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NO20080549L - Sett av prosesser for a fjerne urenheter fra et silisiumproduksjonsanlegg - Google Patents

Sett av prosesser for a fjerne urenheter fra et silisiumproduksjonsanlegg

Info

Publication number
NO20080549L
NO20080549L NO20080549A NO20080549A NO20080549L NO 20080549 L NO20080549 L NO 20080549L NO 20080549 A NO20080549 A NO 20080549A NO 20080549 A NO20080549 A NO 20080549A NO 20080549 L NO20080549 L NO 20080549L
Authority
NO
Norway
Prior art keywords
stream
processes
carbon
phosphine
methane
Prior art date
Application number
NO20080549A
Other languages
English (en)
Inventor
Stephen M Lord
Original Assignee
Stephen M Lord
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stephen M Lord filed Critical Stephen M Lord
Publication of NO20080549L publication Critical patent/NO20080549L/no

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/229—Integrated processes (Diffusion and at least one other process, e.g. adsorption, absorption)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/033—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by reduction of silicon halides or halosilanes with a metal or a metallic alloy as the only reducing agents
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/037—Purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/037—Purification
    • C01B33/039—Purification by conversion of the silicon into a compound, optional purification of the compound, and reconversion into silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/10—Process efficiency
    • Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Analytical Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Silicon Compounds (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

Det beskrives et sett på tre lavomkostningsprosesser for fjerning av bor, fosfor, karbon og andre metall- og ikkemetallurenheter under prosessen med konvertering av metallurgisk kvalitetssilisium til elektronisk kvalitetssilisium. En prosess fjerner bor ved bruk av en eller flere høytemperaturfaststoffjerningsinnretninger for å fjerne fast titandiborid fra en halosilanreaktoravløpsstrøm der den høye temperatur fortrinnsvis er over 200 °C og spesielt over 300 °C, helst over 400 °C. En andre prosess fjerner karbon som metan og fosfor som fosfin ved hjelp av en membranseparator som prosesserer alle eller en del av en hydrogenkarbonresirkuleringsstrøm for å gjenvinne hydrogen mens metan og fosfin støtes ut. En tredje prosess separerer en høytkokende halosilanstrøm i en stor lavurenhetsstrøm og en eller flere små høyurenhetsstrømmer av hvilke noen kan sendes til halogengjenvinning.
NO20080549A 2005-07-29 2008-01-29 Sett av prosesser for a fjerne urenheter fra et silisiumproduksjonsanlegg NO20080549L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/193,734 US7790129B2 (en) 2005-07-29 2005-07-29 Set of processes for removing impurities from a silcon production facility
PCT/US2006/022310 WO2007015721A2 (en) 2005-07-29 2006-06-08 A set of processes for removing impurities from a silicon production facility

Publications (1)

Publication Number Publication Date
NO20080549L true NO20080549L (no) 2008-04-08

Family

ID=37996548

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20080549A NO20080549L (no) 2005-07-29 2008-01-29 Sett av prosesser for a fjerne urenheter fra et silisiumproduksjonsanlegg

Country Status (8)

Country Link
US (1) US7790129B2 (no)
EP (1) EP1912720B1 (no)
ES (1) ES2490596T3 (no)
MD (1) MD20080027A (no)
NO (1) NO20080549L (no)
SM (1) SMAP200800014A (no)
UA (1) UA96268C2 (no)
WO (1) WO2007015721A2 (no)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110787573A (zh) * 2019-10-24 2020-02-14 上海黔宝环保新材料有限公司 一种活性硅粉的生产方法

