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AR096157A1 - Dispositivo de sujeción multifacético para el tratamiento de superficies de sustratos en forma de varilla - Google Patents

Dispositivo de sujeción multifacético para el tratamiento de superficies de sustratos en forma de varilla

Info

Publication number
AR096157A1
AR096157A1 ARP140101788A ARP140101788A AR096157A1 AR 096157 A1 AR096157 A1 AR 096157A1 AR P140101788 A ARP140101788 A AR P140101788A AR P140101788 A ARP140101788 A AR P140101788A AR 096157 A1 AR096157 A1 AR 096157A1
Authority
AR
Argentina
Prior art keywords
substrate body
opening
area
multiphacetic
varilla
Prior art date
Application number
ARP140101788A
Other languages
English (en)
Inventor
Max Siebert
Remo Vogel
Karl Wolfgang Jotz
Original Assignee
Oerlikon Surface Solutions Ag Trubbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag Trubbach filed Critical Oerlikon Surface Solutions Ag Trubbach
Publication of AR096157A1 publication Critical patent/AR096157A1/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32403—Treating multiple sides of workpieces, e.g. 3D workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemically Coating (AREA)
  • Cleaning In General (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)

Abstract

Dispositivo de sujeción para la fijación de al menos un cuerpo de sustrato en forma de varilla (10) con sección transversal variable a lo largo del cuerpo de sustrato y un área Bq1 del cuerpo de sustrato con una superficie a tratar. El dispositivo de sujeción comprende al menos una pared perforada como pared frontal (3) con al menos una abertura (5), un elemento de apoyo (9) y un elemento de detención (11), donde el elemento de apoyo (9) se ha construido y/o fijado en la abertura (5), preferentemente se ha soldado de manera tal que el cuerpo de sustrato puede disponerse en posición oblicua con un ángulo de inclinación a respecto de la horizontal en sentido longitudinal, al menos en parte dentro del elemento de apoyo (9), y el elemento de detención (11) se ha construido y/o fijado en la abertura (5), preferentemente con ayuda de un elemento de conexión, que el elemento de detención (11) puede retener el cuerpo de sustrato en un lugar entre el área BQ₁ y el resto del cuerpo de sustrato de manera tal que el área BQ₁ asoma a través de la abertura (5) fuera del dispositivo de sujeción.
ARP140101788A 2013-05-02 2014-04-30 Dispositivo de sujeción multifacético para el tratamiento de superficies de sustratos en forma de varilla AR096157A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013007454.1A DE102013007454A1 (de) 2013-05-02 2013-05-02 Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten

Publications (1)

Publication Number Publication Date
AR096157A1 true AR096157A1 (es) 2015-12-09

Family

ID=50685858

Family Applications (1)

Application Number Title Priority Date Filing Date
ARP140101788A AR096157A1 (es) 2013-05-02 2014-04-30 Dispositivo de sujeción multifacético para el tratamiento de superficies de sustratos en forma de varilla

Country Status (15)

Country Link
US (1) US10072326B2 (es)
EP (1) EP2992122B1 (es)
JP (1) JP6338654B2 (es)
KR (1) KR102203484B1 (es)
CN (1) CN105579611B (es)
AR (1) AR096157A1 (es)
BR (1) BR112015027518B1 (es)
CA (1) CA2921064C (es)
DE (1) DE102013007454A1 (es)
MX (1) MX2015015254A (es)
MY (1) MY178231A (es)
PH (1) PH12015502506B1 (es)
PL (1) PL2992122T3 (es)
SG (1) SG11201508970RA (es)
WO (1) WO2014177254A1 (es)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013007454A1 (de) * 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten
AR101884A1 (es) * 2014-09-17 2017-01-18 Oerlikon Surface Solutions Ag Trubbach Soporte para tratar cuchillas
DE102015105169A1 (de) * 2015-04-02 2016-10-06 Cemecon Ag Chargierung von Werkstücken in einer Beschichtungsanlage
IL268449B2 (en) * 2017-02-16 2023-03-01 Oerlikon Surface Solutions Ag Pfaffikon Fixes tools for multiple process steps
USD881242S1 (en) * 2018-01-29 2020-04-14 Oerlikon Surface Solutions Ag, Pfaffikon Tool holder
DE102019135182A1 (de) * 2019-12-19 2021-06-24 Oerlikon Surface Solutions Ag, Pfäffikon Haltevorrichtung zum Halten eines Substrats

