vorrichtung zur innenbeschichtung von vorgefertigter rohrleitungen an ort und stelle

Info

Publication number
ATE374264T1
ATE374264T1 AT05014868T AT05014868T ATE374264T1 AT E374264 T1 ATE374264 T1 AT E374264T1 AT 05014868 T AT05014868 T AT 05014868T AT 05014868 T AT05014868 T AT 05014868T AT E374264 T1 ATE374264 T1 AT E374264T1
Authority
AT
Austria
Prior art keywords
workpiece
coating
opening
sputter
argon gas
Prior art date
Application number
AT05014868T
Other languages
German (de)
English (en)
Inventor
William John Boardman
Andrew William Tudhope
Raul Donate Mercado
Original Assignee
Sub One Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sub One Technology Inc filed Critical Sub One Technology Inc
Application granted granted Critical
Publication of ATE374264T1 publication Critical patent/ATE374264T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using DC or AC discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Cleaning In General (AREA)
  • Pipeline Systems (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
AT05014868T 2004-07-15 2005-07-08 Verfahren und vorrichtung zur innenbeschichtung von vorgefertigter rohrleitungen an ort und stelle ATE374264T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/891,983 US7300684B2 (en) 2004-07-15 2004-07-15 Method and system for coating internal surfaces of prefabricated process piping in the field

Publications (1)

Publication Number Publication Date
ATE374264T1 true ATE374264T1 (de) 2007-10-15

Family

ID=35229645

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05014868T ATE374264T1 (de) 2004-07-15 2005-07-08 Verfahren und vorrichtung zur innenbeschichtung von vorgefertigter rohrleitungen an ort und stelle

Country Status (10)

Country Link
US (1) US7300684B2 (fr)
EP (1) EP1619265B1 (fr)
JP (1) JP5043657B2 (fr)
AT (1) ATE374264T1 (fr)
CA (1) CA2573485C (fr)
DE (1) DE602005002593T2 (fr)
ES (1) ES2292015T3 (fr)
PL (1) PL1619265T3 (fr)
PT (1) PT1619265E (fr)
WO (1) WO2006019565A2 (fr)