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7736614B2 (en) * 2008-04-07 2010-06-15 Lord Ltd., Lp Process for removing aluminum and other metal chlorides from chlorosilanes
CN103058194B (zh) 2008-09-16 2015-02-25 储晞 生产高纯颗粒硅的反应器
GB2481144B (en) * 2008-12-23 2014-06-18 Mks Instr Inc Reactive chemical containment system
US8501139B2 (en) * 2009-02-26 2013-08-06 Uri Cohen Floating Si and/or Ge foils
US8603242B2 (en) * 2009-02-26 2013-12-10 Uri Cohen Floating semiconductor foils
WO2010108065A1 (en) * 2009-03-19 2010-09-23 Ae Polysilicon Corporation Silicide - coated metal surfaces and methods of utilizing same
TWI496936B (zh) * 2009-04-20 2015-08-21 Jiangsu Zhongneng Polysilicon Technology Dev Co Ltd 用於製造高純度多晶矽之方法及裝置
TWI454309B (zh) 2009-04-20 2014-10-01 Jiangsu Zhongneng Polysilicon Technology Dev Co Ltd 用於將反應排出氣體冷卻之方法及系統
AU2010239350A1 (en) * 2009-04-20 2011-11-10 Ae Polysilicon Corporation A reactor with silicide-coated metal surfaces
KR20100117025A (ko) * 2009-04-23 2010-11-02 스미또모 가가꾸 가부시키가이샤 포토레지스트 패턴 형성 방법
US8029756B1 (en) 2010-03-30 2011-10-04 Peak Sun Sillcon Corporation Closed-loop silicon production
US20120148728A1 (en) * 2010-12-09 2012-06-14 Siliken Sa Methods and apparatus for the production of high purity silicon
JP6371738B2 (ja) * 2015-05-28 2018-08-08 株式会社東芝 成膜装置
CN108153821A (zh) * 2017-12-04 2018-06-12 北京小米移动软件有限公司 饰品推荐方法及装置
CN112892097B (zh) * 2021-01-30 2022-05-13 成都易态科技有限公司 混合气体的处理方法

Family Cites Families (11)

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Publication number Priority date Publication date Assignee Title
BE632835A (no) * 1962-06-04
US4213937A (en) * 1976-09-22 1980-07-22 Texas Instruments Incorporated Silicon refinery
US4676967A (en) * 1978-08-23 1987-06-30 Union Carbide Corporation High purity silane and silicon production
US4340574A (en) * 1980-08-28 1982-07-20 Union Carbide Corporation Process for the production of ultrahigh purity silane with recycle from separation columns
US4526769A (en) * 1983-07-18 1985-07-02 Motorola, Inc. Trichlorosilane production process
US4941893B1 (en) * 1989-09-19 1996-07-30 Advanced Silicon Materials Inc Gas separation by semi-permeable membranes
BR9611816A (pt) * 1996-10-14 1999-07-13 Kawasaki Steel Co Processo e aparelho para fabricação de silício policristalino e processo para fabricação de pastilhas de silício para baterias solares
US6368568B1 (en) * 2000-02-18 2002-04-09 Stephen M Lord Method for improving the efficiency of a silicon purification process
DE10057482A1 (de) * 2000-11-20 2002-05-23 Solarworld Ag Verfahren zur Reinigung von Trichlorsilan
US6827786B2 (en) * 2000-12-26 2004-12-07 Stephen M Lord Machine for production of granular silicon
NO20033207D0 (no) * 2002-07-31 2003-07-15 Per Kristian Egeberg Fremgangsmåte og reaktor for fremstilling av höyrent silisium, samt anvendelse av fremgangsmåten og reaktoren ved fremstilling av höyrentsilisium fra uraffinert silisium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110787573A (zh) * 2019-10-24 2020-02-14 上海黔宝环保新材料有限公司 一种活性硅粉的生产方法

Also Published As

Publication number Publication date
US20070098612A1 (en) 2007-05-03
WO2007015721A8 (en) 2008-02-21
EP1912720B1 (en) 2014-05-14
EP1912720A2 (en) 2008-04-23
MD20080027A (ro) 2008-10-31
SMAP200800014A (it) 2008-03-05
ES2490596T3 (es) 2014-09-04
US7790129B2 (en) 2010-09-07
UA96268C2 (ru) 2011-10-25
WO2007015721A3 (en) 2009-02-26
WO2007015721A2 (en) 2007-02-08
EP1912720A4 (en) 2010-12-08

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