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ATE365372T1 - Mikromechanischer schalter, herstellungsverfahren und anwendung des mikromechanischen schalters - Google Patents

Mikromechanischer schalter, herstellungsverfahren und anwendung des mikromechanischen schalters

Info

Publication number
ATE365372T1
ATE365372T1 AT03719974T AT03719974T ATE365372T1 AT E365372 T1 ATE365372 T1 AT E365372T1 AT 03719974 T AT03719974 T AT 03719974T AT 03719974 T AT03719974 T AT 03719974T AT E365372 T1 ATE365372 T1 AT E365372T1
Authority
AT
Austria
Prior art keywords
dielectric layer
membrane
micromechanical switch
switch
application
Prior art date
Application number
AT03719974T
Other languages
English (en)
Inventor
Brandon Pillans
David Forehand
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Application granted granted Critical
Publication of ATE365372T1 publication Critical patent/ATE365372T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0008—Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/014—Switches characterised by the shape having a cantilever fixed on one side connected to one or more dimples
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/06—Contacts characterised by the shape or structure of the contact-making surface, e.g. grooved
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0018—Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Push-Button Switches (AREA)
  • Micromachines (AREA)
  • Manufacture Of Switches (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
AT03719974T 2002-05-07 2003-04-30 Mikromechanischer schalter, herstellungsverfahren und anwendung des mikromechanischen schalters ATE365372T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/140,658 US6791441B2 (en) 2002-05-07 2002-05-07 Micro-electro-mechanical switch, and methods of making and using it

Publications (1)

Publication Number Publication Date
ATE365372T1 true ATE365372T1 (de) 2007-07-15

Family

ID=29418391

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03719974T ATE365372T1 (de) 2002-05-07 2003-04-30 Mikromechanischer schalter, herstellungsverfahren und anwendung des mikromechanischen schalters

Country Status (6)

Country Link
US (2) US6791441B2 (de)
EP (1) EP1502273B1 (de)
AT (1) ATE365372T1 (de)
AU (1) AU2003223770A1 (de)
DE (1) DE60314510T2 (de)
WO (1) WO2003096368A1 (de)

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US6791441B2 (en) 2004-09-14
US20040124073A1 (en) 2004-07-01
DE60314510T2 (de) 2008-02-21
WO2003096368A1 (en) 2003-11-20
AU2003223770A1 (en) 2003-11-11
EP1502273B1 (de) 2007-06-20
EP1502273A1 (de) 2005-02-02
US7002441B2 (en) 2006-02-21
US20050012577A1 (en) 2005-01-20
DE60314510D1 (de) 2007-08-02

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