Families Citing this family (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004027535A1 (de) * 2004-06-04 2005-12-22 Robert Bosch Gmbh Verfahren zum Betreiben einer Brennkraftmaschine, Brennkraftmaschine und Steuergerät für eine Brennkraftmaschine
US7541069B2 (en) * 2005-03-07 2009-06-02 Sub-One Technology, Inc. Method and system for coating internal surfaces using reverse-flow cycling
US7608151B2 (en) * 2005-03-07 2009-10-27 Sub-One Technology, Inc. Method and system for coating sections of internal surfaces
EP1878039B1 (fr) * 2005-05-04 2009-03-04 Oerlikon Trading AG, Trübbach Amplificateur de plasma pour une installation de traitement au plasma
EP1826293A1 (fr) * 2006-02-09 2007-08-29 Isoflux, Inc. Formation de surfaces nanométriques pour la fixation des matériaux biologiques
US20080299337A1 (en) * 2006-02-09 2008-12-04 Isoflux, Inc. Method for the formation of surfaces on the inside of medical devices
US20110107473A1 (en) * 2006-03-15 2011-05-05 Wisconsin Alumni Research Foundation Diamond-like carbon coated nanoprobes
US7626135B2 (en) 2006-05-10 2009-12-01 Sub-One Technology, Inc. Electrode systems and methods of using electrodes
US7838793B2 (en) * 2006-07-21 2010-11-23 Sub-One Technology, Inc. System and method for treating surfaces of components
US7851367B2 (en) * 2006-08-31 2010-12-14 Kabushiki Kaisha Toshiba Method for plasma processing a substrate
KR20090079934A (ko) * 2006-10-12 2009-07-22 씨-쓰리 인터내셔널, 엘엘씨 유체 가공 시스템 및 그의 성분을 위한 예방적 표면 처리를 제공하기 위한 방법
US8029875B2 (en) * 2007-05-23 2011-10-04 Southwest Research Institute Plasma immersion ion processing for coating of hollow substrates
US8105660B2 (en) * 2007-06-28 2012-01-31 Andrew W Tudhope Method for producing diamond-like carbon coatings using PECVD and diamondoid precursors on internal surfaces of a hollow component
US7947604B2 (en) * 2008-01-25 2011-05-24 Chartered Semiconductor Manufacturing, Ltd. Method for corrosion prevention during planarization
BRPI0822520B1 (pt) * 2008-03-12 2019-05-21 Alytus Corporation S.A. Sistema de plasma
JP5073545B2 (ja) * 2008-03-26 2012-11-14 東京エレクトロン株式会社 プラズマ処理装置、プラズマ処理方法
US8623301B1 (en) 2008-04-09 2014-01-07 C3 International, Llc Solid oxide fuel cells, electrolyzers, and sensors, and methods of making and using the same
WO2009140417A1 (fr) * 2008-05-13 2009-11-19 Sub-One Technology, Inc. Procédé de revêtement des surfaces intérieure et extérieure de tuyaux pour applications thermiques, solaires et autres applications.
US9175381B2 (en) * 2008-07-09 2015-11-03 Southwest Research Institute Processing tubular surfaces using double glow discharge
US8286715B2 (en) * 2008-08-20 2012-10-16 Exxonmobil Research And Engineering Company Coated sleeved oil and gas well production devices
US8220563B2 (en) * 2008-08-20 2012-07-17 Exxonmobil Research And Engineering Company Ultra-low friction coatings for drill stem assemblies
US8261841B2 (en) * 2009-02-17 2012-09-11 Exxonmobil Research And Engineering Company Coated oil and gas well production devices
GB2476887B (en) * 2008-09-24 2013-03-06 Smith International Drill bit incorporating hardmetal composite material
JP4755262B2 (ja) * 2009-01-28 2011-08-24 株式会社神戸製鋼所 ダイヤモンドライクカーボン膜の製造方法
EP2398933B1 (fr) 2009-02-18 2013-08-07 Council of Scientific & Industrial Research Procédé pour déposer une couche de protection en carbone diamant à la surface intérieure d'un objet façonné
DK2251454T3 (da) 2009-05-13 2014-10-13 Sio2 Medical Products Inc Coating og inspektion af beholder
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
JP5741891B2 (ja) * 2009-06-19 2015-07-01 株式会社ジェイテクト Ｄｌｃ膜形成方法
GB2471271A (en) * 2009-06-19 2010-12-29 Univ Dublin City Method of coating the channels of a microfluidic device
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US8715789B2 (en) 2009-12-18 2014-05-06 Sub-One Technology, Inc. Chemical vapor deposition for an interior of a hollow article with high aspect ratio