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4528208A (en) * 1983-10-13 1985-07-09 Zymet, Inc. Method and apparatus for controlling article temperature during treatment in vacuum
US4711353A (en) * 1986-05-01 1987-12-08 Rozmestor Raymond L Socket organizer
JPH0217552A (ja) * 1988-07-06 1990-01-22 Nec Corp 性能データ計測方式
US5031974A (en) * 1990-04-04 1991-07-16 Liberty Diversified Industries, Inc. Organizer cabinet
US5560480A (en) * 1994-11-04 1996-10-01 Singleton; Robert P. Socket holder apparatus
US5823361A (en) * 1996-02-06 1998-10-20 Progressive System Technologies, Inc. Substrate support apparatus for a substrate housing
US5775513A (en) * 1996-09-19 1998-07-07 Anthony; Larry L. Golf club holder
US5996818A (en) * 1998-11-24 1999-12-07 Lab-Interlink, Inc. Specimen tube rack
GB9916558D0 (en) 1999-07-14 1999-09-15 Dormer Tools Sheffield Ltd Method and means for drill production
DE10012575A1 (de) * 2000-03-15 2001-09-27 Schott Glas Transportvorrichtung für medizinische Behälter
US6474481B1 (en) * 2001-06-08 2002-11-05 Yung-Yuan Liu Flexible tool storage device
US7442285B2 (en) * 2004-06-17 2008-10-28 Vapor Technologies, Inc. Common rack for electroplating and PVD coating operations
DE102005003047A1 (de) 2005-01-22 2006-07-27 Identif Gmbh Vorrichtung zum Bewegen von Werkstücken
US8703240B2 (en) 2005-10-18 2014-04-22 American Axle & Manufacturing, Inc. Apparatus and method for masking and coating tool blades
JP2008260973A (ja) 2007-04-10 2008-10-30 Shinko Seiki Co Ltd 成膜装置用の被処理物の支持具
JP5474948B2 (ja) * 2008-06-11 2014-04-16 エルリコン トレーディング アクチェンゲゼルシャフト，トリューブバハ 被加工物搬送台
USD598566S1 (en) * 2008-08-12 2009-08-18 Diagenode Societe Anonyme Medical instrument for laboratory use
USD608013S1 (en) * 2009-01-29 2010-01-12 ABgene Limited PCR multi-well plate
US8016118B2 (en) * 2009-01-31 2011-09-13 Charles Arthur Boll Digger sifter with ergonomic handle
DE102010056157A1 (de) * 2010-12-28 2012-06-28 Oerlikon Trading Ag, Trübbach Halterung für Bohrkopfbeschichtung
DE102011050451A1 (de) 2011-05-18 2012-11-22 Renate Richardt Stabmesserkopf, Beschichtungsabdeckvorrichtung und Verfahren zum Schleifen und Beschichten von austauschbaren Stabmessern eines Stabmesserkopfes
DE102013007454A1 (de) * 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten

Also Published As

Publication number Publication date
MY178231A (en) 2020-10-07
SG11201508970RA (en) 2015-11-27
CA2921064A1 (en) 2014-11-06
EP2992122A1 (de) 2016-03-09
JP6338654B2 (ja) 2018-06-06
CN105579611A (zh) 2016-05-11
DE102013007454A1 (de) 2014-11-06
US10072326B2 (en) 2018-09-11
WO2014177254A1 (de) 2014-11-06
PH12015502506B1 (en) 2019-09-18
PL2992122T3 (pl) 2017-09-29
PH12015502506A1 (en) 2016-02-22
CN105579611B (zh) 2018-05-15
US20160076131A1 (en) 2016-03-17
MX2015015254A (es) 2016-07-05
KR102203484B1 (ko) 2021-01-18
JP2016524650A (ja) 2016-08-18
BR112015027518A2 (pt) 2017-09-05
KR20160003157A (ko) 2016-01-08
CA2921064C (en) 2021-02-23
EP2992122B1 (de) 2017-03-22
BR112015027518B1 (pt) 2021-12-07

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