JP2011162857A (ja) * 2010-02-10 2011-08-25 Nagoya Univ コーティング前処理方法、ダイヤモンド被膜のコーティング方法、および脱膜処理方法
EP2534723A4 (fr) 2010-02-10 2015-08-05 Fcet Inc Électrolytes fonctionnant à basse température pour piles à oxyde solide présentant une conductivité ionique élevée
US8852685B2 (en) 2010-04-23 2014-10-07 Lam Research Corporation Coating method for gas delivery system
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
BRPI1100176A2 (pt) * 2011-02-10 2013-04-24 Mahle Metal Leve Sa componente de motor
US8753725B2 (en) 2011-03-11 2014-06-17 Southwest Research Institute Method for plasma immersion ion processing and depositing coatings in hollow substrates using a heated center electrode
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
AU2012318242A1 (en) 2011-11-11 2013-05-30 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US9297068B2 (en) 2012-03-07 2016-03-29 The Boeing Company Wear parts having coating run-out and methods of producing same
CN102586753A (zh) * 2012-03-21 2012-07-18 中微半导体设备(上海)有限公司 Mocvd设备的清洁方法
EP2846755A1 (fr) 2012-05-09 2015-03-18 SiO2 Medical Products, Inc. Enrobage protecteur en saccharide pour conditionnement pharmaceutique
US20150297800A1 (en) 2012-07-03 2015-10-22 Sio2 Medical Products, Inc. SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS
CA2890066C (fr) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Procedes d'inspection de revetement
WO2014078666A1 (fr) 2012-11-16 2014-05-22 Sio2 Medical Products, Inc. Procédé et appareil pour détecter des caractéristiques d'intégrité de revêtement de barrière rapide
US9121540B2 (en) 2012-11-21 2015-09-01 Southwest Research Institute Superhydrophobic compositions and coating process for the internal surface of tubular structures
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
EP2925903B1 (fr) 2012-11-30 2022-04-13 Si02 Medical Products, Inc. Contrôle de l'uniformité de dépôt chimique en phase vapeur activé par plasma (pecvd) sur des seringues médicales, des cartouches et analogues
EP2961858B1 (fr) 2013-03-01 2022-09-07 Si02 Medical Products, Inc. Seringue revetu.
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
CN105392916B (zh) 2013-03-11 2019-03-08 Sio2医药产品公司 涂布包装材料
US9765726B2 (en) 2013-03-13 2017-09-19 Federal-Mogul Cylinder liners with adhesive metallic layers and methods of forming the cylinder liners
EP2971227B1 (fr) 2013-03-15 2017-11-15 Si02 Medical Products, Inc. Procede de revetement.
WO2014157250A1 (fr) * 2013-03-25 2014-10-02 国立大学法人名古屋大学 Dispositif de dépôt et procédé de dépôt
BR112015024628B1 (pt) * 2013-05-31 2021-10-26 Honda Motor Co., Ltd. Método e dispositivo de limpeza de película de revestimento de carbono
US20160115589A1 (en) * 2013-05-31 2016-04-28 Honda Motor Co., Ltd. Carbon-coated member and production method therefor
US9905871B2 (en) 2013-07-15 2018-02-27 Fcet, Inc. Low temperature solid oxide cells
US20150024152A1 (en) 2013-07-19 2015-01-22 Agilent Technologies, Inc. Metal components with inert vapor phase coating on internal surfaces
US10767259B2 (en) 2013-07-19 2020-09-08 Agilent Technologies, Inc. Components with an atomic layer deposition coating and methods of producing the same
JP6277398B2 (ja) * 2013-08-27 2018-02-14 株式会社ユーテック プラズマｃｖｄ装置及び配管内の成膜方法
WO2015132443A1 (fr) * 2014-03-03 2015-09-11 Picosun Oy Protection de l'intérieur d'un récipient à gaz avec un revêtement formé par dépôt de couches atomiques (ald)
EP3693493A1 (fr) 2014-03-28 2020-08-12 SiO2 Medical Products, Inc. Revêtements antistatiques pour récipients en plastique
US9382623B2 (en) * 2014-06-13 2016-07-05 Nordson Corporation Apparatus and method for intraluminal polymer deposition
CN110987283A (zh) * 2014-06-30 2020-04-10 罗斯蒙特公司 具有带类金刚石碳涂层的密封件的过程压力变送器
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
JP2020515723A (ja) * 2017-03-31 2020-05-28 デュララ テクノロジーズ、エルエルシー 表面をコーティングするシステム及び方法
US11339464B2 (en) 2017-03-31 2022-05-24 Agm Container Controls, Inc. Plasma nitriding with PECVD coatings using hollow cathode ion immersion technology
CN108914088B (zh) * 2018-09-29 2023-07-28 北京科技大学 一种制备高质量金刚石的气体循环系统及其使用方法
EP3874497A4 (fr) * 2018-11-01 2022-07-20 Agm Container Controls, Inc. Nitruration par plasma avec des revêtements pecvd à l'aide d'une technologie d'immersion d'ions à cathode creuse
US11371137B2 (en) 2019-03-15 2022-06-28 Halliburton Energy Services, Inc. Depositing coatings on and within housings, apparatus, or tools
US11371145B2 (en) 2019-03-15 2022-06-28 Halliburton Energy Services, Inc. Depositing coatings on and within a housing, apparatus, or tool using a coating system positioned therein
US11788187B2 (en) 2020-08-27 2023-10-17 Halliburton Energy Services, Inc. Depositing coatings on and within housings, apparatus, or tools utilizing counter current flow of reactants
US11788189B2 (en) 2020-08-27 2023-10-17 Halliburton Energy Services, Inc. Depositing coatings on and within housings, apparatus, or tools utilizing pressurized cells
CN113529048A (zh) * 2021-07-20 2021-10-22 中国科学院兰州化学物理研究所 一种活塞环表面高结合力超厚dlc涂层的超高速沉积方法
KR102384439B1 (ko) * 2022-02-15 2022-04-08 (주)해피글로벌솔루션 온도 유지를 위한 히터 삽입 및 내벽 코팅을 위한 개방형 rps 블록 장치
CN118497699A (zh) * 2024-05-30 2024-08-16 广东华升纳米科技股份有限公司 一种利用中频电源在管道内壁制备抗腐蚀、抗磨损的致密类金刚石涂层的方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4407712A (en) 1982-06-01 1983-10-04 The United States Of America As Represented By The Secretary Of The Army Hollow cathode discharge source of metal vapor
DE3222189A1 (de) * 1982-06-12 1984-01-26 Hans Dr.Rer.Nat. 5370 Kall Beerwald Plasmaverfahren zur innenbeschichtung von rohren mit dielektrischem material
DE3528275A1 (de) 1985-08-07 1987-02-19 Philips Patentverwaltung Verfahren und vorrichtung zum innenbeschichten von rohren
JPS6326373A (ja) 1986-07-18 1988-02-03 Kobe Steel Ltd プラズマｃｖｄによる管内面のコ−テイング方法
DE3781551T2 (de) 1987-06-29 1993-04-08 Hauzer Holding Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden.
JP2610469B2 (ja) * 1988-02-26 1997-05-14 株式会社 半導体エネルギー研究所 炭素または炭素を主成分とする被膜を形成する方法
DE4242324A1 (de) * 1992-04-30 1994-06-16 Max Planck Gesellschaft Verfahren und Einrichtung zur Behandlung der Innenwand eines Hohlkörpers mittels eines Mikrowellenplasmas
DE4240016A1 (de) * 1992-11-27 1994-06-01 Igenwert Gmbh Verfahren und Vorrichtung zur Behandlung und/oder Beschichtung von Oberflächen durch ein Hochdruckplasma
JP3119172B2 (ja) * 1995-09-13 2000-12-18 日新電機株式会社 プラズマｃｖｄ法及び装置
US5712000A (en) * 1995-10-12 1998-01-27 Hughes Aircraft Company Large-scale, low pressure plasma-ion deposition of diamondlike carbon films
JPH09195036A (ja) * 1996-01-22 1997-07-29 Ulvac Japan Ltd 蒸着装置、及び薄膜製造方法
DE19726443C2 (de) 1997-06-23 2003-11-20 Fraunhofer Ges Forschung Verfahren zur Oberflächenvergütung innerer Oberflächen von Hohlkörpern und Vorrichtung zur Durchführung des Verfahrens
US5879763A (en) * 1997-09-03 1999-03-09 Citizen Watch Co., Ltd. Method of forming hard carbon film over inner surface of cylindrical member
US6265033B1 (en) 1998-09-11 2001-07-24 Donald Bennett Hilliard Method for optically coupled vapor deposition
JP2001200369A (ja) 2000-01-21 2001-07-24 Kobe Steel Ltd プラズマｃｖｄ装置
CA2305938C (fr) 2000-04-10 2007-07-03 Vladimir I. Gorokhovsky Methode et appareillage de depot d'arc cathodique filtre
WO2002097855A1 (fr) * 2001-05-29 2002-12-05 Tokyo Electron Limited Dispositif et procede de traitement au plasma

Also Published As

Publication number Publication date
PT1619265E (pt) 2007-12-04
JP2008506840A (ja) 2008-03-06
ES2292015T3 (es) 2008-03-01
WO2006019565A2 (fr) 2006-02-23
WO2006019565A3 (fr) 2007-04-26
CA2573485A1 (fr) 2006-02-23
US7300684B2 (en) 2007-11-27
EP1619265B1 (fr) 2007-09-26
EP1619265A1 (fr) 2006-01-25
CA2573485C (fr) 2010-11-02
DE602005002593T2 (de) 2008-06-26
PL1619265T3 (pl) 2008-01-31
WO2006019565B1 (fr) 2007-07-12
DE602005002593D1 (de) 2007-11-08
JP5043657B2 (ja) 2012-10-10
US20060011468A1 (en) 2006-01-19

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